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    • 24. 发明申请
    • SCANNING PROBE MICROSCOPE AND MEASUREMENT METHOD OF SAME
    • 扫描探针显微镜及其测量方法
    • US20080245139A1
    • 2008-10-09
    • US12061308
    • 2008-04-02
    • Takafumi MorimotoToru KurenumaManabu EdamuraHiroshi KurodaYukio KemboMasahiro WatanabeShuichi Baba
    • Takafumi MorimotoToru KurenumaManabu EdamuraHiroshi KurodaYukio KemboMasahiro WatanabeShuichi Baba
    • G01B5/28
    • G01Q10/06G01Q10/04
    • A measurement method of a scanning probe microscope including a first approach operation adjusting an operation position of a fine positioning unit to near a maximum extension amount and ending the approach by coarse positioning, a first measurement operation making the probe scan the surface for measurement in a close probe state based on the first approach operation to obtain relief information of the sample surface, a positioning operation positioning the probe at a recessed part based on the relief information obtained by the first measurement operation, a second approach operation making the probe again approach the surface at a position determined by the positioning operation, adjusting an operation position of the Z-axis fine positioning device to close to a maximum extension amount, and ending the repeated approach, and a second measurement operation making the probe scan the surface for measurement in a close probe state based on the second approach operation to obtain relief information of the sample surface.
    • 一种扫描探针显微镜的测量方法,包括:将精细定位单元的操作位置调整到最大延伸量附近的第一接近操作,并且通过粗略定位来结束接近;第一测量操作,使得探测器扫描表面以进行测量 基于第一接近操作关闭探针状态以获得样品表面的浮雕信息,基于通过第一测量操作获得的浮雕信息将探针定位在凹陷部分的定位操作,使探针再次接近的第二接近操作 在由定位操作确定的位置处的表面,将Z轴精细定位装置的操作位置调整为接近最大延伸量,并且结束重复进近,以及使探针扫描表面以进行测量的第二测量操作 基于第二种方法操作获得缓解的近距离探测状态 样品表面的信息。
    • 25. 发明申请
    • Method of Control of Probe Scan and Apparatus for Controlling Probe Scan of Scanning Probe Microscope
    • 探针扫描控制方法及扫描探针显微镜探头扫描控制装置
    • US20080236259A1
    • 2008-10-02
    • US11660271
    • 2005-08-18
    • Tooru KurenumaYukio KenbouHiroaki YanagimotoHiroshi KurodaTakafumi Morimoto
    • Tooru KurenumaYukio KenbouHiroaki YanagimotoHiroshi KurodaTakafumi Morimoto
    • G01B5/28
    • G01Q10/065
    • A scanning probe microscope provided with a cantilever 21 having a probe 20 facing a sample 12, a measurement unit 24 measuring a physical quantity occurring between the probe and sample, and movement mechanisms 11, 29 changing a positional relationship between the probe and sample to cause a scanning operation and making the probe scan the surface of the sample by the movement mechanism and measure the surface of the sample by the measurement unit. This method is provided with a step of feeding the probe in a direction along the surface of the sample at a position separate from the surface at certain distances, a step of making the probe approach the sample at each of a plurality of measurement points determined at certain distances and perform measurement to obtain measurement values, then retract, and a step setting a measurement point at a position between a certain measurement point and next measurement point for measurement when a difference between a measurement value at the certain measurement point and a measurement value at the next measurement point is larger than a reference value.
    • 具有悬臂21的扫描探针显微镜,其具有面向样品12的探针20,测量在探针和样品之间发生的物理量的测量单元24和改变探针与样品之间的位置关系的移动机构11,29, 扫描操作并使探针通过移动机构扫描样品的表面,并通过测量单元测量样品的表面。 该方法具有以下步骤:沿着与样品表面在一定距离处分开的位置沿着样品表面的方向进给探针,使得探针在多个测量点中的每一个测量点处接近样品的步骤 一定距离并进行测量以获得测量值,然后缩回,并且当在某个测量点处的测量值与测量值之间的差异时,将某个测量点和下一测量点之间的位置处的测量点设置为测量点 在下一个测量点大于参考值。
    • 30. 发明授权
    • Fine movement mechanism unit and scanning probe microscope
    • 精细运动机构单元和扫描探针显微镜
    • US06229607B1
    • 2001-05-08
    • US09182048
    • 1998-10-29
    • Takashi ShiraiKen MurayamaTakafumi MorimotoHiroshi KurodaHarumasa Onozato
    • Takashi ShiraiKen MurayamaTakafumi MorimotoHiroshi KurodaHarumasa Onozato
    • G01B1114
    • G01Q10/04Y10S977/87
    • A fine movement mechanism unit is configured by a supporting member, two fixed sections fixed to this supporting member, two pairs of parallel-plate flexural sections disposed between the two fixed sections, an X fine movement mechanism, a Y fine movement mechanism, and a Z fine movement mechanism. The X fine movement mechanism has an X moving section movable in an X direction, connected to each of the two fixed sections through the two pairs of parallel-plate flexural sections, and two X direction piezoelectric actuators causing the X moving section to move. The Y fine movement mechanism arranged to the X moving section, has other two pairs of parallel-plate flexural sections, a Y moving section movable in the Y direction, connected to the X moving section through the other two pairs of parallel-plate flexural sections, and two Y direction piezoelectric actuators causing the Y moving section to move relatively to the X moving section. The Z fine movement mechanism arranged to the Y moving section, has a Z moving section movable in a Z direction perpendicular to both of the X and Y directions, and a Z direction piezoelectric actuator causing the Z moving section to move.
    • 精细运动机构单元由支撑构件构成,固定在该支撑构件上的两个固定部,设置在两个固定部之间的两对平行板弯曲部,X微移动机构,Y细移动机构和 Z精细机芯。 X精细机构具有可沿X方向移动的X移动部,通过两对平行板弯曲部连接到两个固定部中的每一个,以及使X移动部移动的两个X方向压电致动器。 设置在X移动部分上的Y细移动机构具有其他两对平行板弯曲部分,Y方向移动的Y移动部分,通过另外两对平行板弯曲部分连接到X移动部分 以及两个Y方向的压电致动器,其使Y移动部相对于X移动部移动。 配置在Y移动部上的Z细移动机构具有能够沿与X方向和Y方向垂直的Z方向移动的Z移动部,Z方向的压电致动器使Z移动部移动。