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    • 1. 发明授权
    • Photographic apparatus, setting method of photography conditions, and recording medium
    • 摄影装置,摄影条件的设定方法以及记录介质
    • US08149313B2
    • 2012-04-03
    • US12473470
    • 2009-05-28
    • Makoto WatanabeHiroki HosakaYuichi Onumata
    • Makoto WatanabeHiroki HosakaYuichi Onumata
    • H04N5/222
    • H04N5/23293H04N5/23219H04N5/23245
    • In a digital camera 1, when a shutter button is pressed halfway, then a photographic scene is evaluated until the shutter button is fully depressed, and based on automatic parameters corresponding to the evaluated photographic scene which are set, each portion is controlled in accordance with the set automatic parameters (Step S3). Furthermore, tags for manual setting corresponding to the photographic scene evaluated in Step S2 are superimposed on a live view image (Step S5). Whether a touch for any of the tags has been detected is determined (Step S9). If a touch has been detected, manual parameters corresponding to the touched tag in the automatic parameters stored in RAM in Step S3 are changed by one level and updated (Step S13). If the shutter key has been operated, still image photographic processing is performed with the parameters updated and stored in RAM in Step S13 (Step S23).
    • 在数码相机1中,当半按下快门按钮时,评估摄影场景,直到快门按钮被完全按下,并且基于与设定的评估的拍摄场景相对应的自动参数,每个部分根据 设置自动参数(步骤S3)。 此外,将与步骤S2中评估的拍摄场景相对应的手动设置的标签叠加在实时取景图像上(步骤S5)。 确定是否检测到任何标签的触摸(步骤S9)。 如果检测到触摸,则在步骤S3中存储在RAM中的自动参数中的触摸标签对应的手动参数被改变一级并被更新(步骤S13)。 如果已经操作了快门键,则在步骤S13中随机更新并存储在RAM中执行静止图像拍摄处理(步骤S23)。
    • 2. 发明申请
    • PHOTOGRAPHIC APPARATUS, SETTING METHOD OF PHOTOGRAPHY CONDITIONS, AND RECORDING MEDIUM
    • 摄影设备,摄影条件的设置方法和记录媒体
    • US20090295945A1
    • 2009-12-03
    • US12473470
    • 2009-05-28
    • Makoto WATANABEHiroki HOSAKAYuichi ONUMATA
    • Makoto WATANABEHiroki HOSAKAYuichi ONUMATA
    • H04N5/76H04N5/228
    • H04N5/23293H04N5/23219H04N5/23245
    • In a digital camera 1, when a shutter button is pressed halfway, then a photographic scene is evaluated until the shutter button is fully depressed, and based on automatic parameters corresponding to the evaluated photographic scene which are set, each portion is controlled in accordance with the set automatic parameters (Step S3). Furthermore, tags for manual setting corresponding to the photographic scene evaluated in Step S2 are superimposed on a live view image (Step S5). Whether a touch for any of the tags has been detected is determined (Step S9). If a touch has been detected, manual parameters corresponding to the touched tag in the automatic parameters stored in RAM in Step S3 are changed by one level and updated (Step S13). If the shutter key has been operated, still image photographic processing is performed with the parameters updated and stored in RAM in Step S13 (Step S23).
    • 在数码相机1中,当半按下快门按钮时,评估摄影场景,直到快门按钮被完全按下,并且基于与设定的评估的拍摄场景相对应的自动参数,每个部分根据 设置自动参数(步骤S3)。 此外,将与步骤S2中评估的拍摄场景相对应的手动设置的标签叠加在实时取景图像上(步骤S5)。 确定是否检测到任何标签的触摸(步骤S9)。 如果检测到触摸,则在步骤S3中存储在RAM中的自动参数中的触摸标签对应的手动参数被改变一级并被更新(步骤S13)。 如果已经操作了快门键,则在步骤S13中随机更新并存储在RAM中执行静止图像拍摄处理(步骤S23)。
    • 5. 发明申请
    • PROCESSING APPARATUS
    • 加工设备
    • US20070264104A1
    • 2007-11-15
    • US11747646
    • 2007-05-11
    • Hiroki HOSAKAShuji AkiyamaTadashi Obikane
    • Hiroki HOSAKAShuji AkiyamaTadashi Obikane
    • B65G25/00B66C17/08
    • H01L21/67775H01L21/67265H01L21/67766H01L21/68Y10S414/139
    • There is provided a processing apparatus capable of modifying an existing processing apparatus having a single loading port to one having dual loading ports by providing an additional loading port without increasing a foot print thereof and also capable of realizing a complete automation of a wafer transfer by utilizing an existing automatic transfer line. The processing apparatus includes a loader chamber having: a first and a second loading ports positioned to be spaced apart from each other at the side of a prober chamber, each of the loading ports mounting thereon waters; a sub-chuck, disposed under the second loading port, for positioning the wafers; and a wafer transfer unit having a transfer arm for transferring the wafers between the sub-chuck and the prober chamber, the transfer arm being rotatable and movable vertically.
    • 提供了一种处理装置,其能够通过提供附加的加载端口而将具有单一加载端口的现有处理装置修改为具有双加载端口的处理装置,而不增加其脚印,并且还能够通过利用来实现晶片传送的完全自动化 现有的自动传输线。 所述加工设备包括装载室,所述装载室具有:第一和第二装载端口,其定位成在探测室侧面彼此间隔开,每个装载端口安装在水面上; 设置在所述第二装载口下方的用于定位所述晶片的副卡盘; 以及晶片转印单元,其具有用于在子卡盘和检测室之间传送晶片的转移臂,所述转移臂可旋转并可垂直移动。
    • 6. 发明授权
    • Work convey system, unmanned convey vehicle system, unmanned convey vehicle, and work convey method
    • 工作传送系统,无人驾驶车辆系统,无人驾驶车辆和工作传送方式
    • US07283890B2
    • 2007-10-16
    • US10485969
    • 2002-12-27
    • Toshihiko IijimaShuji AkiyamaHiroki HosakaTakashi Nakao
    • Toshihiko IijimaShuji AkiyamaHiroki HosakaTakashi Nakao
    • G06F7/00
    • H01L21/67763G05B19/41865G05B2219/31429G05B2219/32107G05B2219/32252G05B2219/32283G05B2219/45031G06Q10/06H01L21/67754Y02P90/08Y02P90/20
    • There is a jump in the number of devices formed on a single wafer, and it takes a lot of time to inspect a single wafer. In addition, if wafers are inspected every lot, detected wafers remain in staying in a prober until the inspection of all of the wafers is completed. Therefore, the time required to transfer the wafers of each lot to the subsequent step is delayed. As a result, it is difficult to shorten TAT (Turn-Around-Time), and it is difficult to flexibly operate the prober.A transfer system E according to the present invention includes: a host computer 1; a plurality of probers 2 under the control of the host computer 1; a plurality of RGVs 4 for delivering a wafer W to each of the probers 2, one by one, at its request; and a transfer operating unit 5, associated with the host computer, for operating the RGVs 4. The transfer operating unit 5 has a scheduler 54A and a dispatcher 54B, for preparing an operating schedule for each of the RGVs 4 on the basis of the relationship in position between each of the probers 2 and each of the RGVs 4, and for determining optimum transfer paths for the RGVs 4, to assign a corresponding one of the RGVs 4 to a corresponding one of the optimum transfer paths.
    • 在单个晶片上形成的器件数量有所跳跃,检查单个晶片花费大量时间。 另外,如果每批次检查晶片,检测到的晶片保留在探针中,直到完成所有晶片的检查。 因此,将每个批次的晶片转移到随后的步骤所需的时间被延迟。 因此,难以缩短TAT(周转时间),难以灵活操作探测器。 根据本发明的传送系统E包括:主计算机1; 在主计算机1的控制下的多个探测器2; 多个RGV4,用于根据要求一个接一个地将晶片W传送到每个探测器2; 以及与主计算机相关联的用于操作RGV 4的传送操作单元5。 传送操作单元5具有调度器54A和调度器54B,用于根据每个探测器2和每个RGV 4之间的位置关系来准备每个RGV4的操作时间表,并且为了 确定RGV4的最佳传输路径,以将RGV4中的相应一个分配给最佳传输路径中的相应一个。
    • 7. 发明授权
    • Probing apparatus and probing method
    • 探测仪器和探测方法
    • US07583096B2
    • 2009-09-01
    • US11747559
    • 2007-05-11
    • Hiroki HosakaShuji AkiyamaTadashi Obikane
    • Hiroki HosakaShuji AkiyamaTadashi Obikane
    • G01R31/02G01R31/28
    • G01R31/2893
    • There is provided a probing apparatus capable of modifying an existing probing apparatus having a single loading port to one having dual loading ports while saving the space without increasing a foot print thereof and also capable of increasing an inspection efficiency by cooperating with an automatic transfer line for the apparatus having a single loading port. The probing apparatus includes a prober chamber in which a wafer is inspected and a loader chamber having: a first and a second loading ports positioned to be spaced apart from each other at the side of a prober chamber, each of the loading ports mounting thereon a cassette accommodating therein a plurality of waters; and a wafer transfer unit for transferring the wafers between the loading ports and the prober chamber. The loading ports are arranged along a route where the cassette is transferred by an automatic transfer device.
    • 提供了一种探测装置,其能够将具有单个装载端口的现有探测装置修改为具有双重加载端口的探测装置,同时节省空间而不增加其脚印,并且还能够通过与自动传送线协作来提高检查效率, 该装置具有单个装载口。 探测装置包括探测室,其中检查晶片,并且装载器室具有:第一和第二装载端口,定位成在探测室侧面彼此间隔开,其中每个装载端口安装在其上 在其中容纳多个水的盒; 以及用于在装载端口和探测室之间传送晶片的晶片传送单元。 装载端口沿着通过自动传送装置传送盒的路线布置。
    • 8. 发明授权
    • Substrate transfer apparatus and method, and storage medium
    • 基板转印装置和方法以及存储介质
    • US07458469B2
    • 2008-12-02
    • US11227136
    • 2005-09-16
    • Hiroki HosakaToshihiko IijimaShinya Shimizu
    • Hiroki HosakaToshihiko IijimaShinya Shimizu
    • B65G49/07
    • H01L21/67309Y10S414/137
    • In a substrate transfer apparatus, an adaptor unit 25 includes a box-shaped main body 40 having three open sides; and a plurality of stage arms 41 disposed in the main body 40, serving as substrate mounting members. Each of the stage arms 41 has a disc-shaped wafer supporting portion 411 disposed at an approximately central portion of the main body 40 and a flat body 412 disposed in the main body 40 so as not to interfere with the moving paths of transfer arms 241 and 341. Formed at a connecting portion of the wafer supporting portion 411 and the body 412 are cutout portions 413 for preventing interference between the stage arms 41 and two prongs of leading end portions of the transfer arms 241 and 341 introduced into the main body 40.
    • 在基板输送装置中,适配器单元25包括具有三个开口侧的箱形主体40; 以及设置在主体40中的用作基板安装构件的多个平台臂41。 每个平台臂41具有设置在主体40的大致中央部的盘状晶片支撑部411和设置在主体40中的平坦体412,以便不干涉传送臂241的移动路径 在晶片支撑部分411和主体412的连接部分处形成切口部分413,用于防止台臂41与引入主体40的转移臂241和341的前端部分的两个尖头之间的干涉 。
    • 9. 发明申请
    • PROBING APPARATUS AND PROBING METHOD
    • 探测装置和探测方法
    • US20070262783A1
    • 2007-11-15
    • US11747559
    • 2007-05-11
    • Hiroki HOSAKAShuji AkiyamaTadashi Obikane
    • Hiroki HOSAKAShuji AkiyamaTadashi Obikane
    • G01R31/02
    • G01R31/2893
    • There is provided a probing apparatus capable of modifying an existing probing apparatus having a single loading port to one having dual loading ports while saving the space without increasing a foot print thereof and also capable of increasing an inspection efficiency by cooperating with an automatic transfer line for the apparatus having a single loading port. The probing apparatus includes a prober chamber in which a wafer is inspected and a loader chamber having: a first and a second loading ports positioned to be spaced apart from each other at the side of a prober chamber, each of the loading ports mounting thereon a cassette accommodating therein a plurality of waters; and a wafer transfer unit for transferring the wafers between the loading ports and the prober chamber. The loading ports are arranged along a route where the cassette is transferred by an automatic transfer device.
    • 提供了一种探测装置,其能够将具有单个装载端口的现有探测装置修改为具有双重加载端口的探测装置,同时节省空间而不增加其脚印,并且还能够通过与自动传送线协作来提高检查效率, 该装置具有单个装载口。 探测装置包括探测室,其中检查晶片,并且装载器室具有:第一和第二装载端口,定位成在探测室侧面彼此间隔开,其中每个装载端口安装在其上 在其中容纳多个水的盒; 以及用于在装载端口和探测室之间传送晶片的晶片传送单元。 装载端口沿着通过自动传送装置传送盒的路线布置。