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    • 36. 发明申请
    • Semiconductor device
    • 半导体器件
    • US20050001251A1
    • 2005-01-06
    • US10834928
    • 2004-04-30
    • Hiroshi ItokawaKoji YamakawaKatsuaki Natori
    • Hiroshi ItokawaKoji YamakawaKatsuaki Natori
    • H01L21/316H01L21/02H01L21/8246H01L27/105H01L27/108H01L27/115
    • H01L27/11502H01L27/11507H01L28/55H01L28/65
    • A semiconductor device comprising a semiconductor substrate, and a capacitor provided above the semiconductor substrate, and including a bottom electrode, a top electrode and a dielectric film between the bottom and top electrodes, the bottom electrode including a conductive film selected from a noble metal film and a noble metal oxide film, a metal oxide film having a perovskite structure, provided between the dielectric film and the conductive film, expressed by ABO3, and containing first metal element as B-site element, and a metal film provided between the conductive film and the metal oxide film, and containing second metal element which is B-site element of a metal oxide having a perovskite structure, a decrease of Gibbs free energy when the second metal element forms oxide being larger than that when the first metal element forms oxide, a thickness of the metal oxide film being 5 nm or less.
    • 一种半导体器件,包括半导体衬底和设置在半导体衬底之上的电容器,并且在底电极和顶电极之间包括底电极,顶电极和电介质膜,底电极包括选自贵金属膜 和由ABO3表示的电介质膜和导电膜之间具有钙钛矿结构的金属氧化物膜,并且含有作为B位元素的第一金属元素的金属氧化物膜和设置在导电膜之间的金属膜 和金属氧化物膜,并且含有作为具有钙钛矿结构的金属氧化物的B位元素的第二金属元素,当第二金属元素形成氧化物时,吉布斯自由能的降低大于第一金属元素形成氧化物时的吉布斯自由能的降低 ,金属氧化物膜的厚度为5nm以下。
    • 40. 发明授权
    • Semiconductor memory device using ferroelectric capacitor and having
only one sense amplifier selected
    • 使用铁电电容器并且仅选择一个读出放大器的半导体存储器件
    • US5400275A
    • 1995-03-21
    • US712092
    • 1991-06-07
    • Kazuhide AbeHiroshi ToyodaKoji YamakawaMotomasa ImaiKoji Sakui
    • Kazuhide AbeHiroshi ToyodaKoji YamakawaMotomasa ImaiKoji Sakui
    • G11C11/22H01L27/115G11C7/00
    • H01L27/11502G11C11/22
    • A semiconductor memory device comprises a plurality of memory cells arranged in the form of a matrix to constitute rows-and columns, a plurality of first driving lines, connected to the memory cells, for transmitting a first driving signal to the memory cells, one of the plurality of first driving lines being selected by a row address, a plurality of second driving lines, connected to the memory cells, for transmitting a second driving signal to the memory cells, one of the plurality of second driving lines being selected by a column address, a plurality of read/write lines, connected to the memory cells, for performing read/write operations with respect to the memory cells, and a plurality of sense amplifiers connected to the read/ write lines, wherein one of the plurality of sense amplifiers is selected by the column address, and the memory cells in the same column are connected to the same sense amplifier through the read/write lines.
    • 一种半导体存储器件包括以矩阵形式布置以构成行和列的多个存储器单元,连接到存储器单元的多条第一驱动线,用于将第一驱动信号发送到存储器单元,其中之一 所述多个第一驱动线由行地址选择,多个第二驱动线连接到所述存储单元,用于将第二驱动信号发送到所述存储单元,所述多个第二驱动线中的一个由列选择 连接到存储器单元的多个读/写线,用于对存储单元执行读/写操作,以及连接到读/写线的多个读出放大器,其中多个感测中的一个 放大器由列地址选择,同一列中的存储单元通过读/写线连接到相同的读出放大器。