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    • 11. 发明授权
    • Article positioning apparatus and exposing apparatus having the article positioning apparatus
    • 具有物品定位装置的物品定位装置和曝光装置
    • US06333572B1
    • 2001-12-25
    • US09702887
    • 2000-11-01
    • Kazuya Ono
    • Kazuya Ono
    • B65G4907
    • G03F7/70716G03F9/70
    • There is disclosed an article positioning apparatus for positioning an article composed of an electric conductive material over a predetermined base, the apparatus comprising: levitating means for levitating the article over the base; driving force generating means including current generating means for inducing a current in the article and magnetic field generating means for generating a magnetic field in a direction perpendicular to the current induced by the current generating means, and the driving force generating means being for generating a driving force composed of Lorentz force to the article in the direction perpendicular to the current and the magnetic field; and displacement detecting means for detecting a displacement of the article, wherein the article is positioned through the driving force generating means in accordance with a result detected by the displacement detecting means.
    • 公开了一种用于将由导电材料构成的制品定位在预定基底上的物品定位装置,该装置包括:用于将物品悬浮在基座上的悬浮装置; 驱动力产生装置,包括用于产生物品中的电流的电流产生装置和用于在垂直于由电流产生装置感应的电流的方向上产生磁场的磁场产生装置,并且驱动力产生装置用于产生驱动 力由洛伦兹力组成的物品在垂直于电流和磁场的方向上; 以及位移检测装置,用于检测物品的位移,其中根据由位移检测装置检测到的结果,物品通过驱动力产生装置定位。
    • 13. 发明授权
    • Packaging container
    • 包装容器
    • US5598927A
    • 1997-02-04
    • US442107
    • 1995-05-16
    • Tadakatsu IkenoyaKazuya Ono
    • Tadakatsu IkenoyaKazuya Ono
    • B65D5/40B29D22/00B31B1/74B32B27/08B65B51/00B65D5/42B65D5/56B65D65/40B65D85/72B65D3/22
    • B65D5/563B31B1/00B32B27/08B65D5/4279B31B2201/621
    • A packaging container having an enhanced sealing performance includes a packaging material, an outside strip and a strip tape. The opposite side edges of the packaging material are overlapped with each other so that the outermost layer and the innermost layer of the packaging material face each other. The outside strip is interposed between the outermost layer and the innermost layer and is fused and joined with these layers so that a longitudinal sealing portion is formed. The outside strip has an outside layer and an inside layer. The strip tape is placed on the inner surface of the packaging container along the sealing portion, and is joined thereto by heat fusion. The innermost layer of the packaging material and the outside layer of the outside strip are made of a non-olefin flavor-retaining resin, and the outermost layer of the packaging material and the inside layer of the outside strip are made of a polyolefin resin. Since portions to be joined at the longitudinal sealing portion are both polyolefin, an enhanced sealing performance can be obtained.
    • 具有增强的密封性能的包装容器包括包装材料,外部条带和剥离带。 包装材料的相对侧边缘彼此重叠,使得包装材料的最外层和最内层彼此面对。 外侧带介于最外层和最内层之间,并与这些层熔合并接合,从而形成纵向密封部。 外部带有外层和内层。 带状带沿密封部分放置在包装容器的内表面上,并通过热熔接合在一起。 包装材料的最内层和外带的外层由非烯烃香味保持树脂制成,包装材料的最外层和外带的内层由聚烯烃树脂制成。 由于在纵向密封部分处连接的部分都是聚烯烃,因此可以获得增强的密封性能。
    • 15. 发明授权
    • Transport apparatus and exposure apparatus
    • 运输设备和曝光装置
    • US09312159B2
    • 2016-04-12
    • US12795939
    • 2010-06-08
    • Kazuya Ono
    • Kazuya Ono
    • H01L21/677G03B27/52H01L21/67G03F7/20
    • H01L21/67748G03B27/52G03F7/7075H01L21/67126
    • A substrate is transported between a first space and a second space, which are separated by a partition wall, through an opening portion formed in the partition wall. A transport apparatus includes a support device having a support portion which supports the substrate, the support device being provided so as to block the opening portion while a clearance between the partition wall and the support device is formed, the support device moving the support portion from a state where the support portion faces the first space to a state where the support portion faces the second space; and an adjustment device which adjusts an amount of the clearance, thereby suppressing the movement of fluid from the first space to the second space.
    • 基板通过形成在分隔壁上的开口部分在第一空间和第二空间之间传输,第一空间和第二空间被分隔壁隔开。 一种输送装置,具备支撑装置,该支撑装置具有支撑基板的支撑部,支撑装置设置成在形成分隔壁与支撑装置之间的间隙的同时阻挡开口部,支撑装置将支撑部从 支撑部分面向第一空间到支撑部分面向第二空间的状态; 以及调节装置,其调节间隙的量,从而抑制流体从第一空间到第二空间的移动。
    • 18. 发明授权
    • Vibration eliminator, exposure apparatus and projection exposure method
    • 消声器,曝光装置和投影曝光方法
    • US06522388B1
    • 2003-02-18
    • US09572620
    • 2000-05-17
    • Masato TakahashiKazuya Ono
    • Masato TakahashiKazuya Ono
    • G03B2742
    • F16F15/02G03F7/709G05D19/02
    • The columns of an aligner are placed on a surface plate. Actuators are provided between the surface plate and leg parts of the column. Acceleration sensors are attached to the surface plate and the leg parts of the column near the leg parts of the column respectively. Relative vibrations in +/−z directions which are generated between the surface plate and the column are detected by the acceleration sensors and, in accordance with the detection results, driving forces generated by the actuators in +/−z directions are controlled. Further, vibration eliminators are attached to the important points of the surface plate, the column or a lower base and vibrations generated locally in the surface plate, the column or the lower base are reduced by the vibration eliminators.
    • 将对准器的柱放置在平板上。 致动器设置在柱的表面板和腿部之间。 加速度传感器分别连接到柱的腿部部分的表面板和柱部分。 通过加速度传感器检测在表面板和柱之间产生的+/- z方向上的相对振动,并且根据检测结果,控制由致动器在+/- z方向上产生的驱动力。 此外,除振器附着在表面板,柱或下基板的重要点上,并且由表面板,柱或下基板局部产生的振动由振动消除器减少。
    • 19. 发明授权
    • Transport apparatus
    • 运输设备
    • US6160338A
    • 2000-12-12
    • US515868
    • 2000-02-29
    • Kazuya Ono
    • Kazuya Ono
    • G03F7/20H01L21/027H01L21/677H01L21/68H01L21/683B65G49/07H01L21/00
    • G03F7/707G03F7/70708H01L21/67784Y10S414/135Y10S414/136
    • A transport apparatus for holding and transporting a conductive, planar object without contact is provided. The transport apparatus includes pairs of floating-use electrodes to which a certain potential difference is applied to produce electrostatic attraction force for attracting and floating the object in a non-contact state, pairs of driving-use electrodes to which suitable potential differences are applied to cause currents to flow in portions of the object that face these electrodes, and magnetic devices for generating magnetic fields that interact with the currents to produce drive forces or Lorentz forces acting on the object. The transport apparatus further includes displacement sensors for measuring the position of the object in a two-dimensional plane parallel to the carrying surface of the apparatus, and a control device that controls the potential differences applied to the driving-use electrode pairs and the intensity of the magnetic fields, based on measurement results of the displacement meters.
    • 提供了用于保持和传送导电的平面物体而不接触的输送装置。 输送装置包括一对浮动用电极,施加一定的电位差以产生用于在非接触状态下吸引和浮动物体的静电吸引力,将适用的电位差施加到一对驱动用电极 导致电流流过面对这些电极的物体的部分,以及用于产生与电流相互作用的磁场的磁性装置,以产生作用在物体上的驱动力或洛伦兹力。 输送装置还包括位移传感器,用于测量物体在平行于装置的承载表面的二维平面中的位置,以及控制装置,其控制施加于驱动用电极对的电位差和强度 磁场,基于位移仪的测量结果。
    • 20. 发明授权
    • Packaging container
    • 包装容器
    • US5732825A
    • 1998-03-31
    • US696621
    • 1996-08-14
    • Tadakatsu IkenoyaKazuya Ono
    • Tadakatsu IkenoyaKazuya Ono
    • B65D5/40B29D22/00B31B1/74B32B27/08B65B51/00B65D5/42B65D5/56B65D65/40B65D85/72B65D3/22
    • B65D5/563B31B1/00B32B27/08B65D5/4279B31B2201/621
    • A packaging container having an enhanced sealing performance includes a packaging material, an outside strip and a strip tape. The opposite side edges of the packaging material are overlapped with each other so that the outermost layer and the innermost layer of the packaging material face each other. The outside strip is interposed between the outermost layer and the innermost layer and is fused and joined with these layers so that a longitudinal sealing portion is formed. The outside strip has an outside layer and an inside layer. The strip tape is placed on the inner surface of the packaging container along the sealing portion, and is joined thereto by heat fusion. The innermost layer of the packaging material and the outside layer of the outside strip are made of a non-olefin flavor-retaining resin, and the outermost layer of the packaging material and the inside layer of the outside strip are made of a polyolefin resin. Since portions to be joined at the longitudinal sealing portion are both polyolefin, an enhanced sealing performance can be obtained.
    • 具有增强的密封性能的包装容器包括包装材料,外部条带和剥离带。 包装材料的相对侧边缘彼此重叠,使得包装材料的最外层和最内层彼此面对。 外侧带介于最外层和最内层之间,并与这些层熔合并接合,从而形成纵向密封部。 外部带有外层和内层。 带状带沿密封部分放置在包装容器的内表面上,并通过热熔接合在一起。 包装材料的最内层和外带的外层由非烯烃香味保持树脂制成,包装材料的最外层和外带的内层由聚烯烃树脂制成。 由于在纵向密封部分处连接的部分都是聚烯烃,因此可以获得增强的密封性能。