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1. 发明授权

US07857570B2 Method and apparatus for supplying substrates to a processing tool 有权
标题翻译：用于将基材供给到加工工具的方法和装置
公开(公告)号：US07857570B2
公开(公告)日：2010-12-28
申请号：US12100388
申请日：2008-04-09
申请人： Martin R. Elliott , Michael R. Rice , Robert B. Lowrance , Jeffrey C. Hudgens , Eric A. Englhardt
发明人： Martin R. Elliott , Michael R. Rice , Robert B. Lowrance , Jeffrey C. Hudgens , Eric A. Englhardt
IPC分类号： B65G49/07
CPC分类号： H01L21/67775 , Y10S414/14
摘要： In one aspect, a substrate loading station for a processing tool includes plural load ports. Each load port is operatively coupled to the processing tool and has a mechanism for opening a substrate carrier. A carrier handler transports substrate carriers from a factory exchange location to the load ports without placing the carriers on any carrier support location other than the load ports. Numerous other aspects are provided.
摘要翻译：一方面，用于处理工具的基板装载站包括多个装载端口。每个负载端口可操作地耦合到处理工具并且具有用于打开衬底载体的机构。载体处理器将基板载体从工厂交换位置传送到负载端口，而不将载体放置在除负载端口之外的任何载体支撑位置上。提供了许多其他方面。

2. 发明授权

US07594789B2 Overhead transfer flange and support for suspending a substrate carrier 失效
标题翻译：架空传输法兰和支撑件用于悬挂基板载体
公开(公告)号：US07594789B2
公开(公告)日：2009-09-29
申请号：US11838501
申请日：2007-08-14
申请人： Michael R. Rice , Martin R. Elliott , Robert B. Lowrance , Jeffrey C. Hudgens , Eric A. Englhardt
发明人： Michael R. Rice , Martin R. Elliott , Robert B. Lowrance , Jeffrey C. Hudgens , Eric A. Englhardt
IPC分类号： B65G17/02
CPC分类号： H01L21/6773 , H01L21/67733 , H01L21/67769 , H01L21/67778
摘要： In a first aspect, a first apparatus is provided for use in supporting a substrate carrier. The first apparatus includes an overhead transfer flange adapted to couple to a substrate carrier body and an overhead carrier support. The overhead transfer flange has a first side and a second side opposite the first side that is wider than the first side. Numerous other aspects are provided.
摘要翻译：在第一方面，提供了一种用于支撑衬底载体的第一装置。第一装置包括适于联接到衬底载体主体和架空托架支架的架空输送凸缘。架空输送法兰具有比第一侧宽的第一侧和与第一侧相对的第二侧。提供了许多其他方面。

3. 发明授权

US07552816B2 Break-away positioning conveyor mount for accommodating conveyor belt bends 有权
公开(公告)号：US07552816B2
公开(公告)日：2009-06-30
申请号：US11619183
申请日：2007-01-02
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
IPC分类号： B65G43/08
CPC分类号： H01L21/68707 , H01L21/6773 , H01L21/67733
摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.

4. 发明授权

US07540371B2 Break-away positioning conveyor mount for accommodating conveyor belt bends 有权
公开(公告)号：US07540371B2
公开(公告)日：2009-06-02
申请号：US11619181
申请日：2007-01-02
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
IPC分类号： B65G47/34
CPC分类号： H01L21/68707 , H01L21/6773 , H01L21/67733
摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.

5. 发明授权

US07537108B2 Methods and apparatus for transporting substrate carriers 有权
公开(公告)号：US07537108B2
公开(公告)日：2009-05-26
申请号：US11838354
申请日：2007-08-14
申请人： Michael R. Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
发明人： Michael R. Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
IPC分类号： B65G17/02
CPC分类号： H01L21/67706 , B65G17/20 , B65G37/02 , B65G2201/0297 , H01L21/67727 , H01L21/6773 , H01L21/67769 , H01L21/67778 , Y10S414/135
摘要： According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.

6. 发明申请

US20090077805A1 PHOTOVOLTAIC PRODUCTION LINE 失效
标题翻译：光伏生产线
公开(公告)号：US20090077805A1
公开(公告)日：2009-03-26
申请号：US12202199
申请日：2008-08-29
申请人： Robert Z. BACHRACH , Yong-Kee Chae , Soo Young Choi , Nicholas G.J. De Vries , Yacov Elgar , Eric A. Englhardt , Michael R. Frei , Charles Gay , Parris Hawkins , Choi (Gene) Ho , James Craig Hunter , Penchala N. Kankanala , Liwei Li , Wing Hoo (Hendrick) Lo , Danny Cam Toan Lu , Fang Mei , Stephen P. Murphy , Srujal (Steve) Patel , Matthew J.B. Saunders , Asaf Schlezinger , Shuran Sheng , Tzay-Fa (Jeff) Su , Jeffrey S. Sullivan , David Tanner , Teresa Trowbridge , Brice Walker , John M. White , Tae K. Won
发明人： Robert Z. BACHRACH , Yong-Kee Chae , Soo Young Choi , Nicholas G.J. De Vries , Yacov Elgar , Eric A. Englhardt , Michael R. Frei , Charles Gay , Parris Hawkins , Choi (Gene) Ho , James Craig Hunter , Penchala N. Kankanala , Liwei Li , Wing Hoo (Hendrick) Lo , Danny Cam Toan Lu , Fang Mei , Stephen P. Murphy , Srujal (Steve) Patel , Matthew J.B. Saunders , Asaf Schlezinger , Shuran Sheng , Tzay-Fa (Jeff) Su , Jeffrey S. Sullivan , David Tanner , Teresa Trowbridge , Brice Walker , John M. White , Tae K. Won
IPC分类号： H01L31/18 , H05K13/00
CPC分类号： H01L21/67236 , B23K26/364 , B26F3/002 , B26F3/004 , B65G49/064 , B65G2249/02 , B65G2249/04 , C03B33/03 , C03B33/033 , H01L21/67132 , H01L21/67712 , H01L21/67715 , H01L21/67721 , H01L21/67727 , H01L21/6776 , H01L31/022425 , H01L31/03921 , H01L31/0504 , H01L31/075 , H02S50/00 , H02S50/10 , Y02E10/548 , Y02P40/57 , Y10T29/49002 , Y10T29/49355 , Y10T29/5196 , Y10T29/53113 , Y10T29/5313 , Y10T29/5317 , Y10T29/53187 , Y10T29/53365 , Y10T29/53417 , Y10T225/10 , Y10T225/325 , Y10T225/329
摘要： The present invention generally relates to a system that can be used to form a photovoltaic device, or solar cell, using processing modules that are adapted to perform one or more steps in the solar cell formation process. The automated solar cell fab is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices. The automated solar fab will thus generally comprise a substrate receiving module that is adapted to receive a substrate, one or more absorbing layer deposition cluster tools having at least one processing chamber that is adapted to deposit a silicon-containing layer on a surface of the substrate, one or more back contact deposition chambers, one or more material removal chambers, a solar cell encapsulation device, an autoclave module, an automated junction box attaching module, and one or more quality assurance modules that are adapted to test and qualify the completely formed solar cell device.
摘要翻译：本发明一般涉及一种可用于形成光伏器件或太阳能电池的系统，该系统使用适于在太阳能电池形成过程中执行一个或多个步骤的处理模块。自动化太阳能电池制造厂通常是用于形成太阳能电池器件的自动化处理模块和自动化设备的布置。因此，自动化太阳能工厂将通常包括适于接收衬底的衬底接收模块，一个或多个吸收层沉积簇工具，其具有至少一个处理室，该处理室适于在衬底的表面上沉积含硅层，一个或多个背接触沉积室，一个或多个材料去除室，太阳能电池封装装置，高压釜模块，自动接线盒附接模块和一个或多个质量保证模块，其适于测试和限定完全形成太阳能电池装置。

7. 发明授权

US07506747B2 Break-away positioning conveyor mount for accommodating conveyor belt bends 有权
公开(公告)号：US07506747B2
公开(公告)日：2009-03-24
申请号：US11495055
申请日：2006-07-28
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
IPC分类号： B65G29/00
CPC分类号： H01L21/68707 , H01L21/6773 , H01L21/67733
摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.

8. 发明授权

US5476548A Reducing backside deposition in a substrate processing apparatus through the use of a shadow ring 失效
标题翻译：通过使用阴影环来减少衬底处理设备中的背面沉积
公开(公告)号：US5476548A
公开(公告)日：1995-12-19
申请号：US263617
申请日：1994-06-20
申请人： Lawrence C. Lei , Cissy S. Leung , Eric A. Englhardt , Ashok K. Sinha
发明人： Lawrence C. Lei , Cissy S. Leung , Eric A. Englhardt , Ashok K. Sinha
IPC分类号： C23C16/44 , C23C16/455 , C23C16/458 , C30B25/14 , H01L21/205 , H01L21/285 , H01L21/683 , C23C16/00 , B05C13/00 , H01L21/00
CPC分类号： C23C16/45521 , C23C16/4585 , C30B25/14 , H01L21/6838
摘要： A substrate processing apparatus for processing a substrate having a peripheral edge, an upper surface for processing and a lower surface lying on a support. The apparatus includes a processing chamber which houses the substrate support, in the form of a heater pedestal including a substrate receiving surface for receiving the lower surface of the substrate. A circumscribing shadow ring is located around the pedestal to cover peripheral edge portion of the substrate. The shadow ring also defines a cavity, between itself and the pedestal, at the peripheral edge of the substrate. In operation, the chamber receives processing gas at a first pressure and purge gas is introduced into the cavity, between the ring and the pedestal, at a second pressure which is greater than the first pressure. Fluid conduits are provided to enhance the flow of the purge gas away from the peripheral edge of the substrate.
摘要翻译：一种基板处理装置，用于处理具有外围边缘的基板，用于加工的上表面和位于支撑件上的下表面。该设备包括处理室，该处理室以加热器底座的形式容纳衬底支撑件，该加热器基座包括用于接收衬底的下表面的衬底接收表面。位于基座周围的外接阴影环覆盖基板的周边部分。阴影环还在基板的周边边缘处限定了在其自身与基座之间的空腔。在操作中，室以第一压力接收处理气体，并且净化气体以大于第一压力的第二压力被引入空腔中，在环和基座之间。提供流体导管以增强净化气体远离衬底的周边边缘的流动。

9. 发明授权

US08020689B2 Break-away positioning conveyor mount for accommodating conveyor belt bends 有权
标题翻译：分离定位输送机支架，用于容纳输送带弯头
公开(公告)号：US08020689B2
公开(公告)日：2011-09-20
申请号：US12430032
申请日：2009-04-24
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliot , Jeffrey C. Hudgens
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliot , Jeffrey C. Hudgens
IPC分类号： B65G47/34
CPC分类号： H01L21/68707 , H01L21/6773 , H01L21/67733
摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.
摘要翻译：公开了一种用于连续运动的高速位置传送器系统的分离安装系统。支撑托架可以从传送带悬挂，使得支撑托架相对于传送带上的至少一个点保持固定的位置和方向，而不会在传送带，支撑架或传送带之间的联接中引起明显的应力皮带和支撑架。安装件可以包括附接到支撑架的前导可旋转轴承，其可释放地接合附接到传送带的第一键，该旋转轴承适于容纳由传送带施加到支撑支架的旋转力。安装件还可以包括附接到支撑支架的滑动轴承，其可以可释放地接合附接到传送带的第二键，滑动轴承适于容纳由传送带施加到支撑支架的纵向力。

10. 发明授权

US07984543B2 Methods for moving a substrate carrier 有权
标题翻译：移动衬底载体的方法
公开(公告)号：US07984543B2
公开(公告)日：2011-07-26
申请号：US12359310
申请日：2009-01-24
申请人： Martin R. Elliott , Vinay K. Shah , Eric A. Englhardt , Jeffrey C. Hudgens
发明人： Martin R. Elliott , Vinay K. Shah , Eric A. Englhardt , Jeffrey C. Hudgens
IPC分类号： B23P23/00
CPC分类号： H01L21/68707 , H01L21/67769 , Y10T29/49002 , Y10T29/49829 , Y10T29/49998 , Y10T29/5136 , Y10T29/5137 , Y10T29/5313 , Y10T29/53257 , Y10T29/53265
摘要： Systems, methods, and apparatus are provided for electronic device manufacturing. The invention includes removing a first substrate carrier and a second substrate carrier from a moving conveyor using an end effector assembly and concurrently transferring the first and second substrate carriers from the moving conveyor to a support location via the end effector assembly. Numerous other aspects are provided.
摘要翻译：为电子设备制造提供了系统，方法和设备。本发明包括使用端部执行器组件从移动的传送器移除第一衬底载体和第二衬底载体，并且同时地将第一和第二衬底载体从移动的传送器经由端部执行器组件传送到支撑位置。提供了许多其他方面。

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