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11. 发明申请

US20100296147A1 OPTICAL REFLECTION ELEMENT 有权
标题翻译：光学反射元件
公开(公告)号：US20100296147A1
公开(公告)日：2010-11-25
申请号：US12811592
申请日：2009-01-29
申请人： Jirou Terada , Shinsuke Nakazono , Shigeo Furukawa , Kazuki Komaki
发明人： Jirou Terada , Shinsuke Nakazono , Shigeo Furukawa , Kazuki Komaki
IPC分类号： G02B26/10
CPC分类号： B41J2/471 , G02B26/0858 , G02B26/105 , H04N1/113
摘要： An optical reflection device includes a mirror having a reflection surface configured to reflect light, a first support beam connected to the mirror, a tuning fork vibrator connected to the first support beam, a second support beam connected to the tuning fork vibrator, and a supporter connected to the second support beam. The first support beam has a first end connected to the mirror and a second end located on an opposite side to the first end, and extends along a center axis. The tuning fork vibrator includes a joining portion connected to the second end of the first support beam, a first arm extending from the first joining portion while separated from the first center axis, and a second arm extending from the first joining portion symmetrically to the first arm about the first center axis. The second support beam has a third end connected to the joining portion of the tuning fork vibrator and a fourth end located on an opposite side to the third end, and extends along the first center axis.
摘要翻译：光反射装置包括具有被配置为反射光的反射表面的反射镜，连接到反射镜的第一支撑梁，连接到第一支撑梁的音叉振动器，连接到音叉振动器的第二支撑梁，以及支撑件连接到第二支撑梁。第一支撑梁具有连接到反射镜的第一端和位于与第一端相反的一侧的第二端，并沿着中心轴线延伸。音叉振动器包括连接到第一支撑梁的第二端的接合部分，从第一接合部分延伸并与第一中心轴分离的第一臂，以及从第一接合部分对称地延伸到第一接合部分的第一臂围绕第一个中心轴。第二支撑梁具有连接到音叉振动器的接合部分的第三端和位于与第三端相反的一侧的第四端，并沿第一中心轴线延伸。

12. 发明授权

US08964273B2 Optical reflection element 有权
标题翻译：光反射元件
公开(公告)号：US08964273B2
公开(公告)日：2015-02-24
申请号：US13698327
申请日：2011-06-21
申请人： Toshiaki Horie , Shinsuke Nakazono , Soichiro Hiraoka , Yuta Yamamoto , Kazuki Komaki , Masaki Tada , Kiyomi Furukawa
发明人： Toshiaki Horie , Shinsuke Nakazono , Soichiro Hiraoka , Shigeo Furukawa , Yuta Yamamoto , Kazuki Komaki , Masaki Tada
IPC分类号： G02B26/08 , G02B7/182 , B81B3/00
CPC分类号： G02B26/101 , B81B3/0045 , B81B2201/042 , B81B2203/0163 , G02B7/1821 , G02B26/0833 , G02B26/0858 , G02B26/105
摘要： An optical reflection element according to the present invention includes a fixed frame, a pair of first oscillation parts, a movable frame, a pair of second oscillation parts, and a mirror part. One-side ends of the first oscillation parts are connected to the inside of the fixed frame. The movable frame is connected to and held by the other-side ends of the pair of first oscillation parts to be pivotable. One-side ends of the pair of second oscillation parts are connected to the inside of the movable frame and the pair of second oscillation parts are disposed to be substantially perpendicular to the pair of first oscillation parts. The mirror part is connected to and held by the other-side ends of the pair of second oscillation parts to be pivotable. The second oscillation parts have a meandering shape in which a plurality of straight portions and a plurality of folded portions are formed, and a stepped structure portion is provided in part of the folded portion.
摘要翻译：根据本发明的光反射元件包括固定框架，一对第一振动部件，可动框架，一对第二振荡部件和反射镜部件。第一振动部分的一端连接到固定框架的内部。可移动框架连接到一对第一振动部件的另一侧端部并由其保持以可枢转。一对第二振荡部的一端连接到可动框架的内侧，并且一对第二振荡部被配置为大致垂直于该对第一振动部。镜部分连接到一对第二振动部件的另一侧端部并由其保持以可枢转。第二振动部分具有弯曲形状，其中形成多个直线部分和多个折叠部分，并且在折叠部分的一部分中设置阶梯状结构部分。

13. 发明申请

US20130107339A1 OPTICAL REFLECTION ELEMENT 有权
标题翻译：光学反射元件
公开(公告)号：US20130107339A1
公开(公告)日：2013-05-02
申请号：US13698327
申请日：2011-06-21
申请人： Toshiaki Horie , Shinsuke Nakazono , Soichiro Hiraoka , Yuta Yamamoto , Kazuki Komaki , Masaki Tada , Kiyomi Furukawa
发明人： Toshiaki Horie , Shinsuke Nakazono , Soichiro Hiraoka , Shigeo Furukawa , Yuta Yamamoto , Kazuki Komaki , Masaki Tada
IPC分类号： G02B7/182
CPC分类号： G02B26/101 , B81B3/0045 , B81B2201/042 , B81B2203/0163 , G02B7/1821 , G02B26/0833 , G02B26/0858 , G02B26/105
摘要： An optical reflection element according to the present invention includes a fixed frame, a pair of first oscillation parts, a movable frame, a pair of second oscillation parts, and a mirror part. One-side ends of the first oscillation parts are connected to the inside of the fixed frame. The movable frame is connected to and held by the other-side ends of the pair of first oscillation parts to be pivotable. One-side ends of the pair of second oscillation parts are connected to the inside of the movable frame and the pair of second oscillation parts are disposed to be substantially perpendicular to the pair of first oscillation parts. The mirror part is connected to and held by the other-side ends of the pair of second oscillation parts to be pivotable. The second oscillation parts have a meandering shape in which a plurality of straight portions and a plurality of folded portions are formed, and a stepped structure portion is provided in part of the folded portion.
摘要翻译：根据本发明的光反射元件包括固定框架，一对第一振动部件，可动框架，一对第二振荡部件和反射镜部件。第一振动部分的一端连接到固定框架的内部。可移动框架连接到一对第一振动部件的另一侧端部并由其保持以可枢转。一对第二振荡部的一端连接到可动框架的内侧，并且一对第二振荡部被配置为大致垂直于该对第一振动部。镜部分连接到一对第二振动部件的另一侧端部并由其保持以可枢转。第二振动部分具有弯曲形状，其中形成多个直线部分和多个折叠部分，并且在折叠部分的一部分中设置阶梯状结构部分。

14. 发明申请

US20120320439A1 OPTICAL REFLECTION ELEMENT 有权
标题翻译：光学反射元件
公开(公告)号：US20120320439A1
公开(公告)日：2012-12-20
申请号：US13581837
申请日：2011-03-24
申请人： Soichiro Hiraoka , Kazuki Komaki , Masaki Tada , Shigeo Furukawa , Kiyomi Furukawa , Shinsuke Nakazono , Yuta Yamamoto , Toshiaki Horie
发明人： Soichiro Hiraoka , Kazuki Komaki , Masaki Tada , Shigeo Furukawa , Kiyomi Furukawa , Shinsuke Nakazono , Yuta Yamamoto , Toshiaki Horie
IPC分类号： G02B26/08
CPC分类号： G02B26/0833 , B81B3/0051 , B81B2201/042
摘要： An optical reflection element has a frame, a pair of meandering-shaped vibration elements, a mirror having a reflection surface, and a pair of protective beams. The vibration elements have their respective outer ends supported by confronting portions of an inside of the frame. The vibration elements support the mirror with respective inner ends thereof. The protective beams extend from the respective confronting portions of the inside of the frame toward the mirror with a predetermined space from the vibration elements and in parallel with a vibration axis of the vibration elements.
摘要翻译：光反射元件具有框架，一对曲折形状的振动元件，具有反射面的反射镜和一对保护光束。振动元件的各自的外端由框架内部的相对部分支撑。振动元件支撑着镜子的相应内端。保护梁从振动元件的预定空间与振动元件的振动轴线平行地从框架内部的相应的相对部分向镜子延伸。

15. 发明授权

US08279508B2 Optical reflection element 有权
标题翻译：光反射元件
公开(公告)号：US08279508B2
公开(公告)日：2012-10-02
申请号：US13265139
申请日：2010-04-16
申请人： Shinsuke Nakazono , Soichiro Hiraoka , Jirou Terada , Shigeo Furukawa , Kiyomi Furukawa, legal representative , Toshiaki Horie , Kazuki Komaki , Masaki Tada , Yuta Yamamoto
发明人： Shinsuke Nakazono , Soichiro Hiraoka , Jirou Terada , Shigeo Furukawa , Toshiaki Horie , Kazuki Komaki , Masaki Tada , Yuta Yamamoto
IPC分类号： G02B26/08
CPC分类号： G02B26/0858
摘要： An optical reflecting element includes a mirror, and a pair of high-frequency vibrators and a pair of low-frequency vibrators for vibrating the mirror. The high-frequency vibrators include a substrate, a bottom electrode layer formed on the substrate, a piezoelectric layer, and a drive electrode and a first monitor electrode as the top electrode layer. One end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, and a second monitor electrode as the top electrode layer. The other end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, a first monitor electrode, and an insulator layer as a dead zone for preventing a piezoelectric effect due to the piezoelectric layer from reaching the first monitor electrode. The first monitor electrode provided on the low-frequency vibrator is connected from the top of the vibrator to an extraction electrode.
摘要翻译：光反射元件包括反射镜，一对高频振动器和用于振动反射镜的一对低频振动器。高频振动器包括基板，形成在基板上的底部电极层，压电层和驱动电极以及作为顶部电极层的第一监视电极。低频振动器的一端具有与高频振动器共用的基板，底部电极层，压电层，驱动电极和作为顶部电极层的第二监视电极。低频振动器的另一端具有与高频振子共用的基板，底电极层，压电层，驱动电极，第一监视电极和绝缘体层，作为防止压电的死区由于压电层到达第一监视电极的作用。设置在低频振动器上的第一监视电极从振动器的顶部连接到提取电极。

16. 发明申请

US20120206019A1 PIEZOELECTRIC ELEMENT AND METHOD FOR MANUFACTURING THE SAME 审中-公开
标题翻译：压电元件及其制造方法
公开(公告)号：US20120206019A1
公开(公告)日：2012-08-16
申请号：US13455315
申请日：2012-04-25
申请人： Toshinari NODA , Kazuki Komaki
发明人： Toshinari NODA , Kazuki Komaki
IPC分类号： H01L41/04
CPC分类号： H01L41/0478 , H01L41/081 , H01L41/0815 , H01L41/318 , Y10T29/42
摘要： A piezoelectric element includes a substrate, and a lower electrode layer, a piezoelectric layer, and an upper electrode layer sequentially formed on the substrate. The substrate has a linear thermal expansion coefficient higher than that of the piezoelectric layer, and the piezoelectric layer includes a polycrystalline body having an in-plane stress in a compressive direction. Thus, the piezoelectric element realizes the piezoelectric layer having a high orientation in a polarization axis direction, high proportionality of a displacement amount with respect to an applied voltage, and a large absolute value of the displacement amount.
摘要翻译：压电元件包括基板，以及顺序形成在基板上的下电极层，压电层和上电极层。基板的线膨胀系数高于压电层的热膨胀系数，压电层包括在压缩方向上具有面内应力的多晶体。因此，压电元件实现了在偏振轴方向上具有高取向的压电层，相对于施加电压的位移量的高比例性和位移量的绝对值的大的实现。

17. 发明申请

US20110101828A1 PIEZOELECTRIC ELEMENT AND METHOD FOR MANUFACTURING THE SAME 有权
标题翻译：压电元件及其制造方法
公开(公告)号：US20110101828A1
公开(公告)日：2011-05-05
申请号：US12994188
申请日：2009-06-24
申请人： Toshinari Noda , Kazuki Komaki
发明人： Toshinari Noda , Kazuki Komaki
IPC分类号： H01L41/053 , H01L41/22
CPC分类号： H01L41/0478 , H01L41/081 , H01L41/0815 , H01L41/318 , Y10T29/42
摘要： A piezoelectric element includes a substrate, and a lower electrode layer, a piezoelectric layer, and an upper electrode layer sequentially formed on the substrate. The substrate has a linear thermal expansion coefficient higher than that of the piezoelectric layer, and the piezoelectric layer includes a polycrystalline body having an in-plane stress in a compressive direction. Thus, the piezoelectric element realizes the piezoelectric layer having a high orientation in a polarization axis direction, high proportionality of a displacement amount with respect to an applied voltage, and a large absolute value of the displacement amount.
摘要翻译：压电元件包括基板，以及顺序形成在基板上的下电极层，压电层和上电极层。基板的线膨胀系数高于压电层的热膨胀系数，压电层包括在压缩方向上具有面内应力的多晶体。因此，压电元件实现了在偏振轴方向上具有高取向的压电层，相对于施加电压的位移量的高比例性以及位移量的绝对值较大。

18. 发明授权

US5672252A Method and apparatus for fabrication of dielectric film 失效
标题翻译：电介质膜的制造方法和装置
公开(公告)号：US5672252A
公开(公告)日：1997-09-30
申请号：US483835
申请日：1995-06-15
申请人： Shigenori Hayashi , Kazuki Komaki , Takeshi Kamada , Masatoshi Kitagawa , Takashi Deguchi , Ryoichi Takayama , Takashi Hirao
发明人： Shigenori Hayashi , Kazuki Komaki , Takeshi Kamada , Masatoshi Kitagawa , Takashi Deguchi , Ryoichi Takayama , Takashi Hirao
IPC分类号： C23C14/00 , C23C14/08 , C23C14/58 , G02F1/00 , H01L21/314 , H01L21/316 , H01L37/02 , H01L41/316 , C23C14/34
CPC分类号： C23C14/5853 , C23C14/0078 , C23C14/088 , H01L21/02197 , H01L21/02266 , H01L21/314 , H01L21/31691 , H01L37/025 , H01L41/1875 , H01L41/316 , G02F1/0027
摘要： A method whereby perovskite type oxide dielectric thin films with ABO.sub.3 structure are able to be formed with such features as good stability, uniformity, reproducibility, or the like, with high through-put by having a deposition process, wherein the thin films are deposited on a substrate, and a stabilization process, where no deposition of the thin films takes place, repeated alternatingly while the substrate temperature being kept near the temperature at which perovskite type oxide dielectric thin films are formed. Also, by employing (i) a processing method wherein a decomposing excitation of a reactive gas due to plasma takes place on or near the deposition surface in a gaseous atmosphere comprising a gas that reacts with the elements composing the thin films, (ii) a processing method wherein an oxidation reaction takes place on the deposition surface in a gaseous atmosphere comprising at least ozone (O.sub.3), and (iii) a processing method wherein light of short wave length is irradiated on the deposition surface in a gaseous atmosphere comprising at least reactive elements in the non-deposition process, the oxygen concentration in the deposited thin films is adjusted and dielectric thin films of good quality and an extremely low defect content are realized.
摘要翻译：具有ABO3结构的钙钛矿型氧化物电介质薄膜能够通过具有沉积工艺的高通量形成具有良好的稳定性，均匀性，再现性等特性的方法，其中薄膜沉积在基板和稳定化处理，其中不存在薄膜的沉积，在衬底温度保持接近形成钙钛矿型氧化物电介质薄膜的温度的同时交替重复。此外，通过采用以下处理方法：（i）在包含与组成薄膜的元素反应的气体的气体气氛中，在等离子体发生的反应性气体的分解激发发生在沉积表面上或其附近的处理方法，（ii）处理方法，其中在至少包含臭氧（O 3）的气体气氛中在沉积表面上发生氧化反应，和（iii）其中在至少包括至少包含臭氧（O 3）的气体气氛中在沉积表面上照射短波长的光的处理方法在非沉积工艺中的非活性元素，沉积的薄膜中的氧浓度被调节，并且实现了良好质量和极低缺陷含量的介电薄膜。

19. 发明授权

US08792151B2 Optical reflection element 有权
标题翻译：光反射元件
公开(公告)号：US08792151B2
公开(公告)日：2014-07-29
申请号：US13581360
申请日：2011-03-24
申请人： Shinsuke Nakazono , Toshiaki Horie , Soichiro Hiraoka , Yuta Yamamoto , Masaki Tada , Kazuki Komaki , Kiyomi Furukawa
发明人： Shinsuke Nakazono , Toshiaki Horie , Shigeo Furukawa , Soichiro Hiraoka , Yuta Yamamoto , Masaki Tada , Kazuki Komaki
IPC分类号： G02B26/08
CPC分类号： G02B26/0858 , G02B26/08 , G02B26/0841 , G02B26/085
摘要： An optical reflection element includes a frame, a meandrous vibrating part having an outer end connected with an inside of the frame, and a mirror part supported by an inner end of the meandrous vibrating part. The meandrous vibrating part has a meandrous shape that includes curved portions and vibrating beams alternately connected with the curved portions. A curvature of respective one of the curved portions is smaller than a curvature of at least one of the curved portions which is located closer to the inner end than the respective one of the curved portions. This optical reflection element has a large deflection angle of the mirror part.
摘要翻译：光学反射元件包括框架，具有与框架内侧连接的外端的蜿蜒的振动部件和由蜿蜒的振动部件的内端支撑的反射镜部件。蜿蜒的振动部分具有弯曲部分和与弯曲部分交替连接的振动束的蜿蜒形状。相应的一个弯曲部分的曲率小于比各个弯曲部分更靠近内端的弯曲部分中的至少一个的曲率。该光反射元件的反射镜部分的偏转角大。

20. 发明授权

US08422109B2 Optical reflection element 有权
标题翻译：光反射元件
公开(公告)号：US08422109B2
公开(公告)日：2013-04-16
申请号：US12811592
申请日：2009-01-29
申请人： Jirou Terada , Shinsuke Nakazono , Shigeo Furukawa , Kazuki Komaki
发明人： Jirou Terada , Shinsuke Nakazono , Shigeo Furukawa , Kazuki Komaki
IPC分类号： G02B26/08
CPC分类号： B41J2/471 , G02B26/0858 , G02B26/105 , H04N1/113
摘要： An optical reflection device includes a mirror having a reflection surface configured to reflect light, a first support beam connected to the mirror, a tuning fork vibrator connected to the first support beam, a second support beam connected to the tuning fork vibrator, and a supporter connected to the second support beam. The first support beam has a first end connected to the mirror and a second end located on an opposite side to the first end, and extends along a center axis. The tuning fork vibrator includes a joining portion connected to the second end of the first support beam, a first arm extending from the first joining portion while separated from the first center axis, and a second arm extending from the first joining portion symmetrically to the first arm about the first center axis. The second support beam has a third end connected to the joining portion of the tuning fork vibrator and a fourth end located on an opposite side to the third end, and extends along the first center axis.
摘要翻译：光反射装置包括具有被配置为反射光的反射表面的反射镜，连接到反射镜的第一支撑梁，连接到第一支撑梁的音叉振动器，连接到音叉振动器的第二支撑梁，以及支撑件连接到第二支撑梁。第一支撑梁具有连接到反射镜的第一端和位于与第一端相反的一侧的第二端，并沿着中心轴线延伸。音叉振动器包括连接到第一支撑梁的第二端的接合部分，从第一接合部分延伸并与第一中心轴分离的第一臂，以及从第一接合部分对称地延伸到第一接合部分的第一臂围绕第一个中心轴。第二支撑梁具有连接到音叉振动器的接合部分的第三端和位于与第三端相反的一侧的第四端，并沿第一中心轴线延伸。

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