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31. 发明申请

US20090107955A1 OFFSET LINER FOR CHAMBER EVACUATION 审中-公开
标题翻译：用于室内休闲的偏心衬里
公开(公告)号：US20090107955A1
公开(公告)日：2009-04-30
申请号：US12205414
申请日：2008-09-05
申请人： ROBIN L. TINER , Suhail Anwar , Gaku Furuta , Young Jin Choi , Beom Soo Park , Soo Young Choi , John M. White
发明人： ROBIN L. TINER , Suhail Anwar , Gaku Furuta , Young Jin Choi , Beom Soo Park , Soo Young Choi , John M. White
IPC分类号： B44C1/22 , C23C16/455 , C23C16/44 , C23F1/08
CPC分类号： H01J37/32357 , C23C16/4404 , H01J37/32449 , H01J37/32623 , H01J37/32834
摘要： The present invention generally includes a chamber liner spaced from a chamber wall to permit processing gases to be pulled between the chamber liner and the chamber wall when withdrawing gases from the processing chamber. When the vacuum pump is below the susceptor, processing gases will be drawn below the susceptor and may lead to undesired deposition onto process chamber components. Additionally, the processing gases will be pulled past the slit valve opening and potentially deposit within the slit valve opening. When material deposits in the slit valve opening, flaking may occur and contaminate the substrates. By drawing the processing gases along the sidewalls other than the one having the slit valve opening therethrough, undesired deposition on the slit valve opening may be reduced.
摘要翻译：本发明通常包括与室壁间隔开的腔室衬套，以便当从处理腔室排出气体时允许处理气体在腔室衬套和室壁之间被拉动。当真空泵在基座下方时，处理气体将被拉到基座下方，并可能导致不希望的沉积到处理室部件上。此外，处理气体将被拉过狭缝阀开口并可能沉积在狭缝阀开口内。当材料沉积在狭缝阀开口中时，会发生剥落并污染基板。通过沿着具有狭缝阀开口的侧壁以外的侧壁吸收处理气体，可以减少狭缝阀开口上的不期望的沉积。

32. 发明申请

US20090101201A1 NIP-NIP THIN-FILM PHOTOVOLTAIC STRUCTURE 审中-公开
标题翻译： NIP-NIP薄膜光伏结构
公开(公告)号：US20090101201A1
公开(公告)日：2009-04-23
申请号：US11876359
申请日：2007-10-22
申请人： John M. White , Soo Young Choi
发明人： John M. White , Soo Young Choi
IPC分类号： H01L31/045 , C23C16/54 , H01L31/18
CPC分类号： H01L31/076 , H01L31/0475 , H01L31/18 , H01L31/1824 , H01L31/1884 , H01L31/202 , Y02E10/545 , Y02E10/548 , Y02P70/521
摘要： A thin film multi-junction photovoltaic structure is presented as well as methods and apparatus for forming the same. The photovoltaic structure comprises first and second NIP junctions formed over a translucent substrate.
摘要翻译：介绍了薄膜多结光伏结构及其形成方法和装置。光伏结构包括在半透明基板上形成的第一和第二NIP结。

33. 发明授权

US07518466B2 Methods and apparatus for symmetrical and/or concentric radio frequency matching networks 有权
标题翻译：用于对称和/或同心的射频匹配网络的方法和装置
公开(公告)号：US07518466B2
公开(公告)日：2009-04-14
申请号：US11507649
申请日：2006-08-21
申请人： Carl Sorensen , John M. White
发明人： Carl Sorensen , John M. White
IPC分类号： H03H7/38
CPC分类号： H01J37/32183 , H01J37/32082 , H05H1/46
摘要： Apparatus and methods are provided that are adapted to match the impedance of an electrical load to an impedance of an electrical signal generator. The invention includes providing a plurality of electrical components adapted to collectively match the impedance of the electrical load to the impedance of the electrical signal generator. The electrical components are arranged symmetrically and concentrically about an axis. Additionally, the invention may also include a first connector adapted to electrically couple the electrical signal generator to the electrical components. Additionally, the invention may also include a second connector adapted to electrically couple the load to the electrical components. Numerous other aspects are provided.
摘要翻译：提供了适于将电负载的阻抗与电信号发生器的阻抗相匹配的装置和方法。本发明包括提供多个电气部件，其适于将电负载的阻抗统一地匹配到电信号发生器的阻抗。电气部件围绕轴对称地并且同心地布置。另外，本发明还可以包括适于将电信号发生器电耦合到电气部件的第一连接器。另外，本发明还可以包括适于将负载电耦合到电气部件的第二连接器。提供了许多其他方面。

34. 发明申请

US20090077804A1 PRODUCTION LINE MODULE FOR FORMING MULTIPLE SIZED PHOTOVOLTAIC DEVICES 审中-公开
标题翻译：用于形成多个大小的光伏器件的生产线模块
公开(公告)号：US20090077804A1
公开(公告)日：2009-03-26
申请号：US12201840
申请日：2008-08-29
申请人： Robert Z. Bachrach , Yong-Kee Chae , Soo Young Choi , Nicholas G.J. De Vries , Yacov Elgar , Eric A. Englhardt , Michel R. Frei , Charles Gay , Parris Hawkins , Choi (Gene) Ho , James Craig Hunter , Penchala N. Kankanala , Liwei Li , Wing Hoo (Hendrick) Lo , Danny Cam Toan Lu , Fang Mei , Stephen P. Murphy , Srujal (Steve) Patel , Matthew J.B. Saunders , Asaf Schlezinger , Shuran Sheng , Tzay-Fa (Jeff) Su , Jeffrey S. Sullivan , David Tanner , Teresa Trowbridge , Brice Walker , John M. White , Tae K. Won
发明人： Robert Z. Bachrach , Yong-Kee Chae , Soo Young Choi , Nicholas G.J. De Vries , Yacov Elgar , Eric A. Englhardt , Michel R. Frei , Charles Gay , Parris Hawkins , Choi (Gene) Ho , James Craig Hunter , Penchala N. Kankanala , Liwei Li , Wing Hoo (Hendrick) Lo , Danny Cam Toan Lu , Fang Mei , Stephen P. Murphy , Srujal (Steve) Patel , Matthew J.B. Saunders , Asaf Schlezinger , Shuran Sheng , Tzay-Fa (Jeff) Su , Jeffrey S. Sullivan , David Tanner , Teresa Trowbridge , Brice Walker , John M. White , Tae K. Won
IPC分类号： H01L31/18 , H01L21/304 , B26F3/00
CPC分类号： H01L21/67236 , B23K26/364 , B26F3/002 , B26F3/004 , B65G49/064 , B65G2249/02 , B65G2249/04 , C03B33/03 , C03B33/033 , H01L21/67132 , H01L21/67712 , H01L21/67715 , H01L21/67721 , H01L21/67727 , H01L21/6776 , H01L31/022425 , H01L31/03921 , H01L31/0504 , H01L31/075 , H02S50/00 , H02S50/10 , Y02E10/548 , Y02P40/57 , Y10T29/49002 , Y10T29/49355 , Y10T29/5196 , Y10T29/53113 , Y10T29/5313 , Y10T29/5317 , Y10T29/53187 , Y10T29/53365 , Y10T29/53417 , Y10T225/10 , Y10T225/325 , Y10T225/329
摘要： The present invention generally relates to a sectioning module positioned within an automated solar cell device fabrication system. The solar cell device fabrication system is adapted to receive a single large substrate and form multiple silicon thin film solar cell devices from the single large substrate.
摘要翻译：本发明一般涉及一种位于自动化太阳能电池器件制造系统内的切片模块。太阳能电池器件制造系统适于接收单个大型衬底并从单个大衬底形成多个硅薄膜太阳能电池器件。

35. 发明申请

US20090064934A1 SOURCE GAS FLOW PATH CONTROL IN PECVD SYSTEM TO CONTROL A BY-PRODUCT FILM DEPOSITION ON INSIDE CHAMBER 有权
标题翻译： PECVD系统中的源气体流路控制，用于控制室内副产物膜沉积
公开(公告)号：US20090064934A1
公开(公告)日：2009-03-12
申请号：US12205363
申请日：2008-09-05
申请人： BEOM SOO PARK , Young Jin Choi , Robin L. Tiner , Sam H. Kim , Soo Young Choi , John M. White , Dong-Kil Yim
发明人： BEOM SOO PARK , Young Jin Choi , Robin L. Tiner , Sam H. Kim , Soo Young Choi , John M. White , Dong-Kil Yim
IPC分类号： C23C16/513
CPC分类号： C23C16/45502 , C23C16/4401
摘要： The present invention generally comprises a method and an apparatus for guiding the flow of processing gases away from chamber walls and slit valve opening. By controlling the flow path of the process gases within a processing chamber, undesirable deposition upon chamber walls and within slit valve openings may be reduced. By reducing deposition in slit valve openings, flaking may be reduced. By reducing deposition on chamber walls, the time between chamber cleaning may be increased. Thus, guiding the flow of processing gases within the processing chamber may increase substrate throughput.
摘要翻译：本发明通常包括一种用于将处理气体的流动引导离开室壁和狭缝阀开口的方法和装置。通过控制处理室内的处理气体的流动路径，可以减少在室壁上和狭缝阀开口内的不期望的沉积。通过减少狭缝阀开口中的沉积，可能会降低剥落。通过减少室壁上的沉积，可以增加室清洁之间的时间。因此，引导处理室内的处理气体的流动可以增加衬底生产量。

36. 发明申请

US20080309715A1 METHODS AND APPARATUS FOR DEPOSITING INK ONTO SUBSTRATES 失效
标题翻译：用于沉积在基材上的方法和装置
公开(公告)号：US20080309715A1
公开(公告)日：2008-12-18
申请号：US11761832
申请日：2007-06-12
申请人： Bassam Shamoun , John M. White , Quanyuan Shang , Shinichi Kurita
发明人： Bassam Shamoun , John M. White , Quanyuan Shang , Shinichi Kurita
IPC分类号： B41J2/21
CPC分类号： B41J2/2132
摘要： Embodiments of an ink jet printing system include a motion stage adapted to move a substrate having a display object in a printing direction and a first printing assembly mounted over the motion stage including a set of print heads aligned and arranged consecutively in the printing direction such that the display object moves under the print heads sequentially. Embodiments of a method of ink jet printing include moving a substrate under the print heads of printing assembly sequentially in a printing direction, activating alternate ink jetting channels within each print head of the first printing assembly, activating corresponding channels within adjacent print heads in the first printing assembly alternately, and depositing ink in alternating sub-pixels within one or more pixels on the substrate.
摘要翻译：喷墨打印系统的实施例包括适于在打印方向上移动具有显示对象的基板的运动台和安装在运动台上的第一印刷组件，该第一印刷组件包括在打印方向上连续排列和排列的一组打印头，使得显示对象顺序地在打印头下移动。喷墨打印方法的实施例包括在打印方向上顺序地移动印刷组件的打印头下的基板，激活第一印刷组件的每个打印头内的交替喷墨通道，在第一印刷组件的相邻打印头内激活相应的通道交替地印刷组件，并且在基板上的一个或多个像素内的交替子像素中沉积墨。

37. 发明申请

US20080302303A1 METHODS AND APPARATUS FOR DEPOSITING A UNIFORM SILICON FILM WITH FLOW GRADIENT DESIGNS 审中-公开
标题翻译：用流平面设计沉积均匀硅膜的方法和装置
公开(公告)号：US20080302303A1
公开(公告)日：2008-12-11
申请号：US11759599
申请日：2007-06-07
申请人： Soo Young Choi , Tae Kyung Won , John M. White
发明人： Soo Young Choi , Tae Kyung Won , John M. White
IPC分类号： C23C16/00 , B05B1/14
CPC分类号： C23C16/24 , C23C16/45565 , C23C16/5096 , H01J37/32449
摘要： Methods and apparatus having a flow gradient created from a gas distribution plate are provided. In one embodiment, the method and apparatus are particularly useful for, but not limited to, depositing a silicon film for solar cell applications. The apparatus for depositing a uniform film for solar cell applications includes a processing chamber, and a quadrilateral gas distribution plate disposed in the processing chamber and having at least four corners separated by four sides. The gas distribution plate further includes a first plurality of chokes formed through the gas distribution plate, the first plurality of chokes located in the corners, and a second plurality of chokes formed through the gas distribution plate, the second plurality of chokes located along the sides of the gas distribution plate between the corner regions, wherein the first plurality of chokes have a greater flow resistance than that of the second plurality of chokes.
摘要翻译：提供了具有由气体分配板产生的流动梯度的方法和装置。在一个实施例中，该方法和装置特别适用于但不限于沉积太阳能电池应用的硅膜。用于沉积用于太阳能电池应用的均匀膜的设备包括处理室和设置在处理室中的四边形气体分配板，并且具有由四个侧面分开的至少四个角。气体分配板还包括通过气体分配板形成的第一多个扼流圈，位于角部的第一多个扼流圈，以及通过气体分配板形成的第二多个扼流圈，沿着侧面设置的第二多个扼流圈在所述角区域之间的所述气体分配板中，所述第一多个扼流器具有比所述第二多个扼流圈更大的流动阻力。

38. 发明申请

US20080186354A1 METHODS, APPARATUS AND SYSTEMS FOR INCREASING THROUGHPUT USING MULTIPLE PRINT HEADS ROTATABLE ABOUT A COMMON AXIS 审中-公开
标题翻译：方法，使用多个打印头来增加通量的方法，装置和系统
公开(公告)号：US20080186354A1
公开(公告)日：2008-08-07
申请号：US12013399
申请日：2008-01-11
申请人： John M. White
发明人： John M. White
IPC分类号： B41J23/00
CPC分类号： B41J3/28 , B41J3/407 , B41J25/003 , G02B5/201 , G02F1/1303 , G02F1/133516
摘要： Apparatus and methods for printing are provided. A printing apparatus includes a platform adapted to rotate about a rotational axis and a plurality of longitudinally aligned print heads coupled to the platform. In one or more embodiments, each of the plurality of print heads includes a set of nozzles arranged in a line having a nozzle line length and the print heads are separated longitudinally by a clearing distance equal to approximately an integer times the nozzle line length.
摘要翻译：提供了印刷装置和方法。打印设备包括适于围绕旋转轴线旋转的平台和联接到平台的多个纵向对齐的打印头。在一个或多个实施例中，多个打印头中的每一个包括一组喷嘴，其布置成具有喷嘴线长度的线，并且打印头沿纵向分开等于喷嘴线长度的大约整数倍的清除距离。

39. 发明申请

US20080072929A1 DILUTION GAS RECIRCULATION 审中-公开
标题翻译：稀释气体回收
公开(公告)号：US20080072929A1
公开(公告)日：2008-03-27
申请号：US11565400
申请日：2006-11-30
申请人： JOHN M. WHITE
发明人： JOHN M. WHITE
IPC分类号： C23C16/00 , H01L21/306
CPC分类号： C23C16/4412
摘要： The present invention comprises a method and an apparatus for recirculating a process gas through a system. The process gas may be evacuated from the chamber, and a portion of the process gas may pass through at least a particle trap/filter while another portion of the process gas may be evacuated through mechanical backing pumps. The process gas that passes through the particle trap/filter may then join fresh, unrecirculated process gas and enter the processing chamber. The recirculated gas may join the fresh, unrecirculated processing gas after the fresh, unrecirculated processing gas has passed through a remote plasma source. The plasma generated in the remote plasma source may ensure that the recirculated process gas does not deposit on the conduits leading into the process chamber. The amount of gas recirculated may determine the amount of fresh, unrecirculated process gas that may be delivered to the process chamber.
摘要翻译：本发明包括一种用于使工艺气体再循环通过系统的方法和装置。工艺气体可以从室抽真空，并且一部分工艺气体可以通过至少一个颗粒捕集器/过滤器，而另一部分工艺气体可以通过机械背衬泵抽空。然后，通过颗粒捕集器/过滤器的工艺气体可以连接新鲜的未循环的处理气体并进入处理室。新鲜的未循环处理气体通过远程等离子体源之后，再循环的气体可以连接新鲜的未循环的处理气体。在远程等离子体源中产生的等离子体可以确保再循环的工艺气体不会沉积在通向处理室的管道上。再循环的气体量可以确定可能被输送到处理室的新鲜的，未循环的处理气体的量。

40. 发明授权

US07296673B2 Substrate conveyor system 失效
标题翻译：基板输送机系统
公开(公告)号：US07296673B2
公开(公告)日：2007-11-20
申请号：US11176861
申请日：2005-07-07
申请人： Wendell T. Blonigan , John M. White
发明人： Wendell T. Blonigan , John M. White
IPC分类号： B65G47/46
CPC分类号： B65G49/064 , B65G2249/02 , B65G2249/04 , H01L21/67706 , H01L21/67709 , H01L21/67736
摘要： Embodiments of a vacuum conveyor system are provided herein. In one embodiment, apparatus for conveying a substrate includes a vacuum sleeve and a plurality of rollers disposed within the vacuum sleeve for supporting and transporting the substrate thereupon. The plurality of rollers is adapted to simultaneously support the substrate thereupon at a plurality of elevations. A leading edge of the substrate is supported at an elevation above an adjacent one of the plurality of rollers in the direction of travel.
摘要翻译：本文提供了真空输送系统的实施例。在一个实施例中，用于输送基板的装置包括真空套筒和设置在真空套筒内的多个辊，用于在其上支撑和运输基板。多个辊适于在多个高度处同时支撑基底。基板的前缘在行进方向上支撑在多个辊中的相邻的一个上方的高度上。

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