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1. 发明授权

US09239295B2 Variable polarization wafer inspection 有权
标题翻译：可变偏振晶片检查
公开(公告)号：US09239295B2
公开(公告)日：2016-01-19
申请号：US13857744
申请日：2013-04-05
申请人： KLA-Tencor Corporation
发明人： Xianzhao Peng , Mark Shi Wang , Grace Hsiu-Ling Chen
IPC分类号： G01N21/88 , G01N21/21 , G01N21/95
CPC分类号： G01N21/8806 , G01N21/21 , G01N21/9501 , G01N2021/8848
摘要： Methods and systems for variable polarization wafer inspection are provided. One system includes one or more polarizing components position in one or more paths of light scattered from a wafer and detected by one or more channels of an inspection system. The polarizing component(s) are configured to have detection polarization(s) that are selected from two or more polarization settings for the polarizing component(s).
摘要翻译：提供了用于可变偏振晶片检查的方法和系统。一个系统包括一个或多个偏振组件，位于从晶片散射的光的一个或多个路径中，并由检查系统的一个或多个通道检测。偏振分量被配置为具有从偏振分量的两个或更多个偏振设置中选择的检测极化。

2. 发明申请

US20130265577A1 Variable Polarization Wafer Inspection 有权
标题翻译：可变极化晶圆检测
公开(公告)号：US20130265577A1
公开(公告)日：2013-10-10
申请号：US13857744
申请日：2013-04-05
申请人： KLA-TENCOR CORPORATION
发明人： Xianzhao Peng , Mark Shi Wang , Grace Hsiu-Ling Chen
IPC分类号： G01N21/21
CPC分类号： G01N21/8806 , G01N21/21 , G01N21/9501 , G01N2021/8848
摘要： Methods and systems for variable polarization wafer inspection are provided. One system includes one or more polarizing components position in one or more paths of light scattered from a wafer and detected by one or more channels of an inspection system. The polarizing component(s) are configured to have detection polarization(s) that are selected from two or more polarization settings for the polarizing component(s).
摘要翻译：提供了用于可变偏振晶片检查的方法和系统。一个系统包括一个或多个偏振组件，位于从晶片散射的光的一个或多个路径中，并由检查系统的一个或多个通道检测。偏振分量被配置为具有从偏振分量的两个或更多个偏振设置中选择的检测极化。

3. 发明申请

US20140260640A1 Interleaved Acousto-Optical Device Scanning For Suppression Of Optical Crosstalk 有权
标题翻译：用于抑制光串扰的交错声光装置扫描
公开(公告)号：US20140260640A1
公开(公告)日：2014-09-18
申请号：US13844576
申请日：2013-03-15
申请人： KLA-Tencor Corporation
发明人： Jamie Sullivan , Wenjian Cai , Yevgeniy Churin , Ralph Johnson , Meier Yitzhak Brender , Mark Shi Wang , Rex Runyon , Kai Cao
IPC分类号： G01N29/24
CPC分类号： G01N29/2418 , G01N21/8806 , G01N21/9501 , G01N21/956 , G01N2291/2697
摘要： A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.
摘要翻译：扫描样本的方法同时形成多个共线扫描。通过声光装置（AOD）的扫描形成每个扫描。共线扫描以预定间隔分开。通过在垂直于共线扫描的方向上重复同时形成多个共线扫描来形成第一多个条带。第一多个条带具有与预定间隔相同的跨幅间距。可以在第一多个条带附近形成第二多个条带。形成第二多个条可以沿与第一多个条的方向相反的方向或在相同的方向上执行。检查系统可以通过在放大倍率变换器之后包括衍射光学元件（DOE）路径来实现该方法。

4. 发明授权

US10194108B2 Sensor with electrically controllable aperture for inspection and metrology systems 有权
公开(公告)号：US10194108B2
公开(公告)日：2019-01-29
申请号：US15806913
申请日：2017-11-08
申请人： KLA-Tencor Corporation
发明人： Yung-Ho Alex Chuang , John Fielden , David L. Brown , Jingjing Zhang , Keith Lyon , Mark Shi Wang
IPC分类号： G01N21/00 , H04N5/3722 , G01N21/956
摘要： Pixel aperture size adjustment in a linear sensor is achieved by applying more negative control voltages to central regions of the pixel's resistive control gate, and applying more positive control voltages to the gate's end portions. These control voltages cause the resistive control gate to generate an electric field that drives photoelectrons generated in a selected portion of the pixel's light sensitive region into a charge accumulation region for subsequent measurement, and drives photoelectrons generated in other portions of the pixel's light sensitive region away from the charge accumulation region for subsequent discard or simultaneous readout. A system utilizes optics to direct light received at different angles or locations from a sample into corresponding different portions of each pixel's light sensitive region. Multiple aperture control electrodes are selectively actuated to collect/measure light received from either narrow or wide ranges of angles or locations, thereby enabling rapid image data adjustment.

5. 发明授权

US09395340B2 Interleaved acousto-optical device scanning for suppression of optical crosstalk 有权
标题翻译：用于抑制光学串扰的交错声光器件扫描
公开(公告)号：US09395340B2
公开(公告)日：2016-07-19
申请号：US13844576
申请日：2013-03-15
申请人： KLA-Tencor Corporation
发明人： Jamie Sullivan , Wenjian Cai , Yevgeniy Churin , Ralph Johnson , Meier Yitzhak Brender , Mark Shi Wang , Rex Runyon , Kai Cao
IPC分类号： G01N21/88 , G01N21/95 , G01N29/24 , G01N21/956
CPC分类号： G01N29/2418 , G01N21/8806 , G01N21/9501 , G01N21/956 , G01N2291/2697
摘要： A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.
摘要翻译：扫描样本的方法同时形成多个共线扫描。通过声光装置（AOD）的扫描形成每个扫描。共线扫描以预定间隔分开。通过在垂直于共线扫描的方向上重复同时形成多个共线扫描来形成第一多个条带。第一多个条带具有与预定间隔相同的跨幅间距。可以在第一多个条带附近形成第二多个条带。形成第二多个条可以沿与第一多个条的方向相反的方向或在相同的方向上执行。检查系统可以通过在放大倍率变换器之后包括衍射光学元件（DOE）路径来实现该方法。

6. 发明授权

US10060884B2 Interleaved acousto-optical device scanning for suppression of optical crosstalk 有权
公开(公告)号：US10060884B2
公开(公告)日：2018-08-28
申请号：US15184590
申请日：2016-06-16
申请人： KLA-Tencor Corporation
发明人： Jamie Sullivan , Wenjian Cai , Yevgeniy Churin , Ralph Johnson , Meier Yitzhak Brender , Mark Shi Wang , Rex Runyon , Kai Cao
IPC分类号： G01N21/88 , G01N21/95 , G01N29/24 , G01N21/956
CPC分类号： G01N29/2418 , G01N21/8806 , G01N21/9501 , G01N21/956 , G01N2291/2697
摘要： A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. The predetermined spacing can be a scan length or an integral number of scan lengths. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.

7. 发明授权

US09860466B2 Sensor with electrically controllable aperture for inspection and metrology systems 有权
公开(公告)号：US09860466B2
公开(公告)日：2018-01-02
申请号：US15153543
申请日：2016-05-12
申请人： KLA-Tencor Corporation
发明人： Yung-Ho Alex Chuang , John Fielden , David L. Brown , Jingjing Zhang , Keith Lyon , Mark Shi Wang
IPC分类号： G01N21/00 , H04N5/3722 , G01N21/956
CPC分类号： H04N5/3722 , G01N21/956 , G01N2201/12
摘要： Pixel aperture size adjustment in a linear sensor is achieved by applying more negative control voltages to central regions of the pixel's resistive control gate, and applying more positive control voltages to the gate's end portions. These control voltages cause the resistive control gate to generate an electric field that drives photoelectrons generated in a selected portion of the pixel's light sensitive region into a charge accumulation region for subsequent measurement, and drives photoelectrons generated in other portions of the pixel's light sensitive region away from the charge accumulation region for subsequent discard or simultaneous readout. A system utilizes optics to direct light received at different angles or locations from a sample into corresponding different portions of each pixel's light sensitive region. Multiple aperture control electrodes are selectively actuated to collect/measure light received from either narrow or wide ranges of angles or locations, thereby enabling rapid image data adjustment.

8. 发明申请

US20160334342A1 Sensor With Electrically Controllable Aperture For Inspection And Metrology Systems 有权
标题翻译：用于检测和计量系统的带有可控孔径的传感器
公开(公告)号：US20160334342A1
公开(公告)日：2016-11-17
申请号：US15153543
申请日：2016-05-12
申请人： KLA-Tencor Corporation
发明人： Yung-Ho Alex Chuang , John Fielden , David L. Brown , Jingjing Zhang , Keith Lyon , Mark Shi Wang
IPC分类号： G01N21/95
CPC分类号： H04N5/3722 , G01N21/956 , G01N2201/12
摘要： Pixel aperture size adjustment in a linear sensor is achieved by applying more negative control voltages to central regions of the pixel's resistive control gate, and applying more positive control voltages to the gate's end portions. These control voltages cause the resistive control gate to generate an electric field that drives photoelectrons generated in a selected portion of the pixel's light sensitive region into a charge accumulation region for subsequent measurement, and drives photoelectrons generated in other portions of the pixel's light sensitive region away from the charge accumulation region for subsequent discard or simultaneous readout. A system utilizes optics to direct light received at different angles or locations from a sample into corresponding different portions of each pixel's light sensitive region. Multiple aperture control electrodes are selectively actuated to collect/measure light received from either narrow or wide ranges of angles or locations, thereby enabling rapid image data adjustment.
摘要翻译：通过对像素的电阻控制栅极的中心区域施加更多的负的控制电压，并对栅极的端部施加更多的正的控制电压来实现线性传感器中的像素孔径尺寸调整。这些控制电压使得电阻控制栅极产生将在像素的感光区域的选定部分中产生的光电子驱动到用于后续测量的电荷累积区域中的电场，并驱动在像素的光敏区域的其他部分中产生的光电子从电荷累积区域进行随后的丢弃或同时读出。系统利用光学器件将从不同角度或不同位置接收的光引导到每个像素的光敏区域的相应不同部分。选择性地启动多个孔径控制电极以收集/测量从窄范围或宽范围的角度或位置接收的光，从而实现快速的图像数据调整。

9. 发明申请

US20180070040A1 Sensor With Electrically Controllable Aperture For Inspection And Metrology Systems 审中-公开
公开(公告)号：US20180070040A1
公开(公告)日：2018-03-08
申请号：US15806913
申请日：2017-11-08
申请人： KLA-Tencor Corporation
发明人： Yung-Ho Alex Chuang , John Fielden , David L. Brown , Jingjing Zhang , Keith Lyon , Mark Shi Wang
IPC分类号： H04N5/3722
CPC分类号： H04N5/3722 , G01N21/956 , G01N2201/12
摘要： Pixel aperture size adjustment in a linear sensor is achieved by applying more negative control voltages to central regions of the pixel's resistive control gate, and applying more positive control voltages to the gate's end portions. These control voltages cause the resistive control gate to generate an electric field that drives photoelectrons generated in a selected portion of the pixel's light sensitive region into a charge accumulation region for subsequent measurement, and drives photoelectrons generated in other portions of the pixel's light sensitive region away from the charge accumulation region for subsequent discard or simultaneous readout. A system utilizes optics to direct light received at different angles or locations from a sample into corresponding different portions of each pixel's light sensitive region. Multiple aperture control electrodes are selectively actuated to collect/measure light received from either narrow or wide ranges of angles or locations, thereby enabling rapid image data adjustment.

10. 发明申请

US20160290971A1 Interleaved Acousto-Optical Device Scanning For Suppression Of Optical Crosstalk 审中-公开
标题翻译：用于抑制光串扰的交错声光装置扫描
公开(公告)号：US20160290971A1
公开(公告)日：2016-10-06
申请号：US15184590
申请日：2016-06-16
申请人： KLA-Tencor Corporation
发明人： Jamie Sullivan , Wenjian Cai , Yevgeniy Churin , Ralph Johnson , Meier Yitzhak Brender , Mark Shi Wang , Rex Runyon , Kai Cao
IPC分类号： G01N29/24 , G01N21/95 , G01N21/956 , G01N21/88
CPC分类号： G01N29/2418 , G01N21/8806 , G01N21/9501 , G01N21/956 , G01N2291/2697
摘要： A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. The predetermined spacing can be a scan length or an integral number of scan lengths. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.
摘要翻译：扫描样本的方法同时形成多个共线扫描。通过声光装置（AOD）的扫描形成每个扫描。共线扫描以预定间隔分开。通过在垂直于共线扫描的方向上重复同时形成多个共线扫描来形成第一多个条带。第一多个条带具有与预定间隔相同的跨幅间距。预定间隔可以是扫描长度或整数倍的扫描长度。可以在第一多个条带附近形成第二多个条带。形成第二多个条可以沿与第一多个条的方向相反的方向或在相同的方向上执行。检查系统可以通过在放大倍率变换器之后包括衍射光学元件（DOE）路径来实现该方法。

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