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1. 发明授权

US5329354A Alignment apparatus for use in exposure system for optically transferring pattern onto object 失效
标题翻译：用于将图案光学转印到物体上的曝光系统中的对准装置
公开(公告)号：US5329354A
公开(公告)日：1994-07-12
申请号：US872216
申请日：1992-04-22
申请人： Masaki Yamamoto , Keishi Kubo , Takeo Satoh , Ushio Sangawa , Hiroyuki Takeuchi
发明人： Masaki Yamamoto , Keishi Kubo , Takeo Satoh , Ushio Sangawa , Hiroyuki Takeuchi
IPC分类号： G03F7/23 , G03F9/00 , G01B9/02 , G01B11/00
CPC分类号： G03F9/70
摘要： An alignment apparatus for use in an exposure system for exposing fine patterns on a wafer, the alignment apparatus comprising a light source optical system for emitting coherent alignment light, a positional deviation detecting optical system for receiving the alignment light reflected from the wafer, and a light-receiving optical system for detecting a positional deviation of the wafer on the basis of the alignment light received by the positional deviation detecting optical system. These three optical systems are arranged to be coupled through flexible optical fibers to each other. This coupling arrangement using the flexible optical fiber can reduce the size of the positional deviation detecting optical system whereby the positional deviation detecting optical system can be disposed directly under a projection lens of the exposure system, thereby accurately effecting the alignment of the wafer with respect to the projection lens.
摘要翻译：一种用于曝光系统中用于在晶片上曝光精细图案的对准装置，该对准装置包括用于发射相干对准光的光源光学系统，用于接收从晶片反射的对准光的位置偏差检测光学系统，以及光接收光学系统，用于基于由位置偏差检测光学系统接收到的对准光检测晶片的位置偏差。这三个光学系统被布置成通过柔性光纤彼此耦合。使用柔性光纤的这种耦合布置可以减小位置偏差检测光学系统的尺寸，由此位置偏移检测光学系统可以直接设置在曝光系统的投影透镜下方，从而精确地实现晶片相对于投影镜头。

2. 发明授权

US08237931B2 Optoacoustic convolver 有权
标题翻译：光声卷积器
公开(公告)号：US08237931B2
公开(公告)日：2012-08-07
申请号：US13246082
申请日：2011-09-27
申请人： Ushio Sangawa , Masahiko Hashimoto
发明人： Ushio Sangawa , Masahiko Hashimoto
IPC分类号： G01B9/02 , G01N21/41 , G01N21/43
CPC分类号： G02F1/11
摘要： An optoacoustic convolver includes: a light source; a first acoustic waveguide filled with a light-transmissive first acoustic medium; a second acoustic waveguide filled with a light-transmissive second acoustic medium; an optical system whereby light emitted from the light source is split into a first light beam and a second light beam, the first light beam entering the first acoustic waveguide, and the second light beam entering the second acoustic waveguide, thereby generating interference light between the first light beam having passed through the first acoustic waveguide and the second light beam having passed through the second acoustic waveguide; a light-receiving section for receiving the interference light and outputting an electric signal based on an intensity of the received light; and a correlation determination section for determining whether the received signal is correlated with the reference signal by observing the electric signal output from the light-receiving section.
摘要翻译：光声卷积器包括：光源; 填充有透光性第一声介质的第一声波导; 填充有透光性第二声介质的第二声波导; 光学系统，其中从光源发射的光被分成第一光束和第二光束，第一光束进入第一声波导，第二光束进入第二声波导，从而在第二光波束之间产生干涉光已经穿过第一声波导的第一光束和穿过第二声波导的第二光束; 光接收部分，用于接收干涉光并基于所接收的光的强度输出电信号; 以及相关确定部分，用于通过观察从光接收部分输出的电信号来确定接收信号是否与参考信号相关。

3. 发明授权

US07764861B2 Photonic crystal device 有权
标题翻译：光子晶体装置
公开(公告)号：US07764861B2
公开(公告)日：2010-07-27
申请号：US12501093
申请日：2009-07-10
申请人： Ushio Sangawa , Tomoyasu Fujishima , Hiroshi Kanno , Kazuyuki Sakiyama
发明人： Ushio Sangawa , Tomoyasu Fujishima , Hiroshi Kanno , Kazuyuki Sakiyama
IPC分类号： G02B6/00
CPC分类号： H01P1/2039 , H01P1/2005 , H01P1/2013
摘要： A photonic crystal device according to the present invention includes: a first dielectric substrate 104 having a first lattice structure, of which the dielectric constant changes periodically within a first plane; a second dielectric substrate 105 having a second lattice structure, of which the dielectric constant changes periodically within a second plane; and an adjustment device (pivot 303) for changing a photonic band structure, defined by the first and second lattice structures, by varying relative arrangement of the first and second lattice structures. The first and second dielectric substrates 104 and 105 are stacked one upon the other.
摘要翻译：根据本发明的光子晶体器件包括：具有第一晶格结构的第一电介质衬底104，其介电常数在第一平面内周期性变化; 具有第二晶格结构的第二电介质基底105，其中介电常数在第二平面内周期性变化; 以及用于通过改变第一和第二格子结构的相对布置来改变由第一和第二格子结构限定的光子带结构的调节装置（枢轴303）。第一和第二电介质基板104和105彼此堆叠。

4. 发明授权

US07495523B2 Differential transmission line having curved section with reduced line width 有权
标题翻译：差动传输线具有弯曲部分，线宽减小
公开(公告)号：US07495523B2
公开(公告)日：2009-02-24
申请号：US11601770
申请日：2006-11-20
申请人： Hiroshi Kanno , Kazuyuki Sakiyama , Ushio Sangawa , Tomoyasu Fujishima
发明人： Hiroshi Kanno , Kazuyuki Sakiyama , Ushio Sangawa , Tomoyasu Fujishima
IPC分类号： H01P3/08
CPC分类号： H01P3/081 , H05K1/0245 , H05K1/0253 , H05K2201/09272
摘要： A differential transmission line includes: a substrate; a ground conductor layer; and a first and a second signal conductor disposed in parallel to each other on the substrate. The first signal conductor and the ground conductor layer compose a first transmission line, whereas the second signal conductor and the ground conductor layer compose a second transmission line. The first transmission line and the second transmission line compose a differential transmission line. The differential transmission line includes two straight regions and a curved region, interconnecting the two straight regions.
摘要翻译：差动传输线包括：基板; 接地导体层; 以及在基板上彼此平行设置的第一和第二信号导体。第一信号导体和接地导体层构成第一传输线，而第二信号导体和接地导体层构成第二传输线。第一传输线和第二传输线构成差动传输线。差动传输线包括两个直线区域和连接两个直线区域的弯曲区域。

5. 发明授权

US07414201B2 Transmission line pair 有权
标题翻译：传输线对
公开(公告)号：US07414201B2
公开(公告)日：2008-08-19
申请号：US11589067
申请日：2006-10-30
申请人： Hiroshi Kanno , Kazuyuki Sakiyama , Ushio Sangawa , Tomoyasu Fujishima
发明人： Hiroshi Kanno , Kazuyuki Sakiyama , Ushio Sangawa , Tomoyasu Fujishima
IPC分类号： H01B7/08
CPC分类号： H01P3/088 , H01P3/02
摘要： In a transmission line pair including a first transmission line and a second transmission line which is so placed in adjacency that a coupled line region to be coupled with the first transmission line is formed, in the coupled line region, the first transmission line includes a first signal conductor which is placed on one surface which is either a top face of a substrate formed from a dielectric or semiconductor or an inner-layer surface parallel to the top face and which has a linear shape along its transmission direction, and the second transmission line includes a second signal conductor which is placed on the one surface of the substrate and which partly includes a transmission-direction reversal region for transmitting a signal along a direction having an angle of more than 90 degrees with respect to the transmission direction within the plane of the placement, and which has a line length different from that of the first signal conductor.
摘要翻译：在包括第一传输线和第二传输线的传输线对中，所述第一传输线与第二传输线相邻地形成与第一传输线耦合的耦合线区域，在耦合线区中，第一传输线包括第一传输线信号导体，其放置在由电介质或半导体形成的基板的顶面或与顶面平行的内层表面的一个表面上，并且沿其传输方向具有线性形状，并且第二传输线包括放置在基板的一个表面上的第二信号导体，并且部分地包括传输方向反转区域，该传输方向反转区域沿着相对于传输方向具有大于90度的角度的方向传输信号放置，并且具有与第一信号导体的线长不同的线长度。

6. 发明申请

US20070063783A1 Differential transmission line 有权
公开(公告)号：US20070063783A1
公开(公告)日：2007-03-22
申请号：US11601770
申请日：2006-11-20
申请人： Hiroshi Kanno , Kazuyuki Sakiyama , Ushio Sangawa , Tomoyasu Fujishima
发明人： Hiroshi Kanno , Kazuyuki Sakiyama , Ushio Sangawa , Tomoyasu Fujishima
IPC分类号： H01P3/08
CPC分类号： H01P3/081 , H05K1/0245 , H05K1/0253 , H05K2201/09272
摘要： A differential transmission line according to the present invention includes: a substrate 101; a ground conductor layer 105 formed on a rear side of the substrate 101; and a first signal conductor 102a and a second signal conductor 102b disposed in parallel to each other on a front side of the substrate 101. The first signal conductor 102a and the ground conductor layer 105 compose a first transmission line, whereas the second signal conductor 102b and the ground conductor layer 105 compose a second transmission line. The first transmission line and the second transmission line compose a differential transmission line 102c. The differential transmission line 102c includes a curved region 104a, with a straight region 104b being connected to each end of the curved region 104a. The line width of the first signal conductor 102a in the curved region 104a is denoted as Wb1; the line width of the second signal conductor 102b in the curved region 104a is denoted as Wb2; the gap width between the first signal conductor 102a and the second signal conductor 102b in the curved region 104a is denoted as Gb; the line width of the first signal conductor 102a in the straight region 104b is denoted as Ws1; the line width of the second signal conductor 102b in the straight region 104b is denoted as Ws2; the gap width between the first signal conductor 102a and the second signal conductor 102b in the straight region 104b is denoted as Gs; the shortest distance from the center of curvature 115 of the curved region to a line edge of the curved region of the first signal conductor 102a that is closer to the center of curvature is denoted as Rb1; and the perpendicular distance from the center of curvature 115 of the curved region to an extension of a line edge of the straight region of the first signal conductor 102a that is closer to the center of curvature is denoted as Rs1. Wb1 is prescribed to be narrower than Ws1; Wb2 is prescribed to be narrower than Ws2; Gb is prescribed to be narrower than Gs; and Rb1 is prescribed to be greater than Rs1.

7. 发明申请

US20060045460A1 Photonic crystal device 有权
标题翻译：光子晶体装置
公开(公告)号：US20060045460A1
公开(公告)日：2006-03-02
申请号：US11250390
申请日：2005-10-17
申请人： Ushio Sangawa , Tomoyasu Fujishima , Hiroshi Kanno , Kazuyuki Sakiyama
发明人： Ushio Sangawa , Tomoyasu Fujishima , Hiroshi Kanno , Kazuyuki Sakiyama
IPC分类号： G02B6/00
CPC分类号： H01P1/2039 , H01P1/2005 , H01P1/2013
摘要： A photonic crystal device according to the present invention includes: a first dielectric substrate 104 having a first lattice structure, of which the dielectric constant changes periodically within a first plane; a second dielectric substrate 105 having a second lattice structure, of which the dielectric constant changes periodically within a second plane; and an adjustment device (pivot 303) for changing a photonic band structure, defined by the first and second lattice structures, by varying relative arrangement of the first and second lattice structures. The first and second dielectric substrates 104 and 105 are stacked one upon the other.
摘要翻译：根据本发明的光子晶体器件包括：具有第一晶格结构的第一电介质衬底104，其介电常数在第一平面内周期性变化; 具有第二晶格结构的第二电介质基底105，其中介电常数在第二平面内周期性变化; 以及用于通过改变第一和第二格子结构的相对布置来改变由第一和第二格子结构限定的光子带结构的调节装置（枢轴303）。第一和第二电介质基板104和105彼此堆叠。

8. 发明申请

US20050264452A1 Antenna and method of making the same 有权
标题翻译：天线及其制作方法
公开(公告)号：US20050264452A1
公开(公告)日：2005-12-01
申请号：US11173049
申请日：2005-07-01
申请人： Tomoyasu Fujishima , Kazuyuki Sakiyama , Ushio Sangawa , Hiroshi Kanno
发明人： Tomoyasu Fujishima , Kazuyuki Sakiyama , Ushio Sangawa , Hiroshi Kanno
IPC分类号： H01Q1/24 , H01Q1/38 , H01Q1/48 , H01Q3/01 , H01Q3/20 , H01Q9/04 , H01Q9/30 , H01Q13/08
CPC分类号： H01Q1/38 , H01Q1/243 , H01Q1/48 , H01Q3/01 , H01Q9/0407
摘要： An antenna according to the present invention includes a dielectric layer 102 with an upper surface and a lower surface, a signal line strip 101 provided on the upper surface of the dielectric layer 102, and a grounding conductor portion 104 provided on the lower surface of the dielectric layer 102. The surface of the grounding conductor portion 104 includes a plurality of planar areas, each of which has a size that is shorter than the wavelength of an electromagnetic wave to transmit or receive. A distance from a virtual reference plane to each planar area is adjusted on an area-by-area basis. Thus, an antenna, which can change various antenna parameters such as radiation directivity, gain and efficiency dynamically and adaptively according to incessantly changing propagation environment of radio wave, is provided.
摘要翻译：根据本发明的天线包括具有上表面和下表面的电介质层102，设置在电介质层102的上表面上的信号线条101和设置在电介质层102的下表面上的接地导体部分104 介电层102.接地导体部分104的表面包括多个平面区域，每个平面区域的尺寸比要传送或接收的电磁波的波长短。从虚拟参考平面到每个平面区域的距离在逐个区域的基础上进行调整。因此，提供了可以根据不断变化的无线电波的传播环境动态适应地改变各种天线参数（诸如辐射方向性，增益和效率）的天线。

9. 发明授权

US09173039B2 Optical microphone 有权
标题翻译：光学麦克风
公开(公告)号：US09173039B2
公开(公告)日：2015-10-27
申请号：US14062517
申请日：2013-10-24
申请人： Takuya Iwamoto , Masahiko Hashimoto , Ushio Sangawa , Yuriko Kaneko
发明人： Takuya Iwamoto , Masahiko Hashimoto , Ushio Sangawa , Yuriko Kaneko
IPC分类号： H04B10/02 , H04B10/12 , H04R23/00 , H04R1/34
CPC分类号： H04R23/008 , H04R1/34
摘要： An optical microphone for detecting an acoustic wave propagating through an environmental fluid by using a light wave, includes: an acoustic wave receiving section having a propagation medium portion through which an acoustic wave propagate and a first support portion for supporting the propagation medium portion; a light source for outputting a light wave so that the light wave passes through the propagation medium portion across the acoustic wave propagating through the propagation medium portion; a light-blocking portion having an edge line for splitting the light wave having passed through the propagation medium portion into a blocked portion and a non-blocked portion; and a photoelectric conversion section for receiving a portion of the light wave having passed through the propagation medium portion which has not been blocked by the light-blocking portion to output an electric signal.
摘要翻译：一种用于通过使用光波检测通过环境流体传播的声波的光学麦克风，包括：具有传播介质部分的声波接收部分，声波传播通过该传播介质部分和用于支撑传播介质部分的第一支撑部分; 用于输出光波的光源，使得光波穿过传播介质部分传播的声波; 具有用于将通过传播介质部分的光波分解为封闭部分和未阻挡部分的边缘线的遮光部分; 以及光电转换部，其接收未被遮光部阻挡的传播介质部的光波的一部分，以输出电信号。

10. 发明授权

US07639099B2 Dual-frequency matching circuit 有权
标题翻译：双频匹配电路
公开(公告)号：US07639099B2
公开(公告)日：2009-12-29
申请号：US12352194
申请日：2009-01-12
申请人： Ushio Sangawa
发明人： Ushio Sangawa
IPC分类号： H03H7/38
CPC分类号： H04B1/0458 , H03H7/38
摘要： The connection topology of input terminals 2, elements 4a, 4b, 4c and 4d and load 5 is designed similarly to a so-called “seven-segment display”, which is often used to display numerals on an electronic calculator or a digital watch. More specifically, suppose in the three horizontally running segments, the top and bottom segments are associated with the input terminals 2 and the load 5 is allocated to one of the four vertically running segments. Then, the three other vertical segments and the other horizontal segment are associated with the elements 4a, 4b, 4c and 4d, which are an inductor with an inductance of 5.119 nH, a capacitor with a capacitance of 1.370 pF, an inductor with an inductance of 8.360 nH and a capacitor with a capacitance of 5.942 pF, respectively. By adopting this circuit configuration, the total number of elements can be reduced to four and the lossc can be reduced significantly. In addition, since the resonant circuits can be eliminated and the size of the ladder circuit can be reduced, impedance matching is achieved with a high degree of stability.
摘要翻译：输入端子2，元件4a，4b，4c和4d以及负载5的连接结构与所谓的“七段显示器”类似地被设计，所谓的“七段式显示器”通常用于在电子计算器或数字手表上显示数字。更具体地说，假设在三个水平运行的段中，顶部和底部段与输入端子2相关联，并且负载5被分配给四个垂直运行段中的一个。然后，三个其他垂直段和另一个水平段与元件4a，4b，4c和4d相关联，元件4a，4b，4c和4d是电感为5.119 nH的电感器，电容为1.370 pF的电容器，具有电感的电感器为8.360 nH，电容为5.942 pF。通过采用该电路结构，可以将元件的总数减少到4个，并且可以显着降低损耗。此外，由于可以消除谐振电路并且可以减小梯形电路的尺寸，所以能够以高度的稳定性实现阻抗匹配。

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