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71. 发明申请

US20100259574A1 LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, AND ACTUATOR 有权
标题翻译：液体喷射头，液体喷射装置和执行器
公开(公告)号：US20100259574A1
公开(公告)日：2010-10-14
申请号：US12757519
申请日：2010-04-09
申请人： Koji SUMI
发明人： Koji SUMI
IPC分类号： B41J2/07 , H01L41/09
CPC分类号： B41J2/04581 , B41J2/0459 , B41J2/14233 , H01L41/0973
摘要： A liquid ejecting head includes a flow path forming substrate in which pressure generation chambers are formed. The pressure generation chambers communicate with nozzles that eject liquid droplets. Piezoelectric elements are positioned on the flow path forming substrate to generate pressure changes in the pressure generation chambers. Each piezoelectric element includes a piezoelectric body layer, a first electrode on one side of the piezoelectric body layer, and a second electrode on the opposite side of the piezoelectric body layer. The piezoelectric element is driven in a condition that the relationship between minimum voltage Vmin, and maximum voltage Vmax, which are applied to the piezoelectric element, and peak voltage Vo satisfies the expression, Vmin
摘要翻译：液体喷射头包括形成有压力产生室的流路形成基板。压力产生室与喷射液滴的喷嘴连通。压电元件位于流路形成基板上，以产生压力产生室中的压力变化。每个压电元件包括压电体层，压电体层一侧的第一电极和与压电体层相对的第二电极。压电元件在施加到压电元件的最小电压Vmin和最大电压Vmax之间的关系以及峰值电压Vo满足Vmin

72. 发明申请

US20100253750A1 LIQUID-EJECTING HEAD, LIQUID-EJECTING APPARATUS, AND ACTUATOR 有权
标题翻译：液体喷射头，液体喷射装置和执行器
公开(公告)号：US20100253750A1
公开(公告)日：2010-10-07
申请号：US12754675
申请日：2010-04-06
申请人： Koji SUMI
发明人： Koji SUMI
IPC分类号： B41J2/045 , H01L41/18
CPC分类号： B41J2/14233 , B41J2002/14241 , B41J2002/14419 , H01L41/0973 , H01L41/1871 , H01L41/1876
摘要： A liquid-ejecting head includes a flow-passage-forming substrate that includes a pressure-generating chamber, the pressure-generating chamber being in communication with a nozzle through which droplets are ejected, and a piezoelectric element disposed on the flow-passage-forming substrate, the piezoelectric element altering the internal pressure of the pressure-generating chamber. The piezoelectric element includes a piezoelectric layer containing titanium (Ti) and zirconium (Zr), a first electrode, and a second electrode. The first electrode and the second electrode are disposed on the opposite sides of the piezoelectric layer,. The component ratio Ti/(Zr+Ti) of the piezoelectric layer is 0.40 or more but less than 0.50. At least a portion of the piezoelectric layer formed on the first electrode contains tetragonal crystals formed by phase transition under stress caused by an underlying layer.
摘要翻译：液体喷射头包括流路形成基板，该流路形成基板包括压力产生室，所述压力发生室与喷射器连通，液滴喷射通过喷嘴，以及设置在流路形成部上的压电元件基板，压电元件改变压力发生室的内部压力。压电元件包括含有钛（Ti）和锆（Zr）的压电层，第一电极和第二电极。第一电极和第二电极设置在压电层的相对侧上。压电层的成分比Ti /（Zr + Ti）为0.40以上且小于0.50。形成在第一电极上的压电层的至少一部分包含由下层引起的应力下的相变形成的四方晶。

73. 发明授权

US07757362B2 Method for producing dielectric film, method for producing piezoelectric element, method for producing liquid-jet head, dielectric film, piezoelectric element, and liquid-jet apparatus 有权
标题翻译：电介质膜的制造方法，压电元件的制造方法，液体喷射头的制造方法，电介质膜，压电元件，液体喷射装置
公开(公告)号：US07757362B2
公开(公告)日：2010-07-20
申请号：US12167930
申请日：2008-07-03
申请人： Akira Kuriki , Koji Sumi , Hironobu Kazama , Motoki Takabe , Motohisa Noguchi
发明人： Akira Kuriki , Koji Sumi , Hironobu Kazama , Motoki Takabe , Motohisa Noguchi
IPC分类号： H01L41/22 , H04R17/00
CPC分类号： H01L41/318 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1632 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , C23C18/1216 , C23C18/1283 , H01L41/0973 , H01L41/1876 , Y10T29/42 , Y10T29/435 , Y10T29/49155
摘要： A method for producing a dielectric film, comprising: a coating step of coating a colloidal solution containing an organometallic compound containing a metal constituting a dielectric film containing at least a lead component to form a dielectric precursor film; a drying step of drying the dielectric precursor film; a degreasing step of degreasing the dielectric precursor film; and a firing step of firing the dielectric precursor film to form a dielectric film, and wherein the drying step includes a first drying step of heating the dielectric precursor film to a temperature lower than the boiling point of a solvent, which is a main solvent of the material, and holding the dielectric precursor film at the temperature for a certain period of time to dry the dielectric precursor film, and a second drying step of drying the dielectric precursor film at a temperature in the range of 140° C., to 170° C., the degreasing step is performed at a degreasing temperature of 350° C. to 450° C. and at a heating-up rate of 15 [° C./sec] or higher, and the firing step is performed at a heating-up rate of 100 [° C./sec] to 150 [° C./sec].
摘要翻译：一种电介质膜的制造方法，其特征在于，包括：涂布包含含有构成含有至少含有铅成分的电介质膜的金属的有机金属化合物的胶体溶液以形成电介质前体膜的涂布步骤; 干燥所述电介质前体膜的干燥步骤; 脱脂步骤，使所述电介质前体膜脱脂; 以及烧制电介质前体膜以形成电介质膜的烧制步骤，其中干燥步骤包括将电介质前体膜加热至低于作为主要溶剂的溶剂的沸点的温度的第一干燥步骤并且将介电前体膜在该温度下保持一定时间以干燥电介质前体膜;以及第二干燥步骤，在140℃的温度下将电介质前体膜干燥至170℃ ℃，脱脂步骤在350℃至450℃的脱脂温度和15℃/秒以上的加热速率下进行，并且烧成步骤在升温速度为100 [℃/秒]至150℃/秒。

74. 发明授权

US07579041B2 Method of manufacturing dielectric layer and method of manufacturing liquid jet head 有权
标题翻译：制造介质层的方法和制造液体喷头的方法
公开(公告)号：US07579041B2
公开(公告)日：2009-08-25
申请号：US10998195
申请日：2004-11-29
申请人： Akira Kuriki , Hironobu Kazama , Toshinao Shinbo , Koji Sumi
发明人： Akira Kuriki , Hironobu Kazama , Toshinao Shinbo , Koji Sumi
IPC分类号： B05D5/12 , H01L41/22
CPC分类号： B41J2/161 , B41J2/1628 , B41J2/164 , C23C18/1216 , C23C18/1225 , C23C18/1245 , C23C18/1254 , C23C18/1283 , H01L41/1876 , H01L41/318 , Y10T29/42
摘要： A method of manufacturing a dielectric film includes a coating step of coating sol made of an organic metal compound and forming a dielectric precursor film, a drying step of drying the dielectric precursor film, a degreasing step of degreasing the dielectric precursor film, and a baking step of baking the dielectric precursor film to form a dielectric film. The drying step includes a first drying step of drying the dielectric precursor film by heating the dielectric precursor film to a temperature lower than a boiling point of a solvent which is a main solvent of the sol and then holding the dielectric precursor film at the temperature for a predetermined period of time, and a second drying step of drying the dielectric precursor film further by reheating the dielectric precursor film and then holding the dielectric precursor film at the temperature for a predetermined period of time.
摘要翻译：制造电介质膜的方法包括：涂覆由有机金属化合物制成的溶胶并形成电介质前体膜的涂覆步骤，干燥电介质前体膜的干燥步骤，使电介质前体膜脱脂的脱脂步骤和烘烤烘烤电介质前体膜以形成电介质膜的步骤。干燥步骤包括：第一干燥步骤，通过将电介质前体膜加热到低于作为溶胶的主要溶剂的溶剂的沸点的温度，然后将电介质前体膜保持在温度为以及第二干燥步骤，通过再次加热电介质前体膜，然后将电介质前体膜保持在该温度下进一步干燥电介质前体膜一段预定时间。

75. 发明申请

US20090044390A1 METHOD FOR PRODUCING DIELECTRIC FILM, METHOD FOR PRODUCING PIEZOELECTRIC ELEMENT, METHOD FOR PRODUCING LIQUID-JET HEAD, DIELECTRIC FILM, PIEZOELECTRIC ELEMENT, AND LIQUID-JET APPARATUS 有权
标题翻译：制造电介质膜的方法，制造压电元件的方法，用于制造液体喷射头的方法，介电膜，压电元件和液体喷射装置
公开(公告)号：US20090044390A1
公开(公告)日：2009-02-19
申请号：US12167930
申请日：2008-07-03
申请人： Akira KURIKI , Koji SUMI , Hironobu KAZAMA , Motoki TAKABE , Motohisa NOGUCHI
发明人： Akira KURIKI , Koji SUMI , Hironobu KAZAMA , Motoki TAKABE , Motohisa NOGUCHI
IPC分类号： H01L41/22
CPC分类号： H01L41/318 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1632 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , C23C18/1216 , C23C18/1283 , H01L41/0973 , H01L41/1876 , Y10T29/42 , Y10T29/435 , Y10T29/49155
摘要： A method for producing a dielectric film, comprising: a coating step of coating a colloidal solution containing an organometallic compound containing a metal constituting a dielectric film containing at least a lead component to form a dielectric precursor film; a drying step of drying the dielectric precursor film; a degreasing step of degreasing the dielectric precursor film; and a firing step of firing the dielectric precursor film to form a dielectric film, and wherein the drying step includes a first drying step of heating the dielectric precursor film to a temperature lower than the boiling point of a solvent, which is a main solvent of the material, and holding the dielectric precursor film at the temperature for a certain period of time to dry the dielectric precursor film, and a second drying step of drying the dielectric precursor film at a temperature in the range of 140° C. to 170° C., the degreasing step is performed at a degreasing temperature of 350° C. to 450° C. and at a heating-up rate of 15 [° C./sec] or higher, and the firing step is performed at a heating-up rate of 100 [° C./sec] to 150 [° C./sec].
摘要翻译：一种电介质膜的制造方法，其特征在于，包括：涂布包含含有构成含有至少含有铅成分的电介质膜的金属的有机金属化合物的胶体溶液以形成电介质前体膜的涂布步骤; 干燥所述电介质前体膜的干燥步骤; 脱脂步骤，使所述电介质前体膜脱脂; 以及烧制电介质前体膜以形成电介质膜的烧制步骤，其中干燥步骤包括将电介质前体膜加热至低于作为主要溶剂的溶剂的沸点的温度的第一干燥步骤并将电介质前体膜在该温度下保持一定时间以干燥电介质前体膜;以及第二干燥步骤，在140℃至170℃的温度下干燥该电介质前体膜在脱脂温度为350℃〜450℃，升温速度为15℃/秒以上的条件下进行脱脂工序，烧成工序在加热升速率为100 [℃/秒]至150℃/秒。

76. 发明申请

US20080018716A1 Piezoelectric device and liquid jet head 有权
标题翻译：压电元件和液体喷头
公开(公告)号：US20080018716A1
公开(公告)日：2008-01-24
申请号：US11879628
申请日：2007-07-18
申请人： Motohisa Noguchi , Koji Sumi , Motoki Takabe , Naoto Yokoyama
发明人： Motohisa Noguchi , Koji Sumi , Motoki Takabe , Naoto Yokoyama
IPC分类号： B41J2/045 , H01L41/187
CPC分类号： B41J2/14233 , H01L41/0973 , H01L41/1876 , H01L41/317 , H01L41/319
摘要： A piezoelectric device including: a substrate; a lower electrode formed over the substrate; a piezoelectric layer formed over the lower electrode and including lead zirconate titanate; and an upper electrode formed over the piezoelectric layer, the lead zirconate titanate having a half-width of a peak of a (100) plane measured by an X-ray diffraction rocking curve method of 10 degrees or more and 25 degrees or less.
摘要翻译：一种压电装置，包括：基板; 形成在所述基板上的下电极; 形成在下电极上并包括锆钛酸铅的压电层; 和形成在压电层上的上电极，通过X射线衍射摇摆曲线法测量的具有（100）面的峰的半值宽度为10度以上且25度以下的钛酸铅钛酸铅。

77. 发明申请

US20080012911A1 Actuator device, liquid-jet head and liquid-jet apparatus 有权
标题翻译：执行器装置，喷液头和液体喷射装置
公开(公告)号：US20080012911A1
公开(公告)日：2008-01-17
申请号：US11730644
申请日：2007-04-03
申请人： Motoki Takabe , Koji Sumi , Motohisa Noguchi , Naoto Yokoyama , Takeshi Saito
发明人： Motoki Takabe , Koji Sumi , Motohisa Noguchi , Naoto Yokoyama , Takeshi Saito
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491
摘要： Disclosed is an actuator device which includes a vibration plate and a piezoelectric element. The vibration plate includes an elastic film which is made of silicon oxide (SiO2) and which is formed on a substrate while the piezoelectric element is formed on the vibration plate and including a lower electrode, a piezoelectric layer and an upper electrode. The vibration plate has such a stress as to give a tensile stress between 300 MPa and 500 MPa, inclusive, to the piezoelectric element that is in a state of being displaced.
摘要翻译：公开了一种致动器装置，其包括振动板和压电元件。振动板包括由氧化硅（SiO 2）构成的弹性膜，并且形成在基板上，同时压电元件形成在振动板上并且包括下电极，压电层和上电极。该振动板具有这样的应力，即对处于移动状态的压电元件产生在300MPa至500MPa之间的拉伸应力。

78. 发明申请

US20070190238A1 Composite for formiing ferroelectric thin film, ferroelectric thin film, method of manufacturing ferroelectric thin film, and liquid-jet head 失效
标题翻译：用于形成铁电薄膜的复合材料，铁电薄膜，铁电薄膜的制造方法和液体喷射头
公开(公告)号：US20070190238A1
公开(公告)日：2007-08-16
申请号：US10590279
申请日：2005-06-29
申请人： Koji Sumi
发明人： Koji Sumi
IPC分类号： B05D5/12 , B05D3/02
CPC分类号： B41J2/14233 , B41J2202/03 , H01L41/1876 , H01L41/318
摘要： Provided are a composite for forming a ferroelectric thin film which is a colloidal solution applicable to the MOD method and capable of maintaining excellent dispersion stability and preservation stability of an organometallic compound over a long term, a ferroelectric thin film, a method of manufacturing a ferroelectric thin film, and a liquid-jet head. A composite for forming a ferroelectric thin film, which is made of a colloidal solution applicable to the MOD method containing an organometallic compound including metal constituting a ferroelectric thin film, and contains water other than water of crystallization in the organometallic compound is used when forming a ferroelectric thin film in accordance with the MOD method.
摘要翻译：提供一种用于形成铁电薄膜的复合材料，其是适用于MOD方法的胶体溶液，并且能够长期保持有机金属化合物的优异的分散稳定性和保存稳定性，铁电薄膜，铁电体的制造方法薄膜和喷液头。用于形成铁电薄膜的复合材料，其由用于包含构成铁电薄膜的金属的有机金属化合物的MOD方法的胶体溶液制成，并且在形成有机金属化合物时含有结晶水以外的水铁电薄膜按照MOD法。

79. 发明授权

US06962007B1 Method and device for drying substrate 失效
标题翻译：干燥基材的方法和装置
公开(公告)号：US06962007B1
公开(公告)日：2005-11-08
申请号：US09889484
申请日：1999-08-10
申请人： Norio Maeda , Koji Sumi , Hiroshi Aihara , Masao Oono , Naoaki Izu Tani
发明人： Norio Maeda , Koji Sumi , Hiroshi Aihara , Masao Oono , Naoaki Izu Tani
IPC分类号： H01L21/304 , B05B7/04 , B08B3/04 , H01L21/00 , F26B17/00
CPC分类号： H01L21/67051 , H01L21/67028 , H01L21/67034
摘要： A device for drying substrates which stores a plurality of substrate (1) and which comprises a processing container (3) to which cleaning fluid (2) after cleaning the substrates (1) is drained and an injection nozzle (5) for injecting drying fluid located at the terminating part of a feed pipe (4) through which liquid drying fluid is supplied, whereby an exhaust equipment is eliminated or simplified, and the drying fluid is fed smoothly.
摘要翻译：一种用于干燥存储多个基板（1）的基板的装置，其特征在于，包括：清洗基板（1）后的清洗液（2）的清洗液（2）的处理容器（3），以及喷射干燥流体位于进料管（4）的终端部分，通过该进料管供应液体干燥流体，从而消除或简化排气设备，并且干燥流体被顺利进给。

80. 发明申请

US20050168524A1 Manufacturing method of actuator device and liquid jet apparatus provided with actuator device formed by manufacturing method of the same 有权
标题翻译：具有由其制造方法形成的致动器装置的致动器装置和液体喷射装置的制造方法
公开(公告)号：US20050168524A1
公开(公告)日：2005-08-04
申请号：US10995945
申请日：2004-11-24
申请人： Li Xin-Shan , Hironobu Kazama , Masami Murai , Koji Sumi , Maki Ito , Toshiaki Yokouchi
发明人： Li Xin-Shan , Hironobu Kazama , Masami Murai , Koji Sumi , Maki Ito , Toshiaki Yokouchi
IPC分类号： H01L41/08 , B41J2/01 , B41J2/045 , B41J2/16 , B44C1/22
CPC分类号： B41J2/1632 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1635 , B41J2/1646 , B41J2002/14241 , H01L41/0973 , H01L41/1876 , H01L41/314 , H01L41/319 , Y10T29/42 , Y10T29/49401
摘要： A manufacturing method of a liquid jet head having increased the durability and reliability thereof by preventing delamination of a vibration plate is provided. At least the following two steps are included: a vibration plate forming step which includes at least a step of forming a zirconium layer on one side of a passage-forming substrate by sputtering so that a degrees of orientation to a (002) plane of the surface becomes equal to 80% or more, as well as forming an insulation film made of zirconium oxide and constituting a part of the vibration plate by subjecting the zirconium layer to thermal oxidation; and a piezoelectric element forming step of forming piezoelectric elements on the vibration plate.
摘要翻译：提供一种通过防止振动板的分层而提高其耐久性和可靠性的液体喷射头的制造方法。至少包括以下两个步骤：振动板形成步骤，其至少包括通过溅射在通道形成基板的一侧上形成锆层的步骤，使得对（002）面的取向度表面变得等于80％以上，并且通过对锆层进行热氧化来形成由氧化锆制成的绝缘膜并构成振动板的一部分; 以及在振动板上形成压电元件的压电元件形成步骤。

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