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    • 8. 发明授权
    • Device and method for controlling IC temperature
    • US09841459B2
    • 2017-12-12
    • US15191936
    • 2016-06-24
    • TEST21 TAIWAN CO., Ltd
    • Shun-Bon Ho
    • G01R31/00G01R31/28
    • G01R31/2874
    • A device for controlling IC temperature capable of bringing a device-under-test to a predetermined temperature includes a compressor, temperature controller element, thermal sensing element, heat insulating structure, input/output terminal and a temperature controller. The compressor has a base and a contact portion contacting the DUT directly. The thermal sensing element is attached to the temperature controlling element contacting the base. The heat insulation structure surrounds the temperature controlling element and a portion of the compressor. The input/output terminal, having a signal line and at least one power line, is disposed on the heat insulation structure. The power and signal lines connected to the temperature sensor are connected to the temperature controlling element and thermal sensing element respectively. The temperature sensor powers the temperature controlling element and controls temperature thereof. Temperature of the temperature controlling element is obtained by measuring electrical properties of thermal sensing element via signal line.