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1. 发明授权

US08742592B2 Semiconductor device including a plug and method for manufacturing the same 有权
标题翻译：包括插头的半导体装置及其制造方法
公开(公告)号：US08742592B2
公开(公告)日：2014-06-03
申请号：US13424791
申请日：2012-03-20
申请人： Satoshi Wakatsuki , Ichiro Mizushima , Atsuko Sakata , Masayuki Kitamura
发明人： Satoshi Wakatsuki , Ichiro Mizushima , Atsuko Sakata , Masayuki Kitamura
IPC分类号： H01L23/48 , H01L23/52 , H01L29/40
CPC分类号： C23C16/0272 , C23C16/045 , C23C16/14 , H01L21/28556 , H01L21/28562 , H01L21/76843 , H01L21/76876 , H01L21/76877
摘要： According to one embodiment, a method for manufacturing a semiconductor device includes: forming a silicon oxide film on a semiconductor substrate; forming a via in the silicon oxide film; forming a contact layer inside the via; forming a silicon layer on the contact layer; and forming a tungsten film embedded in the via by making a tungsten-containing gas react with the silicon layer.
摘要翻译：根据一个实施例，一种制造半导体器件的方法包括：在半导体衬底上形成氧化硅膜; 在氧化硅膜中形成通孔; 在通孔内形成接触层; 在所述接触层上形成硅层; 以及通过使含钨气体与硅层反应形成嵌入通孔中的钨膜。

2. 发明授权

US08648464B2 Semiconductor device and manufacturing method thereof 有权
标题翻译：半导体装置及其制造方法
公开(公告)号：US08648464B2
公开(公告)日：2014-02-11
申请号：US13413854
申请日：2012-03-07
申请人： Masayuki Kitamura , Makoto Wada , Yuichi Yamazaki , Masayuki Katagiri , Atsuko Sakata , Akihiro Kajita , Tadashi Sakai , Naoshi Sakuma , Ichiro Mizushima
发明人： Masayuki Kitamura , Makoto Wada , Yuichi Yamazaki , Masayuki Katagiri , Atsuko Sakata , Akihiro Kajita , Tadashi Sakai , Naoshi Sakuma , Ichiro Mizushima
IPC分类号： H01L23/48
CPC分类号： H01L21/02639 , H01L21/02491 , H01L21/02502 , H01L21/02527 , H01L21/02645 , H01L21/28556 , H01L21/32051 , H01L21/76846 , H01L21/76877 , H01L23/53276 , H01L2221/1078 , H01L2924/0002 , H01L2924/00
摘要： According to one embodiment, a semiconductor device is disclosed. The device includes a semiconductor substrate, and an interconnection above the semiconductor substrate. The interconnection includes a co-catalyst layer, a catalyst layer on the co-catalyst layer, and a graphene layer on the catalyst layer. The co-catalyst layer includes a portion contacting the catalyst layer. The portion has a face-centered cubic structure with a (111) plane oriented parallel to a surface of the semiconductor substrate. The catalyst layer has a face-centered cubic structure with a (111) plane oriented parallel to the surface of the semiconductor substrate.
摘要翻译：根据一个实施例，公开了一种半导体器件。该器件包括半导体衬底和半导体衬底上方的互连。互连包括助催化剂层，助催化剂层上的催化剂层和催化剂层上的石墨烯层。助催化剂层包括与催化剂层接触的部分。该部分具有面平面立方结构，其中（111）面平行于半导体衬底的表面定向。催化剂层具有面平面立方结构，其中（111）面平行于半导体衬底的表面取向。

3. 发明申请

US20090236746A1 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE 有权
标题翻译：用于制造半导体器件的半导体器件和方法
公开(公告)号：US20090236746A1
公开(公告)日：2009-09-24
申请号：US12408567
申请日：2009-03-20
申请人： Masayuki KITAMURA , Junichi Wada , Hideto Matsuyama
发明人： Masayuki KITAMURA , Junichi Wada , Hideto Matsuyama
IPC分类号： H01L23/48 , H01L21/768
CPC分类号： H01L21/76843 , H01L21/28518 , H01L21/28556 , H01L21/76846 , H01L21/76856 , H01L21/76862 , H01L21/76864 , H01L21/76873 , H01L2221/1089
摘要： A semiconductor device includes a contact plug electrically connected to a semiconductor substrate; a first barrier metal film with a columnar crystal structure arranged in contact with the semiconductor substrate at least on a bottom surface side of the contact plug; an amorphous film made of a material of the first barrier metal film arranged in contact with the first barrier metal film at least on the bottom surface side of the contact plug; a second barrier metal film made of a material identical to that of the first barrier metal film and having a columnar crystal structure, at least a portion of which is arranged in contact with the amorphous film on the bottom surface side and a side surface side of the contact plug; and a dielectric film arranged on the side surface side of the contact plug.
摘要翻译：半导体器件包括电连接到半导体衬底的接触插塞; 具有柱状晶体结构的第一阻挡金属膜至少在所述接触插塞的底面侧与所述半导体衬底接触; 由所述第一阻挡金属膜的材料制成的非晶膜至少在所述接触插塞的底面上与所述第一阻挡金属膜接触; 第二阻挡金属膜，其由与第一阻挡金属膜的材料相同的材料制成，并且具有柱状晶体结构，其至少一部分与底部表面侧的非晶质膜接触，并且侧表面侧接触塞; 以及设置在接触插塞的侧面侧的电介质膜。

4. 发明申请

US20060238132A1 Plasma processing apparatus and method 审中-公开
标题翻译：等离子体处理装置及方法
公开(公告)号：US20060238132A1
公开(公告)日：2006-10-26
申请号：US11391325
申请日：2006-03-29
申请人： Masayuki Kitamura , Masaki Hirayama , Tadahiro Ohmi
发明人： Masayuki Kitamura , Masaki Hirayama , Tadahiro Ohmi
IPC分类号： H01J7/24
CPC分类号： H01J37/32229 , H01J37/32192
摘要： A plasma processing apparatus that passes a microwave, which is introduced into a waveguide, through a slot and propagates the microwave to a dielectric, converts a predetermined gas supplied into a processing chamber into plasma, and applies plasma processing to a substrate, in which a plurality of the waveguides are disposed side by side, a plurality of dielectrics are provided for each of the waveguides, and one slot, or two or more slots is or are provided for each of the dielectrics, is provided. The area of each of the dielectrics can be made extremely small, and a microwave can be reliably propagated into the entire surface of the dielectric. A thin support member that supports the dielectric can be used, a uniform electromagnetic field can be formed in an entire area above the substrate, and uniform plasma can be generated in the processing chamber.
摘要翻译：将通过槽引入波导中的微波通过微波传播到电介质的等离子体处理装置将供给到处理室的规定气体转换为等离子体，并对基板进行等离子体处理，其中多个波导并排设置，为每个波导提供多个电介质，并且为每个电介质提供一个槽或两个或更多个槽。可以使每个电介质的面积非常小，并且可以将微波可靠地传播到电介质的整个表面。可以使用支撑电介质的薄的支撑构件，可以在基板上方的整个区域中形成均匀的电磁场，并且可以在处理室中产生均匀的等离子体。

5. 发明授权

US06488407B1 Radiation temperature measuring method and radiation temperature measuring system 失效
标题翻译：辐射温度测量方法和辐射温度测量系统
公开(公告)号：US06488407B1
公开(公告)日：2002-12-03
申请号：US09527243
申请日：2000-03-17
申请人： Masayuki Kitamura , Eisuke Morisaki , Nobuaki Takahashi , Takashi Shigeoka
发明人： Masayuki Kitamura , Eisuke Morisaki , Nobuaki Takahashi , Takashi Shigeoka
IPC分类号： G01J500
CPC分类号： G01J5/0003 , G01J5/0007 , G01J5/08 , G01J5/0818 , G01J5/0887 , G01J5/0896 , G01J2005/0051 , G01J2005/0077
摘要： The present invention intends to improve the accuracy of temperature measurement when measuring the temperature of a semiconductor wafer by a radiation thermometer on the basis of the idea of virtual blackbody simulated by multiple reflection of light. A system includes a wafer (W), a circular reflector 1 of a radius R disposed opposite to the wafer (W), and a probe (2) disposed in a through hole formed in the reflector (1). The probe (2) is a through hole. The radiation intensity of radiation passed the through hole is determined by image data provided by a CCD camera disposed behind the back surface of the reflector (1). An error in measured radiation intensity of radiation falling the probe (2) due to light that enters a space between the wafer (W) and the reflector (1) and a space between the reflector (1) and the probe (2) and light leaks from the same spaces is corrected, the emissivity of the wafer (W) is calculated and the temperature of the wafer (W) is determined.
摘要翻译：本发明旨在通过基于由多次反射光模拟的虚拟黑体的想法，通过辐射温度计测量半导体晶片的温度来提高温度测量的精度。系统包括晶片（W），与晶片（W）相对设置的半径为R的圆形反射器1和设置在形成于反射器（1）中的通孔中的探针（2）。探针（2）是通孔。通过通孔的辐射的辐射强度由设置在反射器（1）的后表面后面的CCD照相机提供的图像数据确定。由于进入晶片（W）和反射器（1）之间的空间的光以及反射器（1）和探针（2）之间的空间以及光线（2）引起的探测器（2）的测量辐射强度的误差校正相同空间的泄漏，计算晶片的发射率（W），并确定晶片（W）的温度。

6. 发明授权

US06432888B1 Grease for rolling bearing and grease-sealed rolling bearing 失效
标题翻译：滚动轴承润滑脂和润滑脂密封滚动轴承
公开(公告)号：US06432888B1
公开(公告)日：2002-08-13
申请号：US08879134
申请日：1997-06-19
申请人： Hiroshi Komiya , Toshikazu Kouno , Masayuki Kitamura , Toshihiro Kawaguchi , Seiji Okamura , Hiroki Iwamatsu
发明人： Hiroshi Komiya , Toshikazu Kouno , Masayuki Kitamura , Toshihiro Kawaguchi , Seiji Okamura , Hiroki Iwamatsu
IPC分类号： C10M16906
CPC分类号： F16C33/6633 , C10M169/00 , C10M2205/0206 , C10M2207/0406 , C10M2209/1013 , C10M2209/1023 , C10M2215/006 , C10M2215/026 , C10M2215/0813 , C10M2215/1013 , C10M2215/102 , C10M2215/1026 , C10M2215/121 , C10M2215/2206 , C10M2215/2275 , C10M2219/066 , C10M2219/068 , C10M2223/045
摘要： The present invention is directed to a grease for a rolling bearing containing poly-&agr;-olefin synthetic oil or diphenyl ether synthetic oil, a diurea thickening agent, and an organic antimony compound or an organic molybdenum compound. The present invention is also directed to a rolling bearing in which the grease for a rolling bearing is sealed. The organic antimony compound or the organic molybdenum compound reacts with a metal composing inner and outer bearing rings and a rolling element to form a compound film contributing to the reduction of the force in the tangential direction on a raceway surface of the bearing rings and a surface of the rolling element, thereby preventing an excessively large force in the tangential direction under high-speed rotation. This enables to lengthen the life of the rolling bearing used under particularly severe conditions such as high temperature, high-speed rotation and high road.
摘要翻译：本发明涉及一种用于含有聚-α-烯烃合成油或二苯醚合成油，二脲增稠剂和有机锑化合物或有机钼化合物的滚动轴承的润滑脂。本发明还涉及一种用于滚动轴承的润滑脂被密封的滚动轴承。有机锑化合物或有机钼化合物与构成内外轴承环和滚动元件的金属反应，形成有助于减小轴承环的轨道面上的切线方向的力的化合物膜和表面，从而防止在高速旋转下切向方向上的力过大。这使得能够延长在特别严苛的条件下使用的滚动轴承的寿命，例如高温，高速旋转和高路。

7. 发明授权

US08813552B2 Detecting apparatus 有权
标题翻译：检测装置
公开(公告)号：US08813552B2
公开(公告)日：2014-08-26
申请号：US13254492
申请日：2009-08-03
申请人： Seiichi Matsumoto , Hiroyuki Kawaki , Shinya Kamada , Yasunori Toyoshima , Masayuki Kitamura , Takahiro Makihara
发明人： Seiichi Matsumoto , Hiroyuki Kawaki , Shinya Kamada , Yasunori Toyoshima , Masayuki Kitamura , Takahiro Makihara
IPC分类号： H01M4/04
CPC分类号： H01M10/48 , G01B11/306 , G01B21/30 , H01M10/425
摘要： The objective of the present invention is to provide an unexpected detecting apparatus enabled to evaluate an evenness of a compound coated on an electrode of a battery. The detecting apparatus (1) detects an evenness of a compound (12) coated on an electrode (10) of a battery, and includes a first sensor (20) for measuring a mass per unit area of the compound (12) in any points thereof, a second sensor (30, 50) for measuring a thickness of the compound (12) in the any points, and a holder (40, 60) for holding the first and second sensors (20, 30, 50), in which the first and second sensors (20, 30, 50) measure the mass and thickness at the same time, and the evenness is evaluated on the basis of the measured mass and thickness.
摘要翻译：本发明的目的是提供一种能够评估涂覆在电池的电极上的化合物的均匀性的意外检测装置。检测装置（1）检测涂覆在电池的电极（10）上的化合物（12）的均匀性，并且包括用于以任何点测量化合物（12）的每单位面积质量的第一传感器（20），用于测量任何点上的化合物（12）的厚度的第二传感器（30,50）和用于保持第一和第二传感器（20,30,50）的保持器（40,60），其中第一和第二传感器（20,30,50）同时测量质量和厚度，并且基于测量的质量和厚度来评估均匀度。

8. 发明申请

US20130134592A1 WIRE AND SEMICONDUCTOR DEVICE 有权
公开(公告)号：US20130134592A1
公开(公告)日：2013-05-30
申请号：US13684297
申请日：2012-11-23
申请人： Yuichi YAMAZAKI , Makoto Wada , Masayuki Kitamura , Tadashi Sakai
发明人： Yuichi YAMAZAKI , Makoto Wada , Masayuki Kitamura , Tadashi Sakai
IPC分类号： H05K1/09 , H01L23/532
CPC分类号： H01L23/53276 , B82Y10/00 , B82Y30/00 , B82Y99/00 , H01L2924/0002 , H05K1/097 , Y10S977/734 , Y10S977/762 , H01L2924/00
摘要： A wire of an embodiment includes: a substrate; a metal film provided on the substrate; a metal part provided on the metal film; and graphene wires formed on the metal part, wherein the graphene wire is electrically connected to the metal film, and the metal film and the metal part are formed using different metals or alloys from each other.

9. 发明申请

US20090242548A1 TAPE HEATER AND METHOD FOR MANUFACTURING THE SAME 审中-公开
标题翻译：胶带加热器及其制造方法
公开(公告)号：US20090242548A1
公开(公告)日：2009-10-01
申请号：US12410642
申请日：2009-03-25
申请人： Kenji Iida , Keiichi Fukuda , Akira Sasaki , Daisaku Seki , Emico Taguchi , Masayuki Kitamura
发明人： Kenji Iida , Keiichi Fukuda , Akira Sasaki , Daisaku Seki , Emico Taguchi , Masayuki Kitamura
IPC分类号： H05B3/34 , D04B1/22
CPC分类号： H05B3/345 , H05B3/347 , H05B3/58 , H05B2203/016 , H05B2203/017 , Y10T29/49002
摘要： The present invention relates to a tape heater including: at least one flexible fabric base formed from a heat-resistant thread, the at least one flexible fabric base including a first fabric base part and a second fabric base part; and a heater member, in which the heater member is interposed between the first fabric base part and the second fabric base pan. Since the heater member is interposed between the fabric base(s), the tape heater of the present invention exhibits superior flexibility and stretchability and is superior in easily being wrapped around a pipe, as well as reliably protecting the heater member. Further, tape heaters can be continually manufactured, so long as weaving or knitting of the fabric base(s) is caused to proceed while the heater member is interposed between the fabric base(s), to thus join the fabric base(s). Hence, enhancement of production efficiency and prevention of an increase in production cost can be attained.
摘要翻译：带加热器技术领域本发明涉及一种带式加热器，包括：由耐热螺纹形成的至少一个柔性织物基底，所述至少一个柔性织物基底包括第一织物基部和第二织物基部; 以及加热器构件，其中加热器构件插入在第一织物基部和第二织物底盘之间。由于加热件插在织物基底之间，所以本发明的带状加热器显示出优异的柔韧性和拉伸性，并且易于缠绕在管子上而且可靠地保护加热器部件。此外，只要在加热器构件插入织物基底之间进行织物基底的织造或编织，从而连接织物基底，就可以连续地制造带加热器。因此，可以提高生产效率并防止生产成本的增加。

10. 发明授权

US06630991B2 Thermal processing apparatus 失效
公开(公告)号：US06630991B2
公开(公告)日：2003-10-07
申请号：US09838566
申请日：2001-04-20
申请人： Masayuki Kitamura , Eisuke Morisaki , Yun Mo
发明人： Masayuki Kitamura , Eisuke Morisaki , Yun Mo
IPC分类号： G01J548
CPC分类号： H01L21/67248 , G01J5/0003
摘要： A method of detecting a temperature of an object in a multiple-reflection environment by a radiation pyrometer includes the steps of detecting a radiation strength emitted from a target region of an object, applying a correction to the radiation strength so as to correct the effect of multiple reflections of a radiation emitted from the object, applying a correction to the radiation strength so as to correct a reflection loss caused at an end surface of an optical medium interposed between the object and a sensing head of the pyrometer, applying a correction to the radiation strength with regard to an optical absorption loss caused in the optical medium, and applying a correction to the radiation strength with regard to a stray radiation coming in to the sensing head from a source other than the target region of the object.

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