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1. 发明申请

US20120062070A1 SURFACE ACOUSTIC WAVE DEVICE, ELECTRONIC APPARATUS, AND SENSOR APPARATUS 有权
标题翻译：表面声波装置，电子装置和传感器装置
公开(公告)号：US20120062070A1
公开(公告)日：2012-03-15
申请号：US13223581
申请日：2011-09-01
申请人： Kunihito YAMANAKA , Takuya OWAKI , Naohisa OBATA
发明人： Kunihito YAMANAKA , Takuya OWAKI , Naohisa OBATA
IPC分类号： H01L41/04
CPC分类号： H03H9/14594 , H03H9/02551 , H03H9/0542
摘要： A SAW device has an IDT which is provided on the principal surface of a quartz crystal sustrate having Euler angles (−1.5°≦φ≦1.5°, 117°≦θ≦42°, ψ) and excites a SAW in a stopband upper end mode. Inter-electrode-finger grooves 8 are recessed between the electrode fingers of the IDT. When the Euler angle ψ is 42.79°≦|ψ|≦49.57°, the thickness H of the electrode fingers of the IDT is set to be within 0.055 μm≦H≦0.335 μm, preferably, 0.080 μm≦H≦0.335 μm. When the Euler angle ψ is |ψ|≠90°×n (where n=0, 1, 2, 3), and the thickness H of the electrode fingers is set to 0.05 μm≦H≦0.20 μm.
摘要翻译： SAW器件具有设置在具有欧拉角（-1.5°＆nlE;＆amp;＆ls; 1.5°，117°＆nlE;＆amp; thetas;＆amp; 42°，ψ）的石英晶体的主表面上的IDT，并且激发a SAW在阻带上端模式。电极指状槽8在IDT的电极指之间凹陷。当欧拉角ψ为42.79°＆nlE; |ψ|＆nlE; 49.57°时，IDT的电极指的厚度H设定为0.055μm＆lt; NlE; H＆lt; ll;0.335μm，优选为0.080μm＆amp; NlE; H＆。当欧拉角ψ为|ψ|≠90°×n（其中n = 0,1,2,3）时，电极指的厚度H设定为0.05μm＆nlE; H＆lt; ll;0.20μm。

2. 发明申请

US20120049968A1 SURFACE ACOUSTIC WAVE DEVICE, SURFACE ACOUSTIC WAVE OSCILLATOR, AND ELECTRONIC APPARATUS 有权
标题翻译：表面声波设备，表面声波振荡器和电子设备
公开(公告)号：US20120049968A1
公开(公告)日：2012-03-01
申请号：US13212725
申请日：2011-08-18
申请人： Takuya OWAKI , Kunihito YAMANAKA
发明人： Takuya OWAKI , Kunihito YAMANAKA
IPC分类号： H01L41/04 , H03B5/32
CPC分类号： H03H9/0542 , H01L2224/05554 , H01L2224/48091 , H01L2224/48227 , H01L2224/49171 , H01L2224/73265 , H01L2924/16195 , H03H9/02551 , H03H9/02614 , H03H9/02834 , H03H9/0585 , H03H9/1071 , H03H9/14538 , H01L2924/00014
摘要： A surface acoustic wave device includes: a quartz substrate with Euler angles of (φ, θ, ψ); and an IDT which excites a surface acoustic wave in an upper mode of a stop band; wherein, the Euler angle φ is −60°≦φ≦60°, and the Euler angle φ determines the ranges of the Euler angles θ and ψ.
摘要翻译：表面声波装置包括：具有欧拉角（＆Phgr;＆amp; t;ψ）的石英基板; 以及激励停止带的上部模式中的表面声波的IDT; 其中，欧拉角＆phgr 是-60°＆nlE;＆phgr;＆nlE; 60°，欧拉角＆phgr 确定欧拉角度和范围; 和ψ。

3. 发明申请

US20120049969A1 SURFACE ACOUSTIC WAVE RESONATOR, SURFACE ACOUSTIC WAVE OSCILLATOR, AND ELECTRONIC DEVICE 有权
标题翻译：表面声波谐振器，表面声波振荡器和电子设备
公开(公告)号：US20120049969A1
公开(公告)日：2012-03-01
申请号：US13212801
申请日：2011-08-18
申请人： Takuya OWAKI , Kunihito YAMANAKA
发明人： Takuya OWAKI , Kunihito YAMANAKA
IPC分类号： H03B5/32 , H01L41/08
CPC分类号： H03H9/0542 , H03H9/02551 , H03H9/02661 , H03H9/02897
摘要： A surface acoustic wave resonator has a quartz crystal substrate having Euler angles of (φ=0°, 110°≦θ≦150°, 88°≦ψ≦92°) and an IDT having a plurality of electrode fingers disposed on the quartz crystal substrate, and using a surface acoustic wave as an excitation wave, a plurality of grooves arranged in a propagation direction of the surface acoustic wave to form stripes is disposed on the quartz crystal substrate, and the electrode fingers are disposed one of between the grooves and inside the grooves.
摘要翻译：表面声波谐振器具有石英晶体基板，其具有欧拉角（＆amp; 0°，110°＆amp; n1E;＆amp; The; n1E; 150°，88°＆amp; nlE;ψ＆nlE; 92°）和具有多个电极指设置在石英晶体基板上，并且使用表面声波作为激发波，在石英晶体基板上设置沿声表面波的传播方向排列形成条纹的多个槽，并且电极指一个在凹槽之间和凹槽内。

4. 发明申请

US20120139653A1 SURFACE ACOUSTIC WAVE RESONATOR, SURFACE ACOUSTIC WAVE OSCILLATOR, AND ELECTRONIC APPARATUS 有权
标题翻译：表面声波谐振器，表面声波振荡器和电子设备
公开(公告)号：US20120139653A1
公开(公告)日：2012-06-07
申请号：US13310123
申请日：2011-12-02
申请人： Takuya OWAKI , Kunihito YAMANAKA , Keigo IIZAWA , Kenichi HANO
发明人： Takuya OWAKI , Kunihito YAMANAKA , Keigo IIZAWA , Kenichi HANO
IPC分类号： H03B5/30
CPC分类号： H01L41/047 , H03H9/02551 , H03H9/0542 , H03H9/1071 , H03H9/14538 , H03H9/14558 , H03H9/14594
摘要： A surface acoustic wave resonator which can realize favorable frequency-temperature characteristics and suppress frequency variations is provided. The surface acoustic wave resonator includes a quartz crystal substrate with Euler angles (−1.5°≦φ≦1.5°, 117°≦θ≦142°, and 42.79°≦|Ψ|≦49.57°), and an IDT that is provided on the quartz crystal substrate, includes a plurality of electrode fingers, and excites a stop band upper end mode surface acoustic wave, wherein inter-electrode finger grooves are provided between the electrode fingers in a plan view, and wherein if a line occupation rate of convex portions of the quartz crystal substrate disposed between the inter-electrode finger grooves is ηg, and a line occupation rate of the electrode fingers disposed on the convex portions is ηe, ηg>ηe and 0.59
摘要翻译：提供了能够实现良好的频率 - 温度特性并抑制频率变化的表面声波谐振器。声表面波谐振器包括具有欧拉角（-1.5°＆nlE;＆amp;＆ls; 1.5°，117°＆nlE;＆Thetas;＆nlE; 142°和42.79°＆nlE; |Ψ|＆nlE; 49.57°）的石英晶体衬底和设置在石英晶体基板上的IDT包括多个电极指，并且激励阻带上端模式声表面波，其中在平面图中在电极指之间设置有电极间指状槽，以及其中，如果设置在电极间的两个沟槽之间的石英晶体衬底的凸部的线占有率为等于设置在凸部上的电极指线的占有率为“e” 在IDT的有效线占有率和效应是线占有率＆eegr g和行占有率＆eegr e的算术平均值的情况下，＆eegr; e和0.59 <＆eegr; eff <0.73。

5. 发明申请

US20120049979A1 SURFACE ACOUSTIC WAVE RESONATOR, SURFACE ACOUSTIC WAVE OSCILLATOR, AND ELECTRONIC APPARATUS 有权
标题翻译：表面声波谐振器，表面声波振荡器和电子设备
公开(公告)号：US20120049979A1
公开(公告)日：2012-03-01
申请号：US13212714
申请日：2011-08-18
申请人： Takuya OWAKI , Keigo IIZAWA , Kunihito YAMANAKA
发明人： Takuya OWAKI , Keigo IIZAWA , Kunihito YAMANAKA
IPC分类号： H03H9/64
CPC分类号： H03H9/02551 , H03B5/326 , H03H9/02661 , H03H9/0542 , H03H9/14538
摘要： A surface acoustic wave resonator includes: an IDT which is disposed on a quartz substrate with Euler angles of (−1°≦φ≦1°, 117°≦θ≦142°, 42.79°≦|ψ|≦49.57°, which is made of Al or alloy including Al as a main component and which excites a surface acoustic wave in an upper mode of a stop band; and an inter-electrode-finger groove which is formed by recessing the quartz substrate between electrode fingers which form the IDT. Here, the following expression is satisfied: 0.01λ≦G (1), where λ represents a wavelength of the surface acoustic wave and G represents a depth of the inter-electrode-finger groove. The depth G of the inter-electrode-finger groove and a line occupancy η of the IDT satisfy the following expression: - 2.5 × G λ + 0.675 ≦ η ≦ - 2.5 × G λ + 0.775 ( 5 ) and a number of pairs N of the electrode fingers in the IDT is in the range of the following expression: 160≦N≦220 (19).
摘要翻译：表面声波谐振器包括：设置在石英基板上的IDT，欧拉角为（-1°＆amp; nlE;＆amp; nlE; 1°，117°＆nlE;＆Thetas;＆nlE; 142°，42.79°＆nlE; |ψ |铝合金; 49.57°，其由Al或合金构成，以Al为主要成分，并且以阻挡带的上部模式激发表面声波;以及电极指槽，其通过使石英形成IDT的电极指之间的基板，这里满足以下表达式：0.01λ＆nlE; G（1）其中，λ表示声表面波的波长，G表示电极指间槽的深度。电极指槽的深度G和IDT的线占有率等于以下表达式： - 2.5×Gλ+ 0.675＆nlE;＆eegr＆nlE; - 2.5×Gλ+ 0.775（5）和数字在IDT中的电极指针对N的范围在以下范围内：160＆nlE; N＆nlE; 220（19）。

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