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1. 发明申请

US20100040441A1 FOUP OPENING/CLOSING DEVICE AND PROBE APPARATUS 有权
标题翻译： FOUP打开/关闭装置和探针装置
公开(公告)号：US20100040441A1
公开(公告)日：2010-02-18
申请号：US12539952
申请日：2009-08-12
申请人： Tadashi OBIKANE
发明人： Tadashi OBIKANE
IPC分类号： H01L21/673
CPC分类号： H01L21/67772
摘要： A FOUP opening/closing device includes a housing containing a mounting table for mounting the FOUP thereon, an FOUP loading opening, and a delivery opening. The device further includes a rotator for rotating the mounting table, a door opening/closing unit to open or close the door of the FOUP and keep the door open, a mover for moving the FOUP and the door opening/closing unit in a reciprocating manner, to allow the FOUP and the door opening/closing unit to be connected to or separated from each other, and a controller to output control signals for moving the FOUP and the door opening/closing unit via operation of the mover to mount the door of the FOUP to the door opening/closing unit, separating the door from the FOUP, moving the FOUP and the door opening/closing unit away from each other, and rotating the mounting table to make the FOUP face the delivery opening.
摘要翻译： FOUP打开/关闭装置包括容纳有用于将FOUP安装在其上的安装台的壳体，FOUP装载开口和输送口。该装置还包括用于旋转安装台的旋转器，用于打开或关闭FOUP的门并保持门打开的门打开/关闭单元，用于以往复方式移动FOUP和门打开/关闭单元的移动器以允许FOUP和门打开/关闭单元彼此连接或分离，以及控制器，用于通过操作移动器来输出用于移动FOUP和门打开/关闭单元的控制信号，以将门 FOUP到门打开/关闭单元，将门与FOUP分离，使FOUP和门打开/关闭单元彼此远离，并且旋转安装台以使FOUP面向输送开口。

2. 外观设计

USD592230S1 Wafer carrying-in/out machine 有权
标题翻译：晶圆进/出机
公开(公告)号：USD592230S1
公开(公告)日：2009-05-12
申请号：US29297744
申请日：2007-11-16
申请人： Hiroki Hosaka , Shuji Akiyama , Tadashi Obikane
设计人： Hiroki Hosaka , Shuji Akiyama , Tadashi Obikane

3. 发明授权

US06830651B2 Load port capable of coping with different types of cassette containing substrates to be processed 失效
标题翻译：负载端口能够应对要处理的不同类型的盒式基板
公开(公告)号：US06830651B2
公开(公告)日：2004-12-14
申请号：US10259612
申请日：2002-09-30
申请人： Tadashi Obikane
发明人： Tadashi Obikane
IPC分类号： C23F100
CPC分类号： H01L21/67259 , H01L21/67772 , H01L21/67775 , Y10S414/135 , Y10S414/137 , Y10S414/14
摘要： A load port which can selectively receive plural types of cassette having substrate which are to be processed accommodated therein is disclosed. The load port has the following constituents. That is, the load port includes a main body, an opening portion (which has a configuration that opens in the three surfaces) formed in one side surface of the main body, a placement table formed in the opening portion and used to place the cassette thereon, a first sensor mechanism (which identifies the type of the cassette) provided on the placement table, plural types of clamp mechanism (each type of the clamp mechanism clamping the corresponding type of cassette) provided on the placement table, and an up-down-type cover mechanism (which is vertically moved) which covers the opening portion of the main body.
摘要翻译：公开了一种能够选择性地接收多种类型的具有待处理基板的盒的装载端口。负载端口具有以下组成部分。也就是说，负载端口包括主体，形成在主体的一个侧表面中的开口部（具有在三个表面上开口的构造），形成在开口部中并用于放置盒的放置台设置在放置台上的第一传感器机构（其识别盒的类型），设置在放置台上的多种类型的夹持机构（夹持相应类型的盒的夹持机构）下垂式盖机构（其垂直移动），其覆盖主体的开口部。

4. 发明授权

US06441630B1 Probing apparatus and head plate opening/closing force-reducing mechanism 失效
标题翻译：探测装置和头板打开/关闭力减小机构
公开(公告)号：US06441630B1
公开(公告)日：2002-08-27
申请号：US09634884
申请日：2000-08-07
申请人： Tadashi Obikane , Masashi Shimizu
发明人： Tadashi Obikane , Masashi Shimizu
IPC分类号： G01R3102
CPC分类号： G01R31/2887
摘要： A head plate opening/closing force-reducing mechanism includes a head plate (13) one end of which is rotatably attached (13B) to a main body so as to open/close an opening (31) formed in the main body (10), and at least one push-up mechanism (16, 17, 18) attached to at least one edge (36) of the head plate, the push-up mechanism being located in a position close to an opposite end of the head plate.
摘要翻译：头板开闭力减小机构包括头板（13），其一端可旋转地安装（13B）到主体以打开/关闭形成在主体（10）中的开口（31）以及附接到头板的至少一个边缘（36）的至少一个上推机构（16,17,18），所述上推机构位于靠近所述头板的相对端的位置。

5. 发明授权

US4950982A Electric probing test machine 失效
标题翻译：电探测试机
公开(公告)号：US4950982A
公开(公告)日：1990-08-21
申请号：US471696
申请日：1990-01-26
申请人： Tadashi Obikane , Hisashi Koike , Sumi Tanaka
发明人： Tadashi Obikane , Hisashi Koike , Sumi Tanaka
IPC分类号： G01R31/28 , H01L21/66
CPC分类号： G01R31/2831
摘要： An electric probing test machine including a test stage unit which is constructed as an independent component of at least one system and used to test the electrical characteristics of a wafer by having the wafer on the stage contacted by a multitude of probes and a loading/unloading unit which is constructed as an independent component of at least one system and used to bring a wafer from a wafer cassette to the stage of the test stage unit or from the stage of the test stage unit to the wafer cassette. The loading/unloading unit is combined with the test stage unit in such a way that the loading/unloading unit can be separated and moved away from the test stage unit.
摘要翻译：一种电探测试验机，其包括测试台单元，其被构造为至少一个系统的独立部件，并且用于通过使晶片在与多个探针接触的台上并且装载/卸载来测试晶片的电特性单元，其被构造为至少一个系统的独立部件，并用于将晶片从晶片盒带到测试台单元的阶段或从测试台单元的阶段到晶片盒。加载/卸载单元与测试台单元结合，使得装载/卸载单元可以被分离并远离测试台单元移动。

6. 发明授权

US07701236B2 Each inspection units of a probe apparatus is provided with an imaging unit to take an image of a wafer 失效
标题翻译：探针装置的每个检查单元设置有摄像单元以拍摄晶片的图像
公开(公告)号：US07701236B2
公开(公告)日：2010-04-20
申请号：US12120546
申请日：2008-05-14
申请人： Shuji Akiyama , Tadashi Obikane , Masaru Suzuki , Yasuhito Yamamoto , Kazuya Yano , Yuji Asakawa , Kazumi Yamagata , Shigeki Nakamura , Eiichi Matsuzawa , Kazuhiro Ozawa , Fumito Kagami , Shinji Kojima
发明人： Shuji Akiyama , Tadashi Obikane , Masaru Suzuki , Yasuhito Yamamoto , Kazuya Yano , Yuji Asakawa , Kazumi Yamagata , Shigeki Nakamura , Eiichi Matsuzawa , Kazuhiro Ozawa , Fumito Kagami , Shinji Kojima
IPC分类号： G01R1/073 , G01R31/28
CPC分类号： G01R31/2893
摘要： A prove apparatus includes a first and a second loading port for mounting therein two carriers facing each other, a wafer transfer mechanism having a rotation center between the loading ports, and a first and a second inspection unit being symmetrical to each other and disposed in accordance with the arrangement of the loading ports. In this configuration, wafers are directly transferred between the carrier and a wafer chuck of the inspection unit by the wafer transfer mechanism. The wafer transfer mechanism has three arms for unloading two wafers from the carrier. The prove apparatus has a compact size and achieves a high throughput.
摘要翻译：证明装置包括：第一和第二装载端口，用于在其中安装两个彼此面对的载体;晶片传送机构，其具有在装载端口之间的旋转中心;以及第一和第二检查单元，彼此对称并且按照具有装载端口的布置。在这种结构中，通过晶片传送机构将晶片直接传送到检查单元的载体和晶片卡盘之间。晶片传送机构具有用于从载体卸载两个晶片的三个臂。证明设备具有紧凑的尺寸并且实现了高吞吐量。

7. 发明授权

US07583096B2 Probing apparatus and probing method 失效
标题翻译：探测仪器和探测方法
公开(公告)号：US07583096B2
公开(公告)日：2009-09-01
申请号：US11747559
申请日：2007-05-11
申请人： Hiroki Hosaka , Shuji Akiyama , Tadashi Obikane
发明人： Hiroki Hosaka , Shuji Akiyama , Tadashi Obikane
IPC分类号： G01R31/02 , G01R31/28
CPC分类号： G01R31/2893
摘要： There is provided a probing apparatus capable of modifying an existing probing apparatus having a single loading port to one having dual loading ports while saving the space without increasing a foot print thereof and also capable of increasing an inspection efficiency by cooperating with an automatic transfer line for the apparatus having a single loading port. The probing apparatus includes a prober chamber in which a wafer is inspected and a loader chamber having: a first and a second loading ports positioned to be spaced apart from each other at the side of a prober chamber, each of the loading ports mounting thereon a cassette accommodating therein a plurality of waters; and a wafer transfer unit for transferring the wafers between the loading ports and the prober chamber. The loading ports are arranged along a route where the cassette is transferred by an automatic transfer device.
摘要翻译：提供了一种探测装置，其能够将具有单个装载端口的现有探测装置修改为具有双重加载端口的探测装置，同时节省空间而不增加其脚印，并且还能够通过与自动传送线协作来提高检查效率，该装置具有单个装载口。探测装置包括探测室，其中检查晶片，并且装载器室具有：第一和第二装载端口，定位成在探测室侧面彼此间隔开，其中每个装载端口安装在其上在其中容纳多个水的盒; 以及用于在装载端口和探测室之间传送晶片的晶片传送单元。装载端口沿着通过自动传送装置传送盒的路线布置。

8. 发明申请

US20080290886A1 PROBE APPARATUS 失效
标题翻译：探测器
公开(公告)号：US20080290886A1
公开(公告)日：2008-11-27
申请号：US12120546
申请日：2008-05-14
申请人： Shuji Akiyama , Tadashi Obikane , Masaru Suzuki , Yasuhito Yamamoto , Kazuya Yano , Yuji Asakawa , Kazumi Yamagata , Shigeki Nakamura , Eiichi Matsuzawa , Kazuhiro Ozawa , Fumito Kagami , Shinji Kojima
发明人： Shuji Akiyama , Tadashi Obikane , Masaru Suzuki , Yasuhito Yamamoto , Kazuya Yano , Yuji Asakawa , Kazumi Yamagata , Shigeki Nakamura , Eiichi Matsuzawa , Kazuhiro Ozawa , Fumito Kagami , Shinji Kojima
IPC分类号： G01R1/073
CPC分类号： G01R31/2893
摘要： A prove apparatus includes a first and a second loading port for mounting therein two carriers facing each other, a wafer transfer mechanism having a rotation center between the loading ports, and a first and a second inspection unit being symmetrical to each other and disposed in accordance with the arrangement of the loading ports. In this configuration, wafers are directly transferred between the carrier and a wafer chuck of the inspection unit by the wafer transfer mechanism. The wafer transfer mechanism has three arms for unloading two wafers from the carrier. The prove apparatus has a compact size and achieves a high throughput.
摘要翻译：证明装置包括：第一和第二装载端口，用于在其中安装两个彼此面对的载体;晶片传送机构，其具有在装载端口之间的旋转中心;以及第一和第二检查单元，彼此对称并且按照具有装载端口的布置。在这种结构中，通过晶片传送机构将晶片直接传送到检查单元的载体和晶片卡盘之间。晶片传送机构具有用于从载体卸载两个晶片的三个臂。证明设备具有紧凑的尺寸并且实现了高吞吐量。

9. 发明申请

US20070262783A1 PROBING APPARATUS AND PROBING METHOD 失效
标题翻译：探测装置和探测方法
公开(公告)号：US20070262783A1
公开(公告)日：2007-11-15
申请号：US11747559
申请日：2007-05-11
申请人： Hiroki HOSAKA , Shuji Akiyama , Tadashi Obikane
发明人： Hiroki HOSAKA , Shuji Akiyama , Tadashi Obikane
IPC分类号： G01R31/02
CPC分类号： G01R31/2893
摘要： There is provided a probing apparatus capable of modifying an existing probing apparatus having a single loading port to one having dual loading ports while saving the space without increasing a foot print thereof and also capable of increasing an inspection efficiency by cooperating with an automatic transfer line for the apparatus having a single loading port. The probing apparatus includes a prober chamber in which a wafer is inspected and a loader chamber having: a first and a second loading ports positioned to be spaced apart from each other at the side of a prober chamber, each of the loading ports mounting thereon a cassette accommodating therein a plurality of waters; and a wafer transfer unit for transferring the wafers between the loading ports and the prober chamber. The loading ports are arranged along a route where the cassette is transferred by an automatic transfer device.
摘要翻译：提供了一种探测装置，其能够将具有单个装载端口的现有探测装置修改为具有双重加载端口的探测装置，同时节省空间而不增加其脚印，并且还能够通过与自动传送线协作来提高检查效率，该装置具有单个装载口。探测装置包括探测室，其中检查晶片，并且装载器室具有：第一和第二装载端口，定位成在探测室侧面彼此间隔开，其中每个装载端口安装在其上在其中容纳多个水的盒; 以及用于在装载端口和探测室之间传送晶片的晶片传送单元。装载端口沿着通过自动传送装置传送盒的路线布置。

10. 发明授权

US08310261B2 Probing apparatus and probing method 失效
标题翻译：探测仪器和探测方法
公开(公告)号：US08310261B2
公开(公告)日：2012-11-13
申请号：US12488186
申请日：2009-06-19
申请人： Hiroki Hosaka , Shuji Akiyama , Tadashi Obikane
发明人： Hiroki Hosaka , Shuji Akiyama , Tadashi Obikane
IPC分类号： G01R31/20 , G01R31/10
CPC分类号： G01R31/2893
摘要： There is provided a probing apparatus capable of modifying an existing probing apparatus having a single loading port to one having dual loading ports while saving the space without increasing a foot print thereof and also capable of increasing an inspection efficiency by cooperating with an automatic transfer line for the apparatus having a single loading port. The probing apparatus includes a prober chamber in which a wafer is inspected and a loader chamber having: a first and a second loading ports positioned to be spaced apart from each other at the side of a prober chamber, each of the loading ports mounting thereon a cassette accommodating therein a plurality of waters; and a wafer transfer unit for transferring the wafers between the loading ports and the prober chamber. The loading ports are arranged along a route where the cassette is transferred by an automatic transfer device.
摘要翻译：提供了一种探测装置，其能够将具有单个装载端口的现有探测装置修改为具有双重加载端口的探测装置，同时节省空间而不增加其脚印，并且还能够通过与自动传送线协作来提高检查效率，该装置具有单个装载口。探测装置包括探测室，其中检查晶片，并且装载器室具有：第一和第二装载端口，定位成在探测室侧面彼此间隔开，其中每个装载端口安装在其上在其中容纳多个水的盒; 以及用于在装载端口和探测室之间传送晶片的晶片传送单元。装载端口沿着通过自动传送装置传送盒的路线布置。

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