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1. 发明授权

US09685352B2 Apparatus for conserving electronic device manufacturing resources including ozone 有权
公开(公告)号：US09685352B2
公开(公告)日：2017-06-20
申请号：US14610301
申请日：2015-01-30
申请人： Applied Materials, Inc.
发明人： Daniel O. Clark , Phil Chandler , Jay J. Jung
IPC分类号： H01L21/67 , C23C14/56 , B01D53/74 , C23C16/44 , B01D53/38
CPC分类号： H01L21/67017 , B01D53/38 , B01D53/74 , C23C14/56 , C23C16/4412 , Y10T137/0318 , Y10T137/0419
摘要： An electronic device manufacturing system is provided that may reduce the amount of resources used in electronic device manufacturing processes. In some embodiments, unreacted ozone exiting a process tool operating in an ozone mode may be diverted and used as an oxidant in an abatement tool when the process tool is operating in a non-ozone mode. Numerous other embodiments are provided.

2. 发明授权

US07985379B2 Reactor design to reduce particle deposition during process abatement 失效
标题翻译：反应器设计，以减少过程减少过程中的颗粒沉积
公开(公告)号：US07985379B2
公开(公告)日：2011-07-26
申请号：US11838435
申请日：2007-08-14
申请人： Ho-Man Rodney Chiu , Daniel O. Clark , Shaun W. Crawford , Jay J. Jung , Leonard B. Todd , Robbert Vermeulen
发明人： Ho-Man Rodney Chiu , Daniel O. Clark , Shaun W. Crawford , Jay J. Jung , Leonard B. Todd , Robbert Vermeulen
IPC分类号： B01D50/00
CPC分类号： F23M5/085 , F23D2900/00016 , F23G7/065 , F23J9/00 , F23M2900/05002 , F23M2900/05004
摘要： The present invention relates to systems and methods for controlled combustion and decomposition of gaseous pollutants while reducing deposition of unwanted reaction products from within the treatment systems. The systems include a novel thermal reaction chamber design having stacked reticulated ceramic rings through which fluid, e.g., gases, may be directed to form a boundary layer along the interior wall of the thermal reaction chamber, thereby reducing particulate matter buildup thereon. The systems further include the introduction of fluids from the center pilot jet to alter the aerodynamics of the interior of the thermal reaction chamber.
摘要翻译：本发明涉及用于气态污染物的受控燃烧和分解的系统和方法，同时减少不需要的反应产物从处理系统内的沉积。该系统包括具有堆叠的网状陶瓷环的新型热反应室设计，通过该陶瓷环可以使流体（例如气体）被引导以沿着热反应室的内壁形成边界层，从而减少其上积累的颗粒物质。这些系统还包括从中心先导射流引入流体以改变热反应室内部的空气动力学。

3. 发明授权

US07984543B2 Methods for moving a substrate carrier 有权
标题翻译：移动衬底载体的方法
公开(公告)号：US07984543B2
公开(公告)日：2011-07-26
申请号：US12359310
申请日：2009-01-24
申请人： Martin R. Elliott , Vinay K. Shah , Eric A. Englhardt , Jeffrey C. Hudgens
发明人： Martin R. Elliott , Vinay K. Shah , Eric A. Englhardt , Jeffrey C. Hudgens
IPC分类号： B23P23/00
CPC分类号： H01L21/68707 , H01L21/67769 , Y10T29/49002 , Y10T29/49829 , Y10T29/49998 , Y10T29/5136 , Y10T29/5137 , Y10T29/5313 , Y10T29/53257 , Y10T29/53265
摘要： Systems, methods, and apparatus are provided for electronic device manufacturing. The invention includes removing a first substrate carrier and a second substrate carrier from a moving conveyor using an end effector assembly and concurrently transferring the first and second substrate carriers from the moving conveyor to a support location via the end effector assembly. Numerous other aspects are provided.
摘要翻译：为电子设备制造提供了系统，方法和设备。本发明包括使用端部执行器组件从移动的传送器移除第一衬底载体和第二衬底载体，并且同时地将第一和第二衬底载体从移动的传送器经由端部执行器组件传送到支撑位置。提供了许多其他方面。

4. 发明授权

US07816189B2 Vertically stacked field programmable nonvolatile memory and method of fabrication 有权
标题翻译：垂直堆叠现场可编程非易失性存储器和制造方法
公开(公告)号：US07816189B2
公开(公告)日：2010-10-19
申请号：US11925723
申请日：2007-10-26
申请人： Vivek Subramanian , James M. Cleeves
发明人： Vivek Subramanian , James M. Cleeves
IPC分类号： H01L21/82
CPC分类号： G11C17/06 , G11C11/5692 , G11C13/003 , G11C17/14 , G11C17/16 , G11C17/165 , G11C2213/71 , G11C2213/76 , H01L27/101 , H01L27/1021 , H01L27/2481 , H01L45/1233 , H01L45/16
摘要： A very high density field programmable memory is disclosed. An array is formed vertically above a substrate using several layers, each layer of which includes vertically fabricated memory cells. The cell in an N level array may be formed with N+1 masking steps plus masking steps needed for contacts. Maximum use of self alignment techniques minimizes photolithographic limitations. In one embodiment the peripheral circuits are formed in a silicon substrate and an N level array is fabricated above the substrate.
摘要翻译：公开了一种非常高密度的现场可编程存储器。阵列垂直地形成在衬底上方，使用几层，其各层包括垂直制造的存储单元。 N级阵列中的单元可以形成N + 1掩蔽步骤以及接触所需的掩蔽步骤。自动对准技术的最大限度地使光刻限制最小化。在一个实施例中，外围电路形成在硅衬底中，并且在衬底上方制造N电平阵列。

5. 发明授权

US07767499B2 Method to form upward pointing p-i-n diodes having large and uniform current 有权
标题翻译：形成向上指向具有大且均匀电流的p-i-n二极管的方法
公开(公告)号：US07767499B2
公开(公告)日：2010-08-03
申请号：US11692151
申请日：2007-03-27
申请人： S. Brad Herner
发明人： S. Brad Herner
IPC分类号： H01L21/82 , H01L21/336
CPC分类号： G11C5/02 , G11C7/00 , G11C11/39 , G11C17/06 , G11C17/16 , G11C29/00 , G11C2213/71 , G11C2213/77 , H01L27/1021 , H01L27/2409 , H01L27/2481 , H01L29/0657 , H01L29/0676 , H01L29/868 , H01L45/04 , H01L45/1233 , H01L45/146 , H01L45/149
摘要： A method is disclosed to form an upward-pointing p-i-n diode formed of deposited silicon, germanium, or silicon-germanium. The diode has a bottom heavily doped p-type region, a middle intrinsic or lightly doped region, and a top heavily doped n-type region. The top heavily doped p-type region is doped with arsenic, and the semiconductor material of the diode is crystallized in contact with an appropriate silicide, germanide, or silicide-germanide. A large array of such upward-pointing diodes can be formed with excellent uniformity of current across the array when a voltage above the turn-on voltage of the diodes is applied. This diode is advantageously used in a monolithic three dimensional memory array.
摘要翻译：公开了一种形成由沉积的硅，锗或硅 - 锗形成的向上指向的p-i-n二极管的方法。二极管具有底部重掺杂p型区域，中间固有或轻掺杂区域和顶部重掺杂n型区域。顶部重掺杂p型区掺杂砷，二极管的半导体材料与适当的硅化物，锗化物或硅化锗 - 锗化物接触结晶。当施加高于二极管的导通电压的电压时，可以形成具有优异的跨阵列电流均匀性的这种向上指向二极管的大阵列。该二极管有利地用于单片三维存储器阵列中。

6. 发明授权

US07752514B2 Methods and apparatus for testing a scan chain to isolate defects 失效
标题翻译：用于测试扫描链以隔离缺陷的方法和装置
公开(公告)号：US07752514B2
公开(公告)日：2010-07-06
申请号：US11924597
申请日：2007-10-25
申请人： Leendert M. Huisman , William V. Huott , Maroun Kassab , Franco Motika
发明人： Leendert M. Huisman , William V. Huott , Maroun Kassab , Franco Motika
IPC分类号： G01R31/28
CPC分类号： G01R31/318533
摘要： Systems, methods and apparatus are provided for isolating a defect in a scan chain. The invention includes modifying a first test mode of a plurality of latches included in a scan chain, operating the latches in the modified first test mode, and operating the plurality of latches included in the scan chain in a second test mode. A portion of the scan chain adjacent and following a stuck-@-0 or stuck-@-1 fault in the scan chain may store and/or output a value complementary to the value on the output of the previous portion of the scan chain due to the fault. Such values may be unloaded from the scan chain and used for diagnosing (e.g., isolating a defect in) the defective scan chain. Numerous other aspects are provided.
摘要翻译：提供了用于隔离扫描链中的缺陷的系统，方法和装置。本发明包括修改包括在扫描链中的多个锁存器的第一测试模式，在修改的第一测试模式下操作锁存器，以及在第二测试模式下操作包括在扫描链中的多个锁存器。扫描链中与扫描链相邻并跟随卡纸 - @ - 0或卡住 - - - 1故障的部分扫描链可以存储和/或输出与扫描链的先前部分的输出值相匹配的值，到了错误。这些值可以从扫描链中卸载并用于诊断（例如，分离缺陷）缺陷扫描链。提供了许多其他方面。

7. 发明授权

US07625063B2 Apparatus and methods for an inkjet head support having an inkjet head capable of independent lateral movement 失效
标题翻译：用于具有能够独立横向运动的喷墨头的喷墨头支撑件的装置和方法
公开(公告)号：US07625063B2
公开(公告)日：2009-12-01
申请号：US11019967
申请日：2004-12-22
申请人： John M. White , Fan Cheung Sze , Quanyuan Shang , Shinichi Kurita , Hongbin Ji , Janusz Jozwiak , Inchen Huang , Emanual Beer
发明人： John M. White , Fan Cheung Sze , Quanyuan Shang , Shinichi Kurita , Hongbin Ji , Janusz Jozwiak , Inchen Huang , Emanual Beer
IPC分类号： B41J23/00
CPC分类号： B41J3/407 , B41J2/04505 , B41J2/04541 , B41J2/04581 , B41J2/04588 , B41J2/0459 , B41J2/04593 , B41J2/125 , B41J3/28 , B41J3/543 , B41J25/001 , B41J25/003 , B41J25/005 , B41J29/15 , B41J29/393
摘要： In a first aspect, a first apparatus is provided for inkjet printing. The first apparatus includes an inkjet head support that includes a plurality of inkjet heads. A first inkjet head of the plurality of inkjet heads is adapted to be independently moveable in both directions along a lateral axis relative to a second inkjet head of the plurality of inkjet heads. The first apparatus also includes a system controller adapted to control an independent lateral movement of the first inkjet head relative to the second inkjet head. Numerous other aspects are provided.
摘要翻译：在第一方面，提供了用于喷墨打印的第一装置。第一装置包括包括多个喷墨头的喷墨头支撑件。多个喷墨头中的第一喷墨头适于独立地沿相对于多个喷墨头的第二喷墨头的横向轴向两个方向移动。第一装置还包括适于控制第一喷墨头相对于第二喷墨头的独立横向移动的系统控制器。提供了许多其他方面。

8. 发明授权

US07317683B2 Weighted fair queue serving plural output ports 失效
标题翻译：加权公平队列服务多个输出端口
公开(公告)号：US07317683B2
公开(公告)日：2008-01-08
申请号：US10015994
申请日：2001-11-01
申请人： William John Goetzinger , Glen Howard Handlogten , James Francis Mikos , David Alan Norgaard
发明人： William John Goetzinger , Glen Howard Handlogten , James Francis Mikos , David Alan Norgaard
IPC分类号： H04J1/16
CPC分类号： H04L49/30 , H04L47/2441 , H04L47/50 , H04L47/621 , H04L49/254
摘要： A data communication apparatus includes a plurality of output ports and a scheduler for assigning priorities for outbound data frames. The scheduler includes one or more scheduling queues. Each scheduling queue indicates an order in which data flows are to be serviced. At least one scheduling queue has a respective plurality of output ports assigned to the scheduling queue. That is, the scheduling queue is shared by two or more output ports.
摘要翻译：数据通信装置包括多个输出端口和用于分配出站数据帧的优先级的调度器。调度器包括一个或多个调度队列。每个调度队列指示数据流被维护的顺序。至少一个调度队列具有分配给调度队列的相应的多个输出端口。也就是说，调度队列由两个或更多个输出端口共享。

9. 发明授权

US06922076B2 Scalable termination 失效
标题翻译：可扩展终止
公开(公告)号：US06922076B2
公开(公告)日：2005-07-26
申请号：US10604936
申请日：2003-08-27
申请人： George M. Braceras , Reid C. Hutchins , Harold Pilo
发明人： George M. Braceras , Reid C. Hutchins , Harold Pilo
IPC分类号： H04L25/02 , H03K17/16
CPC分类号： H04L25/0298 , H04L25/0278
摘要： In a first aspect, a first method is provided for providing multiple termination values using a plurality of binary termination signals. The first method includes the steps of (1) determining a characteristic impedance of a first port by generating a plurality of binary termination signals; and (2) modifying a characteristic impedance of a second port by manipulating one or more of the plurality of binary termination signals. Numerous other aspects are provided.
摘要翻译：在第一方面，提供了一种使用多个二进制终止信号来提供多个终止值的第一方法。第一种方法包括以下步骤：（1）通过产生多个二进制终止信号来确定第一端口的特性阻抗; 和（2）通过操纵多个二进制终止信号中的一个或多个来修改第二端口的特性阻抗。提供了许多其他方面。

10. 发明授权

US09378443B2 Calibration coded sensors and apparatus, systems and methods for reading same 有权
标题翻译：校准编码的传感器和仪器，系统和读取方法
公开(公告)号：US09378443B2
公开(公告)日：2016-06-28
申请号：US12779443
申请日：2010-05-13
申请人： Paul M. Ripley , Xin Wang , Narasinha Parasnis , Swetha Chinnayelka
发明人： Paul M. Ripley , Xin Wang , Narasinha Parasnis , Swetha Chinnayelka
IPC分类号： G06K7/12 , G06K19/06 , G06K7/10
CPC分类号： G06K7/10712 , G06K19/06009 , G06K19/0614 , G06K2019/06225
摘要： In some aspects, a colored coded analyte sensor is provided. The analyte sensor has a body and a plurality of machine-readable colored codes associated with the body. The colored codes may contain red, green, and blue hues, which are discernable into coded information. The coded information may include the analyte sensor model, analyte sensor calibration constant, expiration or manufacture date of the analyte sensor, analyte sensor counterfeiting codes, warnings, messages to the user, etc. Colored code reading systems, apparatus and methods for reading such color-coded information associated with the analyte sensor are provided, as are numerous other aspects.
摘要翻译：在一些方面，提供了彩色编码的分析物传感器。分析物传感器具有与身体相关联的主体和多个机器可读的有色代码。彩色代码可能包含红色，绿色和蓝色色调，可以识别为编码信息。编码信息可以包括分析物传感器模型，分析物传感器校准常数，分析物传感器的到期或制造日期，分析物传感器假冒代码，警告，给用户的消息等。用于读取这种颜色的有色代码读取系统，装置和方法提供与分析物传感器相关联的编码信息，以及许多其它方面。

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