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    • 3. 发明申请
    • ISOLATED FULLY DEPLETED SILICON-ON-INSULATOR REGIONS BY SELECTIVE ETCH
    • 通过选择性蚀刻分离完全绝缘的绝缘体绝缘体区域
    • US20070128776A1
    • 2007-06-07
    • US11670262
    • 2007-02-01
    • Matthew BreitwischChung LamRandy MannDale Martin
    • Matthew BreitwischChung LamRandy MannDale Martin
    • H01L21/84H01L27/12H01L29/00
    • H01L21/764H01L21/76283H01L21/76289H01L29/78654
    • The present invention provides a method of forming an ultra-thin and uniform layer of Si including the steps of providing a substrate having semiconducting regions separated by insulating regions; implanting dopants into the substrate to provide an etch differential doped portion in the semiconducting regions underlying an upper Si-containing surface of the semiconducting regions; forming a trench in the substrate including the semiconducting regions and the insulating regions; removing the etch differential doped portion from the semiconductor regions to produce a cavity underlying the upper surface of the semiconducting regions; and filling the trench with a trench dielectric, wherein the trench dielectric material encloses the cavity underlying the upper Si-containing surface of the semiconducting regions. The upper Si-containing surface of the semiconducting regions has a uniform thickness of less than about 100 Å.
    • 本发明提供一种形成超薄且均匀的Si层的方法,包括以下步骤:提供具有由绝缘区分隔开的半导体区域的衬底; 将掺杂剂注入衬底中以在半导体区域的上部含Si表面下方的半导体区域中提供蚀刻差分掺杂部分; 在包括半导体区域和绝缘区域的衬底中形成沟槽; 从所述半导体区域去除所述蚀刻差分掺杂部分以在所述半导体区域的上表面下方形成空腔; 以及用沟槽电介质填充所述沟槽,其中所述沟槽电介质材料包围在所述半导体区域的所述上部含Si表面之下的空腔。 半导体区域的上部含Si表面具有小于约的均匀厚度。
    • 5. 发明申请
    • SRAM VOLTAGE CONTROL FOR IMPROVED OPERATIONAL MARGINS
    • 用于改进操作标准的SRAM电压控制
    • US20070121370A1
    • 2007-05-31
    • US11164556
    • 2005-11-29
    • Wayne EllisRandy MannDavid WagerRobert Wong
    • Wayne EllisRandy MannDavid WagerRobert Wong
    • G11C11/00
    • G11C5/14G11C11/413
    • A static random access memory (“SRAM”) is provided which includes a plurality of SRAM cells arranged in an array. The array includes a plurality of rows and a plurality of columns. The SRAM includes a plurality of voltage control corresponding to respective ones of the plurality of columns of the array. Each of the plurality of voltage control circuits are coupled to an output of a power supply, each voltage control circuit having a function to temporarily reduce a voltage provided to power supply inputs of a plurality of SRAM cells that belong to a selected column of columns of the SRAM. The selected column is selected and the power supply voltage to that column is reduced during a write operation in which a bit is written to one of the SRAM cells belonging to the selected column.
    • 提供了包括以阵列布置的多个SRAM单元的静态随机存取存储器(“SRAM”)。 阵列包括多个行和多个列。 SRAM包括对应于阵列的多个列中的相应列的多个电压控制。 多个电压控制电路中的每一个耦合到电源的输出,每个电压控制电路具有临时降低提供给属于所选列列的多个SRAM单元的电源输入的电压的功能 SRAM。 选择的列被选择,并且在将位写入属于所选列的SRAM单元之一的写操作期间,该列的电源电压减小。
    • 9. 发明申请
    • Isolated fully depleted silicon-on-insulator regions by selective etch
    • 通过选择性蚀刻隔离完全耗尽的绝缘体上硅区域
    • US20060027889A1
    • 2006-02-09
    • US10710821
    • 2004-08-05
    • Matthew BreitwischChung LamRandy MannDale Martin
    • Matthew BreitwischChung LamRandy MannDale Martin
    • H01L29/06H01L21/76
    • H01L21/764H01L21/76283H01L21/76289H01L29/78654
    • The present invention provides a method of forming an ultra-thin and uniform layer of Si including the steps of providing a substrate having semiconducting regions separated by insulating regions; implanting dopants into the substrate to provide an etch differential doped portion in the semiconducting regions underlying an upper Si-containing surface of the semiconducting regions; forming a trench in the substrate including the semiconducting regions and the insulating regions; removing the etch differential doped portion from the semiconductor regions to produce a cavity underlying the upper surface of the semiconducting regions; and filling the trench with a trench dielectric, wherein the trench dielectric material encloses the cavity underlying the upper Si-containing surface of the semiconducting regions. The upper Si-containing surface of the semiconducting regions has a uniform thickness of less than about 100 Å.
    • 本发明提供一种形成超薄且均匀的Si层的方法,包括以下步骤:提供具有由绝缘区分隔开的半导体区域的衬底; 将掺杂剂注入衬底中以在半导体区域的上部含Si表面下方的半导体区域中提供蚀刻差分掺杂部分; 在包括半导体区域和绝缘区域的衬底中形成沟槽; 从所述半导体区域移除所述蚀刻差分掺杂部分以产生位于所述半导体区域的上表面下方的空腔; 以及用沟槽电介质填充所述沟槽,其中所述沟槽电介质材料包围在所述半导体区域的所述上部含Si表面下面的空腔。 半导体区域的上部含Si表面具有小于约的均匀厚度。