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1. 发明授权

US06231054B1 Elastomeric sliding seal for vacuum bellows 失效
标题翻译：用于真空波纹管的弹性滑动密封
公开(公告)号：US06231054B1
公开(公告)日：2001-05-15
申请号：US09217383
申请日：1998-12-21
申请人： Ernest E. Allen, Jr. , Robert J. Mitchell , Perry J. I. Justesen , Alexander F. Pless
发明人： Ernest E. Allen, Jr. , Robert J. Mitchell , Perry J. I. Justesen , Alexander F. Pless
IPC分类号： F16J300
CPC分类号： F16J3/047
摘要： An improved bellows assembly (18) is provided for use in, for example, an ion implanter (10). The bellows assembly comprises a first mounting portion (56) located at one end of the bellows assembly for fixedly mounting the bellows assembly to a first vacuum chamber (16); a second mounting portion (54) located at an opposite end of the bellows assembly for slidably mounting the bellows assembly to a second vacuum chamber (15); and a steel bellows (60) located between the first and second mounting portions. The bellows extends generally along a longitudinal axis (64) and is expansible and contractible along this axis. The second mounting portion permits radial slidable movement of the bellows assembly with respect to the second chamber in a first plane substantially perpendicular to this axis. The second mounting portion comprises a first sliding plate (74) having a first wear plate (78), a second sliding plate (76) having a second wear plate (80), and an elastomeric seal (82) for maintaining a vacuum condition at the slidable mating surface provided between the first and second wear plates.
摘要翻译：改进的波纹管组件（18）被提供用于例如离子注入机（10）。波纹管组件包括位于波纹管组件一端的第一安装部分（56），用于将波纹管组件固定地安装到第一真空室（16）上; 位于波纹管组件的相对端的第二安装部分（54），用于将波纹管组件可滑动地安装到第二真空室（15）上; 和位于第一和第二安装部之间的钢质波纹管（60）。波纹管大致沿着纵向轴线（64）延伸并且沿该轴线可膨胀和收缩。第二安装部分允许波纹管组件在基本上垂直于该轴线的第一平面中相对于第二腔室径向滑动运动。第二安装部分包括具有第一耐磨板（78）的第一滑动板（74），具有第二耐磨板（80）的第二滑动板（76）和用于将真空条件保持在设置在第一和第二耐磨板之间的可滑动配合表面。

2. 发明授权

US6065499A Lateral stress relief mechanism for vacuum bellows 有权
标题翻译：真空波纹管侧向应力消除机构
公开(公告)号：US6065499A
公开(公告)日：2000-05-23
申请号：US217677
申请日：1998-12-21
申请人： Alexander F. Pless , Gary J. Rosen , Allan D. Weed , Ernest E. Allen , Victor M. Benveniste , Perry J. I. Justesen
发明人： Alexander F. Pless , Gary J. Rosen , Allan D. Weed , Ernest E. Allen , Victor M. Benveniste , Perry J. I. Justesen
IPC分类号： H01L21/265 , F16J3/04 , F16L51/02 , F16L11/00 , F16L11/16
CPC分类号： F16L51/025 , H01J37/16 , H01J37/3171
摘要： An improved bellows assembly (18) is provided for use in, for example, an ion implanter (10). The bellows assembly comprises a first mounting portion (56) located at one end of the bellows assembly for fixedly mounting the bellows assembly to a first vacuum chamber (16); a second mounting portion (52) located at an opposite end of the bellows assembly for slidably mounting the bellows assembly to a second vacuum chamber (15); and a steel bellows (54) located between the first and second mounting portions. The bellows extends generally along a longitudinal axis (64) and is expansible and contractible along this axis. The second mounting portion permits radial slidable movement of the bellows assembly with respect to the second chamber in a first plane substantially perpendicular to this axis. The second mounting portion comprises at least one sliding seal subassembly (80) for maintaining the vacuum, and a support ring (78) and a slide plate (82) located on opposite ends of the sliding seal subassembly. The slide plate and the sliding seal subassembly provide a slidable vacuum-tight mating surface therebetween.
摘要翻译：改进的波纹管组件（18）被提供用于例如离子注入机（10）。波纹管组件包括位于波纹管组件一端的第一安装部分（56），用于将波纹管组件固定地安装到第一真空室（16）上; 位于波纹管组件的相对端的第二安装部分（52），用于将波纹管组件可滑动地安装到第二真空室（15）; 和位于第一和第二安装部之间的钢质波纹管（54）。波纹管大致沿着纵向轴线（64）延伸并且沿该轴线可膨胀和收缩。第二安装部分允许波纹管组件在基本上垂直于该轴线的第一平面中相对于第二腔室径向滑动运动。第二安装部分包括用于维持真空的至少一个滑动密封子组件（80）以及位于滑动密封子组件的相对端上的支撑环（78）和滑动板（82）。滑板和滑动密封子组件在其间提供可滑动的真空密封配合表面。

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