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1. 发明授权

US06231054B1 Elastomeric sliding seal for vacuum bellows 失效
标题翻译：用于真空波纹管的弹性滑动密封
公开(公告)号：US06231054B1
公开(公告)日：2001-05-15
申请号：US09217383
申请日：1998-12-21
申请人： Ernest E. Allen, Jr. , Robert J. Mitchell , Perry J. I. Justesen , Alexander F. Pless
发明人： Ernest E. Allen, Jr. , Robert J. Mitchell , Perry J. I. Justesen , Alexander F. Pless
IPC分类号： F16J300
CPC分类号： F16J3/047
摘要： An improved bellows assembly (18) is provided for use in, for example, an ion implanter (10). The bellows assembly comprises a first mounting portion (56) located at one end of the bellows assembly for fixedly mounting the bellows assembly to a first vacuum chamber (16); a second mounting portion (54) located at an opposite end of the bellows assembly for slidably mounting the bellows assembly to a second vacuum chamber (15); and a steel bellows (60) located between the first and second mounting portions. The bellows extends generally along a longitudinal axis (64) and is expansible and contractible along this axis. The second mounting portion permits radial slidable movement of the bellows assembly with respect to the second chamber in a first plane substantially perpendicular to this axis. The second mounting portion comprises a first sliding plate (74) having a first wear plate (78), a second sliding plate (76) having a second wear plate (80), and an elastomeric seal (82) for maintaining a vacuum condition at the slidable mating surface provided between the first and second wear plates.
摘要翻译：改进的波纹管组件（18）被提供用于例如离子注入机（10）。波纹管组件包括位于波纹管组件一端的第一安装部分（56），用于将波纹管组件固定地安装到第一真空室（16）上; 位于波纹管组件的相对端的第二安装部分（54），用于将波纹管组件可滑动地安装到第二真空室（15）上; 和位于第一和第二安装部之间的钢质波纹管（60）。波纹管大致沿着纵向轴线（64）延伸并且沿该轴线可膨胀和收缩。第二安装部分允许波纹管组件在基本上垂直于该轴线的第一平面中相对于第二腔室径向滑动运动。第二安装部分包括具有第一耐磨板（78）的第一滑动板（74），具有第二耐磨板（80）的第二滑动板（76）和用于将真空条件保持在设置在第一和第二耐磨板之间的可滑动配合表面。

2. 发明申请

US20120043712A1 MECHANISM AND METHOD FOR ALIGNING A WORKPIECE TO A SHADOW MASK 审中-公开
标题翻译：将工件对准阴影掩模的机制和方法
公开(公告)号：US20120043712A1
公开(公告)日：2012-02-23
申请号：US12858131
申请日：2010-08-17
申请人： William Weaver , Russell J. Low , Steven M. Anella , Robert J. Mitchell
发明人： William Weaver , Russell J. Low , Steven M. Anella , Robert J. Mitchell
IPC分类号： H01L21/68 , B23Q3/00
CPC分类号： H01J37/20 , H01J37/3171 , H01J37/32412 , H01J2237/20207 , H01J2237/31711 , Y10T29/49895
摘要： A workpiece support is disclosed in which the platen, and thus the workpiece, can be tilted about at least two axis, which allows gravity to align the workpiece with a shadow mask in two orthogonal directions. In some embodiments, the workpiece support utilizes an axis of rotation that is orthogonal to the surface of the workpiece, in conjunction with a second axis that is parallel to the surface of the workpiece. Additionally, a method of aligning the workpiece using this workpiece support is also disclosed. Further, the workpiece support can be utilized to remove the workpiece from the support after implantation is completed.
摘要翻译：公开了一种工件支撑件，其中压板以及因此工件可以围绕至少两个轴线倾斜，这允许重力在两个正交方向上将工件与荫罩对准。在一些实施例中，工件支撑件与平行于工件表面的第二轴线结合使用与工件表面正交的旋转轴线。此外，还公开了使用该工件支撑件对准工件的方法。此外，可以利用工件支撑件在植入完成之后将工件从支撑件移除。

3. 发明授权

US07897944B2 Method and apparatus for measurement of beam angle in ion implantation 有权
标题翻译：用于测量离子注入中束角的方法和装置
公开(公告)号：US07897944B2
公开(公告)日：2011-03-01
申请号：US12176748
申请日：2008-07-21
申请人： Robert J. Mitchell , Bo H. Vanderberg
发明人： Robert J. Mitchell , Bo H. Vanderberg
IPC分类号： H01J37/304
CPC分类号： H01J37/1471 , H01J37/304 , H01J37/3171 , H01J2237/24507 , H01J2237/24528 , H01J2237/24578
摘要： An ion beam angle detection apparatus, comprising a linear drive assembly fixedly attached to a moveable profiler assembly, wherein the profiler assembly comprises, a profiler having a profiler aperture formed within a profiler top plate and a profiler sensor assembly, a moveable angle mask assembly comprising a moveable angle mask with a mask aperture, wherein the angle mask assembly is non-fixedly attached to the profiler assembly, the mask aperture is movable relative to the profiler aperture by energizing an mask linear drive fixedly attached to the profiler assembly and the profiler aperture is movable through a length greater than the elongated length of the ion beam.
摘要翻译：一种离子束角度检测装置，包括固定地连接到可移动的分析器组件的线性驱动组件，其中所述分析器组件包括：具有形成在轮廓仪顶板内的轮廓仪孔的轮廓仪和轮廓仪传感器组件;可移动角度掩模组件，具有掩模孔的可移动角度掩模，其中所述角度掩模组件不固定地附接到所述轮廓仪组件，所述掩模孔可以相对于所述轮廓仪孔径移动，通过激励固定地附接到所述轮廓仪组件的轮廓线性驱动器和所述轮廓仪孔可以通过大于离子束的细长长度的长度移动。

4. 发明申请

US20100012861A1 METHOD AND APPARATUS FOR MEASUREMENT OF BEAM ANGLE IN ION IMPLANTATION 有权
标题翻译：用于测量离子植入中的光束角的方法和装置
公开(公告)号：US20100012861A1
公开(公告)日：2010-01-21
申请号：US12176748
申请日：2008-07-21
申请人： Robert J. Mitchell , Bo H. Vanderberg
发明人： Robert J. Mitchell , Bo H. Vanderberg
IPC分类号： H01J37/08
CPC分类号： H01J37/1471 , H01J37/304 , H01J37/3171 , H01J2237/24507 , H01J2237/24528 , H01J2237/24578
摘要： An ion beam angle detection apparatus, comprising a linear drive assembly fixedly attached to a moveable profiler assembly, wherein the profiler assembly comprises, a profiler having a profiler aperture formed within a profiler top plate and a profiler sensor assembly, a moveable angle mask assembly comprising a moveable angle mask with a mask aperture, wherein the angle mask assembly is non-fixedly attached to the profiler assembly, the mask aperture is movable relative to the profiler aperture by energizing an mask linear drive fixedly attached to the profiler assembly and the profiler aperture is movable through a length greater than the elongated length of the ion beam.
摘要翻译：一种离子束角度检测装置，包括固定地连接到可移动的分析器组件的线性驱动组件，其中所述分析器组件包括：具有形成在轮廓仪顶板内的轮廓仪孔的轮廓仪和轮廓仪传感器组件;可移动角度掩模组件，具有掩模孔的可移动角度掩模，其中所述角度掩模组件不固定地附接到所述轮廓仪组件，所述掩模孔可以相对于所述轮廓仪孔径移动，通过激励固定地附接到所述轮廓仪组件的轮廓线性驱动器和所述轮廓仪孔可以通过大于离子束的细长长度的长度移动。

5. 发明申请

US20090136381A1 Ternary nickel eutectic alloy 有权
标题翻译：三元镍共晶合金
公开(公告)号：US20090136381A1
公开(公告)日：2009-05-28
申请号：US12230561
申请日：2008-09-02
申请人： Sammy Tin , Robert J. Mitchell
发明人： Sammy Tin , Robert J. Mitchell
IPC分类号： C22C19/05
CPC分类号： C22C19/05
摘要： A ternary nickel eutectic alloy consisting of 4.5 to 11 wt % chromium, 1 to 6 wt % cobalt, 1 to 4 wt % aluminium, 0 to 1.5 wt % titanium, 0 to 3 wt % tantalum, 16 to 22 wt % niobium, 0 to 3 wt % molybdenum, 0 to 4 wt % tungsten, 0 to 1 wt % hafnium, 0 to 0.1 wt % zirconium, 0 to 0.1 wt % silicon, 0.01 to 0.1 wt % carbon, 0 to 0.01 wt % boron and the balance nickel plus incidental impurities.
摘要翻译：三元镍共晶合金，其由4.5至11重量％的铬，1至6重量％的钴，1至4重量％的铝，0至1.5重量％的钛，0至3重量％的钽，16至22重量％的铌，0 至3重量％的钼，0至4重量％的钨，0至1重量％的铪，0至0.1重量％的锆，0至0.1重量％的硅，0.01至0.1重量％的碳，0至0.01重量％的硼，镍加附带杂质。

6. 发明申请

US20080138175A1 High throughput wafer notch aligner 有权
标题翻译：高通量晶圆缺口对准器
公开(公告)号：US20080138175A1
公开(公告)日：2008-06-12
申请号：US11634697
申请日：2006-12-06
申请人： Robert J. Mitchell , Joseph Ferrara
发明人： Robert J. Mitchell , Joseph Ferrara
IPC分类号： H01L21/677 , B65H1/00 , G06F7/00
CPC分类号： H01L21/681 , H01L21/67265 , H01L21/67745
摘要： An ion implantation apparatus, system, and method are provided for a transferring a plurality of workpieces between vacuum and atmospheric pressures, wherein an alignment mechanism is operable to align a plurality of workpieces for generally simultaneous transportation to a dual-workpiece load lock chamber. The alignment mechanism comprises a characterization device, an elevator, and two vertically-aligned workpiece supports for supporting two workpieces. First and second atmospheric robots are configured to generally simultaneously transfer two workpieces at a time between load lock modules, the alignment mechanism, and a FOUP. Third and fourth vacuum robots are configured to transfer one workpiece at a time between the load lock modules and a process module.
摘要翻译：提供一种用于在真空和大气压之间传送多个工件的离子注入装置，系统和方法，其中对准机构可操作以将多个工件对准，以便大体上同时传送到双工件加载锁定室。对准机构包括表征装置，电梯和用于支撑两个工件的两个垂直对齐的工件支撑件。第一和第二大气机器人被配置为一般在负载锁定模块，对准机构和FOUP之间同时传送两个工件。第三和第四真空机器人被配置为在加载锁模块和处理模块之间一次传送一个工件。

7. 发明授权

US08703045B2 Method of manufacturing a multiple composition component 有权
标题翻译：多组分成分的制造方法
公开(公告)号：US08703045B2
公开(公告)日：2014-04-22
申请号：US12946168
申请日：2010-11-15
申请人： Robert J. Mitchell , Catherine M. F. Rae , Mark C. Hardy , Shaun R. Holmes
发明人： Robert J. Mitchell , Catherine M. F. Rae , Mark C. Hardy , Shaun R. Holmes
IPC分类号： B22F3/15 , B22F7/06 , B22F7/08
CPC分类号： B22F5/009 , B22F3/15 , B22F5/106 , B22F7/062 , B22F2999/00
摘要： The present invention relates to a method of manufacturing a multiple composition component 10, comprising: arranging first, second and third constituent parts 40, 30, 42 having first, second and third compositions respectively A, B, C so that the first constituent part 40 shares a first boundary with the second constituent part 30 and the second constituent part 30 shares a second boundary with the third constituent part 40. The first, second and third constituent parts 40, 30, 42 are each either a powder or a solid so that the first and second boundaries are each a solid adjacent to a powder. The arrangement is then processed so as to form a single solid component having first, second and third regions 16, 18, 20 having first, second and third compositions A, B, C respectively.
摘要翻译：本发明涉及一种多组分成分10的制造方法，其特征在于，包括：将分别具有A，B，C的第一，第二和第三组分的第一，第二和第三组分40,30,42分别排列成第一组成部分40 与第二构成部分30共享第一边界，并且第二构成部分30与第三构成部分40共享第二边界。第一，第二和第三组成部分40,30,42各自是粉末或固体，使得第一和第二边界各自是与粉末相邻的固体。然后处理该装置以形成具有分别具有第一，第二和第三组合物A，B，C的第一，第二和第三区域16,18,20的单个固体组分。

8. 发明授权

US08323424B2 Alloy component including a fine grain structure, a coarse grain structure and a transitional structure 有权
标题翻译：合金成分包括细晶粒结构，粗晶结构和过渡结构
公开(公告)号：US08323424B2
公开(公告)日：2012-12-04
申请号：US13097567
申请日：2011-04-29
申请人： Robert J. Mitchell , David Ulrich Furrer , Joseph Andrew Lemsky , Mark C. Hardy
发明人： Robert J. Mitchell , David Ulrich Furrer , Joseph Andrew Lemsky , Mark C. Hardy
IPC分类号： C22C19/03 , C22C14/00
CPC分类号： C21D1/70 , C21D1/26 , C21D9/0068 , C21D2221/00
摘要： An alloy disc includes a hub portion, a rim portion and a web portion disposed between the hub portion and the rim portion. The disc includes a fine grain structure substantially in a first region of the disc and a coarse grain structure substantially in a second region of the disc. The fine grain structure may be in the hub portion of the disc, and the coarse grain structure may be in the rim portion of the disc. The coarse grain structure may extend a greater distance radially inwardly from the rim portion into the web portion on the first axial end of the disc than on the second axial end of the disc. The fine grain structure may extend a greater distance radially outwardly from the hub portion into the web portion on the second axial end of the disc than on the first axial end of the disc.
摘要翻译：合金盘包括轮毂部分，轮缘部分和布置在轮毂部分和轮缘部分之间的腹板部分。盘包括基本上在盘的第一区域中的细晶粒结构和基本上在盘的第二区域中的粗晶粒结构。细晶粒结构可以在盘的毂部分中，粗粒结构可以在盘的边缘部分中。粗颗粒结构可以从轮缘部分径向向内延伸到盘的第一轴向端部上的纤维网部分中比在盘的第二轴向端部更远的距离。细晶粒结构可以从轮毂部分径向向外延伸到盘的第二轴向端部上的腹板部分中比在盘的第一轴向端部上更远的距离。

9. 发明申请

US20100043929A1 Single crystal component and a method of heat treating a single crystal component 审中-公开
标题翻译：单晶成分和单晶成分的热处理方法
公开(公告)号：US20100043929A1
公开(公告)日：2010-02-25
申请号：US12461012
申请日：2009-07-29
申请人： Robert A. Hobbs , Sammy Tin , Catherine M.F. Rae , Robert J. Mitchell
发明人： Robert A. Hobbs , Sammy Tin , Catherine M.F. Rae , Robert J. Mitchell
IPC分类号： C22F1/00 , C21D9/00
CPC分类号： F01D5/28 , C22F1/10 , F01D5/225 , F01D5/3007 , F05D2300/607
摘要： A single crystal component comprising a first region and a second region. The component comprising a nickel base single crystal superalloy having a gamma phase matrix and gamma prime phase precipitates distributed in the gamma phase matrix. The first region of the component comprises a bi-modal distribution of gamma prime phase precipitates in the gamma phase matrix and the second region of the component comprising a uni-modal distribution of gamma prime phase precipitates in the gamma phase matrix. The uni-modal distribution of gamma prime phase precipitates consisting of primary cuboidal gamma prime phase precipitates and the bi-modal distribution of gamma prime phase precipitates consisting of primary cuboidal gamma prime phase precipitates and secondary spherical gamma prime phase precipitates and/or cuboidal gamma prime phase precipitates whereby the first region of the component has enhanced resistance to low cycle fatigue and the second region of the component has enhanced resistance to creep deformation.
摘要翻译：一种单晶组分，包括第一区和第二区。该组分包含具有分布在伽马相基质中的γ相和γ初相的镍基单晶超合金。该组件的第一区域包括在伽马相基质中的γ相相沉淀物的双模式分布，并且该组分的第二区域包含γ相基质中γ相析出物的单模分布。由初始立方γ相析出物组成的γ初相相沉淀物的单态分布以及由原始立方体γ相析出物和二次球形γ初相相析出物和/或立方形γ原子组成的γ初相析出物的双峰分布相沉积物，由此部件的第一区域具有增强的耐低循环疲劳性，并且部件的第二区域具有增强的抗蠕变变形性。

10. 发明申请

US20070294977A1 System for Securing Roofing Shingles and Underlying Sheeting 审中-公开
标题翻译：用于固定屋面板和底层板的系统
公开(公告)号：US20070294977A1
公开(公告)日：2007-12-27
申请号：US11426125
申请日：2006-06-23
申请人： Robert J. Mitchell
发明人： Robert J. Mitchell
IPC分类号： E04D1/34
CPC分类号： E04D1/3405 , E04D13/00 , E04D2001/3423 , E04D2001/3482
摘要： A system for securing roofing shingles to a roof's underlying structures is disclosed herein. The system includes a strapping member or members and fasteners for securing roofing shingles to the roof's underlying sheeting and truss. Additionally, methods for sealing the system are disclosed.
摘要翻译：本文公开了一种用于将屋顶瓦片固定到屋顶的下面的结构的系统。该系统包括用于将屋顶瓦片固定到屋顶的底板和桁架上的捆扎构件或构件和紧固件。此外，公开了用于密封系统的方法。

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