会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 36. 发明申请
    • Method of Filling Large Deep Trench with High Quality Oxide for Semiconductor Devices
    • 用于半导体器件的高质量氧化物填充大深沟槽的方法
    • US20110140228A1
    • 2011-06-16
    • US12637988
    • 2009-12-15
    • Xiaobin WangAnup BhallaYeeheng Lee
    • Xiaobin WangAnup BhallaYeeheng Lee
    • H01L29/06H01L21/762
    • H01L29/0657H01L21/76202H01L21/76224H01L21/76227H01L29/407H01L29/872H01L2924/0002H01L2924/00
    • A method is disclosed for creating a semiconductor device structure with an oxide-filled large deep trench (OFLDT) portion having trench size TCS and trench depth TCD. A bulk semiconductor layer (BSL) is provided with a thickness BSLT>TCD. A large trench top area (LTTA) is mapped out atop BSL with its geometry equal to OFLDT. The LTTA is partitioned into interspersed, complementary interim areas ITA-A and ITA-B. Numerous interim vertical trenches of depth TCD are created into the top BSL surface by removing bulk semiconductor materials corresponding to ITA-B. The remaining bulk semiconductor materials corresponding to ITA-A are converted into oxide. If any residual space is still left between the so-converted ITA-A, the residual space is filled up with oxide deposition. Importantly, the geometry of all ITA-A and ITA-B should be configured simple and small enough to facilitate fast and efficient processes of oxide conversion and oxide filling.
    • 公开了一种用于产生具有沟槽尺寸TCS和沟槽深度TCD的具有氧化物填充的大深沟槽(OFLDT)部分的半导体器件结构的方法。 体积半导体层(BSL)设置有厚度BSLT> TCD。 一个大的沟槽顶部区域(LTTA)映射到BSL顶部,其几何形状等于OFLDT。 LTTA被划分为散置的,互补的临时区域ITA-A和ITA-B。 通过去除对应于ITA-B的散装半导体材料,在顶部BSL表面上形成了许多深度TCD的临时垂直沟槽。 对应于ITA-A的剩余体积半导体材料被转化为氧化物。 如果在经过转换的ITA-A之间仍然留有剩余空间,则剩余空间被氧化物沉积填满。 重要的是,所有ITA-A和ITA-B的几何形状都应该被简单而小型化,以便于快速有效地进行氧化物转换和氧化物填充。
    • 37. 发明申请
    • Enhancing Schottky breakdown voltage (BV) without affecting an integrated Mosfet-Schottky device layout
    • 增强肖特基击穿电压(BV),而不影响集成的Mosfet-Schottky器件布局
    • US20110140194A1
    • 2011-06-16
    • US12932163
    • 2011-02-17
    • Anup BhallaXiaobin WangMoses Ho
    • Anup BhallaXiaobin WangMoses Ho
    • H01L27/06H01L21/8234
    • H01L29/7813H01L29/0619H01L29/1095H01L29/456H01L29/66727H01L29/66734H01L29/7806H01L29/7811H01L29/872
    • This invention discloses a semiconductor power device that includes an active cell area having a plurality of power transistor cells. Each of said power transistor cells has a planar Schottky diode that includes a Schottky junction barrier metal covering areas above gaps between separated body regions between two adjacent power transistor cells. The separated body regions further provide a function of adjusting a leakage current of said Schottky diode in each of said power transistor cells. Each of the planar Schottky diodes further includes a Shannon implant region disposed in a gap between the separated body regions of two adjacent power transistor cells for further adjusting a leakage current of said Schottky diode. Each of the power transistor cells further includes heavy body doped regions in the separated body regions next to source regions surrounding said Schottky diode forming a junction barrier Schottky (JBS) pocket region.
    • 本发明公开了一种包括具有多个功率晶体管单元的有源单元区域的半导体功率器件。 每个所述功率晶体管单元具有平面肖特基二极管,其包括覆盖两个相邻功率晶体管单元之间的分离体区域之间的间隙上方的区域的肖特基结阻挡金属。 分离体区域还提供调节每个所述功率晶体管单元中的所述肖特基二极管的漏电流的功能。 每个平面肖特基二极管还包括设置在两个相邻功率晶体管单元的分离的体区之间的间隙中的香农注入区,用于进一步调整所述肖特基二极管的漏电流。 每个功率晶体管单元进一步包括分离体区域中的重体掺杂区域,其邻近形成结屏障肖特基(JBS)口袋区域的围绕所述肖特基二极管的源极区域。
    • 38. 发明授权
    • Enhancing Schottky breakdown voltage (BV) without affecting an integrated MOSFET-Schottky device layout
    • 增强肖特基击穿电压(BV),而不影响集成MOSFET肖特基器件布局
    • US07952139B2
    • 2011-05-31
    • US12217092
    • 2008-06-30
    • Anup BhallaXiaobin WangMoses Ho
    • Anup BhallaXiaobin WangMoses Ho
    • H01L29/66
    • H01L29/7813H01L29/0619H01L29/1095H01L29/456H01L29/66727H01L29/66734H01L29/7806H01L29/7811H01L29/872
    • This invention discloses a semiconductor power device that includes an active cell area having a plurality of power transistor cells. Each of said power transistor cells has a planar Schottky diode that includes a Schottky junction barrier metal covering areas above gaps between separated body regions between two adjacent power transistor cells. The separated body regions further provide a function of adjusting a leakage current of said Schottky diode in each of said power transistor cells. Each of the planar Schottky diodes further includes a Shannon implant region disposed in a gap between the separated body regions of two adjacent power transistor cells for further adjusting a leakage current of said Schottky diode. Each of the power transistor cells further includes heavy body doped regions in the separated body regions next to source regions surrounding said Schottky diode forming a junction barrier Schottky (JBS) pocket region.
    • 本发明公开了一种包括具有多个功率晶体管单元的有源单元区域的半导体功率器件。 每个所述功率晶体管单元具有平面肖特基二极管,其包括覆盖两个相邻功率晶体管单元之间的分离体区域之间的间隙上方的区域的肖特基结阻挡金属。 分离体区域还提供调节每个所述功率晶体管单元中的所述肖特基二极管的漏电流的功能。 每个平面肖特基二极管还包括设置在两个相邻功率晶体管单元的分离的体区之间的间隙中的香农注入区,用于进一步调整所述肖特基二极管的漏电流。 每个功率晶体管单元进一步包括分离体区域中的重体掺杂区域,其邻近形成结屏障肖特基(JBS)口袋区域的围绕所述肖特基二极管的源极区域。