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1. 发明申请

US20130192524A1 Continuous Substrate Processing System 有权
标题翻译：连续基板加工系统
公开(公告)号：US20130192524A1
公开(公告)日：2013-08-01
申请号：US13755891
申请日：2013-01-31
申请人： Banqiu Wu , Nag B. Patibandla , Toshiaki Fujita , Ralf Hofmann , Pravin K. Narwankar , Jeonghoon Oh , Srinivas Satya , Li-Qun Xia
发明人： Banqiu Wu , Nag B. Patibandla , Toshiaki Fujita , Ralf Hofmann , Pravin K. Narwankar , Jeonghoon Oh , Srinivas Satya , Li-Qun Xia
IPC分类号： H01L21/673
CPC分类号： H01L21/673 , C23C16/45546 , C23C16/4558 , C23C16/4584 , C23C16/54 , H01L21/67346 , H01L21/677
摘要： A processing chamber having a plurality of movable substrate carriers stacked therein for continuously processing a plurality of substrates is provided. The movable substrate carrier is capable of being transported from outside of the processing chamber, e.g., being transferred from a load luck chamber, into the processing chamber and out of the processing chamber, e.g., being transferred into another load luck chamber. Process gases delivered into the processing chamber are spatially separated into a plurality of processing slots, and/or temporally controlled. The processing chamber can be part of a multi-chamber substrate processing system.
摘要翻译：提供一种处理室，其具有堆叠在其中的多个可移动基板载体，用于连续处理多个基板。可移动衬底载体能够从处理室的外部传送，例如从负载运送室转移到处理室中并且从处理室中输送，例如被转移到另一负载运送室中。输送到处理室中的工艺气体在空间上分离成多个处理槽，和/或在时间上被控制。处理室可以是多室衬底处理系统的一部分。

2. 发明申请

US20190105837A1 Selective Powder Delivery for Additive Manufacturing 审中-公开
公开(公告)号：US20190105837A1
公开(公告)日：2019-04-11
申请号：US16155460
申请日：2018-10-09
申请人： Raanan Zehavi , Hou T. Ng , Nag B. Patibandla , Eric Ng , Ajey M. Joshi , Kashif Maqsood , Paul J. Steffas
发明人： Raanan Zehavi , Hou T. Ng , Nag B. Patibandla , Eric Ng , Ajey M. Joshi , Kashif Maqsood , Paul J. Steffas
IPC分类号： B29C64/329 , B29C64/153 , B29C64/209 , B22F3/105 , B29C64/245
摘要： A dispensing system for an additive manufacturing includes a powder source that contains powder to form an object, and an array of nozzles positioned at a base of the powder source over a top surface of a platen where the object is to be formed. The powder flows from the powder source through the nozzles to the top surface. A respective powder wheel in each nozzle controls a flow rate of the powder. Each wheel has multiple troughs on surface of the wheel. When a motor rotates the wheel, the troughs transport the powder through the nozzle. The rotation speed of the wheel controls the flow rate. For solid parts of the object, the wheel rotates and allows the powder to be deposited on the top surface. For empty parts of the object, the wheel remains stationary to prevent the powder from flowing to the surface.

3. 发明申请

US20170072643A1 ADJUSTABLE Z-AXIS PRINTHEAD MODULE FOR ADDITIVE MANUFACTURING SYSTEM 审中-公开
标题翻译：可调整的Z轴式打印机模块用于附加制造系统
公开(公告)号：US20170072643A1
公开(公告)日：2017-03-16
申请号：US15265631
申请日：2016-09-14
申请人： Hou T. Ng , Raanan Zehavi , Nag B. Patibandla
发明人： Hou T. Ng , Raanan Zehavi , Nag B. Patibandla
IPC分类号： B29C67/00
CPC分类号： B29C64/153 , B22F3/003 , B22F3/1055 , B22F2003/1056 , B29C64/165 , B29C64/20 , B29C64/205 , B29C64/209 , B29C64/232 , B29C64/236 , B29C64/264 , B29C64/295 , B29C64/307 , B29C64/336 , B29C64/386 , B33Y10/00 , B33Y30/00 , B33Y50/02 , B33Y70/00 , Y02P10/295
摘要： An additive manufacturing system includes a platen having a top surface to support an object being manufactured, a support that is movable along a vertical axis, an actuator to move the support along the vertical axis, a dispenser to deliver a plurality of successive layers of feed material over the platen, an energy source configured to fuse at least a portion of the feed material, and a controller. The dispenser and energy source are mounted on the support over the platen such that motion of the support along the vertical axis moves the dispenser and energy source together toward or away from the top surface of the platen. The controller is coupled to the actuator, dispenser and energy source and configured to cause the actuator to move the support to lift the dispenser and actuator away from the top surface after each of the plurality of successive layers is delivered.
摘要翻译：添加剂制造系统包括具有顶表面以支撑正在制造的物体的台板，可沿着垂直轴线移动的支撑件，沿垂直轴线移动支撑件的致动器，分配器，以输送多个连续的进料层材料在压板上，被配置为熔化进料的至少一部分的能量源和控制器。分配器和能量源安装在压板上的支撑件上，使得支撑件沿着垂直轴的运动将分配器和能量源一起朝向或远离压板的顶表面移动。控制器耦合到致动器，分配器和能量源，并且被配置为使得致动器移动支撑件，以在输送多个连续的层中的每一个之后使分配器和致动器从顶表面离开。

4. 发明申请

US20160368055A1 SELECTIVE DEPOSITING OF POWDER IN ADDITIVE MANUFACTURING 审中-公开
标题翻译：添加剂制造中选择性沉积粉末
公开(公告)号：US20160368055A1
公开(公告)日：2016-12-22
申请号：US15186277
申请日：2016-06-17
申请人： Bharath Swaminathan , Ajey M. Joshi , Nag B. Patibandla , Hou T. Ng , Ashavani Kumar , Eric Ng , Bernard Frey , Kasiraman Krishnan
发明人： Bharath Swaminathan , Ajey M. Joshi , Nag B. Patibandla , Hou T. Ng , Ashavani Kumar , Eric Ng , Bernard Frey , Kasiraman Krishnan
IPC分类号： B22F3/105 , B33Y30/00 , B23K26/16 , B22F3/10 , B23K26/342 , B33Y10/00 , B33Y50/02
CPC分类号： B22F3/1055 , B22F2003/1057 , B23K26/16 , B23K26/342 , B23K2103/05 , B23K2103/08 , B23K2103/14 , B23K2103/26 , B29C64/153 , B29C64/245 , B33Y10/00 , B33Y30/00 , B33Y50/02 , Y02P10/295
摘要： A method of additive manufacturing include delivering at least one layer by either depositing a uniform layer of powder on a support and then removing a portion of the layer with a roller with a surface having spatially controlled electrostatic charge, or by depositing powder onto the surface of the roller and moving the roller relative to a support such that the spatially controllable electrostatic charge on the surface of the roller causes transfer of a corresponding portion of the powder from the roller onto the support or an underlying layer.
摘要翻译：添加剂制造的方法包括通过在支撑体上沉积均匀的粉末层，然后用具有空间控制静电荷的表面的辊去除一部分层，或通过将粉末沉积在辊子并相对于支撑件移动辊子，使得辊子表面上的空间可控静电电荷使得相应部分的粉末从辊转移到支撑件或下层上。

5. 发明申请

US20130192761A1 Rotary Substrate Processing System 审中-公开
标题翻译：旋转底材加工系统
公开(公告)号：US20130192761A1
公开(公告)日：2013-08-01
申请号：US13754733
申请日：2013-01-30
申请人： Joseph Yudovsky , Ralf Hofmann , Jeonghoon Oh , Li-Qun Xia , Toshiaki Fujita , Pravin K. Narwankar , Nag B, Patibandla , Srinivas Satya , Banqiu Wu
发明人： Joseph Yudovsky , Ralf Hofmann , Jeonghoon Oh , Li-Qun Xia , Toshiaki Fujita , Pravin K. Narwankar , Nag B, Patibandla , Srinivas Satya , Banqiu Wu
IPC分类号： C23C16/54 , B05C13/00
CPC分类号： C23C16/54 , B05C13/00 , C23C16/45551
摘要： A substrate processing system for processing multiple substrates is provided and generally includes at least one processing platform and at least one staging platform. Each substrate is positioned on a substrate carrier disposed on a substrate support assembly. Multiple substrate carriers, each is configured to carry a substrate thereon, are positioned on the surface of the substrate support assembly. The processing platform and the staging platform, each includes a separate substrate support assembly, which can be rotated by a separate rotary track mechanism. Each rotary track mechanism is capable of supporting the substrate support assembly and continuously rotating multiple substrates carried by the substrate carriers and disposed on the substrate support assembly. Each substrate is thus processed through at least one shower head station and at least one buffer station, which are positioned at a distance above the rotary track mechanism of the processing platform. Each substrate can be transferred between the processing platform and the staging platform and in and out the substrate processing system.
摘要翻译：提供了一种用于处理多个基板的基板处理系统，并且通常包括至少一个处理平台和至少一个分段平台。每个衬底位于设置在衬底支撑组件上的衬底载体上。多个衬底载体，每个被配置为在其上承载衬底，位于衬底支撑组件的表面上。处理平台和分段平台各自包括单独的基板支撑组件，其可以通过单独的旋转轨道机构旋转。每个旋转轨道机构能够支撑基板支撑组件并且连续旋转由基板载体承载并且设置在基板支撑组件上的多个基板。因此，每个基板通过至少一个淋浴喷头站和至少一个缓冲站进行处理，所述至少一个缓冲站位于处理平台的旋转轨道机构上方的距离处。每个基板可以在处理平台和分段平台之间传送并进出基板处理系统。

6. 发明授权

US08409895B2 Gallium nitride-based LED fabrication with PVD-formed aluminum nitride buffer layer 有权
标题翻译：基于氮化镓的LED制造，采用PVD形成的氮化铝缓冲层
公开(公告)号：US08409895B2
公开(公告)日：2013-04-02
申请号：US13036273
申请日：2011-02-28
申请人： Mingwei Zhu , Vivek Agrawal , Nag B. Patibandla , Omkaram Nalamasu
发明人： Mingwei Zhu , Vivek Agrawal , Nag B. Patibandla , Omkaram Nalamasu
IPC分类号： H01L33/005
CPC分类号： H01L21/0254 , C23C14/0641 , C23C14/568 , C23C16/34 , C23C28/04 , C23C28/044 , C30B23/02 , C30B25/08 , C30B29/406 , H01L21/02381 , H01L21/0242 , H01L21/02458 , H01L21/0262 , H01L21/02631 , H01L33/007 , H01L33/0095
摘要： Fabrication of gallium nitride-based light emitting diodes (LEDs) with physical vapor deposition (PVD) formed aluminum nitride buffer layers is described.
摘要翻译：描述了具有形成氮化铝缓冲层的物理气相沉积（PVD）的氮化镓基发光二极管（LED）的制造。

7. 发明申请

US20100189881A1 CARBON-BASED ULTRACAPACITOR 有权
标题翻译：基于碳的超声波消毒器
公开(公告)号：US20100189881A1
公开(公告)日：2010-07-29
申请号：US12360328
申请日：2009-01-27
申请人： Nag B. Patibandla
发明人： Nag B. Patibandla
IPC分类号： B05D5/12
CPC分类号： H01G9/058 , H01G9/016 , H01G11/34 , H01G11/46 , H01G11/50 , H01G11/86 , Y02E60/13
摘要： A method of manufacturing a high surface area per unit weight carbon electrode includes providing a substrate, depositing a carbon-rich material on the substrate to form a film, and after the depositing, activating the carbon-rich material to increase the surface area of the film of carbon-rich material. Due to the activation process being after deposition, this method enables use of low cost carbon-rich material to form a carbon electrode in the capacitor. The electrode may be used in capacitors, ultracapacitors and lithium ion batteries. The substrate may be part of the electrode, or it may be sacrificial—being consumed during the activation process. The carbon-rich material may include any of carbonized material, carbon aerogel and metal oxides, such as manganese and ruthenium oxide. The activation may include exposing the carbon-rich material to carbon dioxide at elevated temperature, in the range of 300 to 900 degrees centigrade. This method may be used to make both symmetric and asymmetric ultracapacitors.
摘要翻译：制造每单位重量碳电极的高表面积的方法包括提供衬底，在衬底上沉积富碳材料以形成膜，并且在沉积之后，激活富含碳的材料以增加表面积富含碳的材料的薄膜。由于沉积后的活化过程，这种方法使得能够使用低成本的富碳材料在电容器中形成碳电极。电极可用于电容器，超级电容器和锂离子电池。衬底可以是电极的一部分，或者它可以在激活过程中被牺牲消耗。富碳材料可以包括碳化材料，碳气凝胶和金属氧化物中的任何一种，例如锰和氧化钌。活化可以包括在300-900摄氏度的高温下将富碳材料暴露于二氧化碳。该方法可用于制造对称和非对称超级电容器。

8. 发明申请

US20180339450A1 ENERGY DELIVERY WITH ROTATING POLYGON AND MULTIPLE LIGHT BEAMS ON SAME PATH FOR ADDITIVE MANUFACTURING 审中-公开
公开(公告)号：US20180339450A1
公开(公告)日：2018-11-29
申请号：US15960481
申请日：2018-04-23
申请人： Jeffrey L. Franklin , Hou T. Ng , Nag B. Patibandla
发明人： Jeffrey L. Franklin , Hou T. Ng , Nag B. Patibandla
IPC分类号： B29C64/153 , B33Y10/00 , B33Y30/00 , B33Y50/02 , B29C64/245 , B29C64/205 , B29C64/268 , B29C64/393
摘要： An additive manufacturing apparatus includes a platform, a dispenser to deliver a plurality of layers of feed material, one or more light sources configured to emit a first light beam and a second light beam, and a polygon beam scanner including a rotatable mirror having a plurality of reflective facets to redirect the first light beam and the second light beam toward the platform to deliver energy to an uppermost layer of feed material. The mirror is positioned and rotatable such that motion of each facet of the plurality of reflective facets causes the first light beam to sweep along a first path on the uppermost layer and causes the second light beam to sweep along the first path following the first light beam.

9. 发明申请

US20170021419A1 ADDITIVE MANUFACTURING WITH MULTIPLE HEAT SOURCES 审中-公开
标题翻译：具有多个热源的添加剂制造
公开(公告)号：US20170021419A1
公开(公告)日：2017-01-26
申请号：US15213277
申请日：2016-07-18
申请人： Hou T. Ng , Bharath Swaminathan , Nag B. Patibandla , Ajey M. Joshi , Ashavani Kumar , Eric Ng , Bernard Frey , Kasiraman Krishnan
发明人： Hou T. Ng , Bharath Swaminathan , Nag B. Patibandla , Ajey M. Joshi , Ashavani Kumar , Eric Ng , Bernard Frey , Kasiraman Krishnan
IPC分类号： B22F3/105 , B28B1/00 , B33Y10/00 , C04B35/64 , B33Y40/00 , B23K26/342 , B23K26/70 , H05B3/00 , B29C67/00 , B33Y30/00
CPC分类号： B22F3/1055 , B22F2003/1056 , B22F2003/1057 , B22F2203/11 , B22F2998/10 , B22F2999/00 , B29C64/153 , B29K2105/251 , B33Y10/00 , B33Y30/00 , B33Y40/00 , H05B3/0057 , H05B3/0061 , H05B2203/032 , Y02P10/295 , B22F1/0085
摘要： An additive manufacturing system includes a platen having a top surface to support an object being manufactured, a dispenser to deliver a plurality of successive layers of feed material over the platen, an energy source positioned above the platen to direct a beam to fuse at least some of an outermost layer of feed material, and a plurality of lamps disposed above the platen and around the energy source to radiatively heat the outermost layer of feed material.
摘要翻译：添加剂制造系统包括具有用于支撑待制造物体的顶表面的压板，用于在压板上方输送多个连续的进料材料层的分配器，位于压板上方的能量源，以引导束熔化至少一些的最外层进料材料，以及多个灯，其设置在压板上方和能量源周围，以辐射加热进料的最外层。

10. 发明申请

US20160368077A1 SURFACE PROCESSING IN ADDITIVE MANUFACTURING WITH LASER AND GAS FLOW 审中-公开
标题翻译：表面加工与添加剂制造与激光和气体流动
公开(公告)号：US20160368077A1
公开(公告)日：2016-12-22
申请号：US15186247
申请日：2016-06-17
申请人： Bharath Swaminathan , Eric Ng , Nag B. Patibandla , Hou T. Ng , Ajey M. Joshi , Ashavani Kumar , Bernard Frey , Kasiraman Krishnan
发明人： Bharath Swaminathan , Eric Ng , Nag B. Patibandla , Hou T. Ng , Ajey M. Joshi , Ashavani Kumar , Bernard Frey , Kasiraman Krishnan
IPC分类号： B23K10/00 , H01J37/305 , H05H1/30 , B25J9/00 , B23K26/36
CPC分类号： H01J37/3056 , B22F2003/247 , B22F2998/10 , B22F2999/00 , B23K10/003 , B23K10/006 , B23K26/032 , B23K26/0884 , B23K26/127 , B23K26/352 , B23K26/355 , B23K26/36 , B23K2103/05 , B23K2103/14 , B23K2103/26 , B23K2103/42 , B23K2103/52 , B25J9/0096 , B29C64/188 , B29C64/35 , B33Y10/00 , B33Y40/00 , B33Y50/02 , H01J37/321 , H01J37/32366 , H01J2237/3174 , H01J2237/31749 , H05H1/2406 , H05H1/30 , H05H2001/245 , H05H2245/123 , Y10S901/42 , B22F3/008 , B22F3/1055 , B22F2202/13
摘要： An apparatus for surface modification includes a support to hold a workpiece, a plasma source to generate a plasma in a localized region that is smaller than the workpiece, and a six-axis robot to manipulate relative positioning of the workpiece and the plasma source. The six-axis robot is coupled to at least one of the support and the plasma source.
摘要翻译：用于表面改性的装置包括用于保持工件的支撑件，等离子体源以在小于工件的局部区域中产生等离子体;以及六轴机器人来操纵工件和等离子体源的相对定位。六轴机器人耦合到支撑件和等离子体源中的至少一个。

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