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1. 发明授权

US08964273B2 Optical reflection element 有权
标题翻译：光反射元件
公开(公告)号：US08964273B2
公开(公告)日：2015-02-24
申请号：US13698327
申请日：2011-06-21
申请人： Toshiaki Horie , Shinsuke Nakazono , Soichiro Hiraoka , Yuta Yamamoto , Kazuki Komaki , Masaki Tada , Kiyomi Furukawa
发明人： Toshiaki Horie , Shinsuke Nakazono , Soichiro Hiraoka , Shigeo Furukawa , Yuta Yamamoto , Kazuki Komaki , Masaki Tada
IPC分类号： G02B26/08 , G02B7/182 , B81B3/00
CPC分类号： G02B26/101 , B81B3/0045 , B81B2201/042 , B81B2203/0163 , G02B7/1821 , G02B26/0833 , G02B26/0858 , G02B26/105
摘要： An optical reflection element according to the present invention includes a fixed frame, a pair of first oscillation parts, a movable frame, a pair of second oscillation parts, and a mirror part. One-side ends of the first oscillation parts are connected to the inside of the fixed frame. The movable frame is connected to and held by the other-side ends of the pair of first oscillation parts to be pivotable. One-side ends of the pair of second oscillation parts are connected to the inside of the movable frame and the pair of second oscillation parts are disposed to be substantially perpendicular to the pair of first oscillation parts. The mirror part is connected to and held by the other-side ends of the pair of second oscillation parts to be pivotable. The second oscillation parts have a meandering shape in which a plurality of straight portions and a plurality of folded portions are formed, and a stepped structure portion is provided in part of the folded portion.
摘要翻译：根据本发明的光反射元件包括固定框架，一对第一振动部件，可动框架，一对第二振荡部件和反射镜部件。第一振动部分的一端连接到固定框架的内部。可移动框架连接到一对第一振动部件的另一侧端部并由其保持以可枢转。一对第二振荡部的一端连接到可动框架的内侧，并且一对第二振荡部被配置为大致垂直于该对第一振动部。镜部分连接到一对第二振动部件的另一侧端部并由其保持以可枢转。第二振动部分具有弯曲形状，其中形成多个直线部分和多个折叠部分，并且在折叠部分的一部分中设置阶梯状结构部分。

2. 发明申请

US20130107339A1 OPTICAL REFLECTION ELEMENT 有权
标题翻译：光学反射元件
公开(公告)号：US20130107339A1
公开(公告)日：2013-05-02
申请号：US13698327
申请日：2011-06-21
申请人： Toshiaki Horie , Shinsuke Nakazono , Soichiro Hiraoka , Yuta Yamamoto , Kazuki Komaki , Masaki Tada , Kiyomi Furukawa
发明人： Toshiaki Horie , Shinsuke Nakazono , Soichiro Hiraoka , Shigeo Furukawa , Yuta Yamamoto , Kazuki Komaki , Masaki Tada
IPC分类号： G02B7/182
CPC分类号： G02B26/101 , B81B3/0045 , B81B2201/042 , B81B2203/0163 , G02B7/1821 , G02B26/0833 , G02B26/0858 , G02B26/105
摘要： An optical reflection element according to the present invention includes a fixed frame, a pair of first oscillation parts, a movable frame, a pair of second oscillation parts, and a mirror part. One-side ends of the first oscillation parts are connected to the inside of the fixed frame. The movable frame is connected to and held by the other-side ends of the pair of first oscillation parts to be pivotable. One-side ends of the pair of second oscillation parts are connected to the inside of the movable frame and the pair of second oscillation parts are disposed to be substantially perpendicular to the pair of first oscillation parts. The mirror part is connected to and held by the other-side ends of the pair of second oscillation parts to be pivotable. The second oscillation parts have a meandering shape in which a plurality of straight portions and a plurality of folded portions are formed, and a stepped structure portion is provided in part of the folded portion.
摘要翻译：根据本发明的光反射元件包括固定框架，一对第一振动部件，可动框架，一对第二振荡部件和反射镜部件。第一振动部分的一端连接到固定框架的内部。可移动框架连接到一对第一振动部件的另一侧端部并由其保持以可枢转。一对第二振荡部的一端连接到可动框架的内侧，并且一对第二振荡部被配置为大致垂直于该对第一振动部。镜部分连接到一对第二振动部件的另一侧端部并由其保持以可枢转。第二振动部分具有弯曲形状，其中形成多个直线部分和多个折叠部分，并且在折叠部分的一部分中设置阶梯状结构部分。

3. 发明申请

US20120320439A1 OPTICAL REFLECTION ELEMENT 有权
标题翻译：光学反射元件
公开(公告)号：US20120320439A1
公开(公告)日：2012-12-20
申请号：US13581837
申请日：2011-03-24
申请人： Soichiro Hiraoka , Kazuki Komaki , Masaki Tada , Shigeo Furukawa , Kiyomi Furukawa , Shinsuke Nakazono , Yuta Yamamoto , Toshiaki Horie
发明人： Soichiro Hiraoka , Kazuki Komaki , Masaki Tada , Shigeo Furukawa , Kiyomi Furukawa , Shinsuke Nakazono , Yuta Yamamoto , Toshiaki Horie
IPC分类号： G02B26/08
CPC分类号： G02B26/0833 , B81B3/0051 , B81B2201/042
摘要： An optical reflection element has a frame, a pair of meandering-shaped vibration elements, a mirror having a reflection surface, and a pair of protective beams. The vibration elements have their respective outer ends supported by confronting portions of an inside of the frame. The vibration elements support the mirror with respective inner ends thereof. The protective beams extend from the respective confronting portions of the inside of the frame toward the mirror with a predetermined space from the vibration elements and in parallel with a vibration axis of the vibration elements.
摘要翻译：光反射元件具有框架，一对曲折形状的振动元件，具有反射面的反射镜和一对保护光束。振动元件的各自的外端由框架内部的相对部分支撑。振动元件支撑着镜子的相应内端。保护梁从振动元件的预定空间与振动元件的振动轴线平行地从框架内部的相应的相对部分向镜子延伸。

4. 发明授权

US08279508B2 Optical reflection element 有权
标题翻译：光反射元件
公开(公告)号：US08279508B2
公开(公告)日：2012-10-02
申请号：US13265139
申请日：2010-04-16
申请人： Shinsuke Nakazono , Soichiro Hiraoka , Jirou Terada , Shigeo Furukawa , Kiyomi Furukawa, legal representative , Toshiaki Horie , Kazuki Komaki , Masaki Tada , Yuta Yamamoto
发明人： Shinsuke Nakazono , Soichiro Hiraoka , Jirou Terada , Shigeo Furukawa , Toshiaki Horie , Kazuki Komaki , Masaki Tada , Yuta Yamamoto
IPC分类号： G02B26/08
CPC分类号： G02B26/0858
摘要： An optical reflecting element includes a mirror, and a pair of high-frequency vibrators and a pair of low-frequency vibrators for vibrating the mirror. The high-frequency vibrators include a substrate, a bottom electrode layer formed on the substrate, a piezoelectric layer, and a drive electrode and a first monitor electrode as the top electrode layer. One end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, and a second monitor electrode as the top electrode layer. The other end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, a first monitor electrode, and an insulator layer as a dead zone for preventing a piezoelectric effect due to the piezoelectric layer from reaching the first monitor electrode. The first monitor electrode provided on the low-frequency vibrator is connected from the top of the vibrator to an extraction electrode.
摘要翻译：光反射元件包括反射镜，一对高频振动器和用于振动反射镜的一对低频振动器。高频振动器包括基板，形成在基板上的底部电极层，压电层和驱动电极以及作为顶部电极层的第一监视电极。低频振动器的一端具有与高频振动器共用的基板，底部电极层，压电层，驱动电极和作为顶部电极层的第二监视电极。低频振动器的另一端具有与高频振子共用的基板，底电极层，压电层，驱动电极，第一监视电极和绝缘体层，作为防止压电的死区由于压电层到达第一监视电极的作用。设置在低频振动器上的第一监视电极从振动器的顶部连接到提取电极。

5. 发明申请

US20120113492A1 OPTICAL REFLECTION ELEMENT 有权
标题翻译：光学反射元件
公开(公告)号：US20120113492A1
公开(公告)日：2012-05-10
申请号：US13265139
申请日：2010-04-16
申请人： Shinsuke Nakazono , Soichiro Hiraoka , Jirou Terada , Shigeo Furukawa , Kiyomi Furukawa , Toshiaki Horie , Kazuki Komaki , Masaki Tada , Yuta Yamamoto
发明人： Shinsuke Nakazono , Soichiro Hiraoka , Jirou Terada , Shigeo Furukawa , Kiyomi Furukawa , Toshiaki Horie , Kazuki Komaki , Masaki Tada , Yuta Yamamoto
IPC分类号： G02B26/08
CPC分类号： G02B26/0858
摘要： An optical reflecting element includes a mirror, and a pair of high-frequency vibrators and a pair of low-frequency vibrators for vibrating the mirror. The high-frequency vibrators include a substrate, a bottom electrode layer formed on the substrate, a piezoelectric layer, and a drive electrode and a first monitor electrode as the top electrode layer. One end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, and a second monitor electrode as the top electrode layer. The other end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, a first monitor electrode, and an insulator layer as a dead zone for preventing a piezoelectric effect due to the piezoelectric layer from reaching the first monitor electrode. The first monitor electrode provided on the low-frequency vibrator is connected from the top of the vibrator to an extraction electrode.
摘要翻译：光反射元件包括反射镜，一对高频振动器和用于振动反射镜的一对低频振动器。高频振动器包括基板，形成在基板上的底部电极层，压电层和驱动电极以及作为顶部电极层的第一监视电极。低频振动器的一端具有与高频振动器共用的基板，底部电极层，压电层，驱动电极和作为顶部电极层的第二监视电极。低频振动器的另一端具有与高频振子共用的基板，底电极层，压电层，驱动电极，第一监视电极和绝缘体层，作为防止压电的死区由于压电层到达第一监视电极的作用。设置在低频振动器上的第一监视电极从振动器的顶部连接到提取电极。

6. 发明授权

US08681407B2 Optical reflection element 有权
标题翻译：光反射元件
公开(公告)号：US08681407B2
公开(公告)日：2014-03-25
申请号：US13581837
申请日：2011-03-24
申请人： Soichiro Hiraoka , Kazuki Komaki , Masaki Tada , Shigeo Furukawa , Kiyomi Furukawa , Shinsuke Nakazono , Yuta Yamamoto , Toshiaki Horie
发明人： Soichiro Hiraoka , Kazuki Komaki , Masaki Tada , Shigeo Furukawa , Kiyomi Furukawa , Shinsuke Nakazono , Yuta Yamamoto , Toshiaki Horie
IPC分类号： G02B26/08
CPC分类号： G02B26/0833 , B81B3/0051 , B81B2201/042
摘要： An optical reflection element has a frame, a pair of meandering-shaped vibration elements, a mirror having a reflection surface, and a pair of protective beams. The vibration elements have their respective outer ends supported by confronting portions of an inside of the frame. The vibration elements support the mirror with respective inner ends thereof. The protective beams extend from the respective confronting portions of the inside of the frame toward the mirror with a predetermined space from the vibration elements and in parallel with a vibration axis of the vibration elements.
摘要翻译：光反射元件具有框架，一对曲折形状的振动元件，具有反射面的反射镜和一对保护光束。振动元件的各自的外端由框架内部的相对部分支撑。振动元件支撑着镜子的相应内端。保护梁从振动元件的预定空间与振动元件的振动轴线平行地从框架内部的相应的相对部分向镜子延伸。

7. 发明授权

US08792151B2 Optical reflection element 有权
标题翻译：光反射元件
公开(公告)号：US08792151B2
公开(公告)日：2014-07-29
申请号：US13581360
申请日：2011-03-24
申请人： Shinsuke Nakazono , Toshiaki Horie , Soichiro Hiraoka , Yuta Yamamoto , Masaki Tada , Kazuki Komaki , Kiyomi Furukawa
发明人： Shinsuke Nakazono , Toshiaki Horie , Shigeo Furukawa , Soichiro Hiraoka , Yuta Yamamoto , Masaki Tada , Kazuki Komaki
IPC分类号： G02B26/08
CPC分类号： G02B26/0858 , G02B26/08 , G02B26/0841 , G02B26/085
摘要： An optical reflection element includes a frame, a meandrous vibrating part having an outer end connected with an inside of the frame, and a mirror part supported by an inner end of the meandrous vibrating part. The meandrous vibrating part has a meandrous shape that includes curved portions and vibrating beams alternately connected with the curved portions. A curvature of respective one of the curved portions is smaller than a curvature of at least one of the curved portions which is located closer to the inner end than the respective one of the curved portions. This optical reflection element has a large deflection angle of the mirror part.
摘要翻译：光学反射元件包括框架，具有与框架内侧连接的外端的蜿蜒的振动部件和由蜿蜒的振动部件的内端支撑的反射镜部件。蜿蜒的振动部分具有弯曲部分和与弯曲部分交替连接的振动束的蜿蜒形状。相应的一个弯曲部分的曲率小于比各个弯曲部分更靠近内端的弯曲部分中的至少一个的曲率。该光反射元件的反射镜部分的偏转角大。

8. 发明申请

US20130050791A1 OPTICAL REFLECTION ELEMENT 有权
标题翻译：光学反射元件
公开(公告)号：US20130050791A1
公开(公告)日：2013-02-28
申请号：US13581360
申请日：2011-03-24
申请人： Shinsuke Nakazono , Toshiaki Horie , Soichiro Hiraoka , Yuta Yamamoto , Masaki Tada , Kazuki Komaki , Kiyomi Furukawa
发明人： Shinsuke Nakazono , Toshiaki Horie , Shigeo Furukawa , Soichiro Hiraoka , Yuta Yamamoto , Masaki Tada , Kazuki Komaki
IPC分类号： G02B26/08
CPC分类号： G02B26/0858 , G02B26/08 , G02B26/0841 , G02B26/085
摘要： An optical reflection element includes a frame, a meandrous vibrating part having an outer end connected with an inside of the frame, and a mirror part supported by an inner end of the meandrous vibrating part. The meandrous vibrating part has a meandrous shape that includes curved portions and vibrating beams alternately connected with the curved portions. A curvature of respective one of the curved portions is smaller than a curvature of at least one of the curved portions which is located closer to the inner end than the respective one of the curved portions. This optical reflection element has a large deflection angle of the mirror part.
摘要翻译：光学反射元件包括框架，具有与框架内侧连接的外端的蜿蜒的振动部件和由蜿蜒的振动部件的内端支撑的反射镜部件。蜿蜒的振动部分具有弯曲部分和与弯曲部分交替连接的振动束的蜿蜒形状。相应的一个弯曲部分的曲率小于比各个弯曲部分更靠近内端的弯曲部分中的至少一个的曲率。该光反射元件的反射镜部分的偏转角大。

9. 发明授权

US09261669B2 Vibrating element having meandering shape, and optical reflection element 有权
标题翻译：具有曲折形状的振动元件和光学反射元件
公开(公告)号：US09261669B2
公开(公告)日：2016-02-16
申请号：US13978386
申请日：2012-02-16
申请人： Toshiaki Horie , Shinsuke Nakazono , Soichiro Hiraoka , Yuta Yamamoto , Kazuki Komaki
发明人： Toshiaki Horie , Shinsuke Nakazono , Soichiro Hiraoka , Yuta Yamamoto , Kazuki Komaki
IPC分类号： G02B26/10 , G02B7/182 , G02B26/08 , H02N2/10 , B81B3/00 , H01L41/08 , H01L41/09
CPC分类号： G02B7/1821 , B81B3/0043 , B81B3/007 , B81B2203/0109 , B81B2203/0163 , G02B26/0858 , G02B26/101 , G02B26/105 , H01L41/081 , H01L41/0953 , H02N2/10 , H02N2/108
摘要： A vibrating element having a meandering shape includes a vibrating beam and a piezoelectric actuator provided on the vibrating beam. The vibrating beam has a meandering-shape substantially formed into the plurality of continuous turned-down shapes. The vibrating beam includes the plurality of turned-down units and the plurality of coupling units coupled to the turned-down units, and the coupling units and the turned-down units are alternately disposed. The piezoelectric actuator includes a lower electrode provided on the vibrating beam, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. A non-existence region where the piezoelectric film does not exist is provided in at least one of a neighborhood of a midpoint of an inner circumference of each of the turned-down units and a neighborhood of a curvature changing point in which a curvature of the inner circumference of each of the turned-down shapes changes.
摘要翻译：具有曲折形状的振动元件包括振动梁和设置在振动梁上的压电致动器。振动梁具有大致形成为多个连续折弯形状的曲折形状。振动梁包括多个折弯单元和耦合到折弯单元的多个联接单元，并且联接单元和下降单元交替地设置。压电致动器包括设置在振动梁上的下电极，设置在下电极上的压电膜和设置在压电膜上的上电极。不存在压电膜的不存在区域设置在每个折射单元的内周的中点附近和曲率变化点的附近中的至少一个中，其中曲率每个倒下的形状的内圆周都会发生变化。

10. 发明申请

US20130271804A1 VIBRATING ELEMENT HAVING MEANDERING SHAPE, AND OPTICAL REFLECTION ELEMENT 有权
标题翻译：具有形状的振动元件和光学反射元件
公开(公告)号：US20130271804A1
公开(公告)日：2013-10-17
申请号：US13978386
申请日：2012-02-16
申请人： Toshiaki Horie , Shinsuke Nakazono , Soichiro Hiraoka , Yuta Yamamoto , Kazuki Komaki
发明人： Toshiaki Horie , Shinsuke Nakazono , Soichiro Hiraoka , Yuta Yamamoto , Kazuki Komaki
IPC分类号： G02B7/182 , H01L41/08
CPC分类号： G02B7/1821 , B81B3/0043 , B81B3/007 , B81B2203/0109 , B81B2203/0163 , G02B26/0858 , G02B26/101 , G02B26/105 , H01L41/081 , H01L41/0953 , H02N2/10 , H02N2/108
摘要： A vibrating element having a meandering shape includes a vibrating beam and a piezoelectric actuator provided on the vibrating beam. The vibrating beam has a meandering-shape substantially formed into the plurality of continuous turned-down shapes. The vibrating beam includes the plurality of turned-down units and the plurality of coupling units coupled to the turned-down units, and the coupling units and the turned-down units are alternately disposed. The piezoelectric actuator includes a lower electrode provided on the vibrating beam, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. A non-existence region where the piezoelectric film does not exist is provided in at least one of a neighborhood of a midpoint of an inner circumference of each of the turned-down units and a neighborhood of a curvature changing point in which a curvature of the inner circumference of each of the turned-down shapes changes.
摘要翻译：具有曲折形状的振动元件包括振动梁和设置在振动梁上的压电致动器。振动梁具有大致形成为多个连续折弯形状的曲折形状。振动梁包括多个折弯单元和耦合到折弯单元的多个联接单元，并且联接单元和下降单元交替地设置。压电致动器包括设置在振动梁上的下电极，设置在下电极上的压电膜和设置在压电膜上的上电极。不存在压电膜的不存在区域设置在每个折射单元的内周的中点附近和曲率变化点的附近中的至少一个中，其中曲率每个倒下的形状的内圆周都会发生变化。

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