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1. 发明授权

US07411339B2 Manufacturing method of actuator device and liquid jet apparatus provided with actuator device formed by manufacturing method of the same 有权
标题翻译：具有由其制造方法形成的致动器装置的致动器装置和液体喷射装置的制造方法
公开(公告)号：US07411339B2
公开(公告)日：2008-08-12
申请号：US10995945
申请日：2004-11-24
申请人： Li Xin-Shan , Hironobu Kazama , Masami Murai , Koji Sumi , Maki Ito , Toshiaki Yokouchi
发明人： Li Xin-Shan , Hironobu Kazama , Masami Murai , Koji Sumi , Maki Ito , Toshiaki Yokouchi
IPC分类号： H01L41/187
CPC分类号： B41J2/1632 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1635 , B41J2/1646 , B41J2002/14241 , H01L41/0973 , H01L41/1876 , H01L41/314 , H01L41/319 , Y10T29/42 , Y10T29/49401
摘要： A manufacturing method of a liquid jet head having increased the durability and reliability thereof by preventing delamination of a vibration plate is provided. At least the following two steps are included: a vibration plate forming step which includes at least a step of forming a zirconium layer on one side of a passage-forming substrate by sputtering so that a degrees of orientation to a (002) plane of the surface becomes equal to 80% or more, as well as forming an insulation film made of zirconium oxide and constituting a part of the vibration plate by subjecting the zirconium layer to thermal oxidation; and a piezoelectric element forming step of forming piezoelectric elements on the vibration plate.
摘要翻译：提供一种通过防止振动板的分层而提高其耐久性和可靠性的液体喷射头的制造方法。至少包括以下两个步骤：振动板形成步骤，其至少包括通过溅射在通道形成基板的一侧上形成锆层的步骤，使得对（002）面的取向度表面变得等于80％以上，并且通过对锆层进行热氧化来形成由氧化锆制成的绝缘膜并构成振动板的一部分; 以及在振动板上形成压电元件的压电元件形成步骤。

2. 发明申请

US20080034563A1 Manufacturing method of actuator device and liquid jet apparatus provided wirth actuator device formed by manufacturing method of the same 审中-公开
标题翻译：通过其制造方法形成致动器装置和液体喷射装置的制造方法
公开(公告)号：US20080034563A1
公开(公告)日：2008-02-14
申请号：US11826705
申请日：2007-07-18
申请人： Li Xin-Shan , Hironobu Kazama , Masami Murai , Koji Sumi , Maki Ito , Toshiaki Yokouchi
发明人： Li Xin-Shan , Hironobu Kazama , Masami Murai , Koji Sumi , Maki Ito , Toshiaki Yokouchi
IPC分类号： H01L41/22 , B44C1/22
CPC分类号： B41J2/1632 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1635 , B41J2/1646 , B41J2002/14241 , H01L41/0973 , H01L41/1876 , H01L41/314 , H01L41/319 , Y10T29/42 , Y10T29/49401
摘要： A manufacturing method of a liquid jet head having increased the durability and reliability thereof by preventing delamination of a vibration plate is provided. At least the following two steps are included: a vibration plate forming step which includes at least a step of forming a zirconium layer on one side of a passage-forming substrate by sputtering so that a degrees of orientation to a (002) plane of the surface becomes equal to 80% or more, as well as forming an insulation film made of zirconium oxide and constituting a part of the vibration plate by subjecting the zirconium layer to thermal oxidation; and a piezoelectric element forming step of forming piezoelectric elements on the vibration plate.
摘要翻译：提供一种通过防止振动板的分层而提高其耐久性和可靠性的液体喷射头的制造方法。至少包括以下两个步骤：振动板形成步骤，其至少包括通过溅射在通道形成基板的一侧上形成锆层的步骤，使得对（002）面的取向度表面变得等于80％以上，并且通过对锆层进行热氧化来形成由氧化锆制成的绝缘膜并构成振动板的一部分; 以及在振动板上形成压电元件的压电元件形成步骤。

3. 发明申请

US20050168524A1 Manufacturing method of actuator device and liquid jet apparatus provided with actuator device formed by manufacturing method of the same 有权
标题翻译：具有由其制造方法形成的致动器装置的致动器装置和液体喷射装置的制造方法
公开(公告)号：US20050168524A1
公开(公告)日：2005-08-04
申请号：US10995945
申请日：2004-11-24
申请人： Li Xin-Shan , Hironobu Kazama , Masami Murai , Koji Sumi , Maki Ito , Toshiaki Yokouchi
发明人： Li Xin-Shan , Hironobu Kazama , Masami Murai , Koji Sumi , Maki Ito , Toshiaki Yokouchi
IPC分类号： H01L41/08 , B41J2/01 , B41J2/045 , B41J2/16 , B44C1/22
CPC分类号： B41J2/1632 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1635 , B41J2/1646 , B41J2002/14241 , H01L41/0973 , H01L41/1876 , H01L41/314 , H01L41/319 , Y10T29/42 , Y10T29/49401
摘要： A manufacturing method of a liquid jet head having increased the durability and reliability thereof by preventing delamination of a vibration plate is provided. At least the following two steps are included: a vibration plate forming step which includes at least a step of forming a zirconium layer on one side of a passage-forming substrate by sputtering so that a degrees of orientation to a (002) plane of the surface becomes equal to 80% or more, as well as forming an insulation film made of zirconium oxide and constituting a part of the vibration plate by subjecting the zirconium layer to thermal oxidation; and a piezoelectric element forming step of forming piezoelectric elements on the vibration plate.
摘要翻译：提供一种通过防止振动板的分层而提高其耐久性和可靠性的液体喷射头的制造方法。至少包括以下两个步骤：振动板形成步骤，其至少包括通过溅射在通道形成基板的一侧上形成锆层的步骤，使得对（002）面的取向度表面变得等于80％以上，并且通过对锆层进行热氧化来形成由氧化锆制成的绝缘膜并构成振动板的一部分; 以及在振动板上形成压电元件的压电元件形成步骤。

4. 发明申请

US20050122005A1 Piezoelectric device, liquid jetting head, ferroelectric device, electronic device and methods for manufacturing these devices 失效
标题翻译：压电元件，液体喷射头，铁电元件，电子器件及其制造方法
公开(公告)号：US20050122005A1
公开(公告)日：2005-06-09
申请号：US10705251
申请日：2003-11-12
申请人： Takamitsu Higuchi , Setsuya Iwashita , Hiromu Miyazawa , Koji Sumi , Masami Murai , Maki Ito , Li Xin-Shan
发明人： Takamitsu Higuchi , Setsuya Iwashita , Hiromu Miyazawa , Koji Sumi , Masami Murai , Maki Ito , Li Xin-Shan
IPC分类号： B41J2/16 , H01L21/316 , H01L41/047 , H01L41/09 , H01L41/22
CPC分类号： H01L41/04 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1634 , B41J2/1642 , B41J2/1643 , B41J2/1645 , B41J2/1646 , H01L21/31691 , H01L41/0973 , H01L41/316
摘要： An intermediate film (15, 12, 53) is formed on a substrate (11, 52), a bottom electrode (13, 542) is formed on top of this intermediate film, a ferroelectric film (24) or piezoelectric film (543) is formed on top of this bottom electrode by an ion beam assist method, and a top electrode (25, 541) is formed on top of this ferroelectric film or piezoelectric film. The ferroelectric film or piezoelectric film is formed by PZT, BST or a relaxer material. As a result of the use of an ion beam assist method in the formation of any one of the intermediate film, bottom electrode, ferroelectric film or piezoelectric film, a piezoelectric device or ferroelectric device which has a piezoelectric film or ferroelectric film with an in-plane orientation can be manufactured with good efficiency.
摘要翻译：在基板（11,52）上形成中间膜（15,12,53），在该中间膜的顶部，铁电体膜（24）或压电膜（543）上形成有底部电极（13,542）通过离子束辅助法形成在该底部电极的顶部上，并且在该铁电体膜或压电膜的顶部上形成顶部电极（25,541）。铁电体膜或压电膜由PZT，BST或松弛材料形成。通过使用离子束辅助方法来形成中间膜，底部电极，铁电体膜或压电膜中的任一个的结果，具有压电膜或铁电体膜的压电器件或铁电体器件，可以以良好的效率制造平面取向。

5. 发明授权

US07268472B2 Piezoelectric device, liquid jetting head, ferroelectric device, electronic device and methods for manufacturing these devices 失效
标题翻译：压电元件，液体喷射头，铁电元件，电子器件及其制造方法
公开(公告)号：US07268472B2
公开(公告)日：2007-09-11
申请号：US10705251
申请日：2003-11-12
申请人： Takamitsu Higuchi , Setsuya Iwashita , Hiromu Miyazawa , Koji Sumi , Masami Murai , Maki Ito , Li Xin-Shan
发明人： Takamitsu Higuchi , Setsuya Iwashita , Hiromu Miyazawa , Koji Sumi , Masami Murai , Maki Ito , Li Xin-Shan
IPC分类号： H01L41/047 , H01L41/22
CPC分类号： H01L41/04 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1634 , B41J2/1642 , B41J2/1643 , B41J2/1645 , B41J2/1646 , H01L21/31691 , H01L41/0973 , H01L41/316
摘要： An intermediate film (15, 12, 53) is formed on a substrate (11, 52), a bottom electrode (13, 542) is formed on top of this intermediate film, a ferroelectric film (24) or piezoelectric film (543) is formed on top of this bottom electrode by an ion beam assist method, and a top electrode (25, 541) is formed on top of this ferroelectric film or piezoelectric film. The ferroelectric film or piezoelectric film is formed by PZT, BST or a relaxer material. As a result of the use of an ion beam assist method in the formation of any one of the intermediate film, bottom electrode, ferroelectric film or piezoelectric film, a piezoelectric device or ferroelectric device which has a piezoelectric film or ferroelectric film with an in-plane orientation can be manufactured with good efficiency.
摘要翻译：在基板（11,52）上形成中间膜（15,12,53），在该中间膜的顶部，铁电体膜（24）或压电膜（543）上形成有底部电极（13,542）通过离子束辅助法形成在该底部电极的顶部上，并且在该铁电体膜或压电膜的顶部上形成顶部电极（25,541）。铁电体膜或压电膜由PZT，BST或松弛材料形成。通过使用离子束辅助方法来形成中间膜，底部电极，铁电体膜或压电膜中的任一个的结果，具有压电膜或铁电体膜的压电器件或铁电体器件，可以以高效率制造平面取向。

6. 发明申请

US20050190239A1 Actuator device, liquid jet head and liquid jet apparatus 有权
标题翻译：致动器装置，液体喷射头和液体喷射装置
公开(公告)号：US20050190239A1
公开(公告)日：2005-09-01
申请号：US11056207
申请日：2005-02-14
申请人： Maki Ito , Li Xin-Shan , Masami Murai
发明人： Maki Ito , Li Xin-Shan , Masami Murai
IPC分类号： B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/145 , B41J2/16 , H01L41/09 , H01L41/187 , H01L41/22
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , H01L41/0973
摘要： Provided are an actuator device, a liquid jet head and a liquid jet apparatus, which can improve reliability by preventing peeling-off of respective films forming a vibration plate. The vibration plate has a first oxide film (elastic film 50) formed on the one surface of a passage-forming substrate 10, and a second oxide film (insulation film 55) formed on the first oxide film 50 by use of a sputtering method. In only a part of an interface between the first and second oxide films 50 and 55, an altered layer is formed which has a first element that is a constituent element other than oxygen included in the first oxide film 50 and a second element that is a constituent element other than oxygen included in the second oxide film 55, and which is a layer in which a proportion of the first element is lower than that in the first oxide film 50 and a proportion of the second element is lower than that in the second oxide film 55. A proportion of the altered layer in the entire interface between the first and second oxide films 50 and 55 is not more than 10%.
摘要翻译：提供了致动器装置，液体喷射头和液体喷射装置，其可以通过防止形成振动板的各个膜的剥离来提高可靠性。振动板具有形成在通道形成基板10的一个表面上的第一氧化膜（弹性膜50）和通过溅射法形成在第一氧化物膜50上的第二氧化膜（绝缘膜55）。在第一和第二氧化物膜50和55之间的界面的仅一部分中，形成改变的层，其具有作为第一氧化膜50中包含的除了氧以外的构成元素的第一元素，第二元素是第二氧化膜55中包含的除了氧以外的构成元素，其中第一元素的比例低于第一氧化物膜50中的比例和第二元素的比例低于第二元素氧化膜55.第一和第二氧化物膜50和55之间的整个界面中的改变层的比例不大于10％。

7. 发明授权

US07320163B2 Method of manufacturing an actuator device 有权
标题翻译：制造执行装置的方法
公开(公告)号：US07320163B2
公开(公告)日：2008-01-22
申请号：US11076028
申请日：2005-03-10
申请人： Li Xin-Shan , Masami Murai , Toshinao Shinbo , Maki Ito
发明人： Li Xin-Shan , Masami Murai , Toshinao Shinbo , Maki Ito
IPC分类号： H01L41/08
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1632 , B41J2/1646 , B41J2002/14241 , H04R17/00 , Y10T29/42 , Y10T29/49401
摘要： A step of forming a vibration plate includes a step of forming an insulation film in order to cause the surface roughness Ra of the insulation film to be in the range of 1 nm to 3 nm: the insulation film being made of zirconia which has been obtained by depositing a zirconium layer, and accordingly by the thermally oxidizing the zirconium layer at a predetermined temperature, and the insulation film constituting the uppermost surface of the vibration plate. In addition, a step of forming a piezoelectric elements includes: a step of applying titanium (Ti) onto a lower electrode by use of a sputtering method, and of forming a seed titanium layer thereon; and a step of forming a piezoelectric precursor film by applying a piezoelectric material onto the seed titanium layer, and of forming a piezoelectric layer by baking, and crystallizing, the piezoelectric precursor layer.
摘要翻译：形成振动板的步骤包括形成绝缘膜以使绝缘膜的表面粗糙度Ra在1nm至3nm的范围内的步骤：绝缘膜由已获得的氧化锆制成通过沉积锆层，因此通过在预定温度下热氧化锆层，以及构成振动板最上表面的绝缘膜。此外，形成压电元件的步骤包括：通过使用溅射法将钛（Ti）施加到下电极上并在其上形成晶种钛层的步骤; 以及通过将压电材料施加到种子钛层上形成压电前体膜的步骤，以及通过烘烤形成压电层并使压电前体层结晶的步骤。

8. 发明申请

US20050210645A1 Method of manufacturing actuator device, and liquid jet device 有权
标题翻译：制造执行器装置的方法和液体喷射装置
公开(公告)号：US20050210645A1
公开(公告)日：2005-09-29
申请号：US11076028
申请日：2005-03-10
申请人： Li Xin-Shan , Masami Murai , Toshinao Shinbo , Maki Ito
发明人： Li Xin-Shan , Masami Murai , Toshinao Shinbo , Maki Ito
IPC分类号： B41J2/16 , B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/145 , B81C1/00 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/319 , H01L41/39 , H02N2/00 , H04R17/00
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1632 , B41J2/1646 , B41J2002/14241 , H04R17/00 , Y10T29/42 , Y10T29/49401
摘要： An object of the present invention is to provide a method of manufacturing an actuator device, and a liquid jet head, which can improve characteristics of a piezoelectric layer constituting piezoelectric elements and can stabilize the characteristics of the piezoelectric layer. A step of forming a vibration plate includes a step of forming an insulation film in order to cause the surface roughness Ra of the insulation film to be in the range of 1 nm to 3 nm: the insulation film being made of zirconia which has been obtained by depositing a zirconium layer, and accordingly by the thermally oxidizing the zirconium layer at a predetermined temperature, and the insulation film constituting the uppermost surface of the vibration plate. In addition, a step of forming a piezoelectric elements includes: a step of applying titanium (Ti) onto a lower electrode by use of a sputtering method, and of forming a seed titanium layer thereon; and a step of forming a piezoelectric precursor film by applying a piezoelectric material onto the seed titanium layer, and of forming a piezoelectric layer by baking, and crystallizing, the piezoelectric precursor layer.
摘要翻译：本发明的目的在于提供一种能够提高构成压电元件的压电层的特性，并能够稳定压电体层的特性的致动器装置和液体喷射头的制造方法。形成振动板的步骤包括形成绝缘膜以使绝缘膜的表面粗糙度Ra在1nm至3nm的范围内的步骤：绝缘膜由已获得的氧化锆制成通过沉积锆层，因此通过在预定温度下热氧化锆层，以及构成振动板最上表面的绝缘膜。此外，形成压电元件的步骤包括：通过使用溅射法将钛（Ti）施加到下电极上并在其上形成晶种钛层的步骤; 以及通过将压电材料施加到种子钛层上形成压电前体膜的步骤，以及通过烘烤形成压电层并使压电前体层结晶的步骤。

9. 发明申请

US20050052482A1 Liquid ejecting head drive method and liquid ejection device 有权
标题翻译：液体喷射头驱动方法和液体喷射装置
公开(公告)号：US20050052482A1
公开(公告)日：2005-03-10
申请号：US10488747
申请日：2002-09-11
申请人： Maki Ito , Masami Murai , Shiro Yazaki
发明人： Maki Ito , Masami Murai , Shiro Yazaki
IPC分类号： B41J2/045 , B41J29/38
CPC分类号： B41J2/04581 , B41J2/04588 , B41J2/04593
摘要： A liquid-ejecting apparatus according to which targeted good characteristics can be obtained, and moreover the scope for material selection can be broadened is provided. The liquid-ejecting apparatus contracts a pressure chamber and thus ejects liquid through application of voltage to a piezoelectric body, and is such that the driving waveform applied to the piezoelectric body during the liquid ejecting operation comprises a high potential period (a2) in which a voltage exhibiting an electric field strength exceeding the coercive electric field of the piezoelectric body is applied, and a reverse potential period (a6) in which a voltage such that the potential becomes of the opposite polarity to the polarity in the high potential period or the potential becomes zero is applied.
摘要翻译：可以获得目标良好特性的液体喷射装置，并且还可以扩大材料选择的范围。液体喷射装置使压力室收缩，从而通过向压电体施加电压喷射液体，并且使得在液体喷射操作期间施加到压电体的驱动波形包括高电位周期（a2），其中施加表现出超过压电体的矫顽电场的电场强度的电压，以及使电位成为与高电位期间的极性相反的电压的电压的反向电位周期（a6）或电位变为零。

10. 发明授权

US07562451B2 Method of manufacturing actuator device for ink jet head 有权
标题翻译：制造用于喷墨头的致动器装置的方法
公开(公告)号：US07562451B2
公开(公告)日：2009-07-21
申请号：US10582112
申请日：2004-12-09
申请人： Maki Ito , Masami Murai , Xin-Shan Li , Toshinao Shinbo
发明人： Maki Ito , Masami Murai , Xin-Shan Li , Toshinao Shinbo
IPC分类号： B23P17/00 , H01L41/00 , H03H9/00
CPC分类号： B41J2/1629 , B41J2/161 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , Y10T29/42 , Y10T29/435 , Y10T29/49126 , Y10T29/49128 , Y10T29/4913 , Y10T29/49346 , Y10T29/49401
摘要： A method of manufacturing an actuator device configured to prevent separation of a vibration plate and to enhance durability and reliability, and a liquid-jet apparatus are provided. The method includes the steps of forming a vibration plate on one surface of a substrate, and forming a piezoelectric element having a lower electrode, a piezoelectric layer, and an upper electrode on the vibration plate. The step of forming a vibration plate at least includes an insulation film forming step of forming an insulation film made of zirconium oxide by forming a zirconium layer on the one surface side of the substrate in accordance with a sputtering method and subjecting the zirconium layer to thermal oxidation by inserting the substrate formed with the zirconium layer to a thermal oxidation furnace heated to a temperature greater than or equal to 700° C. at a speed greater than or equal to 200 mm/min.
摘要翻译：一种制造致动器装置的方法，该致动器装置被配置为防止振动板的分离并提高耐久性和可靠性，以及液体喷射装置。该方法包括以下步骤：在基板的一个表面上形成振动板，并在振动板上形成具有下电极，压电层和上电极的压电元件。形成振动板的步骤至少包括：绝缘膜形成步骤，通过根据溅射方法在基板的一个表面侧上形成锆层，并将锆层热处理形成由氧化锆制成的绝缘膜通过将形成有锆层的基板通过以大于或等于200mm / min的速度加热至大于或等于700℃的温度的热氧化炉来进行氧化。

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