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61. 发明申请

US20160274146A1 SCANNING ION CONDUCTANCE MICROSCOPY USING SURFACE ROUGHNESS FOR PROBE MOVEMENT 审中-公开
标题翻译：使用表面粗糙度进行探测运动的扫描离子导管显微镜
公开(公告)号：US20160274146A1
公开(公告)日：2016-09-22
申请号：US15167666
申请日：2016-05-27
申请人： IMPERIAL INNOVATIONS LIMITED
发明人： PAVEL NOVAK , CHAO LI , ANDREW SHEVCHUK , VICTOR PETROVICH OSTANIN , DAVID KLENERMAN , YURI EVGENIEVICH KORCHEV , GREGORY FROLENKOV , RICHARD CLARKE
IPC分类号： G01Q60/44 , G01Q10/06
CPC分类号： G01Q60/44 , B82Y35/00 , G01Q10/00 , G01Q10/02 , G01Q10/065
摘要： A method for interrogating a surface using scanning ion conductance microscopy (SICM), comprising the steps of: a) repeatedly bringing a SICM probe into proximity with the surface at discrete, spaced locations in a region of the surface and measuring surface height at each location; b) estimating surface roughness or other characteristic for the region based upon the surface height measurements; and c) repeatedly bringing the probe into proximity with the surface at discrete, spaced locations in the region, the number and location of which is based upon the estimated surface roughness or other characteristic in the region, and obtaining an image of the region with a resolution adapted to the surface roughness or other characteristic.
摘要翻译：本发明涉及使用扫描离子电导显微镜（SICM）询问表面的方法。在一个实施例中，本发明的方法包括以下步骤：a）在表面的一个区域中的不连续，间隔的位置处重复使SICM探针与表面接近，并测量每个位置处的表面高度; b）基于表面高度测量来估计区域的表面粗糙度或其他特性; 以及c）在所述区域中的离散的间隔位置处重复地使所述探针靠近所述表面，所述位置的数量和位置基于所估计的表面粗糙度或所述区域中的其它特征，并且获得所述区域的图像分辨率适应于表面粗糙度或其他特性。

62. 发明授权

US09354249B2 Scanning ion conductance microscopy using piezo actuators of different response times 有权
标题翻译：使用不同响应时间的压电致动器扫描离子电导显微镜
公开(公告)号：US09354249B2
公开(公告)日：2016-05-31
申请号：US13953122
申请日：2013-07-29
申请人： IMPERIAL INNOVATIONS LIMITED
发明人： Pavel Novak , Chao Li , Andrew Shevchuk , Victor Petrovich Ostanin , David Klenerman , Yuri Evgenievich Korchev , Gregory Frolenkov , Richard Clarke
IPC分类号： G01Q60/44 , B82Y35/00 , G01Q10/06
CPC分类号： G01Q60/44 , B82Y35/00 , G01Q10/00 , G01Q10/02 , G01Q10/065
摘要： A method for interrogating a surface using scanning ion conductance microscopy (SICM), comprising the steps of: a) repeatedly bringing a SICM probe into proximity with the surface at discrete, spaced locations in a region of the surface and measuring surface height at each location; b) estimating surface roughness or other characteristic for the region based upon the surface height measurements; and c) repeatedly bringing the probe into proximity with the surface at discrete, spaced locations in the region, the number and location of which is based upon the estimated surface roughness or other characteristic in the region, and obtaining an image of the region with a resolution adapted to the surface roughness or other characteristic.
摘要翻译：一种使用扫描离子电导显微镜（SICM）询问表面的方法，包括以下步骤：a）在表面的一个区域中的离散的间隔位置处重复地使SICM探针接近表面，并在每个位置测量表面高度 ; b）基于表面高度测量来估计区域的表面粗糙度或其他特性; 以及c）在所述区域中的离散的间隔位置处重复地使所述探针靠近所述表面，所述位置的数量和位置基于所估计的表面粗糙度或所述区域中的其它特征，并且获得所述区域的图像分辨率适应于表面粗糙度或其他特性。

63. 发明申请

US20160011231A1 Three-Dimensional Fine Movement Device 审中-公开
标题翻译：三维精细运动装置
公开(公告)号：US20160011231A1
公开(公告)日：2016-01-14
申请号：US14794968
申请日：2015-07-09
申请人： Hitachi High-Tech Science Corporation
发明人： Masatsugu Shigeno , Kazutoshi Watanabe , Masafumi Watanabe
IPC分类号： G01Q10/04
CPC分类号： G01Q10/04 , G01Q10/02 , G01Q20/00 , G01Q20/02 , G01Q70/04
摘要： A three-dimensional fine movement device includes a moving body, a fixation member to which the moving body is fixed, a three-dimensional fine movement unit, to which the fixation member is fixed, and which allows for three-dimensional fine movement of the moving body with the fixation member interposed therebetween, a base member to which the three-dimensional fine movement unit is fixed, and movement amount detecting means that is fixed to the base member to detect a movement amount of the fixation member.
摘要翻译：三维细动装置包括：移动体，固定有移动体的固定部件，固定部件固定于其上的三维细微移动部，能够进行三维细微移动移动体，其中固定构件插入其间，固定有三维细微移动单元的基座构件，以及移动量检测装置，其固定到基座构件以检测固定构件的移动量。

64. 发明申请

US20140143912A1 SYSTEM AND METHOD FOR NON-CONTACT MICROSCOPY FOR THREE-DIMENSIONAL PRE-CHARACTERIZATION OF A SAMPLE FOR FAST AND NON-DESTRUCTIVE ON SAMPLE NAVIGATION DURING NANOPROBING 有权
标题翻译：非接触式显微镜的系统和方法，用于三维预处理，用于在纳米制备过程中快速和非破坏性样品导航的样品
公开(公告)号：US20140143912A1
公开(公告)日：2014-05-22
申请号：US14083438
申请日：2013-11-18
申请人： DCG Systems, Inc.
发明人： Vladimir A. Ukraintsev , Richard Stallcup , Sergiy Pryadkin , Mike Berkmyre , John Sanders
IPC分类号： G01Q10/00 , G01Q60/38 , G01Q60/48 , G01Q60/00
CPC分类号： G01Q10/02 , G01Q10/00 , G01Q30/025 , G01Q60/00 , G01Q60/38 , G01Q60/48
摘要： A system for performing sample probing. The system including an topography microscope configured to receive three-dimensional coordinates for a sample based on at least three fiducial marks; receive the sample mounted in a holder; and navigate to at least a location on the sample based on the at least three fiducial marks and the three-dimensional coordinates.
摘要翻译：用于执行抽样探测的系统。该系统包括构造成基于至少三个基准标记接收样本的三维坐标的地形显微镜; 接收安装在支架上的样品; 并基于至少三个基准标记和三维坐标导航到样本上的至少一个位置。

65. 发明授权

US08499621B2 Scanning probe microscopy inspection and modification system 失效
公开(公告)号：US08499621B2
公开(公告)日：2013-08-06
申请号：US11841698
申请日：2007-08-20
申请人： Victor B. Kley
发明人： Victor B. Kley
IPC分类号： G01B5/28 , G06T15/00
CPC分类号： G01Q60/58 , G01B7/31 , G01N23/225 , G01Q10/02 , G01Q10/04 , G01Q10/06 , G01Q20/00 , G01Q20/02 , G01Q30/04 , G01Q40/00 , G01Q60/04 , G01Q60/16 , G01Q60/22 , G01Q60/38 , G01Q70/02 , G01Q70/06 , G01Q80/00 , G02B21/002 , G03F1/72 , G03F1/84 , G03F7/2049 , G03F7/704 , G03F7/70616 , G11B5/232 , G11B5/3116 , G11B5/3163 , G11B5/3166 , G11B9/14 , G11B9/1409 , G11B9/1418 , G11B9/1427 , G11B9/1436 , G11B9/1445 , G11B9/1454 , G11B9/149 , G11B11/12 , G11B11/16 , G11B2005/0002 , G11B2005/0021 , H02N1/006 , Y10S977/855 , Y10S977/871
摘要： A scanning probe microscopy (SPM) inspection and/or modification system which uses SPM technology and techniques. The system includes various types of microstructured SPM probes for inspection and/or modification of the object. The components of the SPM system include microstructured calibration structures. A probe may be defective because of wear or because of fabrication errors. Various types of reference measurements of the calibration structure are made with the probe or vice versa to calibrate it. The components of the SPM system further include one or more tip machining structures. At these structures, material of the tips of the SPM probes may be machined by abrasively lapping and chemically lapping the material of the tip with the tip machining structures.

66. 发明授权

US08370960B2 Modular atomic force microscope 有权
标题翻译：模块化原子力显微镜
公开(公告)号：US08370960B2
公开(公告)日：2013-02-05
申请号：US12587943
申请日：2009-10-14
申请人： Roger Proksch , Mario Viani , Jason Cleveland , Maarten Rutgers , Matthew Klonowski , Daren Walters , James Hodgson , Jonathan Hensel , Paul Costales , Anil Gannepalli
发明人： Roger Proksch , Mario Viani , Jason Cleveland , Maarten Rutgers , Matthew Klonowski , Daren Walters , James Hodgson , Jonathan Hensel , Paul Costales , Anil Gannepalli
IPC分类号： G01Q30/10 , G01Q30/08 , G01Q60/38
CPC分类号： G01Q30/18 , G01Q10/02 , G01Q10/04 , G01Q20/02
摘要： A modular AFM/SPM which provides faster measurements, in part through the use of smaller probes, of smaller forces and movements, free of noise artifacts, that the old generations of these devices have increasingly been unable to provide. The modular AFM/SPM includes a chassis, the foundation on which the modules of the instrument are supported; a view module providing the optics for viewing the sample and the probe; a head module providing the components for the optical lever arrangement and for steering and focusing those components; a scanner module providing the XYZ translation stage that actuates the sample in those dimensions and the engage mechanism; a isolation module that encloses the chassis and provides acoustic and/or thermal isolation for the instrument and an electronics module which, together with the separate controller, provide the electronics for acquiring and processing images and controlling the other functions of the instrument. All these modules and many of their subassemblies are replaceable and potentially upgradeable. This allows updating to new technology as it becomes available.
摘要翻译：模块化AFM / SPM，通过使用较小的探头，通过使用更小的力和运动，无需噪声伪影，这些设备的旧一代越来越无法提供更快的测量。模块化AFM / SPM包括一个底盘，支持仪器模块的基础; 提供用于观察样品和探针的光学元件的视图模块; 提供用于光学杠杆装置的部件并用于转向和聚焦这些部件的头部模块; 提供XYZ平移台的扫描仪模块，其驱动那些尺寸的样品和接合机构; 隔离模块，其包围机箱并为仪器提供声学和/或热隔离;以及电子模块，其与单独的控制器一起提供用于获取和处理图像并控制仪器的其它功能的电子装置。所有这些模块及其许多子组件都是可替换的，并且可以升级。这允许在新技术变得可用时更新新技术。

67. 发明申请

US20120110707A1 Metrology Probe and Method of Configuring a Metrology Probe 有权
标题翻译：计量探头和配置计量探头的方法
公开(公告)号：US20120110707A1
公开(公告)日：2012-05-03
申请号：US13322568
申请日：2010-05-28
申请人： Harsh Deep Chopra , Jason N. Armstrong , Zonglu Hua
发明人： Harsh Deep Chopra , Jason N. Armstrong , Zonglu Hua
IPC分类号： G01Q10/02
CPC分类号： G01Q10/02 , G01Q10/04 , G01Q70/02
摘要： A metrology probe capable of measurements of a broad range of physical properties of individual samples of nano- or sub-nanometer dimensions is provided. The probe comprises a probe body, a substrate connected to the probe body, and a tip proximate the substrate. The probe further comprises a coarse piezoelectric actuator having an electrical input. The coarse piezo is configured to cause the tip and/or the substrate to move relative to each other when a first electrical signal is provided to the electrical input. The probe further comprises a low-pass filter in electrical communication with the electrical input of the coarse piezo. The probe further comprises a fine piezoelectric actuator having an electrical input configured to cause the tip and/or the substrate to move relative to each other when a second electrical signal is provided to the electrical input.
摘要翻译：提供了能够测量纳米或亚纳米尺寸的单个样品的宽范围物理性质的计量探针。探针包括探针体，连接到探针体的基底和靠近基底的尖端。探头还包括具有电输入的粗压电致动器。粗电压被配置为当第一电信号被提供给电输入端时，尖端和/或衬底相对于彼此移动。探头还包括与粗压电体的电输入端电连通的低通滤波器。该探头还包括精细的压电致动器，其具有电输入，该电输入被配置成当向电输入提供第二电信号时使尖端和/或基板相对于彼此移动。

68. 发明授权

US07485856B2 Scanning probe microscopy inspection and modification system 失效
标题翻译：扫描探针显微镜检查和修改系统
公开(公告)号：US07485856B2
公开(公告)日：2009-02-03
申请号：US11411985
申请日：2006-04-25
申请人： Victor B. Kley
发明人： Victor B. Kley
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： G01Q60/58 , G01B7/31 , G01N23/225 , G01Q10/02 , G01Q10/04 , G01Q10/06 , G01Q20/00 , G01Q20/02 , G01Q30/04 , G01Q40/00 , G01Q60/04 , G01Q60/16 , G01Q60/22 , G01Q60/38 , G01Q70/02 , G01Q70/06 , G01Q80/00 , G02B21/002 , G03F1/72 , G03F1/84 , G03F7/2049 , G03F7/704 , G03F7/70616 , G11B5/232 , G11B5/3116 , G11B5/3163 , G11B5/3166 , G11B9/14 , G11B9/1409 , G11B9/1418 , G11B9/1427 , G11B9/1436 , G11B9/1445 , G11B9/1454 , G11B9/149 , G11B11/12 , G11B11/16 , G11B2005/0002 , G11B2005/0021 , H02N1/006 , Y10S977/855 , Y10S977/871
摘要： A scanning probe microscopy (SPM) inspection and/or modification system which uses SPM technology and techniques. The system includes various types of microstructured SPM probes for inspection and/or modification of the object. The components of the SPM system include microstructured calibration structures. A probe may be defective because of wear or because of fabrication errors. Various types of reference measurements of the calibration structure are made with the probe or vice versa to calibrate it. The components of the SPM system further include one or more tip machining structures. At these structures, material of the tips of the SPM probes may be machined by abrasively lapping and chemically lapping the material of the tip with the tip machining structures.
摘要翻译：使用SPM技术和技术的扫描探针显微镜（SPM）检查和/或修改系统。该系统包括用于检查和/或修改物体的各种类型的微结构化SPM探针。 SPM系统的组件包括微结构校准结构。由于磨损或由于制造错误，探头可能有缺陷。校准结构的各种参考测量用探针进行，反之亦然，以校准它。 SPM系统的部件还包括一个或多个尖端加工结构。在这些结构中，SPM探针的尖端的材料可以通过用尖端加工结构进行研磨研磨和化学研磨尖端的材料来加工。

69. 发明授权

US07348571B2 Scanning mechanism for scanning probe microscope and scanning probe microscope 有权
标题翻译：扫描探针显微镜扫描机和扫描探针显微镜
公开(公告)号：US07348571B2
公开(公告)日：2008-03-25
申请号：US11262537
申请日：2005-10-28
申请人： Yoshihiro Ue
发明人： Yoshihiro Ue
IPC分类号： G21K5/10 , G02B21/26 , H01J37/20
CPC分类号： G12B5/00 , G01Q10/02 , H02N2/028
摘要： A scanning probe microscope scanning mechanism has a Z stage for moving an object to be moved along the Z-axis. The Z stage includes an insulating board, a Z-direction moving actuator fixed to the insulating board, wires for the application of a voltage to the Z-direction moving actuator, and electrical connecting portions for electrically connecting the wires to the Z-direction moving actuator. The Z-direction moving actuator has a piezoelectric element that can expand and contract along the X-axis. The object is mounted on the free end of the piezoelectric element. The electrical connecting portions are provided at the fixed end of the piezoelectric element.
摘要翻译：扫描探针显微镜扫描机构具有用于沿Z轴移动物体的Z平台。 Z级包括绝缘板，固定到绝缘板的Z方向移动致动器，用于向Z方向移动致动器施加电压的电线以及用于将电线电连接到Z方向移动的电连接部执行器。 Z方向移动致动器具有能够沿X轴伸缩的压电元件。该物体安装在压电元件的自由端上。电连接部设置在压电元件的固定端。

70. 发明申请

US20070144243A1 SCANNING PROBE APPARATUS AND DRIVE STAGE THEREFOR 失效
标题翻译：扫描探针设备及其驱动阶段
公开(公告)号：US20070144243A1
公开(公告)日：2007-06-28
申请号：US11612111
申请日：2006-12-18
申请人： Nobuki YOSHIMATSU , Takao Kusaka , Susumu YASUDA , Junichi Seki
发明人： Nobuki YOSHIMATSU , Takao Kusaka , Susumu YASUDA , Junichi Seki
IPC分类号： G12B21/24 , G01N13/10
CPC分类号： G01Q10/02 , G01Q70/04
摘要： A drive stage, for driving a sample or a probe, capable of ensuring a movable range of a movable portion as a counterweight and always effectively canceling an inertial force to suppress vibration of a supporting member leading to vibration of the sample or the probe includes a counter drive element for moving the probe or a sample holding table and a movable portion movable in a direction in which the inertial force generated during movement of the probe or the sample holding table. The movable portion surrounds the counter drive element outside the counter drive element.
摘要翻译：用于驱动样本或探针的驱动台能够确保可移动部分作为配重的可移动范围并且总是有效地抵消惯性力以抑制导致样品或探针的振动的支撑构件的振动，包括：用于移动探针或样品保持台的可逆驱动元件和可在探头或样品保持台移动期间产生的惯性力的方向上移动的可动部分。可动部分围绕计数器驱动元件围绕计数器驱动元件。

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