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    • 1. 发明授权
    • Fabrication method of a vertical channel transistor
    • 垂直沟道晶体管的制造方法
    • US5989961A
    • 1999-11-23
    • US116904
    • 1998-07-17
    • Jeon Wook YangJae Kyoung MunEung Gie OhJae Jin LeeKwang Eui Pyun
    • Jeon Wook YangJae Kyoung MunEung Gie OhJae Jin LeeKwang Eui Pyun
    • H01L29/78H01L21/338H01L29/812H01L21/336
    • H01L29/66856H01L29/812
    • Disclosed is a method for manufacturing a vertical channel transistor comprising the steps of: selectively implanting a dopant of high concentration into a semiconductor substrate to form a source region; firstly etching the semiconductor substrate using an insulator and a first photoresist pattern as a mask; secondly etching the substrate using a second photoresist pattern having a shape corresponding to said source region as a mask; implanting a dopant of low concentration into the exposed substrate using said second photoresist pattern as a mask to form a vertical channel layer; implanting a dopant of high concentration into the exposed substrate using same mask to form a drain region; activating said dopants, and forming an ohmic contact layer on said drain region; thirdly etching using a third photoresist pattern for exposing the firstly etched portion of the substrate as a mask; depositing a gate metal on the substrate exposed by the thirdly etching; and wiring a metal, respectively. This invention can be easily manufactured a vertical channel transistor having a low parasitic resistance and an extremely small gate length without sophicated complex processes.
    • 公开了用于制造垂直沟道晶体管的方法,包括以下步骤:选择性地将高浓度的掺杂剂注入到半导体衬底中以形成源极区; 首先使用绝缘体和第一光致抗蚀剂图案作为掩模蚀刻半导体衬底; 其次使用具有对应于所述源区域的形状的第二光致抗蚀剂图案作为掩模蚀刻所述基板; 使用所述第二光致抗蚀剂图案作为掩模将低浓度的掺杂剂注入暴露的衬底中以形成垂直沟道层; 使用相同的掩模将高浓度的掺杂剂注入暴露的衬底中以形成漏区; 激活所述掺杂剂,并在所述漏极区上形成欧姆接触层; 第三次使用第三光致抗蚀剂图案进行蚀刻,以将基板的第一蚀刻部分暴露为掩模; 在通过第三次蚀刻暴露的衬底上沉积栅极金属; 并分别接线金属。 本发明可以容易地制造具有低寄生电阻和非常小的栅极长度的垂直沟道晶体管,而无需复杂的复杂工艺。
    • 2. 发明授权
    • Infrared photodetector with doping superlattice structure
    • 具有掺杂超晶格结构的红外光电探测器
    • US5895930A
    • 1999-04-20
    • US891495
    • 1997-07-11
    • Eung-Gie OhJeon-Wook YangChul-Soon ParkKwang-Eui Pyun
    • Eung-Gie OhJeon-Wook YangChul-Soon ParkKwang-Eui Pyun
    • H01L31/09H01L31/0352H01L29/06
    • B82Y20/00H01L31/035236
    • This invention provides infrared sensing photodetector and a method therefor which provides a structure for effectively absorbing a light incident in a normal direction on a substrate, and a method compatible with existing processes for making integrated circuitry. An infrared sensing photodetector includes a compound semiconductor substrate of a first conductivity type, superlattice areas having implanted impurity ions of a second conductivity type opposite to the compound semiconductor substrate, each being spaced a predetermined distance each other in a selected region of the semiconductor substrate, a first collector area and a first emitter area which are formed in both end portions positioned perpendicular relative to the doped superlattice areas, a first collector electrode and a first emitter electrode formed on the first collector area and the first emitter area, respectively, a second collector area and a second emitter area which are spaced a predetermined distance in a horizontal direction on the doped superlattice area, and a second collector electrode and a second emitter electrode formed on the second collector area and the second emitter area, respectively.
    • 本发明提供了一种红外感测光电检测器及其方法,其提供了用于有效吸收在基板上沿正向入射的光的结构,以及与用于制造集成电路的现有工艺兼容的方法。 红外感测光电检测器包括具有第一导电类型的化合物半导体衬底,具有注入的与化合物半导体衬底相反的第二导电类型的杂质离子的超晶格区域,在半导体衬底的选定区域中彼此隔开预定距离, 第一集电极区域和第一发射极区域,其形成在相对于掺杂的超晶格区域垂直定位的两个端部中,第一集电极电极和第一发射极电极分别形成在第一集电区域和第一发射极区域上, 集电极区域和在掺杂超晶格区域上在水平方向上隔开预定距离的第二发射极区域,以及分别形成在第二集电极区域和第二发射极区域上的第二集电极电极和第二发射极电极。
    • 4. 发明授权
    • Microwave frequency converting receiver
    • 微波变频接收机
    • US06539216B1
    • 2003-03-25
    • US09475053
    • 1999-12-30
    • Eung Gie OhMin Gun KimSung Weon KangJae Jin Lee
    • Eung Gie OhMin Gun KimSung Weon KangJae Jin Lee
    • H04B126
    • H04B1/18
    • A microwave frequency converting receiver of an RF unit should be generally used in wireless/mobile communications systems such as cellular, PCS, WLL and IMT2000 systems and also have low power consumption, low-noise characteristic, high gain and small size. In order to produce the above frequency converting receiver, a multi-band and multi-mode frequency converting receiver for use in a wireless mobile communications system comprises a wideband low-noise amplifier for amplifying a radio frequency input signal, a frequency mixer for generating an intermediate frequency signal having a relatively high linearity by mixing a local oscillator frequency signal and the amplified radio frequency signal outputted from the wideband low noise amplifier, an intermediate frequency amplifier for producing a final intermediate frequency signal by amplifying the intermediate frequency signal derived from the frequency mixer and an input matching circuit for receiving a microwave signal within a frequency band of the wireless mobile communications system, impedance-matching the received microwave signal to the radio frequency input signal of the wideband low-noise amplifier and determining an operating frequency band of the frequency converting receiver.
    • RF单元的微波频率转换接收机通常应用在诸如蜂窝,PCS,WLL和IMT2000系统的无线/移动通信系统中,并且还具有低功耗,低噪声特性,高增益和小尺寸。 为了生产上述频率转换接收机,用于无线移动通信系统的多频和多模式频率转换接收机包括用于放大射频输入信号的宽带低噪声放大器,用于产生 通过混合本地振荡器频率信号和从宽带低噪声放大器输出的放大射频信号具有较高线性度的中频信号,用于通过放大从频率导出的中频信号来产生最终中频信号的中频放大器 混频器和用于在无线移动通信系统的频带内接收微波信号的输入匹配电路,将接收到的微波信号与宽带低噪声放大器的射频输入信号进行阻抗匹配,并确定该宽带低噪声放大器的工作频带 变频接收机。