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71. 发明授权

US08981807B2 Positioner system and method of positioning 有权
标题翻译：定位系统和定位方法
公开(公告)号：US08981807B2
公开(公告)日：2015-03-17
申请号：US13190928
申请日：2011-07-26
申请人： Christopher Leonard West , Charles Paul Nappen
发明人： Christopher Leonard West , Charles Paul Nappen
IPC分类号： G01R31/20 , G01R31/28
CPC分类号： G01R31/2887 , B25J9/023 , B25J9/041 , B25J17/0208 , B25J19/002 , G01R31/2834 , G01R31/2891
摘要： A system for positioning a load including a support column, a drive rail unit coupled to the support column, the drive rail unit moveable relative to the support column, a vertical carriage moveable along the support column, wherein the vertical carriage supports the load, an engagement member which engages the drive rail and which moves along the drive rail, and a motor which applies force to the engagement member, causing the engagement member to move along the drive rail. The motor is coupled to the vertical carriage so that, as the motor applies force to the engagement member, the vertical carriage moves relative to the drive rail unit, the vertical carriage is also moveable with the drive rail unit so that the vertical carriage and the drive rail unit move relative to the support column. A method of positioning a load is also provided.
摘要翻译：一种用于定位负载的系统，包括支撑柱，耦合到支撑柱的驱动轨单元，可相对于支撑柱移动的驱动轨道单元，可沿着支撑柱移动的竖直托架，其中竖直托架支撑负载，接合构件，其与驱动轨道接合并沿着驱动轨道移动;以及电动机，其向接合构件施加力，使得接合构件沿着驱动轨道移动。电动机联接到垂直滑架，使得当电动机对接合构件施加力时，垂直滑架相对于驱动轨道单元移动，垂直滑架也可以与驱动轨道单元一起移动，使得垂直滑架和驱动轨道单元相对于支撑柱移动。还提供了一种定位负载的方法。

72. 发明授权

US08952711B2 Methods for probing semiconductor wafers 有权
标题翻译：探测半导体晶圆的方法
公开(公告)号：US08952711B2
公开(公告)日：2015-02-10
申请号：US13277761
申请日：2011-10-20
申请人： Mill-Jer Wang , Ching-Nen Peng , Hung-Chih Lin , Hao Chen
发明人： Mill-Jer Wang , Ching-Nen Peng , Hung-Chih Lin , Hao Chen
IPC分类号： G01R31/00 , G01R35/00 , G01R31/28 , G01R31/11
CPC分类号： G01R1/07307 , G01R31/11 , G01R31/2601 , G01R31/2891 , G01R31/3191 , G01R35/005
摘要： A wafer probing method includes calibrating a wafer probing system, checking continuity between probe pins of the wafer probing system and respective conductors of a wafer under test, and identifying at least an interconnect structure in the wafer under test to determine whether a fault exists.
摘要翻译：晶片探测方法包括校准晶片探测系统，检查晶片探测系统的探针与待测晶片的相应导体之间的连续性，以及确定被测晶片中的至少互连结构，以确定是否存在故障。

73. 发明申请

US20150008948A1 PROBER FOR TESTING DEVICES IN A REPEAT STRUCTURE ON A SUBSTRATE 有权
公开(公告)号：US20150008948A1
公开(公告)日：2015-01-08
申请号：US14491606
申请日：2014-09-19
申请人： Cascade Microtech, Inc.
发明人： Frank-Michael Werner , Matthias Zieger , Sebastian Giessmann
IPC分类号： G01R1/073 , G01R1/04
CPC分类号： G01R1/073 , G01R1/04 , G01R31/2891
摘要： A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.

74. 发明申请

US20140373637A1 CPU PRESSURE TESTING DEVICE 审中-公开
标题翻译： CPU压力测试装置
公开(公告)号：US20140373637A1
公开(公告)日：2014-12-25
申请号：US14261599
申请日：2014-04-25
申请人： HONG FU JIN PRECISION INDUSTRY (ShenZhen) CO., LTD. , HON HAI PRECISION INDUSTRY CO., LTD.
发明人： ZHAN-YANG LI
IPC分类号： G01L5/00
CPC分类号： G01R31/2891 , G01L5/0061
摘要： A CPU pressure testing device includes a mounting bracket, a CPU simulating member, a heat sink, and a pressure display. The mounting bracket includes a base portion and an engaging member connected to the base portion. The CPU simulating member includes a CPU simulating body and a pressure sensor placed on the CPU simulating body. The CPU simulating member is placed on the base portion. The heat sink is placed on the CPU simulating member to contact the pressure sensor. The pressure display is connected to the pressure sensor. The engaging member engages the base portion to press the heat sink onto the pressure sensor, and the pressure display displays a pressure value.
摘要翻译： CPU压力测试装置包括安装支架，CPU模拟构件，散热器和压力显示器。安装支架包括基部和连接到基部的接合构件。 CPU模拟构件包括CPU模拟主体和放置在CPU模拟主体上的压力传感器。 CPU模拟构件被放置在基座部分上。散热器放置在CPU模拟部件上以接触压力传感器。压力显示器连接到压力传感器。接合构件接合基部以将散热器按压到压力传感器上，并且压力显示器显示压力值。

75. 发明申请

US20140354312A1 TEST HANDLER, TEST CARRIER AND TEST METHOD THEREOF 审中-公开
标题翻译：测试手段，测试载体及其测试方法
公开(公告)号：US20140354312A1
公开(公告)日：2014-12-04
申请号：US14277185
申请日：2014-05-14
申请人： Kai-Ming Li , Chih-Lung Chien
发明人： Kai-Ming Li , Chih-Lung Chien
IPC分类号： G01R31/28
CPC分类号： G01R31/2891 , G01R31/2867 , G01R31/2875
摘要： The present invention provides a test handler for various IC tests, which includes a chamber and a test carrier. The chamber is controllable to present a dry status. The test carrier is made of a high thermal-conductive material and includes plural positioning structures for respectively accommodating plural IC chips. The test carrier is disposed on and in thermal contact with a temperature-adjustment device in the chamber, and the temperature-adjustment device controls the temperature of the IC chips on the test carrier by thermal conduction through the test carrier. The invention also provides a test carrier used in the test handler and a test method thereof.
摘要翻译：本发明提供了一种用于各种IC测试的测试处理器，其包括腔室和测试载体。该室是可控的以呈现干燥状态。测试载体由高导热材料制成，并且包括用于分别容纳多个IC芯片的多个定位结构。测试载体设置在室内的温度调节装置上并与其接触，并且温度调节装置通过测试载体的热传导来控制测试载体上的IC芯片的温度。本发明还提供了一种在测试处理器中使用的测试载体及其测试方法。

76. 发明申请

US20140347084A1 LOW OVERDRIVE PROBES WITH HIGH OVERDRIVE SUBSTRATE 有权
标题翻译：具有高过渡基板的低过载探头
公开(公告)号：US20140347084A1
公开(公告)日：2014-11-27
申请号：US13899458
申请日：2013-05-21
申请人： Advantest Corporation
发明人： Ting HU , Lakshmikanth NAMBURI
IPC分类号： G01R1/073 , G01R31/26
CPC分类号： G01R31/2891
摘要： A method for testing a semiconductor device is disclosed. The method comprises positioning a probe card comprising a plurality of probes above the semiconductor device and moving the probe card in a vertical direction towards the semiconductor device. The plurality of probes are moving in a vertical direction towards a plurality of electrical structures of the semiconductor device until each probe of the plurality of probes has made mechanical contact with a corresponding electrical structure of the plurality of electrical structures with a minimum quantity of force. The each probe of the plurality of probes absorbs a portion of vertical overdrive after contacting their corresponding electrical structures. The probe card absorbs any remaining vertical overdrive. The vertical overdrive is a continuing vertical movement of the plurality of probes after a first probe of the plurality of probes mechanically contacts a first corresponding electrical structure.
摘要翻译：公开了一种用于测试半导体器件的方法。该方法包括将包括多个探针的探针卡定位在半导体器件上方并将探针卡沿垂直方向移向半导体器件。多个探针在垂直方向上朝向半导体器件的多个电结构移动，直到多个探针的每个探针以最小的力量与多个电气结构的对应的电气结构机械接触。多个探针的每个探针在接触其相应的电气结构之后吸收垂直过驱动的一部分。探针卡吸收任何剩余的垂直过载。在多个探针的第一探针机械地接触第一对应的电结构之后，垂直过驱动是多个探针的持续垂直运动。

77. 发明授权

US08890555B2 Method for measuring transistor 有权
标题翻译：测量晶体管的方法
公开(公告)号：US08890555B2
公开(公告)日：2014-11-18
申请号：US13093172
申请日：2011-04-25
申请人： Takahiro Tsuji
发明人： Takahiro Tsuji
IPC分类号： G01R31/00 , G01R31/26 , G01R31/28
CPC分类号： G01R31/2642 , G01R31/2874 , G01R31/2886 , G01R31/2891
摘要： An object is to provide a measuring method with high reproducibility in a bias-temperature stress test of a transistor in which an oxide semiconductor is used for a semiconductor layer. Provided is a measuring method of a transistor, which includes the steps of disposing a transistor in which an oxide semiconductor is used for a semiconductor layer in a measurement room having a light-blocking property, introducing dry air, nitrogen, or argon into the measurement room, and applying a predetermined voltage to a gate electrode of the transistor in the measurement room kept under an atmosphere where the dew point is greater than or equal to −110° C. and less than or equal to −60° C., whereby the amount of change in threshold voltage over time is measured.
摘要翻译：本发明的目的是提供一种在氧化物半导体用于半导体层的晶体管的偏压 - 温度应力测试中具有高再现性的测量方法。提供了一种晶体管的测量方法，其包括以下步骤：将具有阻光性的测量室中的氧化物半导体用于半导体层的晶体管，将干燥空气，氮气或氩气引入到测量中并且在保持在露点大于或等于-110℃且小于等于-60℃的气氛下的测量室中的晶体管的栅电极施加预定电压，由此测量阈值电压随时间的变化量。

78. 发明申请

US20140301631A1 PLATELIKE WORKPIECE WITH ALIGNMENT MARK 有权
标题翻译：具有对准标记的PLATELIKE工作
公开(公告)号：US20140301631A1
公开(公告)日：2014-10-09
申请号：US14244086
申请日：2014-04-03
申请人： DISCO CORPORATION
发明人： Nobuhide Maeda
IPC分类号： G06T3/00
CPC分类号： G06T3/0068 , G01R31/2891 , G06T2207/30148 , H01L21/681 , H05K1/0269 , H05K3/0008 , H05K2201/09918 , H05K2203/166
摘要： A platelike workpiece having an alignment mark formed on the front side thereof and adapted to be recognized by an imaging unit included in an alignment apparatus for performing alignment. The platelike workpiece includes a plurality of direction indicating marks formed at given intervals so as to surround the alignment mark. Each of the direction indicating marks is pointed toward the alignment mark. The space of the direction indicating marks is set so that at least two of the plural direction indicating marks fall in the visual field of the imaging unit in viewing the platelike workpiece from the imaging unit.
摘要翻译：具有形成在其前侧上的对准标记的板状工件，并且适于由包括在用于进行对准的对准装置中的成像单元识别。板状工件包括以规定间隔形成的多个方向指示标记，以包围对准标记。每个方向指示标记指向对准标记。设定方向指示标记的空间，使得多个方向指示标记中的至少两个在从成像单元观察板状工件时落在成像单元的视野内。

79. 发明授权

US08836356B2 Vertical probe assembly with air channel 有权
标题翻译：带空气通道的垂直探头组件
公开(公告)号：US08836356B2
公开(公告)日：2014-09-16
申请号：US13323001
申请日：2011-12-12
申请人： David M. Audette , Dustin M. Fregeau , David L. Gardell , Daniel J. Murphy , Grant Wagner
发明人： David M. Audette , Dustin M. Fregeau , David L. Gardell , Daniel J. Murphy , Grant Wagner
IPC分类号： G01R31/10
CPC分类号： G01R1/067 , G01R31/00 , G01R31/2863 , G01R31/2874 , G01R31/2891
摘要： A vertical probe assembly includes an upper die; a lower die; a plurality of probes, the probes including an electrically conductive material, wherein the probes extend from the upper die through the lower die; and an air channel located between the upper die and the lower die, such that airflow through the air channel passes through the plurality of probes.
摘要翻译：垂直探针组件包括上模; 下模多个探针，所述探针包括导电材料，其中所述探针从所述上模延伸穿过所述下模; 以及位于上模和下模之间的空气通道，使得通过空气通道的气流穿过多个探针。

80. 发明申请

US20140253166A1 INSPECTION DEVICE WITH VERTICALLY MOVEABLE ASSEMBLY 审中-公开
标题翻译：具有垂直移动装置的检查装置
公开(公告)号：US20140253166A1
公开(公告)日：2014-09-11
申请号：US14282565
申请日：2014-05-20
申请人： RUDOLPH TECHNOLOGIES, INC.
发明人： Gary Mark Gunderson , Greg Olmstead
IPC分类号： G01R1/04
CPC分类号： G01R1/04 , G01R31/2891
摘要： The inspection of semiconductors or like substrates by the present mechanism minimizes deflection in the checkplate and probe card. An inspection device including a housing, a toggle assembly within the housing, an objective lens assembly attached within the toggle assembly including an objective coupled within an objective focus, wherein the objective focus is deflectable along an optics axis, and a cam assembly including a rotary cam and a window carrier, wherein the window carrier is moveable along the optics axis with rotation of the rotary cam, wherein the cam assembly is coupled to the toggle assembly with the objective and window are aligned along the optics axis.
摘要翻译：通过本机构检查半导体或类似基板可以最大限度地减少检查板和探针卡中的偏转。一种检查装置，包括壳体，壳体内的肘节组件，附接在肘节组件内的物镜组件，其包括联接在物镜焦点内的物镜，其中物镜焦点可沿光学轴线偏转;以及凸轮组件，包括旋转凸轮和窗户托架，其中所述窗口托架可随着所述旋转凸轮的旋转沿着所述光学轴线移动，其中所述凸轮组件联接到所述肘节组件，所述物镜和所述窗口沿着所述光学轴线对准。

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