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    • 11. 发明授权
    • Developing method and apparatus
    • 开发方法和装置
    • US07101646B2
    • 2006-09-05
    • US11229534
    • 2005-09-20
    • Kiyohisa TateyamaMasafumi NomuraTaketora Shinogi
    • Kiyohisa TateyamaMasafumi NomuraTaketora Shinogi
    • G03F7/30
    • G03D3/065G03D3/06G03F7/30G03F7/3071H01L21/6715H01L21/67253
    • In this developing method and apparatus, a concentration measuring unit 222 picks part of developing fluid in a blending tank 186 to measure the resist concentration by an absorption photometry and feeds the detected resist concentration to a control unit 240. The control unit 240 controls respective valves 210, 212, 216 of a TMAH concentrate solution 200, a solvent pipe 204 and a drain pipe 208 in a manner that the developing fluid in the blending tank 186 has a TMAH concentration corresponding to a measured resist-concentration value to accomplish a constant developing rate, performing component control of the developing fluid. The developing fluid transferred from the blending tank 186 to a supply tank 188 is fed to a developer nozzle DN in a developing section 126 through a developer pipe 224 owing to the drive of a pump 228. Accordingly, even if the developing fluid is reused in the developing process in multiple times, it is possible to make sure of the uniformity in development.
    • 在该显影方法和装置中,浓度测量单元222拾取混合罐186中的显影液的一部分,通过吸收测光法测量抗蚀剂浓度,并将检测到的抗蚀剂浓度供给到控制单元240。 控制单元240以这样的方式控制TMAH浓缩液200,溶剂管204和排水管208的各个阀210,212,216,使得混合罐186中的显影流体具有对应于测量的抗蚀剂层的TMAH浓度, 浓度值以实现恒定的显影速率,进行显影液的成分控制。 通过泵228的驱动,从混合罐186向供给罐188输送的显影液通过显影剂管道224被供给到显影部分126中的显影剂喷嘴DN。 因此,即使显影液在显影过程中重复使用多次,也可以确保显影的均匀性。
    • 16. 发明授权
    • Substrate processing method
    • 基板加工方法
    • US06306455B1
    • 2001-10-23
    • US09141721
    • 1998-08-27
    • Hideyuki TakamoriMasafumi NomuraTsutae Omori
    • Hideyuki TakamoriMasafumi NomuraTsutae Omori
    • B05D312
    • H01L21/67248B05C11/08B05D1/005H01L21/6838
    • A method of processing a substrate for forming a coating film on a substrate comprising the steps of (a) mounting a substrate on a temperature controlling means which is capable of having a heat influence on the substrate, and controlling temperature of the substrate by the temperature controlling means, (b) controlling temperature of a coating solution to be supplied to the substrate, (c) controlling temperature of a contact member in contact with the substrate when the substrate is transported and held, (d) detecting temperature of an atmosphere of a process space for applying the coating solution to the substrate, (e) setting a desired temperature on the basis of temperature/film-thickness data previously obtained by forming the coating film on the substrate, (f) controlling a temperature controlling operation of at least step (c) on the basis of the desired temperature set in the step (e) and the temperature detected in the step (d), and (g) applying the coating solution to the substrate.
    • 一种处理在基板上形成涂膜的基板的方法,包括以下步骤:(a)将基板安装在能够对基板产生热影响的温度控制装置上,并将基板的温度控制在温度 控制装置,(b)控制供给到基板的涂布液的温度,(c)控制基板被输送和保持时与基板接触的接触部件的温度,(d)检测温度, 用于将涂布溶液涂布到基板上的处理空间,(e)基于通过在基板上形成涂膜而获得的温度/膜厚度数据设定所需温度,(f)控制在基板上的温度控制操作 基于步骤(e)中设定的所需温度和步骤(d)中检测到的温度,最小步骤(c),和(g)将涂布溶液施加到副 策划
    • 17. 发明授权
    • Peroral tablet for bowel cleansing
    • 口服片剂肠道清洁
    • US08454995B2
    • 2013-06-04
    • US13392605
    • 2010-08-27
    • Masafumi NomuraTetsuyuki NishiyamaMari IchikawaKyoko Fukaya
    • Masafumi NomuraTetsuyuki NishiyamaMari IchikawaKyoko Fukaya
    • A61K9/20
    • A61K33/42A61K9/2054A61K31/717A61K45/06A61K2300/00
    • To provide a peroral tablet for bowel cleansing which leaves no remains in the intestinal tract after bowel cleansing, which exhibits a dissolution property equivalent to that of conventional sodium phosphate-containing tablets including crystalline cellulose, and which is a small-size agent readily taken by a subject.The peroral tablet for bowel cleansing containing the following ingredients (A) and (B): (A) 80 to 95 mass % of sodium phosphate, and (B) (B1) 7 to 11 mass % of hydroxypropyl cellulose which has such a particle size that ≧99% of the particles thereof pass through a mesh having an opening of 350 μm and whose 2-mass % aqueous solution has a viscosity of 2.0 to 10.0 mPa.s, (B2) 5 to 13 mass % of hydroxypropyl cellulose which has such a particle size that ≧99% of the particles thereof pass through a mesh having an opening of 150 μm and whose 2-mass % aqueous solution has a viscosity of 3.0 to 5.9 mPa.s, or (B3) 7 to 11 mass % of hydroxypropyl cellulose which has such a particle size that ≧99% of the particles thereof pass through a mesh having an opening of 150 μm and whose 2-mass % aqueous solution has a viscosity of 6.0 to 4,000 mPa.s, and having a water-insoluble ingredient content of 5 mass % or less.
    • 为了提供肠道清洁的口服片剂,其肠清洗后没有残留在肠道中,其表现出与包含结晶纤维素的常规含磷酸钠片剂相当的溶解性能,并且其是容易被 课程。 含有以下成分(A)和(B)的肠溶清洁口服片剂:(A)80〜95质量%的磷酸钠,(B)(B1)7〜11质量%的具有这样的粒子的羟丙基纤维素 大于99%的颗粒通过开口为350μm的网,其2质量%的水溶液的粘度为2.0〜10.0mPa·s,(B2)为5〜13质量%的羟丙基纤维素 其粒径> 99%的颗粒通过开口为150μm的网,其2质量%的水溶液的粘度为3.0〜5.9mPa.s,或(B3)7〜 其粒径为99%以上的羟丙基纤维素的质量为11质量%,通过开口为150μm的网,其2质量%的水溶液的粘度为6.0〜4000mPa.s, 并且具有5质量%以下的水不溶成分含量。
    • 18. 发明授权
    • Alkaline protease
    • 碱性蛋白酶
    • US07368273B2
    • 2008-05-06
    • US10385662
    • 2003-03-12
    • Mitsuyoshi OkudaTsuyoshi SatoKazuhiro SaitoNobuyuki SumitomoYoshifumi IzawaKatsuhisa SaekiTohru KobayashiMasafumi Nomura
    • Mitsuyoshi OkudaTsuyoshi SatoKazuhiro SaitoNobuyuki SumitomoYoshifumi IzawaKatsuhisa SaekiTohru KobayashiMasafumi Nomura
    • C12N9/48C11D3/386
    • C11D3/386C12N9/54C12Y304/21062
    • An alkaline protease wherein an amino acid residue at (a) position 65, (b) position 101, (c) position 163, (d) position 17-0, (e) position 171, (f) position 273, (g) position 320, (h) position 359 or (i) position 387 of SEQ. ID NO: 2 or at a position corresponding thereto has been selected from the following amino acid residues: position (a): proline, position (b): asparagine, position (e): histidine, aspartic acid, phenylalanine, lysine, asparagine, seine, isoleucine, leucine, glutamine, threonine and valine, position (d): valine and leucine, position (e): alanine, glutamic acid, glycine and threonine, position (K): isoleucine, glycine and threonine, position (g): phenylalanine, valine, threonine, leucine, isoleucine and glycine, position (h): seine, leucine, valine, isoleucine and glutamine, position (i): alanine, lysine, glutamine, glutamic acid, arginine and histidine. A method to an alkaline protease having activity even in the presence of a highly concentrated fatty acid, and exhibiting excellent detergency for the removal of a complex stain containing protein, sebum and the like, and therefore useful as an ingredient in a detergent.
    • (a)位置65,(b)位置101,(c)位置163,(d)位置17-0,(e)位置171,(f)位置273,(g) 位置320,(h)位置359或(i)SEQ ID NO: 位置(a):脯氨酸,位置(b):天冬酰胺,位置(e):组氨酸,天冬氨酸,苯丙氨酸,赖氨酸,天冬酰胺, (e):丙氨酸,谷氨酸,甘氨酸和苏氨酸,位置(K):异亮氨酸,甘氨酸和苏氨酸,位置(g):缬氨酸和亮氨酸, (i):丙氨酸,赖氨酸,谷氨酰胺,谷氨酸,精氨酸和组氨酸,位置(h):ine碱,亮氨酸,缬氨酸,异亮氨酸和谷氨酰胺。 一种碱性蛋白酶的方法,即使在高度浓缩的脂肪酸的存在下也具有活性,并且对于去除含有蛋白质,皮脂等的复合污渍具有优异的去污力,因此可用作洗涤剂中的成分。
    • 19. 发明授权
    • Developing method and apparatus
    • 开发方法和装置
    • US07182531B2
    • 2007-02-27
    • US11476574
    • 2006-06-29
    • Kiyohisa TateyamaMasafumi NomuraTaketora Shinogi
    • Kiyohisa TateyamaMasafumi NomuraTaketora Shinogi
    • G03D5/00
    • G03D3/065G03D3/06G03F7/30G03F7/3071H01L21/6715H01L21/67253
    • In this developing method and apparatus, a concentration measuring unit 222 picks part of developing fluid in a blending tank 186 to measure the resist concentration by an absorption photometry and feeds the detected resist concentration to a control unit 240. The control unit 240 controls respective valves 210, 212, 216 of a TMAH concentrate solution 200, a solvent pipe 204 and a drain pipe 208 in a manner that the developing fluid in the blending tank 186 has a TMAH concentration corresponding to a measured resist-concentration value to accomplish a constant developing rate, performing component control of the developing fluid. The developing fluid transferred from the blending tank 186 to a supply tank 188 is fed to a developer nozzle DN in a developing section 126 through a developer pipe 224 owing to the drive of a pump 228. Accordingly, even if the developing fluid is reused in the developing process in multiple times, it is possible to make sure of the uniformity in development.
    • 在该显影方法和装置中,浓度测量单元222拾取混合罐186中的显影液的一部分,通过吸收测光法测量抗蚀剂浓度,并将检测到的抗蚀剂浓度输送到控制单元240.控制单元240控制各个阀 210,212,216的TMAH浓缩液200,溶剂管204和排水管208,使得混合罐186中的显影液具有对应于测量的抗蚀剂浓度值的TMAH浓度,以实现恒定显影 速率,执行显影液的成分控制。 从混合罐186输送到供给罐188的显影液由于泵228的驱动而通过显影管224被供给到显影部126中的显影剂喷嘴DN。因此,即使显影液再利用 发展过程多次,有可能确保发展的一致性。
    • 20. 发明申请
    • Developing method and apparatus
    • 开发方法和装置
    • US20060246384A1
    • 2006-11-02
    • US11476574
    • 2006-06-29
    • Kiyohisa TateyamaMasafumi NomuraTaketora Shinogi
    • Kiyohisa TateyamaMasafumi NomuraTaketora Shinogi
    • G03C1/005
    • G03D3/065G03D3/06G03F7/30G03F7/3071H01L21/6715H01L21/67253
    • In this developing method and apparatus, a concentration measuring unit 222 picks part of developing fluid in a blending tank 186 to measure the resist concentration by an absorption photometry and feeds the detected resist concentration to a control unit 240. The control unit 240 controls respective valves 210, 212, 216 of a TMAH concentrate solution 200, a solvent pipe 204 and a drain pipe 208 in a manner that the developing fluid in the blending tank 186 has a TMAH concentration corresponding to a measured resist-concentration value to accomplish a constant developing rate, performing component control of the developing fluid. The developing fluid transferred from the blending tank 186 to a supply tank 188 is fed to a developer nozzle DN in a developing section 126 through a developer pipe 224 owing to the drive of a pump 228. Accordingly, even if the developing fluid is reused in the developing process in multiple times, it is possible to make sure of the uniformity in development.
    • 在该显影方法和装置中,浓度测量单元222拾取混合罐186中的显影液的一部分,通过吸收测光法测量抗蚀剂浓度,并将检测到的抗蚀剂浓度输送到控制单元240.控制单元240控制各个阀 210,212,216的TMAH浓缩液200,溶剂管204和排水管208,使得混合罐186中的显影液具有对应于测量的抗蚀剂浓度值的TMAH浓度,以实现恒定显影 速率,执行显影液的成分控制。 从混合罐186输送到供给罐188的显影液由于泵228的驱动而通过显影管224被供给到显影部126中的显影剂喷嘴DN。因此,即使显影液再利用 发展过程多次,有可能确保发展的一致性。