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    • 7. 发明授权
    • Semiconductor device having ferroelectric capacitors
    • 具有铁电电容器的半导体装置
    • US06995417B2
    • 2006-02-07
    • US10924854
    • 2004-08-25
    • Soichi YamazakiKoji Yamakawa
    • Soichi YamazakiKoji Yamakawa
    • H01L27/108
    • H01L27/11507H01L27/11502H01L28/57H01L28/65
    • Disclosed is a semiconductor device comprising a semiconductor substrate, an insulating region provided on the semiconductor substrate, a first capacitor provided above the insulating region, a second capacitor provided above the insulating region and adjacent to the first capacitor, a conductive hydrogen-barrier film which prevents diffusion of hydrogen into the first and second capacitors and connects a bottom electrode of the first capacitor with a bottom electrode of the second capacitor, the conductive hydrogen-barrier film having a first portion interposing between the insulating region and the first capacitor and between the insulating region and the second capacitor.
    • 公开了一种半导体器件,包括半导体衬底,设置在半导体衬底上的绝缘区域,设置在绝缘区域上方的第一电容器,设置在绝缘区域上方并与第一电容器相邻的第二电容器,导电阻氧膜, 防止氢扩散到第一和第二电容器中,并且将第一电容器的底部电极与第二电容器的底部电极连接,导电阻氧膜具有介于绝缘区域和第一电容器之间的第一部分, 绝缘区域和第二电容器。