专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

31. 发明授权

US06581271B2 Method of manufacturing thin-film magnetic head 有权
标题翻译：制造薄膜磁头的方法
公开(公告)号：US06581271B2
公开(公告)日：2003-06-24
申请号：US09865719
申请日：2001-05-29
申请人： Yoshitaka Sasaki , Hiroyuki Itoh
发明人： Yoshitaka Sasaki , Hiroyuki Itoh
IPC分类号： G11B5127
CPC分类号： G11B5/3173 , G11B5/3103 , G11B5/3116 , G11B5/3163 , G11B5/3166 , G11B5/3967 , Y10S428/90 , Y10T29/49004 , Y10T29/49021 , Y10T29/49032 , Y10T29/49036 , Y10T29/49037 , Y10T29/49041 , Y10T29/49046 , Y10T29/49789 , Y10T29/49792 , Y10T29/49794 , Y10T29/49798 , Y10T428/11 , Y10T428/1171 , Y10T428/24355
摘要： A manufacturing method is provided for manufacturing thin film magnetic heads through the use of a thin-film magnetic head material, the head material including: a plurality of rows of head-to-be sections to be thin-film magnetic heads; an inter-row cutting section provided to be a position at which adjacent ones of the rows are to be separated; and an intra-row cutting section provided to be a position at which adjacent ones of the head-to-be sections in each of the rows are to be separated. The method includes the steps of: fabricating the head material including: a detection element for detecting an amount of processing on the head material, an electrode formed in the inter-row cutting section for electrically connecting the detection element to an external device, and a conductor for electrically connecting the electrode to the detection element; performing a specific processing on the head material while monitoring an output signal of the detection element; forming a head aggregate including one of the rows of the head-to-be sections by separating the head material having gone through the processing at the inter-row cutting section; and forming the thin-film magnetic heads by separating the head aggregate at the intra-row cutting section.
摘要翻译：提供一种通过使用薄膜磁头材料来制造薄膜磁头的制造方法，所述头材料包括：多列要成为薄膜磁头的头部; 设置为相邻行中要分离的位置的行间切割部; 以及设置成为要分离每行中的相邻的待部分的位置的行内切割部。该方法包括以下步骤：制造头部材料包括：用于检测头部材料上的处理量的检测元件，形成在用于将检测元件电连接到外部装置的行间切割部分中的电极，以及用于将电极电连接到检测元件的导体; 在监视检测元件的输出信号的同时对头材料执行特定处理; 通过分离经过所述行间切割部分处理的所述头部材料，形成包括所述头部至所述部分中的一排的头部骨料; 以及通过在行内切割部分分离头骨料来形成薄膜磁头。

32. 发明授权

US06527662B2 Pump drive apparatus 有权
公开(公告)号：US06527662B2
公开(公告)日：2003-03-04
申请号：US09860454
申请日：2001-05-21
申请人： Shinji Miyata , Hiroyuki Itoh
发明人： Shinji Miyata , Hiroyuki Itoh
IPC分类号： F16H3702
CPC分类号： F16H37/022 , F16H37/086 , F16H2037/088
摘要： Between a water pump 3 and an electric motor 1, there is interposed a toroidal-type continuously variable transmission 2. By changing the gear change ratio of the toroidal-type continuously variable transmission 2, the water supply quantity can be changed while the electric motor 1 is being operated at a constant speed.

33. 发明授权

US06515291B2 Electron beam drawing apparatus and method of the same 失效
公开(公告)号：US06515291B2
公开(公告)日：2003-02-04
申请号：US09768722
申请日：2001-01-25
申请人： Hiroyuki Itoh
发明人： Hiroyuki Itoh
IPC分类号： H01J37302
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/3174 , H01J2237/31776
摘要： It is an object of the present invention to reduce a number of deflection awaiting and a connection error between shots by scanning and exposing a formed beam having a large area. To achieve the object, a continuous scanning deflector and a scan limiter are added to a variable forming type electron beam column and the drawing is performed such that a state in which the electron beam is limited by the scan limiter is continuous to a state in which the electron beam is irradiated on a face of a sample. According to this structure, the number of deflection awaiting and the connection error between shots are reduced and further, a high-speed and highly accurate drawing of a 45° slanted figure is made possible.

34. 发明授权

US06416439B1 Toroidal-type continuously variable transmission 有权
标题翻译：环形无级变速器
公开(公告)号：US06416439B1
公开(公告)日：2002-07-09
申请号：US09543343
申请日：2000-04-05
申请人： Hiroyuki Itoh , Seiji Higuchi , Nobuo Goto , Masami Tanaka , Norihisa Kobayashi
发明人： Hiroyuki Itoh , Seiji Higuchi , Nobuo Goto , Masami Tanaka , Norihisa Kobayashi
IPC分类号： F16H1538
CPC分类号： F16H15/38 , F16C2361/65
摘要： In a toroidal-type continuously variable transmission, a plurality of trunnions is respectively swingable about a pair of mutually concentric pivot shafts through a plurality of radial needle roller bearings respectively supporting the pivot shafts. Each of the radial needle roller bearings includes: an outer race interposed between an outer peripheral surface of the pivot shaft and an inner peripheral surface of the circular hole of the support plate, the outer race having an outer peripheral surface formed in a spherically convex surface; and a plurality of needle rollers respectively disposed on the inside diameter side of the outer race. The outer race is formed with an inwardly facing flange portion on the inner peripheral surface of the end portion thereof.
摘要翻译：在环形无级变速器中，多个耳轴分别通过分别支撑枢转轴的多个径向滚针轴承绕一对相互同心的枢转轴摆动。每个径向滚针轴承包括：外圈，其设置在所述枢转轴的外周面和所述支撑板的圆孔的内周面之间，所述外圈具有形成在球面凸起表面中的外周面 ; 以及分别设置在外圈的内径侧的多个针辊。外圈在其端部的内周面上形成面向内的凸缘部。

35. 发明授权

US06383112B1 Toroidal-type continuously variable transmission 有权
标题翻译：环形无级变速器
公开(公告)号：US06383112B1
公开(公告)日：2002-05-07
申请号：US09418995
申请日：1999-10-14
申请人： Hiroyuki Itoh , Nobuo Goto , Makoto Fujinami , Takashi Imanishi , Hiroshi Kato
发明人： Hiroyuki Itoh , Nobuo Goto , Makoto Fujinami , Takashi Imanishi , Hiroshi Kato
IPC分类号： F16H1538
CPC分类号： F16H15/38
摘要： In the toroidal-type continuously variable transmission, the torque transmission shaft 15 includes a flange portion 29a formed in one end thereof, while a securing portion 43 is formed in the end-face side half section of the flange portion 29a so as to be able to secure a tool thereto when tightly fastening a loading nut 19 to a external thread portion 40 formed in the torque transmission shaft 15. And, the outer peripheral surface of the securing portion 43 is formed as a polygonally cylindrical shape having four or more flat surfaces. Also, after the torque transmission shaft 15 is heat-carburized and the surface of a cylindrical portion 44 formed in the torque transmission shaft 15 is removed, the external thread portion 40 is worked, which makes it possible not only to secure the hardness of the adjoining portions of the external thread portion 40 but also to control the hardness of the external thread portion 40 itself. Further, branch oil supply passages 39 and 39 used to supply oil to ball splines 17 and 17 are formed at the positions of the torque transmission shaft 15 that are shifted in the axial direction of the torque transmission shaft 15 from the positions of balls 37, 37, which respectively construct the ball splines 17 and 17.
摘要翻译：在环形无级变速器中，扭矩传递轴15包括在其一端形成的凸缘部29a，而在凸缘部29a的端面侧半部形成有固定部43，从而能够当将加载螺母19紧固到形成在扭矩传递轴15中的外螺纹部40上时，固定工具。固定部43的外周面形成为具有四个以上平面的多边形。此外，在转矩传递轴15被热渗碳并且形成在转矩传递轴15中的圆筒部44的表面被去除之后，外螺纹部40被加工，这不仅可以确保外螺纹部分40的相邻部分，而且还用于控制外螺纹部分40本身的硬度。此外，用于向滚珠花键17,17供给油的分支供油路39,39形成在转矩传递轴15的从转矩传递轴15的轴向偏移的位置， 37，分别构成球形花键17和17。

36. 发明授权

US06247548B1 Moving apparatus with drive power assisting device and movement controlling method 失效
标题翻译：带动力辅助装置的移动装置和运动控制方法
公开(公告)号：US06247548B1
公开(公告)日：2001-06-19
申请号：US09000030
申请日：1998-05-21
申请人： Toshiro Hayashi , Yuichi Nanae , Hiroyoshi Hayashi , Ichiro Katagiri , Naomasa Sato , Tetsuo Endo , Hiroyuki Itoh
发明人： Toshiro Hayashi , Yuichi Nanae , Hiroyoshi Hayashi , Ichiro Katagiri , Naomasa Sato , Tetsuo Endo , Hiroyuki Itoh
IPC分类号： B62M2302
CPC分类号： B62M6/45 , B60L11/007 , B60L11/1801 , B60L11/1872 , B60L2200/12 , B60L2240/36 , B62M6/50 , B62M6/65 , G01R31/36 , H02J7/1415 , H02K7/14 , H02K11/048 , H02K21/22 , H02K29/10 , Y02T10/641 , Y02T10/7005 , Y02T10/705 , Y10T428/249923
摘要： A moving apparatus with a driving force assist mechanism traveled mainly by human power. This moving apparatus detects, in a non-contact manner, with respect to rotating portion such as traveling wheel, etc., rotation speed of the rotating portion to detect traveling state to deliver, from the driving force assist mechanism, assistant driving force corresponding to speed change information that a person who operates the moving apparatus intends to give on the basis of the detected traveling information to carry out traveling to thereby permit smooth traveling even in the case where traveling by only human power becomes difficult.
摘要翻译：具有主要由人力驱动的驱动力辅助机构的移动装置。该移动装置以非接触的方式相对于诸如行进轮等的旋转部来检测旋转部的旋转速度，以检测行驶状态，从驱动力辅助机构传递对应于操作移动装置的人员的变速信息旨在基于检测到的行驶信息进行行驶，从而即使在仅通过人力行驶变得困难的情况下也允许顺利行驶。

37. 发明授权

US6088080A Exposure apparatus and device manufacturing method 失效
标题翻译：曝光装置和装置制造方法
公开(公告)号：US6088080A
公开(公告)日：2000-07-11
申请号：US65524
申请日：1998-04-24
申请人： Hiroyuki Itoh
发明人： Hiroyuki Itoh
IPC分类号： G03F7/20 , H01L21/027 , G03B27/42 , G03B27/52 , G03B27/68
CPC分类号： G03F7/70616 , G03F7/70241 , G03F7/70633 , G03F7/70875
摘要： An exposure apparatus includes a stage for holding a substrate at an exposure station, an arm mechanism for conveying a substrate to be exposed, onto the stage, and a sensor provided on one of the stage and the arm mechanism, for measuring temperature of the substrate to be exposed. On the basis of the measured temperature, pattern projection magnification to the workpiece, for example, is corrected.
摘要翻译：曝光装置包括用于在曝光站保持基板的台，用于将待曝光的基板输送到台上的臂机构和设置在台架和臂机构之一上的传感器，用于测量基板的温度被暴露。在测量温度的基础上，例如对工件的图案投影放大率进行校正。

38. 发明授权

US5993081A In-line processing system 失效
标题翻译：在线处理系统
公开(公告)号：US5993081A
公开(公告)日：1999-11-30
申请号：US732718
申请日：1996-10-18
申请人： Hiroyuki Itoh , Shinji Tsutsui , Masahide Sato
发明人： Hiroyuki Itoh , Shinji Tsutsui , Masahide Sato
IPC分类号： B65G49/07 , G03F7/20 , H01L21/677 , G03D5/00 , B65G25/00
CPC分类号： H01L21/67748 , G03F7/7075 , G03F7/70991 , H01L21/67745 , H01L21/67778 , Y10S414/137 , Y10S414/138
摘要： An in-line processing system having an exposure processing unit and a coating and development processing unit is provided with a conveyance arm for transferring a workpiece between these units. The conveyance arm can access to each of these units, and these units have horizontal workpiece holding planes of substantially the same level. The workpiece can be conveyed between these units while being kept laid horizontally.
摘要翻译：具有曝光处理单元和涂布显影处理单元的在线处理系统设置有用于在这些单元之间传送工件的输送臂。输送臂可以接近这些单元中的每一个，并且这些单元具有基本上相同水平的水平工件保持平面。工件可以在这些单元之间传送并保持水平放置。

39. 发明授权

US5972772A Electron beam drawing process 失效
标题翻译：电子束拉制工艺
公开(公告)号：US5972772A
公开(公告)日：1999-10-26
申请号：US922334
申请日：1997-09-03
申请人： Minoru Sasaki , Yuji Tange , Yutaka Hojyo , Kazuyoshi Oonuki , Hiroyuki Itoh
发明人： Minoru Sasaki , Yuji Tange , Yutaka Hojyo , Kazuyoshi Oonuki , Hiroyuki Itoh
IPC分类号： G03F9/00 , G03F7/20 , H01J37/304 , H01J37/305 , H01J37/317 , H01L21/027 , H01L21/76
CPC分类号： B82Y10/00 , B82Y40/00 , G03F7/2061 , H01J37/304 , H01J37/3045 , H01J37/3174 , H01J2237/3045 , H01J2237/30455 , H01J2237/3175
摘要： An electron beam drawing process of high throughput, coping with the changes in static distortion and dynamic distortion of a lower layer exposure apparatus or an optical reduction exposure apparatus. At least two marks formed in each chip formed on a wafer are detected for a predetermined number of chips, and the relation between the shape distortion of each chip in the wafer plane and the wafer coordinates is determined from the positions of the detected marks and the designed positions of the marks by a statistical processing. Patterns are drawn in all chips while correcting the patterns to be drawn on the individual chips, by using the relation between the determined chip shape distortion and the wafer coordinates. As a result, the superposition exposure with the lower layer can be achieved with a high throughput and with a high accuracy without any manual adjustment.
摘要翻译：一种高产量的电子束拉制工艺，能够应对下层曝光装置或光学还原曝光装置的静态失真和动态变形的变化。对于预定数量的芯片，检测在晶片上形成的每个芯片中形成的至少两个标记，并且根据检测到的标记和晶片坐标的位置确定晶片平面中每个芯片的形状失真与晶片坐标之间的关系通过统计处理设计标记的位置。通过使用确定的芯片形状失真和晶片坐标之间的关系来校正在各个芯片上绘制的图案，在所有芯片中绘制图案。因此，无需任何手动调整，可以以高产量和高精度实现与较低层的重叠曝光。

40. 发明授权

US5759423A Electron beam writing method and apparatus for carrying out the same 失效
标题翻译：电子束写入方法及其执行装置
公开(公告)号：US5759423A
公开(公告)日：1998-06-02
申请号：US563329
申请日：1995-11-28
申请人： Yasunari Sohda , Yasuhiro Someda , Hiroyuki Itoh , Katsuhiro Kawasaki , Norio Saitou
发明人： Yasunari Sohda , Yasuhiro Someda , Hiroyuki Itoh , Katsuhiro Kawasaki , Norio Saitou
IPC分类号： G03F7/20 , H01J37/317 , H01L21/027 , B44C1/22 , H01L21/00
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/3174 , H01J2237/31776
摘要： An electron beam writing apparatus comprises: an electron beam source for projecting an electron beam; a first mask provided with a first rectangular aperture for passing the electron beam projected by the electron beam source to shape the electron beam in a primary shaped beam having a rectangular cross section; a second mask provided with a second rectangular aperture for passing the primary shaped beam to shape the primary shaped beam in a secondary shaped beam having a rectangular cross section, and triangular apertures for passing the primary shaped beam to form a secondary shaped beam having a triangular cross section; a first electron beam deflecting system for moving the primary shaped beam on the surface of the second mask; and a second electron beam deflecting system for moving the secondary shaped beam on the surface of a workpiece on which a pattern is to be written. Each of the triangular apertures is formed in a size such that the triangular aperture can be entirely covered with a rectangular image formed by the first shaped beam on the surface of the second mask.
摘要翻译：电子束写入装置包括：用于投射电子束的电子束源; 第一掩模，设置有第一矩形孔，用于使由电子束源投影的电子束通过，以将电子束形成为具有矩形横截面的主要形状的梁; 第二掩模，其设置有第二矩形孔，用于使主要成形梁通过，以形成具有矩形截面的次级成形梁的主要成形梁，以及三角形孔，用于使初级成形梁通过以形成具有三角形的二次成形梁横截面; 第一电子束偏转系统，用于将第一形状光束移动到第二掩模的表面上; 以及用于在待写入图案的工件的表面上移动二次成形光束的第二电子束偏转系统。每个三角形孔形成为使得三角形孔可以被由第二掩模的表面上的第一成形束形成的矩形图像完全覆盖的尺寸。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式