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    • 33. 发明授权
    • Method and apparatus for digital printing
    • 数字印刷的方法和装置
    • US06786971B2
    • 2004-09-07
    • US10165017
    • 2002-06-06
    • Dean Robert Gary Anderson
    • Dean Robert Gary Anderson
    • B05C1100
    • B05B13/04B05B7/2483B05B12/1472B05B13/005B05B15/50
    • A printing device for digital printing on a print medium is comprised of a wheel rotatable by a motor, a liquid dispenser for depositing a quantity of liquid on the wheel along the outer edge, and an air jet positioned adjacent the outer edge for removing the liquid from the outer edge and directing the liquid toward the print medium as the wheel rotates through the air jet. The outer edge includes a plurality of teeth transport the paint from the dispenser to the air jet. An electronically controlled motor is used to selectively rotate the wheel through the air jet thereby removing a desired amount of liquid from the wheel. The liquid is transported by the air jet toward the print medium. By employing a plurality of such printing devices, a full color digital image can be reproduced on any print medium.
    • 用于在打印介质上进行数字印刷的打印装置包括可由马达旋转的轮子,用于沿着外边缘在轮上沉积一定数量的液体的液体分配器以及邻近外边缘定位的用于去除液体的空气喷射 并且当轮旋转通过空气射流时,将液体引向打印介质。 外边缘包括将涂料从分配器输送到空气喷射器的多个齿。 电子控制马达用于通过空气喷射器选择性地旋转车轮,从而从车轮中除去所需量的液体。 液体通过空气喷射朝向打印介质输送。 通过使用多个这样的打印装置,可以在任何打印介质上再现全色数字图像。
    • 34. 发明授权
    • Method and apparatus for mitigating cross-contamination between liquid dispensing jets in close proximity to a surface
    • 用于减轻在靠近表面的液体分配喷嘴之间的交叉污染的方法和装置
    • US06689215B2
    • 2004-02-10
    • US10265203
    • 2002-10-03
    • Andrew Nguyen
    • Andrew Nguyen
    • B05C500
    • H01L21/6708B05B7/0884B05B12/1472B05C5/027B05C11/08G03F7/3021H01L21/67051
    • Methods and apparatus for delivering a variety of processing fluids onto a semiconductor wafer substrate with a multi-port nozzle: The nozzle is formed with plurality of longitudinal liquid manifolds and gas manifolds. Each manifold is positioned within the nozzle body so they are in fluid communication with a separate corresponding inlet formed in the body of the nozzle. Fluid inlets may be connected to external sources for receiving processing fluids to be dispensed. In addition, the nozzle includes a plurality of nozzle tips for directing dispensed liquids onto the wafer substrate. At least some portion of each tip extends beyond the bottom surface of the nozzle, and at the same time, at least some portion of the tip extends into a liquid manifold within the nozzle body to form an interior reservoir. Furthermore, the bottom nozzle surface includes a network of trenches formed in between the nozzle tips in a grid-like pattern and may further include a plurality of gas orifices therein. The gas orifices are connected to a gas manifold to receive pressurized gas thereby forming gas curtains which assist in controlling and directing the various processing fluids onto the wafer substrate with reduced cross-contamination and splashback from the wafer substrate.
    • 用多端口喷嘴将各种处理流体输送到半导体晶片衬底上的方法和装置:喷嘴形成有多个纵向液体歧管和气体歧管。 每个歧管定位在喷嘴体内,使得它们与形成在喷嘴主体中的单独的对应入口流体连通。 流体入口可以连接到外部源以接收待分配的处理流体。 此外,喷嘴包括用于将分配的液体引导到晶片衬底上的多个喷嘴尖端。 每个尖端的至少一些部分延伸超过喷嘴的底表面,并且同时,尖端的至少一些部分延伸到喷嘴体内的液体歧管中以形成内部储存器。 此外,底部喷嘴表面包括以格子状图案形成在喷嘴尖端之间的沟槽网络,并且还可以包括多个气体孔。 气体孔连接到气体歧管以接收加压气体,从而形成气体窗帘,其有助于将各种处理流体控制和引导到晶片衬底上,同时具有减少的来自晶片衬底的交叉污染和溅射。