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    • 1. 发明授权
    • Method for chemical mechanical polishing
    • 化学机械抛光方法
    • US5759918A
    • 1998-06-02
    • US689741
    • 1996-08-13
    • Jon A. HoshizakiRoger O. WilliamsJames D. BuhlerCharles A. ReichelWilliam K. HollywoodRichard de GeusLawrence L. Lee
    • Jon A. HoshizakiRoger O. WilliamsJames D. BuhlerCharles A. ReichelWilliam K. HollywoodRichard de GeusLawrence L. Lee
    • B24B7/24B24B37/04B24B37/10B24B37/30B24B37/32G05B19/18H01L21/304B24B1/00
    • B24B37/105B24B37/042B24B37/30B24B37/32B24B7/241G05B19/182G05B2219/43142G05B2219/45058G05B2219/45232
    • A method and apparatus is disclosed for polishing the face of a semiconductor wafer. The wafer is held in position by a tooling head and is contacted by an abrasive pad. A table is provided on to which the abrasive pad is fixedly attached, both of which move in directions parallel to the face of the wafer being polished. A controller controls the motion of the table according to a predetermined polishing pattern and is capable of maintaining a constant velocity between the wafer and the abrasive pad. The tooling head includes a circular platen and a retention ring peripherally oriented about the outer edge of the platen which resists lateral forces on the wafer caused by engagement of the face of the wafer with the polishing surface. An adjustable coupling is mounted to the platen and the ring, and serves to adjustably position during polishing the height of the ring relative to the face of the wafer as well as to rigidly support during polishing the position of the retaining ring. A flexible disk is fixedly mounted between a support post and the platen and oriented substantially parallel to the face of the platen. The flexible disk is adapted to prevent rotation of the platen about the axis of the support post and to transmit forces between the platen and the post in directions parallel to the face of the platen.
    • 公开了一种用于抛光半导体晶片的表面的方法和装置。 晶片通过工具头保持在适当位置并且被研磨垫接触。 提供了一个桌子,研磨垫固定在该工作台上,两者都沿平行于待抛光晶片的表面的方向移动。 控制器根据预定的抛光图案控制工作台的运动,并且能够在晶片和研磨垫之间保持恒定的速度。 工具头包括圆形压板和围绕压板的外边缘周向定向的保持环,其抵抗由晶片的表面与抛光表面的接合引起的晶片上的横向力。 可调联接件安装到压板和环上,并且用于在抛光环相对于晶片表面的高度期间可调节地定位,并且在抛光保持环的位置期间刚性地支撑。 柔性盘固定地安装在支撑柱和压板之间并且基本上平行于压板的表面定向。 柔性盘适于防止压板围绕支柱的轴线旋转并且在平行于压板的表面的方向上在压板和柱之间传递力。
    • 2. 发明授权
    • Dental floss applicator
    • 牙线牙膏
    • US5141008A
    • 1992-08-25
    • US700752
    • 1991-05-15
    • Lawrence L. Lee
    • Lawrence L. Lee
    • A61C15/04
    • A61C15/046
    • A dental floss applicator having an elongated body, a bow across which the floss is to be stretched, a storage area for a supply of floss, a supply capstan for drawing the floss out of the storage area, a take-up capstan for disposal of the used floss, an axle to support the supply and take-up capstans, and guides to guide the floss between the bow and the capstans. The supply and take-up capstans are coaxial and integrated into one piece so that they rotate together as one rigid-body around the axle. The supply capstan is smaller in diameter than the take-up capstan, therefore, as the capstans are turned to advance the floss they also stretch the floss to generate floss tension. The axle is an extension of the body; it is hollow and it supports the capstans from a direction along the capstans common axis, on the side of the supply capstan (away from the take-up capstan). The guide is also an extension of the body, reaching axially over the supply capstan to guide the floss to the take-up capstan. The body is also hollow, thus providing rigidity while not having any thick areas that would be expensive to mold out of plastic.
    • 一种具有细长主体的牙线涂抹器,用于将牙线拉伸的弓,用于供应牙线的储存区域,用于将牙线从存储区域拉出的供应绞盘,用于处理牙线的卷取绞盘 使用的牙线,用于支撑供应和卷取绞盘的轴,以及引导引导弓和绞盘之间的牙线。 供应和卷绕绞盘是同轴的并且集成成一体,使得它们作为一个刚体围绕轴旋转在一起。 供应绞盘的直径小于卷取绞盘的直径,因此,当绞盘转动以推进牙线时,它们也拉伸牙线以产生牙线张力。 车轴是车身的延伸线; 它是中空的,并且从供电绞盘(远离卷取绞盘)的一侧沿着绞盘公共轴线的方向支撑绞盘。 引导件也是身体的延伸部分,轴向延伸到供应绞盘上以将牙线引导到卷取绞盘。 身体也是中空的,因此提供刚性,而不具有从塑料模制成本昂贵的任何厚的区域。
    • 4. 发明授权
    • Perforated splint
    • 穿孔夹板
    • US4768502A
    • 1988-09-06
    • US832589
    • 1986-02-25
    • Lawrence L. Lee
    • Lawrence L. Lee
    • A61F5/058A61F5/04
    • A61F5/05866
    • A splint for use with retaining straps to immobilize part of a limb comprising an elongated rigid sheet and a rigid collar. The sheet is formed into a shape to conform to the surface of one side of the part of the limb to be immobilized. The collar, which is attached to one end of the sheet, extends circumferentially more than halfway around the limb, grips the limb, and holds it in a fixed position relative to the sheet. Retaining straps are used at other positions along the sheet to hold the limb against the splint. In one embodiment, the splint is made of stainless steel, the sheet is formed of intersecting strips of stainless steel that are spotwelded together at intersection points to form a perforated sheet having large holes distributed throughout its area for ventilation and removal of water from the surface of the limb. The collar can be attached to the sheet in more than one orientations; one of these orientations allows the splint to fit a person's left limb, and another one of these orientations allows the splint to fit the person's right limb. Final adjustments of the splint are made by manually bending the sheet and the collar. The splint can be made to fit the limb so well that it is comfortable to wear in direct contact with the skin (without padding material) for extended periods of time.
    • 用于固定带的夹板以固定包括细长刚性片和刚性环的肢体的一部分。 片材形成为与要固定的肢体部分的一侧的表面一致。 附接到片材的一端的套环周向延伸超过肢体的一半,握住肢体,并将其保持在相对于片材的固定位置。 保持带用于沿着片材的其他位置,以将肢体夹持在夹板上。 在一个实施例中,夹板由不锈钢制成,片材由相交的不锈钢带形成,它们在交叉点处点焊在一起形成具有分布在其整个区域中的大孔的穿孔板,用于从表面通风和去除水 的肢体。 衣领可以多个方向连接到片材上; 这些方向之一允许夹板适合人的左肢,另外一个方向允许夹板适合人的右肢。 夹板的最终调整是通过手动弯曲片材和衣领来进行的。 夹板可以使其适合肢体,以使其与皮肤(无填充材料)直接接触很长时间佩戴舒适。
    • 9. 发明授权
    • Apparatus for chemical mechanical polishing
    • 化学机械抛光装置
    • US5938884A
    • 1999-08-17
    • US900750
    • 1997-07-25
    • Jon A. HoshizakiRoger O. WilliamsJames D. BuhlerCharles A. ReichelWilliam K. HollywoodRichard de GeusLawrence L. Lee
    • Jon A. HoshizakiRoger O. WilliamsJames D. BuhlerCharles A. ReichelWilliam K. HollywoodRichard de GeusLawrence L. Lee
    • B24B7/24B24B37/04B24B37/10B24B37/30B24B37/32G05B19/18H01L21/304B24B37/00
    • B24B37/105B24B37/042B24B37/30B24B37/32B24B7/241G05B19/182G05B2219/43142G05B2219/45058G05B2219/45232
    • A method and apparatus is disclosed for polishing the face of a semiconductor wafer. The wafer is held in position by a tooling head and is contacted by an abrasive pad. A table is provided on to which the abrasive pad is fixedly attached, both of which move in directions parallel to the face of the wafer being polished. A controller controls the motion of the table according to a predetermined polishing pattern and is capable of maintaining a constant velocity between the wafer and the abrasive pad. The tooling head includes a circular platen and a retention ring peripherally oriented about the outer edge of the platen which resists lateral forces on the wafer caused by engagement of the face of the wafer with the polishing surface. An adjustable coupling is mounted to the platen and the ring, and serves to adjustably position during polishing the height of the ring relative to the face of the wafer as well as to rigidly support during polishing the position of the retaining ring. A flexible disk is fixedly mounted between a support post and the platen and oriented substantially parallel to the face of the platen. The flexible disk is adapted to prevent rotation of the platen about the axis of the support post and to transmit forces between the platen and the post in directions parallel to the face of the platen.
    • 公开了一种用于抛光半导体晶片的表面的方法和装置。 晶片通过工具头保持在适当位置并且被研磨垫接触。 提供了一个桌子,研磨垫固定在该工作台上,两者都沿平行于待抛光晶片的表面的方向移动。 控制器根据预定的抛光图案控制工作台的运动,并且能够在晶片和研磨垫之间保持恒定的速度。 工具头包括圆形压板和围绕压板的外边缘周向定向的保持环,其抵抗由晶片的表面与抛光表面的接合引起的晶片上的横向力。 可调联接件安装到压板和环上,并且用于在抛光环相对于晶片表面的高度期间可调节地定位,并且在抛光保持环的位置期间刚性地支撑。 柔性盘固定地安装在支撑柱和压板之间并且基本上平行于压板的表面定向。 柔性盘适于防止压板围绕支柱的轴线旋转并且在平行于压板的表面的方向上在压板和柱之间传递力。