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71. 发明申请

US20180070040A1 Sensor With Electrically Controllable Aperture For Inspection And Metrology Systems 审中-公开
公开(公告)号：US20180070040A1
公开(公告)日：2018-03-08
申请号：US15806913
申请日：2017-11-08
申请人： KLA-Tencor Corporation
发明人： Yung-Ho Alex Chuang , John Fielden , David L. Brown , Jingjing Zhang , Keith Lyon , Mark Shi Wang
IPC分类号： H04N5/3722
CPC分类号： H04N5/3722 , G01N21/956 , G01N2201/12
摘要： Pixel aperture size adjustment in a linear sensor is achieved by applying more negative control voltages to central regions of the pixel's resistive control gate, and applying more positive control voltages to the gate's end portions. These control voltages cause the resistive control gate to generate an electric field that drives photoelectrons generated in a selected portion of the pixel's light sensitive region into a charge accumulation region for subsequent measurement, and drives photoelectrons generated in other portions of the pixel's light sensitive region away from the charge accumulation region for subsequent discard or simultaneous readout. A system utilizes optics to direct light received at different angles or locations from a sample into corresponding different portions of each pixel's light sensitive region. Multiple aperture control electrodes are selectively actuated to collect/measure light received from either narrow or wide ranges of angles or locations, thereby enabling rapid image data adjustment.

72. 发明授权

US09768577B2 Semiconductor inspection and metrology system using laser pulse multiplier 有权
公开(公告)号：US09768577B2
公开(公告)日：2017-09-19
申请号：US14832833
申请日：2015-08-21
申请人： KLA-Tencor Corporation
发明人： Yung-Ho Alex Chuang , Justin Dianhuan Liou , J. Joseph Armstrong , Yujun Deng
IPC分类号： H01S3/00 , G02B17/00 , G02B27/00 , C23C16/00 , G02B17/08 , G02B27/10 , H01S3/10
CPC分类号： H01S3/005 , C23C16/00 , G02B17/00 , G02B17/0848 , G02B27/00 , G02B27/108 , H01S3/00 , H01S3/10
摘要： A pulse multiplier includes a beam splitter and one or more mirrors. The beam splitter receives a series of input laser pulses and directs part of the energy of each pulse into a ring cavity. After circulating around the ring cavity, part of the pulse energy leaves the ring cavity through the beam splitter and part of the energy is recirculated. By selecting the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitter. This pulse multiplier can inexpensively reduce the peak power per pulse while increasing the number of pulses per second with minimal total power loss.

73. 发明申请

US20170047207A1 Electron Source 审中-公开
标题翻译：电子源
公开(公告)号：US20170047207A1
公开(公告)日：2017-02-16
申请号：US15234638
申请日：2016-08-11
申请人： KLA-Tencor Corporation
发明人： Yung-Ho Alex Chuang , Yinying Xiao-Li , Xuefeng Liu , John Fielden
IPC分类号： H01J40/06 , G03F7/20 , H01J37/29 , H01J37/285 , H01J1/34 , H01J35/14
CPC分类号： G03F7/70008 , H01J1/304 , H01J1/34 , H01J35/065 , H01J37/073 , H01J2201/30411 , H01J2201/3048 , H01J2237/0635
摘要： An electron source is formed on a silicon substrate having opposing first and second surfaces. At least one field emitter is prepared on the second surface of the silicon substrate to enhance the emission of electrons. To prevent oxidation of the silicon, a thin, contiguous boron layer is disposed directly on the output surface of the field emitter using a process that minimizes oxidation and defects. The field emitter can take various shapes such as pyramids and rounded whiskers. One or several optional gate layers may be placed at or slightly lower than the height of the field emitter tip in order to achieve fast and accurate control of the emission current and high emission currents. The field emitter can be p-type doped and configured to operate in a reverse bias mode or the field emitter can be n-type doped.
摘要翻译：在具有相对的第一和第二表面的硅衬底上形成电子源。在硅衬底的第二表面上制备至少一个场致发射体以增强电子的发射。为了防止硅的氧化，使用最小化氧化和缺陷的工艺将薄的连续的硼层直接设置在场致发射体的输出表面上。场发射器可以采取各种形状，例如金字塔和圆形晶须。一个或几个可选的栅极层可以放置在或稍低于场发射极尖端的高度，以便实现对发射电流和高发射电流的快速和准确的控制。场发射极可以是p型掺杂的并且被配置为以反偏压模式操作，或者场发射极可以是n型掺杂的。

74. 发明授权

US09525265B2 Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms 有权
标题翻译：使用反射镜和/或棱镜的激光重复率倍增器和平顶光束轮廓发生器
公开(公告)号：US09525265B2
公开(公告)日：2016-12-20
申请号：US14596738
申请日：2015-01-14
申请人： KLA-Tencor Corporation
发明人： Yung-Ho Alex Chuang , Xiaoxu Lu , Justin Dianhuan Liou , J. Joseph Armstrong , Yujun Deng , John Fielden
IPC分类号： H01S3/10 , H01S3/00
CPC分类号： H01S3/10046 , G03F7/70025 , H01S3/005 , H01S3/0071 , H01S3/08004 , H01S3/08054 , H01S3/08059 , H01S3/083 , H01S3/10 , H01S3/10061 , H01S2301/20 , H01S2301/203 , H01S2301/206
摘要： A repetition rate (pulse) multiplier includes one or more beam splitters and prisms forming one or more ring cavities with different optical path lengths that delay parts of the energy of each pulse. A series of input laser pulses circulate in the ring cavities and part of the energy of each pulse leaves the system after traversing the shorter cavity path, while another part of the energy leaves the system after traversing the longer cavity path, and/or a combination of both cavity paths. By proper choice of the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitters. Some embodiments generate a time-averaged output beam profile that is substantially flat in one dimension.
摘要翻译：重复率（脉冲）乘法器包括一个或多个分束器和棱镜，其形成具有延迟每个脉冲的能量部分的不同光程长度的一个或多个环形空腔。一系列输入激光脉冲在环形腔中循环，并且每个脉冲的能量的一部分在穿过较短腔体路径之后离开系统，而另一部分能量在穿过较长腔体路径后离开系统，和/或组合两个腔道。通过适当选择环腔光程长度，激光脉冲的输出系列的重复率可以是输入重复率的倍数。可以通过选择分束器的透射和反射系数来控制输出脉冲的相对能量。一些实施例产生在一个维度上基本上平坦的时间平均的输出光束轮廓。

75. 发明申请

US20160359292A1 Laser Repetition Rate Multiplier And Flat-Top Beam Profile Generators Using Mirrors And/or Prisms 审中-公开
标题翻译：激光重复率乘法器和平顶波束轮廓发生器使用镜子和/或棱镜
公开(公告)号：US20160359292A1
公开(公告)日：2016-12-08
申请号：US15239268
申请日：2016-08-17
申请人： KLA-Tencor Corporation
发明人： Yung-Ho Alex Chuang , Xiaoxu Lu , Justin Dianhuan Liou , J. Joseph Armstrong , Yujun Deng , John Fielden
IPC分类号： H01S3/10 , H01S3/083 , H01S3/08
CPC分类号： H01S3/10046 , G03F7/70025 , H01S3/005 , H01S3/0071 , H01S3/08004 , H01S3/08054 , H01S3/08059 , H01S3/083 , H01S3/10 , H01S3/10061 , H01S2301/20 , H01S2301/203 , H01S2301/206
摘要： A repetition rate (pulse) multiplier includes one or more beam splitters and prisms forming one or more ring cavities with different optical path lengths that delay parts of the energy of each pulse. A series of input laser pulses circulate in the ring cavities and part of the energy of each pulse leaves the system after traversing the shorter cavity path, while another part of the energy leaves the system after traversing the longer cavity path, and/or a combination of both cavity paths. By proper choice of the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitters. Some embodiments generate a time-averaged output beam profile that is substantially flat in one dimension.
摘要翻译：重复率（脉冲）乘法器包括一个或多个分束器和棱镜，其形成具有延迟每个脉冲的能量部分的不同光程长度的一个或多个环形空腔。一系列输入激光脉冲在环形腔中循环，并且每个脉冲的能量的一部分在穿过较短腔体路径之后离开系统，而另一部分能量在穿过较长腔体路径后离开系统，和/或组合两个腔道。通过适当选择环腔光程长度，激光脉冲的输出系列的重复率可以是输入重复率的倍数。可以通过选择分束器的透射和反射系数来控制输出脉冲的相对能量。一些实施例产生在一个维度上基本上平坦的时间平均的输出光束轮廓。

76. 发明授权

US09494531B2 Multi-spot illumination for improved detection sensitivity 有权
标题翻译：多点照明提高检测灵敏度
公开(公告)号：US09494531B2
公开(公告)日：2016-11-15
申请号：US14455161
申请日：2014-08-08
申请人： KLA-Tencor Corporation
发明人： Yung-Ho Alex Chuang , Xiaoxu Lu , John Fielden , Ivan Maleev
IPC分类号： G01N21/88 , G01J1/04 , G01N21/95
CPC分类号： G01N21/9501 , G01J1/04 , G01N21/8806
摘要： Methods and systems for minimizing interference among multiple illumination beams generated from a non-uniform illumination source to provide an effectively uniform illumination profile over the field of view of an inspection system are presented. In some examples, a pulsed beam of light is split into multiple illumination beams such that each of the beams are temporally separated at the surface of the specimen under inspection. In some examples, multiple illumination beams generated from a non-uniform illumination source are projected onto spatially separated areas on the surface of the specimen. A point object of interest illuminated by each area is imaged onto the surface of a time-delay integration (TDI) detector. The images are integrated such that the relative position of the illumination areas along the direction of motion of the point object of interest has no impact on the illumination efficiency distribution over the field of view.
摘要翻译：提出了用于最小化从不均匀照明源产生的多个照明光束之间的干扰的方法和系统，以在检查系统的视场上提供有效均匀的照明轮廓。在一些示例中，脉冲光束被分成多个照明光束，使得每个光束在被检查的样品的表面处在时间上分离。在一些示例中，从不均匀照明源产生的多个照明光束投影到样本表面上的空间分离的区域上。由每个区域照明的感兴趣的点对象被成像到时间延迟积分（TDI）检测器的表面上。图像被集成为使得照明区域沿着感兴趣点对象的运动方向的相对位置对视场的照明效率分布没有影响。

77. 发明申请

US20160315114A1 Image Sensor, An Inspection System And A Method Of Inspecting An Article 有权
公开(公告)号：US20160315114A1
公开(公告)日：2016-10-27
申请号：US15201028
申请日：2016-07-01
申请人： KLA-Tencor Corporation
发明人： Yung-Ho Alex Chuang , Jingjing Zhang , John Fielden
IPC分类号： H01L27/146 , H01L31/107 , G01N21/88 , H01L27/148 , G01N21/95
CPC分类号： H01L27/14632 , G01N21/8806 , G01N21/9501 , G01N2201/061 , G01N2201/0638 , G01N2201/12 , H01L27/14609 , H01L27/1461 , H01L27/14612 , H01L27/1462 , H01L27/1464 , H01L27/14643 , H01L27/14645 , H01L27/14647 , H01L27/14681 , H01L27/14685 , H01L27/14687 , H01L27/14689 , H01L27/14698 , H01L27/14825 , H01L27/14831 , H01L27/14856 , H01L31/028 , H01L31/107 , H01L31/1804
摘要： A high sensitivity image sensor comprises an epitaxial layer of silicon that is intrinsic or lightly p doped (such as a doping level less than about 1013 cm−3). CMOS or CCD circuits are fabricated on the front-side of the epitaxial layer. Epitaxial p and n type layers are grown on the backside of the epitaxial layer. A pure boron layer is deposited on the n-type epitaxial layer. Some boron is driven a few nm into the n-type epitaxial layer from the backside during the boron deposition process. An anti-reflection coating may be applied to the pure boron layer. During operation of the sensor a negative bias voltage of several tens to a few hundred volts is applied to the boron layer to accelerate photo-electrons away from the backside surface and create additional electrons by an avalanche effect. Grounded p-wells protect active circuits as needed from the reversed biased epitaxial layer.

78. 发明申请

US20160300701A1 Photomultiplier Tube, Image Sensor, And An Inspection System Using A PMT Or Image Sensor 有权
标题翻译：光电倍增管，图像传感器和使用PMT或图像传感器的检测系统
公开(公告)号：US20160300701A1
公开(公告)日：2016-10-13
申请号：US15189871
申请日：2016-06-22
申请人： KLA-Tencor Corporation
发明人： Yung-Ho Alex Chuang , David L. Brown , John Fielden
IPC分类号： H01J40/06 , H01L31/103 , H01L31/0216 , H01J43/08
CPC分类号： H01J40/06 , H01J43/08 , H01L31/02161 , H01L31/103
摘要： A system for inspecting a sample including a detector, either a photomultiplier tube or an electron-bombarded image sensor, that is positioned to receive light from the sample. The detector includes a semiconductor photocathode and a photodiode. Notably, the photodiode includes a p-doped semiconductor layer, an n-doped semiconductor layer formed on a first surface of the p-doped semiconductor layer to form a diode, and a pure boron layer formed on a second surface of the p-doped semiconductor layer. The semiconductor photocathode includes silicon, and further includes a pure boron coating on at least one surface.
摘要翻译：用于检查包括检测器，光电倍增管或电子轰击图像传感器的样品的系统，其被定位成接收来自样品的光。检测器包括半导体光电阴极和光电二极管。值得注意的是，光电二极管包括p掺杂半导体层，形成在p掺杂半导体层的第一表面上以形成二极管的n掺杂半导体层，以及在p掺杂的第二表面上形成的纯硼层半导体层。半导体光电阴极包括硅，并且在至少一个表面上还包括纯硼涂层。

79. 发明授权

US09410901B2 Image sensor, an inspection system and a method of inspecting an article 有权
标题翻译：图像传感器，检查系统和检查物品的方法
公开(公告)号：US09410901B2
公开(公告)日：2016-08-09
申请号：US14643148
申请日：2015-03-10
申请人： KLA-Tencor Corporation
发明人： Yung-Ho Alex Chuang , Jingjing Zhang , John Fielden
IPC分类号： H01L25/00 , G01N21/95 , G01N21/88 , H01L27/146 , H01L27/148 , H01L31/107 , H01L31/028 , H01L31/18
CPC分类号： H01L27/14632 , G01N21/8806 , G01N21/9501 , G01N2201/061 , G01N2201/0638 , G01N2201/12 , H01L27/14609 , H01L27/1461 , H01L27/14612 , H01L27/1462 , H01L27/1464 , H01L27/14643 , H01L27/14645 , H01L27/14647 , H01L27/14681 , H01L27/14685 , H01L27/14687 , H01L27/14689 , H01L27/14698 , H01L27/14825 , H01L27/14831 , H01L27/14856 , H01L31/028 , H01L31/107 , H01L31/1804
摘要： A high sensitivity image sensor comprises an epitaxial layer of silicon that is intrinsic or lightly p doped (such as a doping level less than about 1013 cm−3). CMOS or CCD circuits are fabricated on the front-side of the epitaxial layer. Epitaxial p and n type layers are grown on the backside of the epitaxial layer. A pure boron layer is deposited on the n-type epitaxial layer. Some boron is driven a few nm into the n-type epitaxial layer from the backside during the boron deposition process. An anti-reflection coating may be applied to the pure boron layer. During operation of the sensor a negative bias voltage of several tens to a few hundred volts is applied to the boron layer to accelerate photo-electrons away from the backside surface and create additional electrons by an avalanche effect. Grounded p-wells protect active circuits as needed from the reversed biased epitaxial layer.
摘要翻译：高灵敏度图像传感器包括硅的外延层，其是固有的或轻掺杂的（例如掺杂水平小于约1013cm-3）。 CMOS或CCD电路制造在外延层的前侧。外延p和n型层生长在外延层的背面。在n型外延层上沉积纯硼层。在硼沉积过程中，一些硼从背面被驱动到几nm的n型外延层中。可以将抗反射涂层施加到纯硼层。在传感器的操作期间，将数十至几百伏的负偏压施加到硼层，以加速光电子远离背面，并通过雪崩效应产生额外的电子。接地的p阱可以根据需要从反向偏置的外延层保护有源电路。

80. 发明申请

US20150364895A1 Semiconductor Inspection And Metrology System Using Laser Pulse Multiplier 有权
标题翻译：使用激光脉冲乘法器的半导体检测和计量系统
公开(公告)号：US20150364895A1
公开(公告)日：2015-12-17
申请号：US14832833
申请日：2015-08-21
申请人： KLA-Tencor Corporation
发明人： Yung-Ho Alex Chuang , Justin Dianhuan Liou , J. Joseph Armstrong , Yujun Deng
IPC分类号： H01S3/00 , G02B17/08 , G02B27/10 , H01S3/10
CPC分类号： H01S3/005 , C23C16/00 , G02B17/00 , G02B17/0848 , G02B27/00 , G02B27/108 , H01S3/00 , H01S3/10
摘要： A pulse multiplier includes a beam splitter and one or more mirrors. The beam splitter receives a series of input laser pulses and directs part of the energy of each pulse into a ring cavity. After circulating around the ring cavity, part of the pulse energy leaves the ring cavity through the beam splitter and part of the energy is recirculated. By selecting the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitter. This pulse multiplier can inexpensively reduce the peak power per pulse while increasing the number of pulses per second with minimal total power loss.
摘要翻译：脉冲倍增器包括分束器和一个或多个反射镜。分束器接收一系列输入激光脉冲并将每个脉冲的能量的一部分引导到环形腔中。在环形腔周围循环后，部分脉冲能量通过分束器离开环形空腔，部分能量被再循环。通过选择环腔光路长度，可以将输出系列激光脉冲的重复率设为输入重复率的倍数。可以通过选择分束器的透射和反射系数来控制输出脉冲的相对能量。该脉冲倍增器可以以最小的总功率损耗来降低每脉冲的峰值功率，同时增加每秒的脉冲数。

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