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    • 1. 发明授权
    • Liquid-ejecting head, liquid-ejecting apparatus, and actuator
    • 液体喷射头,液体喷射装置和致动器
    • US08277031B2
    • 2012-10-02
    • US12754675
    • 2010-04-06
    • Koji Sumi
    • Koji Sumi
    • B41J2/045
    • B41J2/14233B41J2002/14241B41J2002/14419H01L41/0973H01L41/1871H01L41/1876
    • A liquid-ejecting head includes a flow-passage-forming substrate that includes a pressure-generating chamber, the pressure-generating chamber being in communication with a nozzle through which droplets are ejected, and a piezoelectric element disposed on the flow-passage-forming substrate, the piezoelectric element altering the internal pressure of the pressure-generating chamber. The piezoelectric element includes a piezoelectric layer containing titanium (Ti) and zirconium (Zr), a first electrode, and a second electrode. The first electrode and the second electrode are disposed on the opposite sides of the piezoelectric layer,. The component ratio Ti/(Zr+Ti) of the piezoelectric layer is 0.40 or more but less than 0.50. At least a portion of the piezoelectric layer formed on the first electrode contains tetragonal crystals formed by phase transition under stress caused by an underlying layer.
    • 液体喷射头包括流路形成基板,该流路形成基板包括压力产生室,所述压力发生室与喷射器连通,液滴喷射通过喷嘴,以及设置在流路形成部上的压电元件 基板,压电元件改变压力发生室的内部压力。 压电元件包括​​含有钛(Ti)和锆(Zr)的压电层,第一电极和第二电极。 第一电极和第二电极设置在压电层的相对侧上。 压电层的成分比Ti /(Zr + Ti)为0.40以上且小于0.50。 形成在第一电极上的压电层的至少一部分包含由下层引起的应力下的相变形成的四方晶。
    • 3. 发明授权
    • Liquid jet head and a piezoelectric element
    • 液体喷头和压电元件
    • US07896480B2
    • 2011-03-01
    • US12433204
    • 2009-04-30
    • Hironobu KazamaYuka YonekuraKoji Sumi
    • Hironobu KazamaYuka YonekuraKoji Sumi
    • B41J2/045
    • B41J2/14233B41J2002/14241B41J2002/14419B41J2002/14491B41J2202/03H01L41/0973
    • A liquid jet head includes a passage-forming substrate composed of a crystal substrate provided with pressure-generating chambers communicating with nozzle orifices and piezoelectric elements disposed on the passage-forming substrate and each composed of a lower electrode, a piezoelectric material layer, and an upper electrode to cause a change of pressure in the pressure-generating chamber. The piezoelectric material layer has a thickness of 5 μm or less and is made of a perovskite-type crystal and is configured such that the distance between an X-ray diffraction peak position derived from the (220) plane of the passage-forming substrate and an X-ray diffraction peak position derived from the (110) plane of the piezoelectric material layer is within a range of 2θ=16.262±0.1 degrees.
    • 液体喷射头包括通道形成基板,该通道形成基板由具有与喷嘴孔连通的压力产生室和设置在通道形成基板上的压电元件的晶体基板构成,并且每个由下电极,压电材料层和 上部电极引起压力发生室中的压力变化。 压电材料层的厚度为5μm以下,由钙钛矿型晶体构成,使得从通道形成基板的(220)面导出的X射线衍射峰值位置与 衍生自压电材料层的(110)面的X射线衍射峰位置在2θ= 16.262±0.1度的范围内。
    • 7. 发明申请
    • LIQUID EJECTION HEAD, LIQUID EJECTING APPARATUS, AND ACTUATOR
    • 液体喷射头,液体喷射装置和执行器
    • US20100157000A1
    • 2010-06-24
    • US12640870
    • 2009-12-17
    • Koji SUMI
    • Koji SUMI
    • B41J2/045H01L41/04
    • B41J2/14233H01L41/0973
    • A liquid ejection head includes: a pressure generating chamber communicating with a nozzle hole; a vibrating film placed on one side of the pressure generating chamber; and a pressure generating element including a piezoelectric layer formed between a first and a second electrodes placed on the vibrating film. The pressure generating element generates displacement when voltage is applied across the first and the second electrodes to make pressure in the pressure generating chamber change, while a neutral plane of stress made by the displacement is so configured as to exist in the first electrode, and a layer on the pressure generating chamber side relative to the first electrode includes a laminar film or an amorphous film.
    • 液体喷射头包括:与喷嘴孔连通的压力产生室; 放置在压力发生室一侧的振动膜; 以及压力产生元件,包括形成在置于振动膜上的第一和第二电极之间的压电层。 当施加电压施加到第一和第二电极两端以使压力发生室中的压力发生变化时,压力产生元件产生位移,而位移产生的中性应力平面被配置为存在于第一电极中,并且 相对于第一电极的压力发生室侧的层包括层状膜或非晶膜。