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1. 发明授权

US07458469B2 Substrate transfer apparatus and method, and storage medium 失效
标题翻译：基板转印装置和方法以及存储介质
公开(公告)号：US07458469B2
公开(公告)日：2008-12-02
申请号：US11227136
申请日：2005-09-16
申请人： Hiroki Hosaka , Toshihiko Iijima , Shinya Shimizu
发明人： Hiroki Hosaka , Toshihiko Iijima , Shinya Shimizu
IPC分类号： B65G49/07
CPC分类号： H01L21/67309 , Y10S414/137
摘要： In a substrate transfer apparatus, an adaptor unit 25 includes a box-shaped main body 40 having three open sides; and a plurality of stage arms 41 disposed in the main body 40, serving as substrate mounting members. Each of the stage arms 41 has a disc-shaped wafer supporting portion 411 disposed at an approximately central portion of the main body 40 and a flat body 412 disposed in the main body 40 so as not to interfere with the moving paths of transfer arms 241 and 341. Formed at a connecting portion of the wafer supporting portion 411 and the body 412 are cutout portions 413 for preventing interference between the stage arms 41 and two prongs of leading end portions of the transfer arms 241 and 341 introduced into the main body 40.
摘要翻译：在基板输送装置中，适配器单元25包括具有三个开口侧的箱形主体40; 以及设置在主体40中的用作基板安装构件的多个平台臂41。每个平台臂41具有设置在主体40的大致中央部的盘状晶片支撑部411和设置在主体40中的平坦体412，以便不干涉传送臂241的移动路径在晶片支撑部分411和主体412的连接部分处形成切口部分413，用于防止台臂41与引入主体40的转移臂241和341的前端部分的两个尖头之间的干涉。

2. 发明申请

US20070031222A1 Substrate transfer apparatus and method, and storage medium 失效
标题翻译：基板转印装置和方法以及存储介质
公开(公告)号：US20070031222A1
公开(公告)日：2007-02-08
申请号：US11227136
申请日：2005-09-16
申请人： Hiroki Hosaka , Toshihiko Iijima , Shinya Shimizu
发明人： Hiroki Hosaka , Toshihiko Iijima , Shinya Shimizu
IPC分类号： B65B69/00
CPC分类号： H01L21/67309 , Y10S414/137
摘要： In a substrate transfer apparatus, an adaptor unit 25 includes a box-shaped main body 40 having three open sides; and a plurality of stage arms 41 disposed in the main body 40, serving as substrate mounting members. Each of the stage arms 41 has a disc-shaped wafer supporting portion 411 disposed at an approximately central portion of the main body 40 and a flat body 412 disposed in the main body 40 so as not to interfere with the moving paths of transfer arms 241 and 341. Formed at a connecting portion of the wafer supporting portion 411 and the body 412 are cutout portions 413 for preventing interference between the stage arms 41 and two prongs of leading end portions of the transfer arms 241 and 341 introduced into the main body 40.
摘要翻译：在基板输送装置中，适配器单元25包括具有三个开口侧的箱形主体40; 以及设置在主体40中的用作基板安装构件的多个平台臂41。每个平台臂41具有设置在主体40的大致中央部的盘状晶片支撑部411和设置在主体40中的平坦体412，以便不干涉传送臂241的移动路径和341。在晶片支撑部分411和主体412的连接部分处形成切口部分413，用于防止台臂41与引入主体40的转移臂241和341的前端部分的两个尖头之间的干涉。

3. 发明授权

US08121723B2 Substrate transfer system, substrate transfer apparatus and storage medium 有权
标题翻译：基板转印系统，基板转印装置和存储介质
公开(公告)号：US08121723B2
公开(公告)日：2012-02-21
申请号：US11524280
申请日：2006-09-21
申请人： Toshihiko Iijima , Shinya Shimizu
发明人： Toshihiko Iijima , Shinya Shimizu
IPC分类号： G06F7/00
CPC分类号： H01L21/6732 , H01L21/67276 , H01L21/67736
摘要： A substrate transfer system includes a substrate storing apparatus for storing therein one or more substrates; at least one substrate processing apparatus for performing a predetermined processing on the substrate; and a substrate transfer apparatus for transferring the substrate by moving between the substrate storing apparatus and the substrate processing apparatus, the substrate transfer apparatus including at least one substrate transfer unit for supporting the substrate, unloading the substrate from the substrate storing apparatus or the substrate processing apparatus, and loading the substrate into the substrate storing apparatus of the substrate processing apparatus. The substrate transfer apparatus moves while supporting the substrate by the substrate transfer unit.
摘要翻译：基板转印系统包括用于在其中存储一个或多个基板的基板存储装置; 至少一个基板处理装置，用于对所述基板执行预定处理; 以及基板转印装置，用于通过在基板收纳装置和基板处理装置之间移动来转印基板，基板转印装置包括至少一个用于支撑基板的基板转移单元，从基板存储装置卸载基板或基板处理装置，并将基板装载到基板处理装置的基板存储装置中。基板转印装置在通过基板转印单元支撑基板的同时移动。

4. 发明授权

US07826918B2 Transfer system and transfer method of object to be processed 有权
标题翻译：待处理对象的传送系统和传送方法
公开(公告)号：US07826918B2
公开(公告)日：2010-11-02
申请号：US11374998
申请日：2006-03-15
申请人： Toshihiko Iijima , Shinya Shimizu , Kaori Ishihara
发明人： Toshihiko Iijima , Shinya Shimizu , Kaori Ishihara
IPC分类号： G06F7/00
CPC分类号： H01L21/67736 , G01R31/2893 , G05B19/41815 , G05B2219/31002 , G05B2219/31216 , G05B2219/33198 , G05B2219/45031 , H01L21/67265 , Y02P90/08 , Y02P90/285 , Y10S414/135
摘要： A transfer method employs a transfer system including a semiconductor handling device and an automatic transfer device. The semiconductor handling device includes a first transfer mechanism and a first optically coupled parallel I/O communications interface. The automatic transfer device includes a second transfer mechanism and a second optically coupled parallel I/O communications interface. The transfer method includes a successive transfer notifying step wherein the automatic transfer device and the semiconductor handling device notify each other that a successive transfer is possible via an optical communications between the first and the second optically coupled parallel I/O communications interface in case where a plurality of objects to be processed are able to be successively transferred one by one between the first and the second transfer mechanism; and a successive transfer step wherein the objects are transferred one by one between the first and the second transfer mechanism.
摘要翻译：转印方法采用包括半导体处理装置和自动转印装置的转印系统。半导体处理装置包括第一传送机构和第一光耦合并行I / O通信接口。自动传送装置包括第二传送机构和第二光耦合并行I / O通信接口。传送方法包括连续传送通知步骤，其中自动传送设备和半导体处理设备通过彼此通过第一和第二光耦合并行I / O通信接口之间的光通信可以进行连续的传送，要处理的多个物体能够在第一和第二传送机构之间逐个地依次传送; 以及连续传送步骤，其中物体在第一和第二传送机构之间逐个传送。

5. 发明申请

US20070062446A1 Substrate transfer system, substrate transfer apparatus and storage medium 有权
标题翻译：基板转印系统，基板转印装置和存储介质
公开(公告)号：US20070062446A1
公开(公告)日：2007-03-22
申请号：US11524280
申请日：2006-09-21
申请人： Toshihiko Iijima , Shinya Shimizu
发明人： Toshihiko Iijima , Shinya Shimizu
IPC分类号： B05C13/00 , B05C13/02 , B05C21/00 , B05C1/00
CPC分类号： H01L21/6732 , H01L21/67276 , H01L21/67736
摘要： A substrate transfer system includes a substrate storing apparatus for storing therein one or more substrates; at least one substrate processing apparatus for performing a predetermined processing on the substrate; and a substrate transfer apparatus for transferring the substrate by moving between the substrate storing apparatus and the substrate processing apparatus, the substrate transfer apparatus including at least one substrate transfer unit for supporting the substrate, unloading the substrate from the substrate storing apparatus or the substrate processing apparatus, and loading the substrate into the substrate storing apparatus of the substrate processing apparatus. The substrate transfer apparatus moves while supporting the substrate by the substrate transfer unit.
摘要翻译：基板转印系统包括用于在其中存储一个或多个基板的基板存储装置; 至少一个基板处理装置，用于对所述基板执行预定处理; 以及基板转印装置，用于通过在基板收纳装置和基板处理装置之间移动来转印基板，基板转印装置包括至少一个用于支撑基板的基板转移单元，从基板存储装置卸载基板或基板处理装置，并将基板装载到基板处理装置的基板存储装置中。基板转印装置在通过基板转印单元支撑基板的同时移动。

6. 发明申请

US20060152211A1 Transfer system and transfer method of object to be processed 有权
标题翻译：待处理对象的传送系统和传送方法
公开(公告)号：US20060152211A1
公开(公告)日：2006-07-13
申请号：US11374998
申请日：2006-03-15
申请人： Toshihiko Iijima , Shinya Shimizu , Kaori Ishihara
发明人： Toshihiko Iijima , Shinya Shimizu , Kaori Ishihara
IPC分类号： G01R31/28
CPC分类号： H01L21/67736 , G01R31/2893 , G05B19/41815 , G05B2219/31002 , G05B2219/31216 , G05B2219/33198 , G05B2219/45031 , H01L21/67265 , Y02P90/08 , Y02P90/285 , Y10S414/135
摘要： A transfer method employs a transfer system including a semiconductor handling device and an automatic transfer device. The semiconductor handling device includes a first transfer mechanism and a first optically coupled parallel I/O communications interface. The automatic transfer device includes a second transfer mechanism and a second optically coupled parallel I/O communications interface. The transfer method includes a successive transfer notifying step wherein the automatic transfer device and the semiconductor handling device notify each other that a successive transfer is possible via an optical communications between the first and the second optically coupled parallel I/O communications interface in case where a plurality of objects to be processed are able to be successively transferred one by one between the first and the second transfer mechanism; and a successive transfer step wherein the objects are transferred one by one between the first and the second transfer mechanism.
摘要翻译：转印方法采用包括半导体处理装置和自动转印装置的转印系统。半导体处理装置包括第一传送机构和第一光耦合并行I / O通信接口。自动传送装置包括第二传送机构和第二光耦合并行I / O通信接口。传送方法包括连续传送通知步骤，其中自动传送设备和半导体处理设备通过彼此通过第一和第二光耦合并行I / O通信接口之间的光通信可以进行连续的传送，要处理的多个物体能够在第一和第二传送机构之间逐个地依次传送; 以及连续传送步骤，其中物体在第一和第二传送机构之间逐个传送。

7. 发明授权

US09501025B2 Gear transmission device and image forming apparatus including the same 有权
公开(公告)号：US09501025B2
公开(公告)日：2016-11-22
申请号：US15047891
申请日：2016-02-19
申请人： Masahiro Ishida , Shinya Shimizu , Naoki Matsuda
发明人： Masahiro Ishida , Shinya Shimizu , Naoki Matsuda
IPC分类号： G03G15/00 , F16H1/20 , F16H1/28 , F16H55/14 , F16H55/17 , G03G15/16
CPC分类号： G03G15/757 , F16H1/20 , F16H1/206 , F16H1/28 , F16H55/14 , F16H55/17 , F16H2055/176 , G03G15/00 , G03G15/1615 , G03G21/1647 , G03G2221/1657 , Y10T74/19684
摘要： A gear transmission device includes a first external gear driven by a drive motor attached to a first side of a frame and a first internal gear driven by the first external gear. The first internal gear includes an outer cylinder portion, an end plate, an annular opening, and an inner cylinder portion including a shaft hole. The outer cylinder portion includes internal teeth formed on an inner circumferential surface thereof. The inner cylinder portion is formed concentrically inside the outer cylinder portion. The end plate connects the outer cylinder portion, the inner cylinder portion, and the shaft hole at one end in an axial direction. In a state in which the annular opening faces a second side of the frame opposite the first side thereof, the first external gear is inserted to the annular opening to mesh with the internal teeth of the outer cylinder portion.

8. 发明申请

US20160161898A1 GEAR TRANSMISSION DEVICE AND IMAGE FORMING APPARATUS INCLUDING THE SAME 审中-公开
公开(公告)号：US20160161898A1
公开(公告)日：2016-06-09
申请号：US15047891
申请日：2016-02-19
申请人： Masahiro Ishida , Shinya Shimizu , Naoki Matsuda
发明人： Masahiro Ishida , Shinya Shimizu , Naoki Matsuda
IPC分类号： G03G15/00 , F16H1/20
CPC分类号： G03G15/757 , F16H1/20 , F16H1/206 , F16H1/28 , F16H55/14 , F16H55/17 , F16H2055/176 , G03G15/00 , G03G15/1615 , G03G21/1647 , G03G2221/1657 , Y10T74/19684
摘要： A gear transmission device includes a first external gear driven by a drive motor attached to a first side of a frame and a first internal gear driven by the first external gear. The first internal gear includes an outer cylinder portion, an end plate, an annular opening, and an inner cylinder portion including a shaft hole. The outer cylinder portion includes internal teeth formed on an inner circumferential surface thereof. The inner cylinder portion is formed concentrically inside the outer cylinder portion. The end plate connects the outer cylinder portion, the inner cylinder portion, and the shaft hole at one end in an axial direction. In a state in which the annular opening faces a second side of the frame opposite the first side thereof, the first external gear is inserted to the annular opening to mesh with the internal teeth of the outer cylinder portion.

9. 发明授权

US09310747B2 Gear transmission device and image forming apparatus including the same 有权
公开(公告)号：US09310747B2
公开(公告)日：2016-04-12
申请号：US14793206
申请日：2015-07-07
申请人： Masahiro Ishida , Shinya Shimizu , Naoki Matsuda
发明人： Masahiro Ishida , Shinya Shimizu , Naoki Matsuda
IPC分类号： G03G15/00 , F16H1/20 , F16H1/28 , F16H55/14 , F16H55/17 , G03G15/16
CPC分类号： G03G15/757 , F16H1/20 , F16H1/206 , F16H1/28 , F16H55/14 , F16H55/17 , F16H2055/176 , G03G15/00 , G03G15/1615 , G03G21/1647 , G03G2221/1657 , Y10T74/19684
摘要： A gear transmission device includes a first external gear driven by a drive motor attached to a first side of a frame and a first internal gear driven by the first external gear. The first internal gear includes an outer cylinder portion, an end plate, an annular opening, and an inner cylinder portion including a shaft hole. The outer cylinder portion includes internal teeth formed on an inner circumferential surface thereof. The inner cylinder portion is formed concentrically inside the outer cylinder portion. The end plate connects the outer cylinder portion, the inner cylinder portion, and the shaft hole at one end in an axial direction. In a state in which the annular opening faces a second side of the frame opposite the first side thereof, the first external gear is inserted to the annular opening to mesh with the internal teeth of the outer cylinder portion.

10. 发明授权

US08934815B2 Gear transmission device and image forming apparatus including the same 有权
标题翻译：齿轮传动装置及其成像装置
公开(公告)号：US08934815B2
公开(公告)日：2015-01-13
申请号：US14024990
申请日：2013-09-12
申请人： Masahiro Ishida , Shinya Shimizu , Naoki Matsuda
发明人： Masahiro Ishida , Shinya Shimizu , Naoki Matsuda
IPC分类号： G03B15/00 , F16H1/20
CPC分类号： G03G15/757 , F16H1/20 , F16H1/206 , F16H1/28 , F16H55/14 , F16H55/17 , F16H2055/176 , G03G15/00 , G03G15/1615 , G03G21/1647 , G03G2221/1657 , Y10T74/19684
摘要： A gear transmission device includes a first external gear driven by a drive motor attached to a first side of a frame and a first internal gear driven by the first external gear. The first internal gear includes an outer cylinder portion, an end plate, an annular opening, and an inner cylinder portion including a shaft hole,. The outer cylinder portion includes internal teeth formed on an inner circumferential surface thereof. The inner cylinder portion is formed concentrically inside the outer cylinder portion. The end plate connects the outer cylinder portion, the inner cylinder portion, and the shaft hole at one end in an axial direction. In a state in which the annular opening faces a second side of the frame opposite the first side thereof, the first external gear is inserted to the annular opening to mesh with the internal teeth of the outer cylinder portion.
摘要翻译：齿轮传动装置包括由附接到框架的第一侧的驱动马达驱动的第一外齿轮和由第一外齿轮驱动的第一内齿轮。第一内齿轮包括外筒部，端板，环形开口和包括轴孔的内筒部。外筒部包括形成在其内周面上的内齿。内筒部同心地形成在外筒部内。端板在一端沿轴向连接外筒部，内筒部和轴孔。在其中环形开口面向与框架第一侧相对的框架的第二侧的状态下，第一外齿轮插入环形开口以与外筒部分的内齿啮合。

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