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    • 43. 发明申请
    • PIXEL SENSOR CELL FOR COLLECTING ELECTRONS AND HOLES
    • 用于收集电子和孔的像素传感器单元
    • US20070029581A1
    • 2007-02-08
    • US11161535
    • 2005-08-08
    • James AdkissonAndres BryantJohn Ellis-MonaghanMark JaffeJeffrey JohnsonAlain Loiseau
    • James AdkissonAndres BryantJohn Ellis-MonaghanMark JaffeJeffrey JohnsonAlain Loiseau
    • H01L27/148
    • H01L27/14603H01L27/14609H01L27/14689H01L31/035281
    • The present invention is a pixel sensor cell and method of making the same. The pixel sensor cell approximately doubles the available signal for a given quanta of light. The device of the present invention utilizes the holes produced by impinging photons in a pixel sensor cell circuit. A pixel sensor cell having reduced complexity includes an n-type collection well region formed beneath a surface of a substrate for collecting electrons generated by electromagnetic radiation impinging on the pixel sensor cell and a p-type collection well region formed beneath the surface of the substrate for collecting holes generated by the impinging photons. A circuit structure having a first input is coupled to the n-type collection well region and a second input is coupled to the p-type collection well region, wherein an output signal of the pixel sensor cell is the magnitude of the difference of a signal of the first input and a signal of the second input.
    • 本发明是像素传感器单元及其制造方法。 像素传感器单元对于给定的光量大约使可用信号加倍。 本发明的器件利用通过在像素传感器单元电路中照射光子而产生的空穴。 具有降低的复杂度的像素传感器单元包括形成在基板的表面下面的n型收集阱区域,用于收集由电子辐射照射在像素传感器单元上​​产生的电子以及形成在基板表面下方的p型收集阱区域 用于收集由撞击光子产生的孔。 具有第一输入的电路结构耦合到n型收集阱区域,而第二输入端耦合到p型收集阱区域,其中像素传感器单元的输出信号是信号的差值的大小 的第一输入和第二输入的信号。
    • 44. 发明申请
    • PIXEL SENSOR HAVING DOPED ISOLATION STRUCTURE SIDEWALL
    • 具有分离隔离结构的PIXEL传感器
    • US20060267013A1
    • 2006-11-30
    • US10908885
    • 2005-05-31
    • James AdkissonMark JaffeRobert Leidy
    • James AdkissonMark JaffeRobert Leidy
    • H01L29/04H01L29/768H01L27/148H01L29/76
    • H01L27/14603H01L27/1463H01L27/14643H01L27/14683
    • A novel pixel sensor structure formed on a substrate of a first conductivity type includes a photosensitive device of a second conductivity type and a surface pinning layer of the first conductivity type. An isolation structure is formed adjacent to the photosensitive device pinning layer. The isolation structure includes a dopant region comprising material of the first conductivity type selectively formed along a sidewall of the isolation structure that is adapted to electrically couple the surface pinning layer to the underlying substrate. The corresponding method for forming the dopant region selectively formed along the sidewall of the isolation structure comprises an out-diffusion process whereby dopant materials present in a doped material layer formed along selected portions in the isolation structure are driven into the underlying substrate during an anneal. Alternately, or in conjunction, an angled ion implantation of dopant material in the isolation structure sidewall may be performed by first fabricating a photoresist layer and reducing its size by removing a corner, or a corner portion thereof, which may block the angled implant material.
    • 形成在第一导电类型的衬底上的新型像素传感器结构包括第二导电类型的光敏器件和第一导电类型的表面钉扎层。 在光敏器件钉扎层附近形成隔离结构。 隔离结构包括掺杂区域,该掺杂剂区域包括沿着隔离结构的侧壁选择性地形成的第一导电类型的材料,其适于将表面钉扎层电耦合到下面的衬底。 用于形成沿着隔离结构的侧壁选择性地形成的掺杂剂区域的相应方法包括外扩散工艺,由此在退火期间,存在于沿隔离结构中的选定部分形成的掺杂材料层中的掺杂剂材料被驱动到下面的衬底中。 替代地或结合地,隔离结构侧壁中的掺杂剂材料的成角度的离子注入可以通过首先制造光致抗蚀剂层并通过去除可能阻挡成角度的植入材料的角部或其角部来减小其尺寸来执行。