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1. 发明申请

US20110226739A1 PROCESS CHAMBER LINER WITH APERTURES FOR PARTICLE CONTAINMENT 审中-公开
标题翻译：具有颗粒容纳孔的过程室内衬
公开(公告)号：US20110226739A1
公开(公告)日：2011-09-22
申请号：US12727547
申请日：2010-03-19
申请人： Ernest E. Allen , Appu Naveen George Thomas
发明人： Ernest E. Allen , Appu Naveen George Thomas
IPC分类号： C23F1/08 , C23C16/00
CPC分类号： H01J37/32871 , H01J37/32412 , H01J37/3244 , H01J37/32477 , H01J37/32633 , H01J37/32834
摘要： An apparatus for use within a process chamber is provided. The apparatus includes a liner adapted to cover the sidewalls of the process chamber, with apertures corresponding to various inlets and outlets in the process chamber. In addition, the liner has one or more apertures on its bottom surface, which allow particles to pass through the liner. The liner is designed to be shorter in height than the sidewalls of the process chamber. This allows the liner to be placed within the chamber such that its bottom surface is above the floor of the process chamber. This minimizes the possibility of particles that have fallen onto the process chamber floor becoming re-suspended at a later time. According to a second aspect of the disclosure, a bottom liner is provided. This liner can be used in conjunction with a conventional liner or in a process chamber without a liner.
摘要翻译：提供了一种在处理室内使用的装置。该装置包括适于覆盖处理室的侧壁的衬垫，孔中对应于处理室中的各种入口和出口。此外，衬垫在其底表面上具有一个或多个孔，这允许颗粒通过衬垫。衬里的高度设计成比处理室的侧壁短。这使得衬垫能够被放置在腔室内，使得其底面位于处理腔室的地板之上。这样可以最大限度地减少掉落在处理室地板上的颗粒在稍后的时间内被重新悬挂的可能性。根据本公开的第二方面，提供一种底部衬套。该衬垫可以与常规衬垫结合使用，也可以在没有衬垫的工艺室中使用。

2. 发明授权

US6065499A Lateral stress relief mechanism for vacuum bellows 有权
标题翻译：真空波纹管侧向应力消除机构
公开(公告)号：US6065499A
公开(公告)日：2000-05-23
申请号：US217677
申请日：1998-12-21
申请人： Alexander F. Pless , Gary J. Rosen , Allan D. Weed , Ernest E. Allen , Victor M. Benveniste , Perry J. I. Justesen
发明人： Alexander F. Pless , Gary J. Rosen , Allan D. Weed , Ernest E. Allen , Victor M. Benveniste , Perry J. I. Justesen
IPC分类号： H01L21/265 , F16J3/04 , F16L51/02 , F16L11/00 , F16L11/16
CPC分类号： F16L51/025 , H01J37/16 , H01J37/3171
摘要： An improved bellows assembly (18) is provided for use in, for example, an ion implanter (10). The bellows assembly comprises a first mounting portion (56) located at one end of the bellows assembly for fixedly mounting the bellows assembly to a first vacuum chamber (16); a second mounting portion (52) located at an opposite end of the bellows assembly for slidably mounting the bellows assembly to a second vacuum chamber (15); and a steel bellows (54) located between the first and second mounting portions. The bellows extends generally along a longitudinal axis (64) and is expansible and contractible along this axis. The second mounting portion permits radial slidable movement of the bellows assembly with respect to the second chamber in a first plane substantially perpendicular to this axis. The second mounting portion comprises at least one sliding seal subassembly (80) for maintaining the vacuum, and a support ring (78) and a slide plate (82) located on opposite ends of the sliding seal subassembly. The slide plate and the sliding seal subassembly provide a slidable vacuum-tight mating surface therebetween.
摘要翻译：改进的波纹管组件（18）被提供用于例如离子注入机（10）。波纹管组件包括位于波纹管组件一端的第一安装部分（56），用于将波纹管组件固定地安装到第一真空室（16）上; 位于波纹管组件的相对端的第二安装部分（52），用于将波纹管组件可滑动地安装到第二真空室（15）; 和位于第一和第二安装部之间的钢质波纹管（54）。波纹管大致沿着纵向轴线（64）延伸并且沿该轴线可膨胀和收缩。第二安装部分允许波纹管组件在基本上垂直于该轴线的第一平面中相对于第二腔室径向滑动运动。第二安装部分包括用于维持真空的至少一个滑动密封子组件（80）以及位于滑动密封子组件的相对端上的支撑环（78）和滑动板（82）。滑板和滑动密封子组件在其间提供可滑动的真空密封配合表面。

3. 发明授权

US5218984A Means and method for noise and cavitation attenuation in ball-type valves 失效
标题翻译：球形阀门噪声和气穴衰减的方法和方法
公开(公告)号：US5218984A
公开(公告)日：1993-06-15
申请号：US891443
申请日：1992-05-29
申请人： Ernest E. Allen
发明人： Ernest E. Allen
IPC分类号： F16K5/06
CPC分类号： F16K5/0605 , Y10T137/0318 , Y10T137/86743
摘要： An optional insertable feature to the trim or modulating member for ball-type valves limits the magnitude of fluid flow turbulence within the flow stream of the valve. This attenuates noise and cavitation caused by flow through the valve. The insert mounts into the interior of the trim member and presents two intersecting apertured surfaces. The apertures or holes are specially shaped, sized, and spaced to maximize flow efficiency and minimize fluid turbulence as a result of flow through ball-like valves. The size and orientation of the surfaces are such that they restrict and partition fluid flow through the valve to varying degrees at varying valve openings. Virtually all fluid is partitioned by being directed through the apertured plates during approximately the first 50 percent opening of the valve to minimize noise and cavitation, while insuring that the flow characteristic is a monotonic function between valve capacity and valve opening.
摘要翻译：用于球形阀的修剪或调节构件的可选择的可插入特征限制了阀的流动流内的流体流动湍流的大小。这样可以减轻由流过阀门引起的噪音和空化现象。插入件安装到装饰构件的内部并且呈现两个相交的有孔表面。这些孔或孔是特殊形状，尺寸和间隔，以使流动效率最大化并且由于流过球状阀而使流体紊流最小化。表面的尺寸和方向使得它们在变化的阀开口处限制和分隔通过阀的流体流量不同程度。几乎所有的流体在大约阀门的第一个50％的开口期间被引导穿过孔板，以最小化噪音和气蚀，同时确保流量特性是阀门容量和阀门开度之间的单调功能。

4. 发明申请

US20150325405A1 PROCESSING APPARATUS AND METHOD OF TREATING A SUBSTRATE 有权
标题翻译：处理装置和处理基板的方法
公开(公告)号：US20150325405A1
公开(公告)日：2015-11-12
申请号：US14275763
申请日：2014-05-12
申请人： Ernest E. Allen , Jon Ballou , Kevin M. Daniels , James P. Buonodono , Joseph P. Dzengeleski
发明人： Ernest E. Allen , Jon Ballou , Kevin M. Daniels , James P. Buonodono , Joseph P. Dzengeleski
IPC分类号： H01J37/20 , H01J37/317 , H01J37/305 , G21K5/08 , H01J37/304
CPC分类号： H01J37/20 , G21K5/08 , H01J37/304 , H01J37/3053 , H01J37/3171 , H01J37/32412 , H01J2237/024 , H01J2237/061 , H01J2237/1503
摘要： A processing apparatus including a process chamber, a plasma source disposed within the process chamber, wherein the plasma source is movable in a first direction and is configured to emit an ion beam along a second direction that is orthogonal to the first direction. The apparatus may further include a platen disposed within the process chamber for supporting a substrate, and an ion beam current sensor that is disposed adjacent to the platen.
摘要翻译：一种处理装置，包括处理室，设置在处理室内的等离子体源，其中等离子体源可沿第一方向移动并且被配置为沿着与第一方向正交的第二方向发射离子束。该设备还可以包括设置在处理室内的用于支撑衬底的压板和邻近压板设置的离子束电流传感器。

5. 发明授权

US08563407B2 Dual sided workpiece handling 失效
标题翻译：双面工件处理
公开(公告)号：US08563407B2
公开(公告)日：2013-10-22
申请号：US12717647
申请日：2010-03-04
申请人： Richard J. Hertel , Ernest E. Allen, Jr. , Philip J. McGrail, Jr.
发明人： Richard J. Hertel , Ernest E. Allen, Jr. , Philip J. McGrail, Jr.
IPC分类号： H01L21/425 , G21K1/00
CPC分类号： H01J37/20 , C23C14/48 , C23C14/505 , G11B5/84
摘要： A method includes positioning at least one dual sided workpiece on an assembly in a process chamber to expose a first side of the at least one dual sided workpiece, treating the first side of the at least one dual sided workpiece, reorienting a portion of the assembly in the process chamber to expose a second side of the at least one dual sided workpiece, the second side opposing the first side, and treating the second side. A processing apparatus including a process chamber defining an enclosed volume and a dual sided workpiece assembly disposed in the enclosed volume is also provided.
摘要翻译：一种方法包括将至少一个双面工件定位在处理室中的组件上以暴露所述至少一个双面工件的第一侧面，处理所述至少一个双面工件的第一侧，重新定向所述组件的一部分在所述处理室中暴露所述至少一个双面工件的第二侧，所述第二侧与所述第一侧相对，并且处理所述第二侧。还提供了一种处理装置，其包括限定封闭容积的处理室和设置在封闭容积中的双面工件组件。

6. 发明授权

US06231054B1 Elastomeric sliding seal for vacuum bellows 失效
标题翻译：用于真空波纹管的弹性滑动密封
公开(公告)号：US06231054B1
公开(公告)日：2001-05-15
申请号：US09217383
申请日：1998-12-21
申请人： Ernest E. Allen, Jr. , Robert J. Mitchell , Perry J. I. Justesen , Alexander F. Pless
发明人： Ernest E. Allen, Jr. , Robert J. Mitchell , Perry J. I. Justesen , Alexander F. Pless
IPC分类号： F16J300
CPC分类号： F16J3/047
摘要： An improved bellows assembly (18) is provided for use in, for example, an ion implanter (10). The bellows assembly comprises a first mounting portion (56) located at one end of the bellows assembly for fixedly mounting the bellows assembly to a first vacuum chamber (16); a second mounting portion (54) located at an opposite end of the bellows assembly for slidably mounting the bellows assembly to a second vacuum chamber (15); and a steel bellows (60) located between the first and second mounting portions. The bellows extends generally along a longitudinal axis (64) and is expansible and contractible along this axis. The second mounting portion permits radial slidable movement of the bellows assembly with respect to the second chamber in a first plane substantially perpendicular to this axis. The second mounting portion comprises a first sliding plate (74) having a first wear plate (78), a second sliding plate (76) having a second wear plate (80), and an elastomeric seal (82) for maintaining a vacuum condition at the slidable mating surface provided between the first and second wear plates.
摘要翻译：改进的波纹管组件（18）被提供用于例如离子注入机（10）。波纹管组件包括位于波纹管组件一端的第一安装部分（56），用于将波纹管组件固定地安装到第一真空室（16）上; 位于波纹管组件的相对端的第二安装部分（54），用于将波纹管组件可滑动地安装到第二真空室（15）上; 和位于第一和第二安装部之间的钢质波纹管（60）。波纹管大致沿着纵向轴线（64）延伸并且沿该轴线可膨胀和收缩。第二安装部分允许波纹管组件在基本上垂直于该轴线的第一平面中相对于第二腔室径向滑动运动。第二安装部分包括具有第一耐磨板（78）的第一滑动板（74），具有第二耐磨板（80）的第二滑动板（76）和用于将真空条件保持在设置在第一和第二耐磨板之间的可滑动配合表面。

7. 发明申请

US20100260943A1 DUAL SIDED WORKPIECE HANDLING 失效
标题翻译：双面工作处理
公开(公告)号：US20100260943A1
公开(公告)日：2010-10-14
申请号：US12717647
申请日：2010-03-04
申请人： Richard J. HERTEL , Ernest E. Allen , Philip J. McGrail, JR.
发明人： Richard J. HERTEL , Ernest E. Allen , Philip J. McGrail, JR.
IPC分类号： C23C14/48
CPC分类号： H01J37/20 , C23C14/48 , C23C14/505 , G11B5/84
摘要： A method includes positioning at least one dual sided workpiece on an assembly in a process chamber to expose a first side of the at least one dual sided workpiece, treating the first side of the at least one dual sided workpiece, reorienting a portion of the assembly in the process chamber to expose a second side of the at least one dual sided workpiece, the second side opposing the first side, and treating the second side. A processing apparatus including a process chamber defining an enclosed volume and a dual sided workpiece assembly disposed in the enclosed volume is also provided.
摘要翻译：一种方法包括将至少一个双面工件定位在处理室中的组件上以暴露所述至少一个双面工件的第一侧面，处理所述至少一个双面工件的第一侧，重新定向所述组件的一部分在所述处理室中暴露所述至少一个双面工件的第二侧，所述第二侧与所述第一侧相对，并且处理所述第二侧。还提供了一种处理装置，其包括限定封闭容积的处理室和设置在封闭容积中的双面工件组件。

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