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    • 2. 发明授权
    • Methods of manufacturing monocrystalline silicon ingots and wafers by
controlling pull rate profiles in a hot zone furnance
    • 通过控制热区炉中的拉力曲线来制造单晶硅锭和晶片的方法
    • US6045610A
    • 2000-04-04
    • US989591
    • 1997-12-12
    • Jea-gun ParkKyoo-chul ChoGon-sub Lee
    • Jea-gun ParkKyoo-chul ChoGon-sub Lee
    • C30B15/00C30B15/14C30B15/20
    • C30B29/06C30B15/14C30B15/203Y10T117/1004Y10T117/1008
    • A silicon ingot is manufactured in a hot zone furnace by pulling the ingot from a silicon melt in the hot zone furnace in an axial direction, at a pull rate profile of the ingot from the silicon melt in the hot zone furnace that is sufficiently high so as to prevent interstitial agglomerates but is sufficiently low so as to confine vacancy agglomerates to a vacancy rich region at the axis of the ingot. The ingot so pulled is sliced into a plurality of semi-pure wafers each having a vacancy rich region at the center thereof that includes vacancy agglomerates and a pure region between the vacancy rich region and the wafer edge that is free of vacancy agglomerates and interstitial agglomerates. According to another aspect of the present invention, the ingot is pulled from the silicon melt in the hot zone furnace at a pull rate profile of the ingot from the silicon melt in the hot zone furnace that is sufficiently high so as to prevent interstitial agglomerates, but is also sufficiently low as to prevent vacancy agglomerates. Accordingly, when this ingot is sliced into wafers, the wafers are pure silicon wafers that may include point defects but that are free of vacancy agglomerates and interstitial agglomerates.
    • 在热区炉中通过从热区炉中的硅熔体在轴向方向上以锭子的拉力速率分布从热区炉中的硅熔体中提取足够高的硅锭来制造硅锭 以防止间隙附聚物但足够低以便将空位团聚物限制在锭的轴线处的空位丰富区域。 将如此拉出的锭切成多个半纯晶片,每个半晶片在其中心处具有空位丰富区域,其包括空位团聚体和在空位富集区域和晶片边缘之间的纯区域,其中没有空隙附聚物和间隙附聚物 。 根据本发明的另一方面,将铸锭从热区炉中的硅熔体中以锭的拉伸速率分布从热区炉中的硅熔体中提取得足够高以防止间隙附聚物, 但也足够低以防止空位聚集。 因此,当该锭被切成晶片时,晶片是纯硅晶片,其可以包括点缺陷,但是没有空隙聚集体和间隙附聚物。
    • 5. 发明授权
    • Method of fabricating nano SOI wafer and nano SOI wafer fabricated by the same
    • 制造纳米SOI晶片和纳米SOI晶片的方法
    • US07338882B2
    • 2008-03-04
    • US11084033
    • 2005-03-21
    • Jea-Gun ParkGon-Sub LeeSang-Hee Lee
    • Jea-Gun ParkGon-Sub LeeSang-Hee Lee
    • H01L21/46H01L21/302
    • H01L21/76254Y10S438/959
    • A method of fabricating a nano silicon on insulator (SOI) wafer having an excellent thickness evenness without performing a chemical mechanical polishing (CMP) and a wafer fabricated by the same are provided. The provided method includes preparing a bond wafer and a base wafer, and forming a dielectric on at least on surface of the bond wafer. Thereafter, an impurity ion implantation unit is formed by implanting impurity ions into the bond wafer to a predetermined depth from the surface of the bond wafer at a low voltage. The dielectric of the bond wafer and the base wafer contact each other in order to be bonded. Next, a thermal process of low temperature is performed to cleave the impurity ion implantation unit of the bond wafer. In addition, the cleaved surface of the bond wafer bonded to the base wafer is etched to form a nano scale device region. Here, the cleaved surface may be etched by performing a hydrogen surface process and a wet etching.
    • 提供了不进行化学机械抛光(CMP)和由其制造的晶片的制造具有优异的厚度均匀性的纳米绝缘体(SOI)晶片的方法。 所提供的方法包括制备接合晶片和基底晶片,并且在接合晶片的至少一个表面上形成电介质。 此后,通过以低电压将杂质离子注入接合晶片到接合晶片的表面至预定深度来形成杂质离子注入单元。 接合晶片和基底晶片的电介质彼此接触以便结合。 接下来,进行低温的热处理,以切割接合晶片的杂质离子注入单元。 此外,蚀刻结合到基底晶片的接合晶片的切割表面以形成纳米级器件区域。 这里,可以通过进行氢表面处理和湿蚀刻来蚀刻裂开的表面。
    • 6. 发明申请
    • Method of fabricating nano SOI wafer and nano SOI wafer fabricated by the same
    • 制造纳米SOI晶片和纳米SOI晶片的方法
    • US20050164435A1
    • 2005-07-28
    • US11084033
    • 2005-03-21
    • Jea-Gun ParkGon-Sub LeeSang-Hee Lee
    • Jea-Gun ParkGon-Sub LeeSang-Hee Lee
    • H01L21/20H01L21/02H01L21/265H01L21/762H01L27/12H01L21/00H01L21/30H01L21/46H01L21/84
    • H01L21/76254Y10S438/959
    • A method of fabricating a nano silicon on insulator (SOI) wafer having an excellent thickness evenness without performing a chemical mechanical polishing (CMP) and a wafer fabricated by the same are provided. The provided method includes preparing a bond wafer and a base wafer, and forming a dielectric on at least on surface of the bond wafer. Thereafter, an impurity ion implantation unit is formed by implanting impurity ions into the bond wafer to a predetermined depth from the surface of the bond wafer at a low voltage. The dielectric of the bond wafer and the base wafer contact each other in order to be bonded. Next, a thermal process of low temperature is performed to cleave the impurity ion implantation unit of the bond wafer. In addition, the cleaved surface of the bond wafer bonded to the base wafer is etched to form a nano scale device region. Here, the cleaved surface may be etched by performing a hydrogen surface process and a wet etching.
    • 提供了不进行化学机械抛光(CMP)和由其制造的晶片的制造具有优异的厚度均匀性的纳米绝缘体(SOI)晶片的方法。 所提供的方法包括制备接合晶片和基底晶片,并且在接合晶片的至少一个表面上形成电介质。 此后,通过以低电压将杂质离子注入接合晶片到接合晶片的表面至预定深度来形成杂质离子注入单元。 接合晶片和基底晶片的电介质彼此接触以便结合。 接下来,进行低温的热处理,以切割接合晶片的杂质离子注入单元。 此外,蚀刻结合到基底晶片的接合晶片的切割表面以形成纳米级器件区域。 这里,可以通过进行氢表面处理和湿蚀刻来蚀刻裂开的表面。