会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 5. 发明申请
    • SUBSTRATE ALIGNMENT APPARATUS AND SUBSTRATE PROCESSING APPARATUS
    • 基板对准装置和基板处理装置
    • US20100024723A1
    • 2010-02-04
    • US12501827
    • 2009-07-13
    • Masami HasegawaKazuaki Kaneko
    • Masami HasegawaKazuaki Kaneko
    • B05C13/00C23F1/00
    • H01L21/68742H01J37/32743H01L21/68H01L21/681
    • A substrate alignment apparatus for aligning a substrate with a reference point, comprises a plurality of columns configured to rotate about rotation axes parallel to respective axial directions thereof, a driving mechanism configured to synchronously rotate the plurality of columns through an identical angle in an identical direction, a detector configured to detect an amount of positional deviation of the substrate from the reference point, and support pins which are located on upper surfaces of the plurality of columns while being spaced apart from respective rotation axes of the plurality of columns, and are configured to support the substrate, wherein the substrate is aligned by synchronously rotating the plurality of columns through the identical angle in the identical direction by the driving mechanism based on the amount of positional deviation detected by the detector.
    • 一种用于使衬底与参考点对准的衬底对准装置,包括:多个列,其被构造成绕其平行于其轴向方向的旋转轴线旋转;驱动机构,其构造成使多个柱沿相同方向同步旋转相同的角度 检测器,被配置为检测基板与参考点的位置偏移量,以及支撑销,其位于多个列的上表面上,同时与多个列的相应旋转轴线间隔开,并且被配置 以支撑基板,其中通过基于由检测器检测到的位置偏差的量,通过驱动机构使多个列在相同方向上同步旋转相同的角度来对准基板。
    • 8. 发明申请
    • Electro-Static Chucking Mechanism and Surface Processing Apparatus
    • 静电吸盘机构和表面处理设备
    • US20080014363A1
    • 2008-01-17
    • US11779169
    • 2007-07-17
    • Yasumi SAGOMasayoshi IKEDAKazuaki KANEKOHiroki DATE
    • Yasumi SAGOMasayoshi IKEDAKazuaki KANEKOHiroki DATE
    • H05C1/00
    • H01L21/6831C23C16/4586H01J2237/2001
    • This invention presents an ESC mechanism for chucking an object electro-statically on a chucking surface, comprising a stage having a dielectric block of which surface is the chucking surface, and a chucking electrode provided in the dielectric block. A temperature controller is provided with the stage for controlling temperature of the object. A chucking power source to apply voltage to the chucking electrode is provided so that the object is chucked. The chucking surface has concaves of which openings are shut by the chucked object. A heat-exchange gas introduction system that introduces heat-exchange gas into the concaves is provided. The concaves include a heat-exchange concave for promoting heat-exchange between the stage and the object under increased pressure, and a gas-diffusion concave for making the introduced gas diffuse to the heat-exchange concave. The gas-diffusion concave is deeper than the heat-exchange concave. This invention also presents a surface processing apparatus, comprising a process chamber in which a surface of an object is processed, and the electro-static chucking mechanism of the same composition.
    • 本发明提供一种用于将电子静电夹持在夹持表面上的ESC机构,包括具有表面为夹持表面的介质块的台和设置在该介质块中的夹持电极。 温度控制器设置有用于控制物体的温度的台。 提供用于向夹持电极施加电压的夹持电源,以便夹持该物体。 卡盘表面具有通过夹持物体关闭开口的凹陷。 提供了将热交换气体引入凹部的热交换气体导入系统。 凹部包括用于在增压下促进台与物体之间的热交换的热交换凹部,以及用于使引入的气体扩散到热交换凹部的气体扩散凹部。 气体扩散凹部比热交换凹部深。 本发明还提供了一种表面处理装置,其包括处理物体的表面的处理室和相同组成的静电夹持机构。