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    • 2. 发明授权
    • Apparatus for analyzing a substrate employing a copper decoration
    • 用于分析使用铜装饰的基板的装置
    • US06919214B2
    • 2005-07-19
    • US10688954
    • 2003-10-21
    • Gi-Jung KimKyoo-Chul ChoTae-Yeol HeoSook-Hyun Park
    • Gi-Jung KimKyoo-Chul ChoTae-Yeol HeoSook-Hyun Park
    • G01N33/00H01L21/66H01L21/00
    • H01L22/24G01N2033/0095
    • An apparatus for analyzing a substrate employing a copper decoration includes a bath having at least two receiving containers for receiving electrolytes, slots formed at insides of the receiving containers for receiving substrates to be analyzed in a direction that is normal to a bottom face of the bath, lower copper plates provided in the receiving containers, the lower copper plates making contact with entire rear faces of the substrates received in the receiving containers, upper copper plates provided in the receiving containers, each of the upper copper plates corresponding to a respective one of the lower copper plates, and separated from front faces of the substrates, and a power source connected to the upper copper plates and the lower copper plates for providing voltages to the same. A plurality of substrates may be simultaneously analyzed using one apparatus thereby greatly reducing an amount of time required for the analysis.
    • 用于分析使用铜装饰的基板的装置包括具有至少两个用于接收电解质的接收容器的浴槽,在接收容器的内侧形成的槽,用于接收正常于浴底面的方向分析的基板 设置在接收容器中的下铜板,与接收容器中容纳的基板的整个后表面接触的下铜板,设置在接收容器中的上铜板,每个上铜板对应于 下铜板,并且与基板的前表面分离,以及连接到上铜板和下铜板的电源,用于向其提供电压。 可以使用一个装置同时分析多个基板,从而大大减少了分析所需的时间量。
    • 7. 发明申请
    • Polishing pad of a chemical mechanical polishing apparatus and method of manufacturing the same
    • 化学机械抛光装置的抛光垫及其制造方法
    • US20070197143A1
    • 2007-08-23
    • US11706241
    • 2007-02-15
    • Young-Sam LimYoung-Nam KimGi-Jung Kim
    • Young-Sam LimYoung-Nam KimGi-Jung Kim
    • B24B1/00B24D11/00
    • B24B37/24B24D18/0063
    • The surface(s) of a polishing pad for polishing an object has a first portion including hydrophilic material and a second portion including hydrophobic material. The first portion of the polishing surface is located in a first region of the polishing pad and the second portion of the polishing surface is located in a second region of the polishing pad juxtaposed with the first region in the radial direction of the pad. The hydrophilic material may be a polymer resin that contains hydrophilic functional groups having OH and/or ═O at bonding sites of the polymer. The hydrophobic material may be a polymer resin that contains hydrophobic functional groups having H and/or F at bonding sites of the polymer. The polishing pad is manufactured by extruding respective lines of the hydrophilic and hydrophobic materials. The extruders and a backing are moved relative to each other such that the lines form concentric rings of the hydrophilic and hydrophobic materials.
    • 用于抛光物体的抛光垫的表面具有包括亲水材料的第一部分和包括疏水材料的第二部分。 抛光表面的第一部分位于抛光垫的第一区域中,并且抛光表面的第二部分位于抛光垫的与垫的径向方向上与第一区域并置的第二区域中。 亲水材料可以是聚合物树脂,其在聚合物的键合位置含有具有OH和/或-O的亲水性官能团。 疏水性材料可以是在聚合物的结合位置含有H和/或F的疏水官能团的聚合物树脂。 抛光垫通过挤出亲水和疏水材料的相应线来制造。 挤出机和背衬相对于彼此移动,使得线形成亲水和疏水材料的同心环。