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1. 发明授权

US10153182B2 Substrate processing apparatus 有权
公开(公告)号：US10153182B2
公开(公告)日：2018-12-11
申请号：US13598431
申请日：2012-08-29
申请人： Noboru Higashi , Satoru Hiraki , Hiromi Kiyose , Hideaki Sato , Hiroshi Komiya
发明人： Noboru Higashi , Satoru Hiraki , Hiromi Kiyose , Hideaki Sato , Hiroshi Komiya
IPC分类号： H01L21/67 , H01L21/311 , G01N21/3577
摘要： A substrate processing apparatus that performs processing by immersing a substrate into a processing liquid obtained by mixing phosphoric acid with a diluent includes a concentration sensing means for sensing the concentration of the processing liquid by measuring the absorbance characteristics of the processing liquid. The concentration sensing means includes a light-transmitting section that introduces the processing liquid into the inside to let the processing liquid pass therethrough, a light-emitting section that radiates light having a predetermined wavelength to the light-transmitting section, a light-receiving section that receives the light therefrom via the light-transmitting section, a first lens that condenses the light emitted from the light-emitting section to the light-transmitting section, a second lens that condenses the light that has passed through the light-transmitting section to the light-receiving section, and a cooling mechanism that cools at least one of these.

2. 发明授权

US06432888B1 Grease for rolling bearing and grease-sealed rolling bearing 失效
标题翻译：滚动轴承润滑脂和润滑脂密封滚动轴承
公开(公告)号：US06432888B1
公开(公告)日：2002-08-13
申请号：US08879134
申请日：1997-06-19
申请人： Hiroshi Komiya , Toshikazu Kouno , Masayuki Kitamura , Toshihiro Kawaguchi , Seiji Okamura , Hiroki Iwamatsu
发明人： Hiroshi Komiya , Toshikazu Kouno , Masayuki Kitamura , Toshihiro Kawaguchi , Seiji Okamura , Hiroki Iwamatsu
IPC分类号： C10M16906
CPC分类号： F16C33/6633 , C10M169/00 , C10M2205/0206 , C10M2207/0406 , C10M2209/1013 , C10M2209/1023 , C10M2215/006 , C10M2215/026 , C10M2215/0813 , C10M2215/1013 , C10M2215/102 , C10M2215/1026 , C10M2215/121 , C10M2215/2206 , C10M2215/2275 , C10M2219/066 , C10M2219/068 , C10M2223/045
摘要： The present invention is directed to a grease for a rolling bearing containing poly-&agr;-olefin synthetic oil or diphenyl ether synthetic oil, a diurea thickening agent, and an organic antimony compound or an organic molybdenum compound. The present invention is also directed to a rolling bearing in which the grease for a rolling bearing is sealed. The organic antimony compound or the organic molybdenum compound reacts with a metal composing inner and outer bearing rings and a rolling element to form a compound film contributing to the reduction of the force in the tangential direction on a raceway surface of the bearing rings and a surface of the rolling element, thereby preventing an excessively large force in the tangential direction under high-speed rotation. This enables to lengthen the life of the rolling bearing used under particularly severe conditions such as high temperature, high-speed rotation and high road.
摘要翻译：本发明涉及一种用于含有聚-α-烯烃合成油或二苯醚合成油，二脲增稠剂和有机锑化合物或有机钼化合物的滚动轴承的润滑脂。本发明还涉及一种用于滚动轴承的润滑脂被密封的滚动轴承。有机锑化合物或有机钼化合物与构成内外轴承环和滚动元件的金属反应，形成有助于减小轴承环的轨道面上的切线方向的力的化合物膜和表面，从而防止在高速旋转下切向方向上的力过大。这使得能够延长在特别严苛的条件下使用的滚动轴承的寿命，例如高温，高速旋转和高路。

3. 发明授权

US08493070B2 Device and method for measuring vibration characteristics of hard disk suspension 有权
标题翻译：用于测量硬盘悬架振动特性的装置和方法
公开(公告)号：US08493070B2
公开(公告)日：2013-07-23
申请号：US12835057
申请日：2010-07-13
申请人： Hiroshi Komiya , Tatsuhiko Nishida
发明人： Hiroshi Komiya , Tatsuhiko Nishida
IPC分类号： G01R31/08 , G01R27/26
CPC分类号： G01M7/08 , G11B19/048
摘要： The signal source generates a signal of a frequency higher than the vibration frequency of the slider of the hard disk drive, and supplies it to one end of the slider and the disk of the hard disk drive. The detector detects a signal output from the other end of the slider and the disk, and outputs a change in the capacitance between the slider and the disk as a voltage when the hard disk drive receives an impact.
摘要翻译：信号源产生频率高于硬盘驱动器的滑块的振动频率的信号，并将其提供给滑块和硬盘驱动器的盘的一端。检测器检测从滑块和盘的另一端输出的信号，并且当硬盘驱动器受到冲击时，作为电压输出滑块和盘之间的电容的变化。

4. 发明申请

US20110019521A1 DEVICE AND METHOD FOR MEASURING VIBRATION CHARACTERISTICS OF HARD DISK SUSPENSION 有权
标题翻译：用于测量硬盘悬挂振动特性的装置和方法
公开(公告)号：US20110019521A1
公开(公告)日：2011-01-27
申请号：US12835057
申请日：2010-07-13
申请人： Hiroshi Komiya , Tatsuhiko Nishida
发明人： Hiroshi Komiya , Tatsuhiko Nishida
IPC分类号： G11B27/36
CPC分类号： G01M7/08 , G11B19/048
摘要： The signal source generates a signal of a frequency higher than the vibration frequency of the slider of the hard disk drive, and supplies it to one end of the slider and the disk of the hard disk drive. The detector detects a signal output from the other end of the slider and the disk, and outputs a change in the capacitance between the slider and the disk as a voltage when the hard disk drive receives an impact.
摘要翻译：信号源产生频率高于硬盘驱动器的滑块的振动频率的信号，并将其提供给滑块和硬盘驱动器的盘的一端。检测器检测从滑块和盘的另一端输出的信号，并且当硬盘驱动器受到冲击时，作为电压输出滑块和盘之间的电容的变化。

5. 发明授权

US07008115B2 Polymeric lubricant packed bearing and method of producing the same 失效
标题翻译：聚合润滑剂填充轴承及其制造方法
公开(公告)号：US07008115B2
公开(公告)日：2006-03-07
申请号：US10146975
申请日：2002-05-15
申请人： Ryuji Nakata , Hiroshi Komiya
发明人： Ryuji Nakata , Hiroshi Komiya
IPC分类号： F16C33/66
CPC分类号： F16C23/086 , F16C19/38 , F16C33/36 , F16C33/48 , F16C33/495 , F16C33/543 , F16C33/6611
摘要： A film composed of grease, or a film composed of a thickener for grease, is formed on a portion of the surface of each of components constituting a bearing, the portion being opposed to a polymeric lubricant, whereby sliding frictional resistance between the bearing components and the polymeric lubricant is reduced. In the formation of the film, the assembled bearing in which the film has not yet been formed is immersed into a liquid which is obtained by diluting the grease or the thickener for grease with a solvent, and the solvent is then dried, thereby to highly reproducibly form the film of uniform thickness. In an assembled double-row self-aligning roller bearing wherein an outer race is swingable in a direction perpendicular to the center axis of the bearing, raw materials of a polymeric lubricant are poured into and solidified in two regions of an annular space between the inner and outer races.
摘要翻译：在构成轴承的各部件的表面的一部分上形成由油脂构成的膜或由润滑脂增稠剂构成的膜，该部分与聚合物润滑剂相对，由此轴承部件与轴承部件之间的滑动摩擦阻力聚合物润滑剂减少。在形成膜时，其中尚未形成膜的组装轴承被浸入通过用溶剂稀释润滑脂或增稠剂用于润滑脂获得的液体，然后将溶剂干燥，从而高度可重复地形成均匀厚度的膜。在组装的双列自动调心滚子轴承中，外圈可以在垂直于轴承的中心轴线的方向上摆动，聚合物润滑剂的原料被注入固化在内部的环形空间的两个区域中和外场。

6. 发明授权

US06794342B2 Grease composition and rolling bearing lubricated by the grease composition 有权
标题翻译：润滑脂组合物和滚动轴承由润滑脂组合物润滑
公开(公告)号：US06794342B2
公开(公告)日：2004-09-21
申请号：US10098810
申请日：2002-03-14
申请人： Hiroshi Komiya , Atsushi Yao , Nao Ito , Youzou Taniguchi
发明人： Hiroshi Komiya , Atsushi Yao , Nao Ito , Youzou Taniguchi
IPC分类号： C10M12302
CPC分类号： C10M169/02 , C10M105/36 , C10M105/38 , C10M107/02 , C10M115/08 , C10M117/02 , C10M117/04 , C10M2205/02 , C10M2205/0206 , C10M2207/1225 , C10M2207/1245 , C10M2207/125 , C10M2207/1265 , C10M2207/1285 , C10M2207/129 , C10M2207/166 , C10M2207/186 , C10M2207/206 , C10M2207/246 , C10M2207/281 , C10M2207/282 , C10M2207/2825 , C10M2207/283 , C10M2207/2835 , C10M2207/2855 , C10M2207/286 , C10M2207/34 , C10M2215/006 , C10M2215/026 , C10M2215/0813 , C10M2215/1013 , C10M2215/102 , C10M2215/1026 , C10M2215/121 , C10M2215/2206 , C10M2215/2275 , C10N2210/01 , C10N2240/02
摘要： In a grease composition which essentially comprises a base oil and a thickener, a mixture of a urea compound and lithium soap is blended as the thickener. The content of the urea compound in the thickener is preferably set to 20 to 80 wt %. As the urea compound, an alkyl group- or cyclohexyl group-terminated diurea compound, or, particularly, a diurea compound in which the diisocyanate component is 4,4′-diphenylmethane diisocyanate is preferably used. In a rolling bearing which is lubricated by the grease composition, the acoustic performance is largely improved by a synergistic action of the lithium soap and the urea compound, and simultaneously also the anti-fretting property is enhanced by an action of the urea compound.
摘要翻译：在基本上包含基础油和增稠剂的润滑脂组合物中，混合尿素化合物和锂皂的混合物作为增稠剂。增稠剂中脲化合物的含量优选为20〜80重量％。作为脲化合物，优选使用烷基或环己基封端的二脲化合物，特别是二异氰酸酯成分为4,4'-二苯基甲烷二异氰酸酯的二脲化合物。在通过润滑脂组合物润滑的滚动轴承中，通过锂皂和尿素化合物的协同作用，大大提高了声学性能，并且通过尿素化合物的作用同时提高了抗微动性。

7. 发明授权

US06335310B1 Conductive lubricant for fluid dynamic bearing 有权
标题翻译：用于流体动力轴承的导电润滑剂
公开(公告)号：US06335310B1
公开(公告)日：2002-01-01
申请号：US09690480
申请日：2000-10-18
申请人： Noriko Suekuni , Koji Yoshizaki , Hiroshi Komiya
发明人： Noriko Suekuni , Koji Yoshizaki , Hiroshi Komiya
IPC分类号： C10M10536
CPC分类号： G11B19/20 , C10M169/04 , C10M2207/281 , C10M2207/282 , C10M2207/2825 , C10M2207/283 , C10M2207/2835 , C10M2207/2855 , C10M2207/286 , C10M2207/34 , C10M2215/04 , C10M2215/042 , C10M2219/044 , C10M2223/02 , C10M2223/04 , C10M2223/042 , C10M2223/049 , C10M2223/10 , C10N2240/20 , C10N2240/201 , C10N2240/202 , C10N2240/203 , C10N2240/204 , C10N2240/205 , F16C33/109 , F16C2202/32 , F16C2370/12 , G11B19/2018
摘要： There is provided is a conductive lubricant for a fluid dynamic bearing being able to ground static electricity occurring at the fluid dynamic bearing without impairing the performance of the fluid dynamic bearing. This conductive lubricant for a fluid dynamic bearing is provided by an ester base oil such as dioctyl sebacate that concurrently has heat resistance, a small quantity of evaporation, low cost and wettability to metal, which are necessary for a fluid dynamic bearing. The conductive lubricant contains 0.1 to 5 percent by weight of antistatic additive such as alkyl aryl sulfonate having an affinity for this ester base oil. Therefore, this antistatic additive imparts conductivity to the base oil, by which the static electricity occurring at the fluid dynamic bearing can be grounded without impairing the lubrication performance.
摘要翻译：提供了一种用于流体动力轴承的导电润滑剂，其能够研磨在流体动态轴承处发生的静电而不损害流体动态轴承的性能。用于流体动力轴承的这种导电润滑剂由与流体动力轴承所必需的同时具有耐热性，少量蒸发，低成本和金属润湿性的酯基油例如癸二酸二辛酯提供。导电润滑剂含有0.1至5重量％的抗静电添加剂，例如对该酯基油具有亲和性的烷基芳基磺酸盐。因此，这种抗静电添加剂赋予基础油的导电性，由此在流体动力轴承处发生的静电可以接地而不损害润滑性能。

8. 发明授权

US6100771A Multi-signal generator 失效
标题翻译：多信号发生器
公开(公告)号：US6100771A
公开(公告)日：2000-08-08
申请号：US180197
申请日：1999-10-18
申请人： Hiroshi Komiya
发明人： Hiroshi Komiya
IPC分类号： G01R31/00 , G01R31/28 , H03J5/00 , H04B17/00 , H03C3/00 , H04L27/00
CPC分类号： G01R31/2841
摘要： It is to provide a multi-signal generator which is able to lower the cost thereof by performing modulation in a low frequency range and using an output of a frequency synthesizer commonly to all channels. The multi-signal generator for generating a multi-signal which is a combination of a plurality of output signals generated by a plurality of channels each of which is using a frequency conversion method wherein a modulated carrier signal and a local signal are frequency converted by a mixer, wherein an output frequency from at least one frequency synthesizer is commonly used as a frequency source for the carrier signal or local signal by all the channels.
摘要翻译： PCT No.PCT / JP96 / 01739 Sec。 371 1999年10月18日第 102（e）1999年10月18日PCT提交1998年4月16日PCT公布。出版物WO98 / 49568 日期：1998年11月5日提供一种多信号发生器，能够通过在低频范围内进行调制并将频率合成器的输出通用于所有通道来降低成本。用于产生多信号的多信号发生器，其是由多个信道产生的多个输出信号的组合，每个信道均使用频率转换方法，其中调制载波信号和本地信号被频率转换混频器，其中来自至少一个频率合成器的输出频率通常用作所有信道的载波信号或本地信号的频率源。

9. 发明申请

US20130048215A1 SUBSTRATE PROCESSING APPARATUS 审中-公开
标题翻译：基板加工设备
公开(公告)号：US20130048215A1
公开(公告)日：2013-02-28
申请号：US13598431
申请日：2012-08-29
申请人： Noboru Higashi , Satoru Hiraki , Hiromi Kiyose , Hideaki Sato , Hiroshi Komiya
发明人： Noboru Higashi , Satoru Hiraki , Hiromi Kiyose , Hideaki Sato , Hiroshi Komiya
IPC分类号： B44C1/22 , H01L21/465 , C03C15/00
CPC分类号： H01L21/67086 , G01N21/3577 , H01L21/31111 , H01L21/67248 , H01L21/67253
摘要： A substrate processing apparatus that performs processing by immersing a substrate into a processing liquid obtained by mixing phosphoric acid with a diluent includes a concentration sensing means for sensing the concentration of the processing liquid by measuring the absorbance characteristics of the processing liquid. The concentration sensing means includes a light-transmitting section that introduces the processing liquid into the inside to let the processing liquid pass therethrough, a light-emitting section that radiates light having a predetermined wavelength to the light-transmitting section, a light-receiving section that receives the light therefrom via the light-transmitting section, a first lens that condenses the light emitted from the light-emitting section to the light-transmitting section, a second lens that condenses the light that has passed through the light-transmitting section to the light-receiving section, and a cooling mechanism that cools at least one of these.
摘要翻译：通过将磷酸与稀释剂混合而获得的处理液中的基材浸渍进行处理的基板处理装置包括：浓度检测单元，用于通过测定处理液的吸光度特性来检测处理液的浓度。集中检测装置包括将处理液引入到内部以使处理液通过的透光部，将具有预定波长的光照射到发光部的发光部，受光部经由透光部接收来自该发光部的光的第一透镜，将从发光部射出的光会聚到透光部的第一透镜，将透过该透光部的光聚光的第二透镜，光接收部分和冷却这些中的至少一个的冷却机构。

10. 发明申请

US20100043835A1 SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, PROGRAM, AND STORAGE MEDIUM 审中-公开
标题翻译：基板处理装置，基板处理方法，程序和存储介质
公开(公告)号：US20100043835A1
公开(公告)日：2010-02-25
申请号：US12546088
申请日：2009-08-24
申请人： Kazuyoshi ESHIMA , Keisuke Sasaki , Hiroshi Komiya
发明人： Kazuyoshi ESHIMA , Keisuke Sasaki , Hiroshi Komiya
IPC分类号： B08B3/08 , B08B13/00
CPC分类号： H01L21/67057 , H01L21/67017
摘要： A second line 44 is branched from a first line 22 connected to a processing part 10 configured to process a wafer W. A plurality of third lines (an ammonia-water supply line 48, a hydrochloric-acid supply line 52, and a hydrofluoric-acid line 56) are branched from the second line 44. The third lines are respectively provided with valves 48a, 52a, and 56a at locations branched from the second line 44. Chemical-liquid supply sources (an ammonia-water supply source 46, a hydrochloric-acid supply source 50, and a hydrofluoric-acid supply source 54) are connected to the respective third lines, whereby chemical liquids can be supplied from these chemical-liquid supply sources to the respective third lines.
摘要翻译：第二线路44从连接到处理部件10的第一线22分支，该处理部件10被配置为处理晶片W.多条第三线路（氨水供应线路48，盐酸供应线路52和氢氟酸供应线路线路酸性管线56）从第二管线44分支。在从第二管线44分支的位置处，第三管线分别设置有阀48a，52a和56a。化学液体供应源（氨水供应源46，盐酸供给源50和氢氟酸供给源54）连接到各自的第三管路，由此可以将这些化学液体供给源的化学液体供给到各自的第三管路。

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