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1. 发明申请

US20130192761A1 Rotary Substrate Processing System 审中-公开
标题翻译：旋转底材加工系统
公开(公告)号：US20130192761A1
公开(公告)日：2013-08-01
申请号：US13754733
申请日：2013-01-30
申请人： Joseph Yudovsky , Ralf Hofmann , Jeonghoon Oh , Li-Qun Xia , Toshiaki Fujita , Pravin K. Narwankar , Nag B, Patibandla , Srinivas Satya , Banqiu Wu
发明人： Joseph Yudovsky , Ralf Hofmann , Jeonghoon Oh , Li-Qun Xia , Toshiaki Fujita , Pravin K. Narwankar , Nag B, Patibandla , Srinivas Satya , Banqiu Wu
IPC分类号： C23C16/54 , B05C13/00
CPC分类号： C23C16/54 , B05C13/00 , C23C16/45551
摘要： A substrate processing system for processing multiple substrates is provided and generally includes at least one processing platform and at least one staging platform. Each substrate is positioned on a substrate carrier disposed on a substrate support assembly. Multiple substrate carriers, each is configured to carry a substrate thereon, are positioned on the surface of the substrate support assembly. The processing platform and the staging platform, each includes a separate substrate support assembly, which can be rotated by a separate rotary track mechanism. Each rotary track mechanism is capable of supporting the substrate support assembly and continuously rotating multiple substrates carried by the substrate carriers and disposed on the substrate support assembly. Each substrate is thus processed through at least one shower head station and at least one buffer station, which are positioned at a distance above the rotary track mechanism of the processing platform. Each substrate can be transferred between the processing platform and the staging platform and in and out the substrate processing system.
摘要翻译：提供了一种用于处理多个基板的基板处理系统，并且通常包括至少一个处理平台和至少一个分段平台。每个衬底位于设置在衬底支撑组件上的衬底载体上。多个衬底载体，每个被配置为在其上承载衬底，位于衬底支撑组件的表面上。处理平台和分段平台各自包括单独的基板支撑组件，其可以通过单独的旋转轨道机构旋转。每个旋转轨道机构能够支撑基板支撑组件并且连续旋转由基板载体承载并且设置在基板支撑组件上的多个基板。因此，每个基板通过至少一个淋浴喷头站和至少一个缓冲站进行处理，所述至少一个缓冲站位于处理平台的旋转轨道机构上方的距离处。每个基板可以在处理平台和分段平台之间传送并进出基板处理系统。

2. 发明授权

US08454413B2 Multi-chamber carrier head with a textured membrane 有权
标题翻译：具有纹理膜的多腔载体头
公开(公告)号：US08454413B2
公开(公告)日：2013-06-04
申请号：US11614940
申请日：2006-12-21
申请人： Jeonghoon Oh , Tsz-Sin Siu , Hung Chih Chen , Andrew J. Nagengast , Steven M. Zuniga , Thomas B. Brezoczky
发明人： Jeonghoon Oh , Tsz-Sin Siu , Hung Chih Chen , Andrew J. Nagengast , Steven M. Zuniga , Thomas B. Brezoczky
IPC分类号： B24B41/06
CPC分类号： B24B37/30 , B24B41/06 , B29C33/424 , B29C35/02 , B29K2023/00 , B29K2083/00 , B29K2995/0074 , B29L2031/755
摘要： A flexible membrane for use in a carrier head has a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to the base assembly. At least one surface of the flap has a surface texture to prevent adhesion.
摘要翻译：用于载体头部的柔性膜具有大致圆形的主要部分，具有下表面，用于连接到基座组件的环形外部部分和从主体部分在与下表面相对的一侧延伸的环形挡片，用于连接到基座组件。翼片的至少一个表面具有表面纹理以防止粘附。

3. 发明申请

US20130104996A1 METHOD FOR BALANCING GAS FLOW SUPPLYING MULTIPLE CVD REACTORS 审中-公开
标题翻译：用于平衡气体供应多种CVD反应器的方法
公开(公告)号：US20130104996A1
公开(公告)日：2013-05-02
申请号：US13647160
申请日：2012-10-08
申请人： JEONGHOON OH , Michael S. Cox , Alexander S. Polyak
发明人： JEONGHOON OH , Michael S. Cox , Alexander S. Polyak
IPC分类号： F16K11/00
CPC分类号： F16K11/00 , C23C16/45561 , Y10T137/0324 , Y10T137/877
摘要： Gas supply systems and methods are disclosed for solar cell production using multiple parallel reactors. A first gas supply control system has a gas panel having a plurality of gas outlet lines, supplying a first main supply line having a main line mass flow meter measuring the combined total gas mass flow rate in the first main supply line. First, second and third branch lines supplied by the first main supply line each branch line having mass flow controller and one or more control loops established between the mass flow meter and the branch line mass flow controllers. The control loop determining a set point for each of the branch mass flow controllers based on dividing the flow rate of the total gas flow by the number of reactors in use. In addition, a second gas supply control system may be coupled to the first gas supply control system to avoid mixing certain gases before they enter the respective reactors to which they are supplied.
摘要翻译：公开了使用多个并联反应器的太阳能电池生产的气体供应系统和方法。第一气体供给控制系统具有具有多个气体出口管线的气体面板，供给具有测量第一主供应管线中的总气体质量流量的总线质量流量计的第一主供应管线。第一，第二和第三分支线由第一主供应线提供，每个分支线具有质量流量控制器和在质量流量计和分支线质量流量控制器之间建立的一个或多个控制回路。控制回路基于将总气体流量的流量除以使用的反应堆的数量来确定每个分支质量流量控制器的设定点。此外，第二气体供应控制系统可以耦合到第一气体供应控制系统，以避免在它们进入它们所供应的相应反应器之前混合某些气体。

4. 发明授权

US07727055B2 Flexible membrane for carrier head 有权
标题翻译：用于载体头的柔性膜
公开(公告)号：US07727055B2
公开(公告)日：2010-06-01
申请号：US11741692
申请日：2007-04-27
申请人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
发明人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
IPC分类号： B24B5/35
CPC分类号： B24B37/30 , Y10T428/24174 , Y10T428/24182
摘要： A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. The flexible membrane has a main portion and an outer annular portion, wherein a junction between the main portion and the outer annular portion comprises a peripheral edge hinge and an annular recess above the hinge along the outer wall of the outer annular portion.
摘要翻译：描述了具有基座组件，保持环组件，载体环和柔性膜的承载头。柔性膜具有主要部分和外部环形部分，其中主要部分和外部环形部分之间的接合处包括周边边缘铰链和沿着外部环形部分的外壁的铰链上方的环形凹部。

5. 发明申请

US20100062694A1 CARRIER HEAD USING FLEXURE RESTRAINTS FOR RETAINING RING ALIGNMENT 失效
标题翻译：携带器头使用弯曲限制器来保持环对准
公开(公告)号：US20100062694A1
公开(公告)日：2010-03-11
申请号：US12206338
申请日：2008-09-08
申请人： Jin Yi , Jeonghoon Oh , Hung Chih Chen , Samuel Chu-Chiang Hsu
发明人： Jin Yi , Jeonghoon Oh , Hung Chih Chen , Samuel Chu-Chiang Hsu
IPC分类号： B24B5/00 , B24B47/02
CPC分类号： B24B37/32
摘要： One embodiment provides a retaining ring assembly. The retaining ring assembly comprises a retaining ring configured to circumferentially surround and retain the substrate within an inner surface of the retaining ring, and a flexure coupled to the retaining ring. The flexure is configured to maintain a gap between an inner surface of a carrier ring and an outer surface of the retaining ring, and the carrier ring is circumferentially surrounding the retaining ring.
摘要翻译：一个实施例提供一种保持环组件。保持环组件包括保持环，所述保持环被构造成周向地围绕并保持在保持环的内表面内的基板，以及耦合到保持环的挠曲件。挠曲构造成在承载环的内表面和保持环的外表面之间保持间隙，并且承载环周向围绕保持环。

6. 发明授权

US07503837B2 Composite retaining ring 有权
标题翻译：复合保持环
公开(公告)号：US07503837B2
公开(公告)日：2009-03-17
申请号：US11682257
申请日：2007-03-05
申请人： Jeonghoon Oh , Hung Chih Chen , Thomas B. Brezoczky , Douglas R. McAllister , David Datong Huo
发明人： Jeonghoon Oh , Hung Chih Chen , Thomas B. Brezoczky , Douglas R. McAllister , David Datong Huo
IPC分类号： B24B29/00
CPC分类号： B24B37/32
摘要： A two part retaining ring is described that has a lower ring and an upper ring. The lower ring contacts a polishing surface during chemical mechanical polishing. The upper surface and the lower surface of the lower ring have thick and thin subportions to increase the flexibility of the lower ring.
摘要翻译：描述了具有下环和上环的两部分保持环。在化学机械抛光期间，下环接触抛光表面。下环的上表面和下表面具有厚而薄的子部分，以增加下环的柔性。

7. 发明申请

US20080196833A1 RETAINING RING WITH SHAPED SURFACE 有权
标题翻译：具有形状表面的保持环
公开(公告)号：US20080196833A1
公开(公告)日：2008-08-21
申请号：US12049650
申请日：2008-03-17
申请人： Hung Chih Chen , Steven M. Zuniga , Charles C. Garretson , Douglas R. McAllister , Jian Lin , Stacy Meyer , Sidney P. Huey , Jeonghoon Oh , Trung T. Doan , Jeffrey Schmidt , Martin S. Wohlert , Kerry F. Hughes , James C. Wang , Danny Cam Toan Lu , Romain Beau De Lamenie , Venkata R. Balagani , Aden Martin Allen , Michael Jon Fong
发明人： Hung Chih Chen , Steven M. Zuniga , Charles C. Garretson , Douglas R. McAllister , Jian Lin , Stacy Meyer , Sidney P. Huey , Jeonghoon Oh , Trung T. Doan , Jeffrey Schmidt , Martin S. Wohlert , Kerry F. Hughes , James C. Wang , Danny Cam Toan Lu , Romain Beau De Lamenie , Venkata R. Balagani , Aden Martin Allen , Michael Jon Fong
IPC分类号： H01L21/306 , B24B1/00
CPC分类号： B24B37/32 , Y10T29/49815
摘要： A retaining ring can be shaped by machining or lapping the bottom surface of the ring to form a shaped profile in the bottom surface. The bottom surface of the retaining ring can include flat, sloped and curved portions. The lapping can be performed using a machine that dedicated for use in lapping the bottom surface of retaining rings. During the lapping the ring can be permitted to rotate freely about an axis of the ring. The bottom surface of the retaining ring can have curved or flat portions.
摘要翻译：保持环可以通过机械加工或研磨环的底部表面而在底面形成成形轮廓。保持环的底面可以包括平坦的，倾斜的和弯曲的部分。可以使用专用于研磨保持环底面的机器进行研磨。在研磨期间，可以允许环围绕环的轴线自由旋转。保持环的底面可以具有弯曲或平坦的部分。

8. 发明申请

US20070289124A1 FAST SUBSTRATE LOADING ON POLISHING HEAD WITHOUT MEMBRANE INFLATION STEP 有权
标题翻译：快速底板装载在无膜渗透步骤的抛光头上
公开(公告)号：US20070289124A1
公开(公告)日：2007-12-20
申请号：US11757069
申请日：2007-06-01
申请人： Jeonghoon Oh , Andrew Nagengast , Steven M. Zuniga , Hung Chih Chen
发明人： Jeonghoon Oh , Andrew Nagengast , Steven M. Zuniga , Hung Chih Chen
IPC分类号： H05K13/04
CPC分类号： H01L21/6838 , B24B37/30 , H01L21/67005 , Y10T29/5313 , Y10T279/11
摘要： The present invention relates to an apparatus and method for improving and speeding up substrate loading process. One embodiment provides a method for vacuum chucking a substrate. The method comprises venting a center chamber of a flexible membrane configured for mounting the substrate, moving the substrate such that a backside of the substrate is in full contact with the flexible membrane, and vacuuming the center chamber to vacuum chuck the backside of the substrate to the flexible membrane.
摘要翻译：本发明涉及一种用于改善和加速基板加载过程的装置和方法。一个实施例提供了用于真空吸附衬底的方法。该方法包括将配置用于安装衬底的柔性膜的中心室排出，移动衬底，使得衬底的背面与柔性膜完全接触，并且抽真空中心室以将衬底的背面真空吸附到柔性膜。

9. 发明申请

US20070197146A1 COMPOSITE RETAINING RING 有权
标题翻译：复合保持环
公开(公告)号：US20070197146A1
公开(公告)日：2007-08-23
申请号：US11682257
申请日：2007-03-05
申请人： Jeonghoon Oh , Hung Chen , Thomas Brezoczky , Douglas McAllister , David Huo
发明人： Jeonghoon Oh , Hung Chen , Thomas Brezoczky , Douglas McAllister , David Huo
IPC分类号： B24B29/00 , B24B5/00 , B24B21/00
CPC分类号： B24B37/32
摘要： A two part retaining ring is described that has a lower ring and an upper ring. The lower ring contacts a polishing surface during chemical mechanical polishing. The upper surface and the lower surface of the lower ring have thick and thin subportions to increase the flexibility of the lower ring.
摘要翻译：描述了具有下环和上环的两部分保持环。在化学机械抛光期间，下环接触抛光表面。下环的上表面和下表面具有厚而薄的子部分，以增加下环的柔性。

10. 发明授权

US07186171B2 Composite retaining ring 有权
标题翻译：复合保持环
公开(公告)号：US07186171B2
公开(公告)日：2007-03-06
申请号：US11407695
申请日：2006-04-19
申请人： Jeonghoon Oh , Hung Chih Chen , Thomas B. Brezoczky , Douglas R. McAllister , David Datong Huo
发明人： Jeonghoon Oh , Hung Chih Chen , Thomas B. Brezoczky , Douglas R. McAllister , David Datong Huo
IPC分类号： B24B29/00
CPC分类号： B24B37/32
摘要： A two part retaining ring is described that has a lower ring and an upper ring. The lower ring contacts a polishing surface during chemical mechanical polishing. The upper surface and the lower surface of the lower ring have matching grooves formed therein to increase the flexibility of the lower ring.
摘要翻译：描述了具有下环和上环的两部分保持环。在化学机械抛光期间，下环接触抛光表面。下环的上表面和下表面具有形成在其中的匹配凹槽，以增加下环的柔性。

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