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61. 发明授权

US07423765B2 Optical system of a microlithographic projection exposure apparatus 有权
标题翻译：微光刻投影曝光装置的光学系统
公开(公告)号：US07423765B2
公开(公告)日：2008-09-09
申请号：US11190555
申请日：2005-07-27
申请人： Joerg Tschischgale , Toralf Gruner
发明人： Joerg Tschischgale , Toralf Gruner
IPC分类号： G01B11/02 , G03B27/42
CPC分类号： G03F7/70591 , G03B13/00 , G03F7/70266
摘要： In a method for improving imaging properties of an illumination system or a projection objective of a microlithographic projection exposure apparatus, which comprises an optical element having a surface, the shape of the surface is measured directly at various points. To this end, a measuring beam is directed on the points, and the reflected or refracted beam is measured, e.g. using an interferometer. Based on deviations of the measured shape from a target shape, corrective measures are derived so that the imaging errors of the optical system are improved. The corrective measures may comprise a change in the position or the shape of the optical element being analyzed, or another optical element of the optical system. The target shape of the surface may, for example, be determined so that the optical element at least partially corrects imaging errors caused by other optical elements.
摘要翻译：在用于改善包括具有表面的光学元件的微光刻投影曝光装置的照明系统或投影物镜的成像特性的方法中，直接在各个点测量表面的形状。为此，测量光束被引导到这些点上，并且测量反射或折射的光束。使用干涉仪。基于测量形状与目标形状的偏差，导出校正措施，使得光学系统的成像误差得到改善。校正措施可以包括被分析的光学元件的位置或形状的改变，或光学系统的另一个光学元件的变化。例如，可以确定表面的目标形状，使得光学元件至少部分地校正由其它光学元件引起的成像误差。

62. 发明申请

US20080204692A1 MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND METHOD FOR PRODUCING MICROSTRUCTURED COMPONENTS 审中-公开
标题翻译：微结构投影曝光装置及其生产微结构元件的方法
公开(公告)号：US20080204692A1
公开(公告)日：2008-08-28
申请号：US12054991
申请日：2008-03-25
申请人： Toralf Gruner , Bernd Geh
发明人： Toralf Gruner , Bernd Geh
IPC分类号： G03B27/72 , G03B27/54
CPC分类号： G03F7/70441 , G03F7/70083 , G03F7/70141 , G03F7/70391 , G03F7/70566 , G03F7/70941
摘要： A method for producing microstructured components in a microlithographic projection exposure apparatus is disclosed. The method includes imaging a pattern of structures into an image plane of a projection objective. The dose distribution of projection light in the image plane can be influenced so that the image of a structure is at least essentially independent of the topography of structures which lie inside a region surrounding the structure.
摘要翻译：公开了一种在微光刻投影曝光装置中制造微结构元件的方法。该方法包括将结构图案成像到投影物镜的像平面中。可以影响投影光在图像平面中的剂量分布，使得结构的图像至少基本上独立于位于围绕结构的区域内的结构的形貌。

63. 发明授权

US07321465B2 Method of optimizing an objective with fluoride crystal lenses, and objective with fluoride crystal lenses 失效
标题翻译：氟化物晶体透镜优化目标的方法，以及氟化物晶体透镜的目标
公开(公告)号：US07321465B2
公开(公告)日：2008-01-22
申请号：US11071699
申请日：2005-03-02
申请人： Michael Totzeck , Vladimir Kamenov , Toralf Gruner
发明人： Michael Totzeck , Vladimir Kamenov , Toralf Gruner
IPC分类号： G02B27/28
CPC分类号： G02B1/08 , G02B1/02 , G02B5/3083 , G02B13/143 , G03F7/70241 , G03F7/705 , G03F7/70966 , Y10S359/90
摘要： A numerical optimizing method serves to reduce harmful effects caused by intrinsic birefringence in lenses of a fluoride crystal material of cubic crystal structure in an objective, particularly a projection objective for a microlithography system. Under the optimizing method, an optimizing function which takes at least one birefringence-related image aberration into account is minimized. The birefringence-related image aberration is determined from a calculation for a light ray passing through the fluoride crystal lenses. To the extent that the birefringence-related image aberration is a function of parameters of the light ray, it depends only on geometric parameters of the light ray. The numerical optimizing method is used to produce objectives in which an optical retardation as well as an asymmetry of the optical retardation are corrected. The lenses are arranged in homogeneous groups, where each homogeneous group is corrected for the optical retardation asymmetry.
摘要翻译：数值优化方法用于减少物镜中的立方晶体结构的氟化物晶体材料的透镜中的固有双折射引起的有害影响，特别是微光刻系统的投影物镜。在优化方法下，考虑到至少一个双折射相关图像像差的优化函数被最小化。从通过氟化物晶体透镜的光线的计算确定双折射相关图像像差。在双折射相关图像像差是光线参数的函数的程度上，其仅取决于光线的几何参数。使用数值优化方法来产生其中光学延迟以及光学延迟的不对称性被校正的目标。透镜被排列成均匀的组，其中每个均匀组被校正用于光学延迟不对称。

64. 发明授权

US07145720B2 Objective with fluoride crystal lenses 有权
公开(公告)号：US07145720B2
公开(公告)日：2006-12-05
申请号：US10367989
申请日：2003-02-12
申请人： Daniel Krähmer , Toralf Gruner , Wilhelm Ulrich , Birgit Enkisch , Michael Gerhard , Martin Brunotte , Christian Wagner , Winfried Kaiser , Manfred Maul , Christof Zaczek
发明人： Daniel Krähmer , Toralf Gruner , Wilhelm Ulrich , Birgit Enkisch , Michael Gerhard , Martin Brunotte , Christian Wagner , Winfried Kaiser , Manfred Maul , Christof Zaczek
IPC分类号： G02B5/30
CPC分类号： G03F7/70966 , G02B1/02 , G02B1/08 , G02B5/3083 , G03F7/70225 , G03F7/70241 , G03F7/70566 , G03F7/70958 , Y10S359/90
摘要： An objective for a microlithography projection system has at least one fluoride crystal lens. The effects of birefringence, which are detrimental to the image quality, are reduced if the lens axis of the crystal lens is oriented substantially perpendicular to the {100}-planes or {100}-equivalent crystallographic planes of the fluoride crystal. If two or more fluoride crystal lenses are used, they should have lens axes oriented in the (100)-, (111)-, or (110)-direction of the crystallographic structure, and they should be oriented at rotated positions relative to each other. The birefringence-related effects are further reduced by using groups of mutually rotated (100)-lenses in combination with groups of mutually rotated (111)- or (110)-lenses. A further improvement is also achieved by applying a compensation coating to at least one optical element of the objective.

65. 发明授权

US07068436B2 Projection lens for a microlithographic projection exposure apparatus 失效
标题翻译：用于微光刻投影曝光装置的投影透镜
公开(公告)号：US07068436B2
公开(公告)日：2006-06-27
申请号：US10878611
申请日：2004-06-29
申请人： Toralf Gruner , Hans-Jürgen Mann
发明人： Toralf Gruner , Hans-Jürgen Mann
IPC分类号： G02B13/24
CPC分类号： G02B27/286 , G02B13/14 , G02B17/08 , G02B17/0892 , G03F7/70191 , G03F7/70225 , G03F7/70566
摘要： A projection lens (10) for a microlithographic projection exposure apparatus has a first optical element, for example a birefringent lens (L2), that has polarization dependent properties causing intensity fluctuations in an image plane of the projection lens. These fluctuation may be produced by a second optical element (24), for example a polarization selective beam splitting layer (28), that is arranged downstream of the first optical element. A gray filter (32; 132; 232) disposed in the beam path reduces the intensity fluctuations.
摘要翻译：用于微光刻投影曝光装置的投影透镜（10）具有第一光学元件（例如双折射透镜（L 2）），其具有导致投影透镜的图像平面中的强度波动的偏振相关特性。这些波动可以由布置在第一光学元件下游的第二光学元件（24）产生，例如偏振选择分束层（28）。设置在光束路径中的灰色滤光器（32; 132; 232）减小了强度波动。

66. 发明申请

US20060023179A1 Optical system of a microlithographic projection exposure apparatus 有权
标题翻译：微光刻投影曝光装置的光学系统
公开(公告)号：US20060023179A1
公开(公告)日：2006-02-02
申请号：US11190555
申请日：2005-07-27
申请人： Joerg Tschischgale , Toralf Gruner
发明人： Joerg Tschischgale , Toralf Gruner
IPC分类号： G03B27/42
CPC分类号： G03F7/70591 , G03B13/00 , G03F7/70266
摘要： In a method for improving imaging properties of an illumination system or a projection objective of a microlithographic projection exposure apparatus, which comprises an optical element having a surface, the shape of the surface is measured directly at various points. To this end, a measuring beam is directed on the points, and the reflected or refracted beam is measured, e.g. using an interferometer. Based on deviations of the measured shape from a target shape, corrective measures are derived so that the imaging errors of the optical system are improved. The corrective measures may comprise a change in the position or the shape of the optical element being analyzed, or another optical element of the optical system. The target shape of the surface may, for example, be determined so that the optical element at least partially corrects imaging errors caused by other optical elements.
摘要翻译：在用于改善包括具有表面的光学元件的微光刻投影曝光装置的照明系统或投影物镜的成像特性的方法中，直接在各个点测量表面的形状。为此，测量光束被引导到这些点上，并且测量反射或折射的光束。使用干涉仪。基于测量形状与目标形状的偏差，导出校正措施，使得光学系统的成像误差得到改善。校正措施可以包括被分析的光学元件的位置或形状的改变，或光学系统的另一个光学元件的变化。例如，可以确定表面的目标形状，使得光学元件至少部分地校正由其它光学元件引起的成像误差。

67. 发明申请

US20050248858A1 Device for holding a beam splitter element 失效
标题翻译：用于固定分束器元件的装置
公开(公告)号：US20050248858A1
公开(公告)日：2005-11-10
申请号：US11109316
申请日：2005-04-19
申请人： Ulrich Weber , Alexander Kohl , Hubert Holderer , Armin Schoeppach , Erwin Gaber , Winfried Kaiser , Reiner Garreis , Toralf Gruner , Chris Reed , Dragos Pariza , Mike Meehan
发明人： Ulrich Weber , Alexander Kohl , Hubert Holderer , Armin Schoeppach , Erwin Gaber , Winfried Kaiser , Reiner Garreis , Toralf Gruner , Chris Reed , Dragos Pariza , Mike Meehan
IPC分类号： G02B7/00 , G02B7/18 , G03F7/20 , G02B5/30 , G02B7/02 , G02B27/28
CPC分类号： G03F7/70825 , G02B7/008 , G02B7/1805 , G03F7/70891
摘要： The invention relates to a device for holding a beam splitter element having an optically active beam splitter layer in an optical imaging device, the beam splitter element being connected to at least one support element that is fastened in the housing of the imaging device. The connection between the beam splitter element and said at least one support element is designed in such a way that the position of the beam splitter layer of the beam splitter element remains nearly constant relative to the housing independently of temperatures and of thermal stresses acting upon the beam splitter element.
摘要翻译：本发明涉及一种用于在光学成像装置中保持具有光学有源分束器层的分束器元件的装置，所述分束器元件连接到紧固在成像装置的壳体中的至少一个支撑元件。分束器元件和所述至少一个支撑元件之间的连接被设计成使得分束器元件的分束器层的位置相对于壳体保持几乎恒定，而与温度和作用在分束器元件

68. 发明申请

US20050225737A1 Projection objective for immersion lithography 有权
标题翻译：浸没光刻的投影目标
公开(公告)号：US20050225737A1
公开(公告)日：2005-10-13
申请号：US11015553
申请日：2004-12-20
申请人： Karl-Stefan Weissenrieder , Alexander Hirnet , Alexandra Pazidis , Karl-Heinz Schuster , Christoph Zaczek , Michael Lill , Patrick Scheible , Harald Schink , Markus Brotsack , Ulrich Loering , Toralf Gruner , Guenter Scheible
发明人： Karl-Stefan Weissenrieder , Alexander Hirnet , Alexandra Pazidis , Karl-Heinz Schuster , Christoph Zaczek , Michael Lill , Patrick Scheible , Harald Schink , Markus Brotsack , Ulrich Loering , Toralf Gruner , Guenter Scheible
IPC分类号： G03B27/42 , G03F7/20
CPC分类号： G03F7/70983 , G03F7/70341
摘要： In a projection objective provided for imaging a pattern arranged in an object plane of the projection objective into an image plane of the projection objective with the aid of an immersion medium arranged between a last optical element of the projection objective in the light path and the image plane, the last optical element has a transparent substrate and a protective layer system that is fitted to the substrate, is provided for contact with the immersion medium and serves for increasing the resistance of the last optical element to degradation caused by the immersion medium.
摘要翻译：在投影物镜中，借助于设置在光路中的投影物镜的最后一个光学元件与图像之间的浸没介质，将布置在投影物镜的物平面中的图案成像到投影物镜的像平面中平面，最后一个光学元件具有透明基板和与基板相配合的保护层系统，用于与浸没介质接触，用于增加最后一个光学元件对浸入介质引起的劣化的电阻。

69. 发明申请

US20050152046A1 Optical system, in particular illumination system, of a microlithographic projection exposure apparatus 有权
标题翻译：光学系统，特别是照明系统，微光刻投影曝光装置
公开(公告)号：US20050152046A1
公开(公告)日：2005-07-14
申请号：US11014199
申请日：2004-12-16
申请人： Toralf Gruner , Michael Totzeck , Damian Fiolka , Wilhelm Ulrich , Gerhard Fuerter
发明人： Toralf Gruner , Michael Totzeck , Damian Fiolka , Wilhelm Ulrich , Gerhard Fuerter
IPC分类号： G02B27/00 , G02B27/28 , G03F7/20 , G02B17/00
CPC分类号： G03F7/70191 , G02B5/04 , G02B5/3066 , G02B27/286 , G03F7/70566
摘要： An optical system, particularly an illumination system, of a microlithographic projection exposure apparatus contains at least one plane reflecting surface for folding the beam path. The at least one reflecting surface is arranged with respect to an optical axis of the optical system such that the intensity ratio between two mutually perpendicular polarization directions is at least substantially preserved for an axially parallel light ray deviated by the at least one reflecting surface. In accordance with a second aspect, the at least one reflecting surface is arranged such that a maximum effect on the polarization of the projection light is achieved, so as to be able to compensate for polarization dependencies which occur in other components of the illumination system.
摘要翻译：微光刻投影曝光装置的光学系统，特别是照明系统包含用于折叠光束路径的至少一个平面反射表面。所述至少一个反射表面相对于所述光学系统的光轴布置，使得对于由所述至少一个反射表面偏离的轴向平行的光线，至少基本上保留了两个相互垂直的偏振方向之间的强度比。根据第二方面，至少一个反射表面被布置成使得能够实现对投射光的极化的最大影响，以便能够补偿在照明系统的其它部件中发生的偏振依赖性。

70. 发明申请

US20050123840A1 Mask for use in a microlithographic projection exposure apparatus 审中-公开
标题翻译：用于微光刻投影曝光装置的掩模
公开(公告)号：US20050123840A1
公开(公告)日：2005-06-09
申请号：US10984868
申请日：2004-11-10
申请人： Michael Totzeck , Toralf Gruner , Jochen Hetzler
发明人： Michael Totzeck , Toralf Gruner , Jochen Hetzler
IPC分类号： G02F1/13 , G03B27/42 , G03C5/00 , G03F1/00 , G03F7/20 , G03F9/00 , H01L21/027
CPC分类号： G03F7/70566 , G03F1/38 , G03F1/50
摘要： A mask (20) for use in a microlithographic projection exposure apparatus (10) has a support (28) on which a pattern of opaque structures (32) is applied. The intermediate spaces (36, 36′) remaining between the structures (32c) are filled with a liquid or solid dielectric material (38, 38′). This increases the polarisation dependency of the diffraction efficiency, so that the mask can be used as a polarizer.
摘要翻译：在微光刻投影曝光装置（10）中使用的掩模（20）具有支撑体（28），在其上施加不透明结构（32）的图案。残留在结构（32c）之间的中间空间（36,36'）填充有液体或固体电介质材料（38,38'）。这增加了衍射效率的极化依赖性，使得掩模可以用作偏振器。

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