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1. 发明授权

US09798124B2 Image display apparatus and image capturing apparatus 有权
公开(公告)号：US09798124B2
公开(公告)日：2017-10-24
申请号：US15213678
申请日：2016-07-19
申请人： CANON KABUSHIKI KAISHA
发明人： Ryoji Kondo
IPC分类号： G02B17/08 , G02B5/13 , G06F3/01 , H04N5/374 , G02B27/01
CPC分类号： G02B17/0856 , G02B5/13 , G02B17/0848 , G02B17/086 , G02B27/0172 , G06F3/011 , H04N5/374
摘要： The image display apparatus includes an optical system causing a light flux entering from an original image by being transmitted through a fifth surface to reflect at a fourth surface, a third surface, a first surface and a second surface and then cause the light flux to be transmitted through the first surface and exit toward an exit pupil, causing the light flux to form an intermediate image and causing optical paths to intersect with each other. The optical system satisfies 0.62≦L12/f≦5.00 and 1.80≦L45/L12≦5.00. When a distance between hit points of a central-view-angle principal ray on the surfaces is referred to as a hit point distance, L45 represents a hit point distance between the fourth and fifth surfaces, L12 represents a hit point distance between the first and second surfaces, and f represents a focal length of the optical system.

2. 发明申请

US20170132782A1 METHOD FOR THREE-DIMENSIONALLY MEASURING A 3D AERIAL IMAGE OF A LITHOGRAPHY MASK 审中-公开
公开(公告)号：US20170132782A1
公开(公告)日：2017-05-11
申请号：US15410918
申请日：2017-01-20
申请人： Carl Zeiss SMT GmbH
发明人： Ulrich Matejka , Christoph Husemann , Johannes Ruoff , Sascha Perlitz , Hans-Jürgen Mann
IPC分类号： G06T7/00 , G06T7/11 , G06T3/40 , G03F1/84 , G06T11/60 , G02B27/22 , G02B27/09 , G06T7/60 , G06T3/00
CPC分类号： G06T7/0004 , G02B5/005 , G02B13/08 , G02B17/0647 , G02B17/0828 , G02B17/0848 , G02B21/04 , G02B21/361 , G02B27/0927 , G02B27/0988 , G02B27/2292 , G03F1/84 , G06T3/0093 , G06T3/40 , G06T7/11 , G06T7/60 , G06T11/60 , G06T2200/04 , G06T2207/10032 , G06T2207/20048 , G06T2207/20076 , G06T2207/30148 , G21K7/00
摘要： In a method for three-dimensionally measuring a 3D aerial image in the region around an image plane during the imaging of a lithography mask, which is arranged in an object plane, a selectable imaging scale ratio in mutually perpendicular directions (x, y) is taken into account. For this purpose, an electromagnetic wavefront of imaging light is reconstructed after interaction thereof with the lithography mask. An influencing variable that corresponds to the imaging scale ratio is included. Finally, the 3D aerial image measured with the inclusion of the influencing variable is output. This results in a measuring method with which lithography masks that are optimized for being used with an anamorphic projection optical unit during projection exposure can also be measured.

3. 发明申请

US20170131528A1 IMAGING OPTICAL UNIT FOR A METROLOGY SYSTEM FOR EXAMINING A LITHOGRAPHY MASK 审中-公开
公开(公告)号：US20170131528A1
公开(公告)日：2017-05-11
申请号：US15410904
申请日：2017-01-20
申请人： Carl Zeiss SMT GmbH
发明人： Johannes Ruoff , Ralf Müller , Susanne Beder , Ulrich Matejka , Hans-Jürgen Mann , Jens Timo Neumann
IPC分类号： G02B17/06 , G03F1/84 , G02B21/04 , G02B21/36 , G02B13/08 , G02B5/00
CPC分类号： G06T7/0004 , G02B5/005 , G02B13/08 , G02B17/0647 , G02B17/0828 , G02B17/0848 , G02B21/04 , G02B21/361 , G02B27/0927 , G02B27/0988 , G02B27/2292 , G03F1/84 , G06T3/0093 , G06T3/40 , G06T7/11 , G06T7/60 , G06T11/60 , G06T2200/04 , G06T2207/10032 , G06T2207/20048 , G06T2207/20076 , G06T2207/30148 , G21K7/00
摘要： An imaging optical unit serves within a metrology system for examining a lithography mask. The lithography mask can be arranged in an object field of the imaging optical unit. The object field is defined by two mutually perpendicular object field coordinates. The imaging optical unit has an aperture stop of which the aspect ratio in the direction of the two object field coordinates differs from 1. This results in an imaging optical unit which can be used for the examination of lithography masks that are designed for projection exposure with an anamorphic projection optical unit.

4. 发明授权

US08724216B2 Dual band infrared continuous zoom lens 失效
标题翻译：双频红外连续变焦镜头
公开(公告)号：US08724216B2
公开(公告)日：2014-05-13
申请号：US12975424
申请日：2010-12-22
申请人： Jay N. Vizgaitis
发明人： Jay N. Vizgaitis
IPC分类号： G02B23/00 , G02B17/06 , G02B17/08 , G02B23/12
CPC分类号： G02B13/146 , G02B9/64 , G02B13/14 , G02B17/0642 , G02B17/0832 , G02B17/0848 , G02B17/0896 , G02B23/12
摘要： A continuous zoom lens arrangement can image MWIR and LWIR spectral bands to a common image plane. Such an exemplary optical system comprises eight infrared imaging lenses that all transmit over the wavelengths 3.5-11.0 microns and form a collocated image plane for the MWIR and LWIR spectral bands. The lens has six stationary lenses, and two lenses that move in an axial fashion. A cold stop inside the dewar can act as the aperture stop of the system and control the stray light from reaching the FPA. The pupil is reimaged from the cold stop to near the first lens of the system to minimize the size of the lens.
摘要翻译：连续变焦镜头装置可将MWIR和LWIR光谱带图像映射到公共图像平面。这样的示例性光学系统包括八个红外成像透镜，其全部在3.5-11.0微米的波长上传输并形成用于MWIR和LWIR光谱带的并置图像平面。镜头有六个固定镜头，两个透镜以轴向方式移动。杜瓦瓶内的冷藏可以作为系统的孔径光阑，并控制杂散光到达FPA。将瞳孔从冷停止件重新成像到系统的第一个透镜附近，以最小化透镜的尺寸。

5. 发明授权

US08622542B2 Image display apparatus 有权
标题翻译：图像显示装置
公开(公告)号：US08622542B2
公开(公告)日：2014-01-07
申请号：US13187847
申请日：2011-07-21
申请人： Koichi Takahashi
发明人： Koichi Takahashi
IPC分类号： G02C1/00 , G02B27/14
CPC分类号： G02B27/0172 , G02B5/04 , G02B17/0848 , G02B17/086 , G02B2027/011 , G02B2027/0178
摘要： The image display apparatus of the invention comprises a prism optical system using at least two optical surfaces, each having an optical function. At least two surfaces of the two optical surfaces are rotationally asymmetric surfaces, and one of the two surfaces which light transmits or leaves has a function of one transmission and two internal reflections.
摘要翻译：本发明的图像显示装置包括使用至少两个具有光学功能的光学表面的棱镜光学系统。两个光学表面的至少两个表面是旋转非对称的表面，光透射或离开的两个表面中的一个具有一个透射和两个内部反射的功能。

6. 发明申请

US20130222896A1 VIRTUAL IMAGE DISPLAY APPARATUS 有权
标题翻译：虚拟图像显示设备
公开(公告)号：US20130222896A1
公开(公告)日：2013-08-29
申请号：US13773058
申请日：2013-02-21
申请人： SEIKO EPSON CORPORATION
发明人： Akira KOMATSU , Takahiro TOTANI , Takashi TAKEDA , Toshiaki MIYAO , Masayuki TAKAGI
IPC分类号： G02B27/01
CPC分类号： G02B27/0172 , G02B17/0848 , G02B17/086 , G02B27/0101 , G02B27/017 , G02B2027/0123
摘要： An intermediate image is formed inside a prism by a projection lens and the like. Image light, totally reflected, in the order of a third surface, a first surface and a second surface, on two or more surfaces thereof, reaches an eye of an observer after passing through the first surface. Thus, it is possible to decrease the thickness of the prism and to reduce the size and weight of the entire optical system. Further, it is possible to realize a bright high-performance display with a wide viewing angle. With respect to external light, it is possible to pass the external light through the first surface and the third surface, for example, for observation. Further, by setting diopter at this time to about 0, it is possible to reduce defocusing or warp of the external light when the external light is observed in a see-through manner.
摘要翻译：通过投影透镜等在棱镜内部形成中间图像。在其两个或多个表面上以第三表面，第一表面和第二表面的顺序全反射的图像光在通过第一表面之后到达观察者的眼睛。因此，可以减小棱镜的厚度并减小整个光学系统的尺寸和重量。此外，可以实现具有宽视角的明亮的高性能显示。对于外部光，可以使外部光穿过第一表面和第三表面，例如用于观察。此外，通过将此时的屈光度设定为约0，当以观察方式观察外部光时，可以减少外部光的散焦或翘曲。

7. 发明授权

US07938545B2 Projection optical system, magnification projection optical system, magnification projection apparatus, and image projection apparatus 有权
标题翻译：投影光学系统，放大投影光学系统，放大投影装置和图像投影装置
公开(公告)号：US07938545B2
公开(公告)日：2011-05-10
申请号：US12909540
申请日：2010-10-21
申请人： Atsushi Takaura , Kazuhiro Fujita , Nobuo Sakuma
发明人： Atsushi Takaura , Kazuhiro Fujita , Nobuo Sakuma
IPC分类号： G03B21/28
CPC分类号： G03B21/28 , G02B13/16 , G02B17/0816 , G02B17/0848 , G02B17/0852
摘要： A projection optical system for use in an image projection apparatus illuminating a lightbulb forming an image in accordance with a modulating signal with illumination light from a light source is disclosed. The projection optical system includes first and second optical systems arranged along an optical path defining an upstream-downstream direction in the order described from upstream to downstream on the downstream side of the lightbulb. The first optical system includes at least one dioptric system and has positive power. The second optical system includes at least one reflecting surface having power and has positive power. The image formed by the lightbulb is formed as an intermediate image in the optical path, and the intermediate image is magnified and projected.
摘要翻译：公开了一种用于图像投影装置的投影光学系统，其利用来自光源的照明光照射形成根据调制信号的图像的灯泡。投影光学系统包括沿着光路布置的第一和第二光学系统，该光学路径以从灯泡的下游侧的上游到下游描述的顺序限定上游 - 下游方向。第一光学系统包括至少一个屈光度系统并且具有正的功率。第二光学系统包括具有功率并且具有正功率的至少一个反射表面。由灯泡形成的图像形成为光路中的中间图像，并且中间图像被放大和投影。

8. 发明授权

US07903301B2 Imaging optical system and image reading apparatus using the same 有权
标题翻译：成像光学系统和使用其的图像读取装置
公开(公告)号：US07903301B2
公开(公告)日：2011-03-08
申请号：US11961727
申请日：2007-12-20
申请人： Takeyoshi Saiga
发明人： Takeyoshi Saiga
IPC分类号： H04N1/04
CPC分类号： H04N1/03 , G02B17/0848 , H04N1/0303 , H04N1/0305
摘要： An imaging optical system for imaging imagewise information provided on a surface of an original, upon a surface of an image pickup device such that the imagewise information is read based on signals from the image pickup device, the imaging optical system including four off-axial reflection surfaces which are asymmetric within a sub-scan section, wherein, when a combined power, in a main-scan direction, of two off-axial reflection surfaces of said four off-axial reflection surfaces which are optically close to an original side is denoted by Mf and a combined power, in the main-scan direction, of two off-axial reflection surfaces of the four off-axial reflection surfaces which are optically close to an image pickup device side is denoted by Mr, relations −0.3
摘要翻译：一种成像光学系统，用于对提供在原件表面上的图像信息进行成像，在图像拾取装置的表面上，使得基于来自图像拾取装置的信号读取图像信息，成像光学系统包括四个离轴反射在副扫描部分内不对称的表面，其中当在主扫描方向上组合功率表示所述四个偏轴反射表面的光学上接近原始侧的两个偏轴反射表面时通过Mf和在主扫描方向上的光学上靠近图像拾取装置侧的四个偏轴反射表面的两个偏轴反射表面的组合功率表示为Mr，关系-0.3

9. 发明授权

US07712905B2 Imaging system with mirror group 有权
标题翻译：镜像组成像系统
公开(公告)号：US07712905B2
公开(公告)日：2010-05-11
申请号：US11578098
申请日：2005-03-22
申请人： David Shafer , Aurelian Dodoc , Alexander Epple , Hans-Juergen Mann
发明人： David Shafer , Aurelian Dodoc , Alexander Epple , Hans-Juergen Mann
IPC分类号： G02B5/08
CPC分类号： G02B17/0804 , G02B17/0808 , G02B17/0812 , G02B17/0816 , G02B17/0836 , G02B17/0844 , G02B17/0848 , G02B17/086 , G02B17/0892 , G03F7/70058 , G03F7/70225 , G03F7/70275 , G03F7/70341
摘要： An imaging system for imaging an off-axis object field arranged in an object surface of the imaging system onto an off-axis image field arranged in an image surface of the imaging system while creating at least one intermediate image has: an optical axis; an in-line mirror group having an object side mirror group entry, an image side mirror group exit and a mirror group plane aligned transversely to the optical axis and arranged geometrically between the mirror group entry and the mirror group exit, the mirror group including: a first mirror having a first mirror surface for receiving radiation coming from the object surface in a first reflecting area asymmetric to the optical axis; at least one second mirror having a second mirror surface facing the first mirror surface for receiving radiation coming from the first mirror in a second reflecting area asymmetric to the optical axis; at least one of the first and second mirrors being a concave mirror having a concave mirror surface defining a mirror axis on the optical axis; wherein the mirrors of the mirror group are arranged such that radiation coming from the mirror group entry passes at least four times through the mirror group plane and is reflected at least twice on a concave mirror surface of the mirror group prior to exiting the mirror group at the mirror group exit. A strong overcorrection of image field curvature can be effected in an axially compact design.
摘要翻译：用于将布置在成像系统的物体表面中的离轴对象场成像到设置在成像系统的图像表面中的离轴图像场同时创建至少一个中间图像的成像系统具有：光轴; 具有对象侧反射镜组入口的直列式反射镜组，横向于所述光轴排列的像侧反射镜组出射和反射镜组平面，并且几何地布置在所述反射镜组入口和所述镜子组出口之间，所述镜组包括：第一反射镜，具有第一反射镜表面，用于在与光轴不对称的第一反射区域中接收来自物体表面的辐射; 至少一个第二反射镜，具有面向第一镜面的第二镜面，用于在不对称于光轴的第二反射区域中接收来自第一反射镜的辐射; 所述第一和第二反射镜中的至少一个是凹面镜，所述凹面镜具有在光轴上限定反射镜轴的凹面镜面; 其中反射镜组的反射镜被布置成使得来自反射镜组入口的辐射通过镜组平面至少四次，并且在离开镜组之前在镜组的凹面镜表面上反射至少两次镜组退出。可以在轴向紧凑的设计中实现图像场曲率的强过度校正。

10. 发明授权

US07542211B2 Image-forming optical system 有权
标题翻译：成像光学系统
公开(公告)号：US07542211B2
公开(公告)日：2009-06-02
申请号：US12015904
申请日：2008-01-17
申请人： Takayoshi Togino
发明人： Takayoshi Togino
IPC分类号： G02B27/14 , G02B17/00
CPC分类号： G02B17/086 , G02B17/0848 , H04N5/2254 , H04N5/23293 , H04N2005/2255
摘要： A high-performance image-forming optical system made compact and thin by folding an optical path using reflecting surfaces arranged to minimize the number of reflections. The image-forming optical system has a single prism. When image-side three surfaces of the prism are defined as a surface A, a surface B and a surface C in order from the image plane side thereof, at least one of the surfaces B and C has a rotationally asymmetric curved surface configuration that gives a power to a light beam and corrects aberrations due to decentration. The optical system leads light rays from an object to the image plane without forming an image in the prism and has a pupil in the prism. The surface A is a transmitting surface through which rays exit from the prism. The surfaces B and C are internally reflecting surfaces, which are positioned to face each other to form a Z-shaped optical path.
摘要翻译：高性能的成像光学系统通过使用反射表面折叠光路而变得紧凑和薄型，以使反射次数最小化。图像形成光学系统具有单个棱镜。当棱镜的图像侧三面被定义为表面A，表面B和表面C时，从其像面侧开始，表面B和C中的至少一个具有旋转非对称的曲面构型，其给出光束的功率和纠正由于偏心造成的像差。光学系统将来自物体的光线引导到图像平面，而不在棱镜中形成图像，并且在棱镜中具有瞳孔。表面A是射线从棱镜射出的透射面。表面B和C是内部反射表面，其被定位成彼此面对以形成Z形光路。

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