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    • 35. 发明授权
    • Vacuum treatment device
    • 真空处理装置
    • US06746196B1
    • 2004-06-08
    • US09889148
    • 2001-07-12
    • Jun OzawaJun HiroseEiji HiroseHiroshi Koizumi
    • Jun OzawaJun HiroseEiji HiroseHiroshi Koizumi
    • B65G4907
    • H01L21/68707H01L21/67742H01L21/6835Y10S414/139
    • A vacuum treatment device, comprising a vacuum treatment chamber (1) etching a semiconductor wafer (W) as a body to be treated and a preliminary vacuum chamber (2) communicating with the vacuum treatment chamber (1), wherein a transfer arm (5) and first and second buffers (6, 7) for temporarily supporting the wafer (W) are installed in the preliminary vacuum chamber (2), the transfer arm (5) is provided with a flexible arm part (5a) and a support part (16) supporting the wafer (W), the arm part (5a) is extended and retracted by the rotations of a drive side swing arm (14) and a driven side swing arm (15) forming the arm (5a) so as to move the support part (16) straight forward and backward while maintaining it in its attitude, and the first and second buffers (6, 7) are disposed on the motion route of the support part (16) of the transfer arm (5).
    • 1.一种真空处理装置,其特征在于,具备对作为被处理体的半导体晶片(W)进行蚀刻的真空处理室(1)和与所述真空处理室(1)连通的预备真空室(2),其特征在于, )和用于临时支撑晶片(W)的第一和第二缓冲器(6,7)安装在预备真空室(2)中,传送臂(5)设置有柔性臂部分(5a)和支撑部分 (16)支撑晶片(W)时,通过驱动侧摆臂(14)和形成臂(5a)的从动侧摆臂(15)的旋转使臂部(5a)伸长和缩回,从而 在保持其姿态的同时将支撑部(16)向前后方向移动,第一缓冲器(6,7)设置在传送臂(5)的支撑部(16)的运动路径上。
    • 36. 发明授权
    • Weighing method in prepla type injection molding machine
    • 在prepla型注塑机中的称重方法
    • US06645405B2
    • 2003-11-11
    • US09883706
    • 2001-06-18
    • Hisato ShimizuHiroshi KoizumiKazutoyo Kobayashi
    • Hisato ShimizuHiroshi KoizumiKazutoyo Kobayashi
    • B29C4577
    • B29C45/54B29C2045/548
    • An unstable weighing due to the plunger sliding resistance in a prepla type injection molding machine is prevented by dividing control of the plunger retraction movement for the weighing into speed control and pressure control. A plastic resin supply start position and a forced retraction release position are set along the way of the plunger retraction stroke by reference to a weighing start position. A plunger is moved from the weighing start position after injection and pressure-keeping to a weighing stop retraction position. Plastic resin is supplied to the forward portion of the injection cylinder when the plunger attains the supply start position from the weighing start position. The plunger is moved by forced retraction up to the forced retraction release position by speed control; the weighing is stabilized by changing the speed control to the pressure control once the plunger attains the forced retraction release position.
    • 通过将用于称重的柱塞缩回运动的控制分成速度控制和压力控制来防止由于预成型注塑机中的柱塞滑动阻力导致的不稳定称重。 通过参考称重开始位置沿塑料树脂供给开始位置和强制退回释放位置沿柱塞退回行程的方式设置。 柱塞在注射和压力保持之后从称重起始位置移动到称重停止缩回位置。 当柱塞从称重开始位置到达供给开始位置时,将塑料树脂供给到注射缸的前部。 柱塞通过强制退回移动到强制退回释放位置,通过速度控制; 一旦柱塞达到强制退回释放位置,通过将速度控制改变为压力控制来使称重稳定。
    • 40. 发明授权
    • Zoom lens system
    • 变焦镜头系统
    • US5969878A
    • 1999-10-19
    • US922181
    • 1997-09-02
    • Hiroshi Koizumi
    • Hiroshi Koizumi
    • G02B13/18G02B15/177G02B15/20G02B15/14G02B9/12G02B13/04
    • G02B15/177
    • A zoom lens system for use in a camera having a color filter and a CCD achieves a magnification ratio of about 2.9 or greater and a back focus of about 9.2 or greater. The zoom lens system includes in order from an object side of the lens system, a first lens group having a negative refracting power, a second lens group spaced from the first lens group and having a positive refracting power and a third lens group spaced from the second lens group and having a positive refracting power. One or both of the fifth and an eighth lens surface has an aspherical surface, the fifth and eighth lens surfaces being counted from the object side. The second lens group includes five lenses with an extra lens being located at a far end of the second lens group relative to the object side. Each of the first, second and third lens groups is movable from a first position when the lens system is in a wide position to a second position when the lens system is in a tele position.
    • 用于具有滤色器和CCD的相机中的变焦透镜系统实现了大约2.9或更大的放大倍数和大约9.2或更大的后焦距。 变焦透镜系统从透镜系统的物体侧起依次包括具有负折射力的第一透镜组,与第一透镜组间隔开并且具有正折射率的第二透镜组,以及与第一透镜组间隔开的第三透镜组 第二透镜组并且具有正的折射光焦度。 第五和第八透镜表面中的一个或两个具有非球面,第五和第八透镜表面从物体侧开始计数。 第二透镜组包括五个透镜,其中多个透镜位于第二透镜组相对于物体侧的远端。 当透镜系统处于远程位置时,当透镜系统处于宽位置到第二位置时,第一,第二和第三透镜组中的每一个可从第一位置移动。