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    • 15. 发明授权
    • Heat-sensitive recording medium affording patterns with different colors
    • 热敏记录介质提供不同颜色的图案
    • US4500896A
    • 1985-02-19
    • US573357
    • 1984-01-24
    • Keishi KuboHideo WatanabeNobuhiro TakigawaMinoru HagiriKanjiro Kawasaki
    • Keishi KuboHideo WatanabeNobuhiro TakigawaMinoru HagiriKanjiro Kawasaki
    • B41M5/00B41M5/34B41M5/382B41M5/22
    • B41M5/38235B41M5/345Y10S428/913Y10S428/914
    • A heat-sensitive recording medium including:(a) a transferring sheet which includesa first substrate,a lower layer provided over the first substrate and comprised of a discoloring agent and a solid ink having a first color, andan upper layer provided above the lower layer and containing a leuco-compound capable of coloring in a second color which is different from the first color by reaction with a developer at such a first temperature that at least one of said leuco-compound and said developer can melt but that neither the discoloring agent nor the solid ink can melt, the leuco-compound being incapable of coloring upon contact with the developer in the presence of the discoloring agent at such a second temperature that both of the discoloring agent and the solid ink can melt; and(b) a receiving sheet which includesa second substrate, anda developing layer provided over the second substrate and containing the developer. When the recording medium is subjected to thermal recording temperatures with the upper layer being maintained in thermal contact with the developing layer, there are formed a first image developed by the contact between the leuco-compound and the developer at the first temperature and a second, fused image of the solid ink at the second temperature, the first and second images being received by the receiving sheet.
    • 一种热敏记录介质,包括:(a)转印片,其包括第一基底,设置在所述第一基底上的下层,包含变色剂和具有第一颜色的固体墨,以及设置在所述第一基底上方的上层 并且含有能够在第一个温度下与显色剂反应而与第一颜色不同的第二颜色的无色复合物,使得所述无色化合物和所述显影剂中的至少一种可以熔化,但是, 变色剂和固体油墨可以熔融,所述无色复合物在变色剂存在下与显色剂接触时不能在使变色剂和固体油墨两者融化的第二温度下着色; 和(b)包括第二衬底的接收片和设置在第二衬底上并含有显影剂的显影层。 当记录介质经受保持与显影层热接触的上层的热记录温度时,形成在第一温度下由无色化合物和显影剂之间的接触显影的第一图像, 在第二温度下固体油墨的融合图像,第一和第二图像由接收纸张接收。
    • 17. 发明授权
    • Measurement probe and using method for the same
    • 测量探头和使用方法相同
    • US07065893B2
    • 2006-06-27
    • US11014947
    • 2004-12-20
    • Takaaki KassaiKeishi KuboMasateru DoiHiroyuki MochizukiKeiichi Yoshizumi
    • Takaaki KassaiKeishi KuboMasateru DoiHiroyuki MochizukiKeiichi Yoshizumi
    • G01B5/00
    • G01B3/008G01B5/012G01B7/002
    • A measuring probe for obtaining positional information on a measuring target face has: a movable member having a contact portion which is formed in its top and comes into contact with the measuring target face and a reflecting plane formed on its base end for reflecting a measuring light beam; a magnetic substance mounted on the movable member; a fixed member disposed in a fixed state; a bearing provided on the fixed member for supporting the movable member movably in axis line direction; and a magnetic force generating portion provided on the fixed member for generating force acting upon the magnetic substance to move the movable member in the axis line direction. The movable member is formed from a nonmagnetic material, and the bearing and the fixed member are formed from a magnetic material.
    • 用于获得测量目标面上的位置信息的测量探针具有:具有形成在其顶部并与测量对象面接触的接触部分的可动部件和形成在其基端的用于反射测量光的反射面 光束; 安装在可动件上的磁性物质; 以固定状态设置的固定部件; 设置在所述固定构件上用于沿轴线方向可移动地支撑所述可动构件的轴承; 以及磁力产生部,其设置在所述固定部件上,用于产生作用在所述磁性物质上的力,以使所述可动部件沿所述轴线方向移动。 可动构件由非磁性材料形成,并且轴承和固定构件由磁性材料形成。
    • 18. 发明授权
    • Apparatus and method for measuring flatness of thin plate
    • 测量薄板平整度的装置和方法
    • US06710883B2
    • 2004-03-23
    • US10140883
    • 2002-05-09
    • Keiichi YoshizumiKeishi KuboHiroyuki TakeuchiKouji Handa
    • Keiichi YoshizumiKeishi KuboHiroyuki TakeuchiKouji Handa
    • G01B902
    • G01B11/2441G01B11/306
    • The invention measures a thickness variation at a high accuracy around a wide range of a thin plate by a comparatively large spot diameter between 0.5 mm and 2 mm. A polarization beam splitter separating a laser beam emitted from a laser generator and transmitting through an isolator into a measurement light and a reference light is provided. A quarter wavelength plate is provided between the polarization beam splitter and a measurement surface, and between the polarization beam splitter and a reference surface. A focusing and reflecting means for focusing and reflecting the measurement light reflected by the measurement surface and reflected by the polarization beam splitter, and the reference light reflecting by the reference surface and transmitting through the polarization beam splitter is provided. A half mirror reflecting the measurement light and the reference light which return from the polarization beam splitter is provided. A light receiving portion receiving the measurement light and the reference light which are reflected by the half mirror so as to interfere, converting an interference light intensity change into an electric signal, and counting the electric signal so as to measure a flatness of the measurement surface is provided.
    • 本发明通过0.5mm至2mm之间的较大的光点直径来测量薄板宽范围内的高精度的厚度变化。 提供了将从激光发生器发射的激光束分离并通过隔离器传输到测量光和参考光的偏振分束器。 四分之一波长板设置在偏振分束器和测量表面之间以及偏振分束器与参考表面之间。 提供了用于聚焦和反射由测量表面反射并由偏振分束器反射的测量光以及由参考表面反射并通过偏振分束器透射的参考光的聚焦和反射装置。 提供了反射从偏振分束器返回的测量光和参考光的半反射镜。 接收由半反射镜反射的测量光和参考光的光接收部分,其干涉,将干涉光强度变化转换成电信号,并对电信号进行计数,以便测量测量表面的平坦度 被提供。
    • 20. 发明授权
    • Alignment apparatus for use in exposure system for optically
transferring pattern onto object
    • 用于将图案光学转印到物体上的曝光系统中的对准装置
    • US5329354A
    • 1994-07-12
    • US872216
    • 1992-04-22
    • Masaki YamamotoKeishi KuboTakeo SatohUshio SangawaHiroyuki Takeuchi
    • Masaki YamamotoKeishi KuboTakeo SatohUshio SangawaHiroyuki Takeuchi
    • G03F7/23G03F9/00G01B9/02G01B11/00
    • G03F9/70
    • An alignment apparatus for use in an exposure system for exposing fine patterns on a wafer, the alignment apparatus comprising a light source optical system for emitting coherent alignment light, a positional deviation detecting optical system for receiving the alignment light reflected from the wafer, and a light-receiving optical system for detecting a positional deviation of the wafer on the basis of the alignment light received by the positional deviation detecting optical system. These three optical systems are arranged to be coupled through flexible optical fibers to each other. This coupling arrangement using the flexible optical fiber can reduce the size of the positional deviation detecting optical system whereby the positional deviation detecting optical system can be disposed directly under a projection lens of the exposure system, thereby accurately effecting the alignment of the wafer with respect to the projection lens.
    • 一种用于曝光系统中用于在晶片上曝光精细图案的对准装置,该对准装置包括用于发射相干对准光的光源光学系统,用于接收从晶片反射的对准光的位置偏差检测光学系统,以及 光接收光学系统,用于基于由位置偏差检测光学系统接收到的对准光检测晶片的位置偏差。 这三个光学系统被布置成通过柔性光纤彼此耦合。 使用柔性光纤的这种耦合布置可以减小位置偏差检测光学系统的尺寸,由此位置偏移检测光学系统可以直接设置在曝光系统的投影透镜下方,从而精确地实现晶片相对于 投影镜头。