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1. 发明授权

US06590355B1 Linear motor device, stage device, and exposure apparatus 有权
标题翻译：直线电机装置，平台装置和曝光装置
公开(公告)号：US06590355B1
公开(公告)日：2003-07-08
申请号：US09588713
申请日：2000-06-07
申请人： Toshihide Kikuchi , Masahiro Totsu , Kazuya Ono , Yutaka Uda
发明人： Toshihide Kikuchi , Masahiro Totsu , Kazuya Ono , Yutaka Uda
IPC分类号： H02K4102
CPC分类号： G03F7/70716 , G03F7/70758 , H02K41/03
摘要： Disclosed is a linear motor device provided with a movable member, a stator having coils, and a control system for powering selected coils among the coils in accordance with a position of the movable member. The control system powers only the minimum number of coils contributing to the generation of thrust in relation with the current position of the movable member.
摘要翻译：公开了一种线性电动机装置，其具有可动部件，具有线圈的定子，以及用于根据可动部件的位置为线圈间选择的线圈供电的控制系统。控制系统仅对有助于产生推力的最小数量的线圈相对于可动构件的当前位置起作用。

2. 发明申请

US20080252151A1 TWO DEGREE OF FREEDOM MOVERS WITH OVERLAPPING COILS 审中-公开
标题翻译：具有超重线圈的自由度的两个自由度
公开(公告)号：US20080252151A1
公开(公告)日：2008-10-16
申请号：US12061428
申请日：2008-04-02
申请人： Michael B. Binnard , Masahiro Totsu
发明人： Michael B. Binnard , Masahiro Totsu
IPC分类号： H02K41/00
CPC分类号： H02K41/03 , G03F7/70758 , H02K2201/18
摘要： A mover (344) that moves a stage (238) along a first axis and along a second axis includes a magnetic component (354), a conductor component (356), and a control system (324). The magnetic component (354) includes one or more magnets (354D) that are surrounded by a magnetic field. The conductor component (356) is positioned near the magnetic component (354). Further, the conductor component (356) interacts with the magnetic component (354) when current is directed to the conductor component (356). The control system (224) directs current to the conductor component (356) to generate a controllable force along the first axis and a controllable force along the second axis. With this design, the same mover (344) can be used to move the stage (238) along two degrees of freedom (“DOF”). Further, the conductor component (356) including a first phase coil (364A) and a second phase coil (364B) that partly overlaps the first phase coil (364A). With this design, the size and efficiency of the mover (334) is significantly improved. As a result thereof, the overall footprint of the mover (344) can be reduced and the heat generated by the mover (344) is minimized.
摘要翻译：沿着第一轴线和第二轴线移动台架（238）的移动器（344）包括磁性部件（354），导体部件（356）和控制系统（324）。磁性部件（354）包括由磁场包围的一个或多个磁体（354D）。导体部件（356）位于磁性部件（354）附近。此外，当电流被引导到导体部件（356）时，导体部件（356）与磁性部件（354）相互作用。控制系统（224）将电流引导到导体部件（356）以沿着第一轴线产生可控制的力并且沿着第二轴线产生可控制的力。通过这种设计，可以使用相同的移动器（344）沿两个自由度（“DOF”）移动平台（238）。此外，导体部件（356）包括与第一相线圈（364A）部分重叠的第一相线圈（364A）和第二相线圈（364B）。通过这种设计，移动器（334）的尺寸和效率得到显着提高。作为其结果，可以减小动子（344）的总体占地面积，并且由动子（344）产生的热量最小化。

3. 发明申请

US20080073563A1 Exposure apparatus that includes a phase change circulation system for movers 审中-公开
标题翻译：包括移动器的相变循环系统的曝光装置
公开(公告)号：US20080073563A1
公开(公告)日：2008-03-27
申请号：US11479628
申请日：2006-07-01
申请人： W. Thomas Novak , Michael Binnard , Alex Ka Tim Poon , Masahiro Totsu , Leonard Wai Fung Kho , Gaurav Keswani
发明人： W. Thomas Novak , Michael Binnard , Alex Ka Tim Poon , Masahiro Totsu , Leonard Wai Fung Kho , Gaurav Keswani
IPC分类号： G01F23/00
CPC分类号： G03F7/70875 , G03F7/70758 , H01L21/67248 , H01L21/68 , H02K9/20 , H02K41/02
摘要： A mover combination (226) for moving and positioning a device (34) includes a mover (328) that defines a fluid passageway (370) and a circulation system (330) having a passageway inlet (374) and a passageway outlet (376). The circulation system (330) directs a circulation fluid (378) into the fluid passageway (370). The circulation system (330) can include a liquid/gas separator (384) that is in fluid communication with the fluid passageway (370). With this design, the plumbing for the liquid (378A) and the gas (378B) can each be optimized. Additionally, the circulation system (330) can include a pressure control device (388) that controls the pressure of the circulation fluid (378) in at least a portion of the fluid passageway (370). With this design, the pressure control device (388) controls the pressure of the circulation fluid (378) near the fluid passageway (370) so that the temperature of the circulation fluid (378) at the passageway outlet (376) is approximately equal to the temperature of the circulation fluid (378) at the passageway inlet (374). Moreover, the circulation system (930) can include a pump assembly (980) that directs the circulation fluid (978) into the passageway inlet (974), and a pressure control device (996) that precisely controls a state of the circulation fluid (978) near the passageway inlet (974). With this design, the phase of the circulation fluid (978) at the passageway inlet (974) can be precisely controlled without restricting the flow of the circulation fluid (978).
摘要翻译：用于移动和定位装置（34）的移动器组合（226）包括限定流体通道（370）的移动器（328）和具有通道入口（374）和通道出口（376）的循环系统（330）。循环系统（330）将循环流体（378）引导到流体通道（370）中。循环系统（330）可以包括与流体通道（370）流体连通的液体/气体分离器（384）。通过这种设计，可以优化液体（378A）和气体（378B）的管道。另外，循环系统（330）可以包括控制流体通道（370）的至少一部分中的循环流体（378）的压力的压力控制装置（388）。通过该设计，压力控制装置（388）控制流体通道（370）附近的循环流体（378）的压力，使得通道出口（376）处的循环流体（378）的温度近似等于通道入口处的循环流体（378）的温度（374）。此外，循环系统（930）可以包括引导循环流体（978）进入通道入口（974）的泵组件（980）和精确地控制循环流体的状态的压力控制装置（996） 978）在通道入口附近（974）。通过这种设计，可以精确地控制在通道入口（974）处的循环流体（978）的相位，而不限制循环流体（978）的流动。

4. 发明申请

US20120062866A1 MICROCHANNEL-COOLED COILS OF ELECTROMAGNETIC ACTUATORS EXHIBITING REDUCED EDDY-CURRENT DRAG 审中-公开
标题翻译：电磁致动器的微通道冷却线圈展示减少的EDDY-CURRENT DRAG
公开(公告)号：US20120062866A1
公开(公告)日：2012-03-15
申请号：US13225235
申请日：2011-09-02
申请人： Michael B. Binnard , Scott Coakley , Alex Ka Tim Poon , Masahiro Totsu , Derek Coon , Leonard Wai Fung Kho , Gaurav Keswani , Alexander Cooper , Michel Pharand , Matt Bjork
发明人： Michael B. Binnard , Scott Coakley , Alex Ka Tim Poon , Masahiro Totsu , Derek Coon , Leonard Wai Fung Kho , Gaurav Keswani , Alexander Cooper , Michel Pharand , Matt Bjork
IPC分类号： G03B27/58 , H02K41/02
CPC分类号： H02K9/22 , G03F7/70758 , G03F7/70875 , H02K9/19 , H02K41/031 , H02K2201/18
摘要： Electromagnetic actuators are disclosed having at least one actively cooled coil assembly. Exemplary actuators are linear and planar motors of which the cooled coil assembly has a coil having first and second main surfaces. A respective thermally conductive cooling plate is in thermal contact with at least one main surface of the coil. Defined in or on each cooling plate is a coolant passageway that conducts a liquid coolant. A primary pattern of the coolant passageway is coextensive with at least part of the main surface of the coil. The primary pattern can have a secondary pattern through which coolant flows in a manner reducing eddy-current losses. An exemplary secondary pattern is serpentine. An exemplary primary pattern is radial or has a radial aspect, such as an X-shaped pattern. The devices exhibit reduced eddy-current drag.
摘要翻译：公开了具有至少一个主动冷却的线圈组件的电磁致动器。示例性致动器是线性和平面电动机，其中冷却的线圈组件具有具有第一和第二主表面的线圈。相应的导热冷却板与线圈的至少一个主表面热接触。在每个冷却板中或每个冷却板上定义的是冷却剂通道，其导通液体冷却剂。冷却剂通道的主要图案与线圈的主表面的至少一部分共同延伸。初级图案可以具有二次图案，冷却剂通过该图案以减少涡流损耗的方式流动。示例性的次要图案是蛇纹石。示例性的主要图案是径向的或具有径向方面，例如X形图案。该装置表现出减小的涡流阻力。

5. 发明申请

US20100167556A1 THREE DEGREE OF MOVEMENT MOVER AND METHOD FOR CONTROLLING A THREE DEGREE OF MOVEMENT MOVER 审中-公开
标题翻译：运动运动的三个程度和控制三个运动程度的方法
公开(公告)号：US20100167556A1
公开(公告)日：2010-07-01
申请号：US12596569
申请日：2008-04-16
申请人： Masahiro Totsu , Michael B. Binnard , Scott Coakley
发明人： Masahiro Totsu , Michael B. Binnard , Scott Coakley
IPC分类号： H01L21/26 , G03B27/58 , H02K41/02 , H02P7/285 , H05K13/00
CPC分类号： H02K41/03 , G03F7/70758 , H02K2201/18 , H02P25/06 , Y10T29/49002
摘要： A mover (344) moving a stage (238) along a first axis and about a second axis includes a magnetic component (454), and a conductor component (456). The magnetic component (454) includes one or more magnets (454D) that are surrounded by a magnetic field. The conductor component (456) is positioned near the magnetic component (454) in the magnetic field. Further, the conductor component (456) interacts with the magnetic component (454) when current is directed to the conductor component (456) to generate a controlled force along the first axis, and a controlled moment about the second axis. Additionally, the conductor component (456) interacts with the magnetic component (454) to generate a controlled force along a third axis that is perpendicular to the first axis and the second axis when current is directed to the conductor component (456).
摘要翻译：沿着第一轴线和第二轴线移动台架（238）的移动器（344）包括磁性部件（454）和导体部件（456）。磁性部件（454）包括由磁场包围的一个或多个磁体（454D）。导体部件（456）位于磁场附近的磁性部件（454）附近。此外，当电流指向导体部件（456）时，导体部件（456）与磁性部件（454）相互作用，以产生沿着第一轴线的受控力，以及围绕第二轴线的受控力矩。另外，当电流被引导到导体部件（456）时，导体部件（456）与磁性部件（454）相互作用，以沿垂直于第一轴线和第二轴线的第三轴线产生受控的力。

6. 发明申请

US20050057102A1 Holding member, coolant, cooling method and cooling device, linear motor device, stage device, and exposure apparatus 审中-公开
标题翻译：保持构件，冷却剂，冷却方法和冷却装置，线性电动机装置，平台装置和曝光装置
公开(公告)号：US20050057102A1
公开(公告)日：2005-03-17
申请号：US10659401
申请日：2003-09-11
申请人： Masahiro Totsu , Andrew Hazelton , Ed Reynolds , Michael Binnard , Yoichi Arai
发明人： Masahiro Totsu , Andrew Hazelton , Ed Reynolds , Michael Binnard , Yoichi Arai
IPC分类号： B23Q11/14 , G03F7/20 , H01L21/027 , H02K9/19 , H02K9/20 , H02K41/02 , H02K41/00 , H02K9/00
CPC分类号： G03F7/70758 , G03F7/70858 , H02K9/19 , H02K9/20 , H02K41/031
摘要： A coolant cools an object (such as, for example, a coil of a linear motor that drives a stage of an exposure apparatus) while suppressing the generation of a temperature distribution in various parts of the object being cooled by using a coolant that includes a first component and a second component dispersed in the first component, the second component increases in temperature by a lesser amount than the first component when a predetermined amount of heat is absorbed by the first and second components, respectively. The second component may be a substance that changes phase (for example, from a solid to a liquid or from a liquid to a gas) in order to absorb the predetermined amount of heat. The second component may have a higher heat capacity than the first component, and may not change phase when it absorbs heat to cool the object.
摘要翻译：冷却剂冷却物体（例如，驱动曝光装置的阶段的线性电动机的线圈），同时通过使用包括冷却剂的冷却剂来抑制被冷却物体的各个部分中的温度分布的产生第一组分和第二组分分散在第一组分中，当预定量的热分别被第一组分和第二组分吸收时，第二组分的温度比第一组分的量少。第二组分可以是改变相（例如，从固体到液体或从液体到气体）的物质，以便吸收预定量的热量。第二组分可能具有比第一组分更高的热容量，并且当其吸收热量以冷却物体时可能不改变相。

7. 发明申请

US20100271159A1 Electromagnetic Coil Design for Improved Thermal Performance 审中-公开
标题翻译：用于提高热性能的电磁线圈设计
公开(公告)号：US20100271159A1
公开(公告)日：2010-10-28
申请号：US12718600
申请日：2010-03-05
申请人： Alex Ka Tim Poon , Masahiro Totsu , Leonard Wai Fung Kho , Derek Coon , Gaurav Keswani
发明人： Alex Ka Tim Poon , Masahiro Totsu , Leonard Wai Fung Kho , Derek Coon , Gaurav Keswani
IPC分类号： H01F5/00
CPC分类号： H01F7/08 , G03F7/70858 , G03F7/709 , H01F5/00 , H01F27/2876
摘要： Methods and apparatus for improving the thermal performance of electromagnetic coils are disclosed. According to one aspect of the present invention, an electromagnetic actuator includes a core and a coil. The coil is formed form a conductor wire that includes a plurality of windings. The windings are arranged around the core, and include at least a first set of windings and a second set of windings. The first set of windings has a different geometry from the second set of windings.
摘要翻译：公开了用于改善电磁线圈的热性能的方法和装置。根据本发明的一个方面，电磁致动器包括芯和线圈。线圈形成为包括多个绕组的导线。绕组围绕芯布置，并且包括至少第一组绕组和第二组绕组。第一组绕组具有与第二组绕组不同的几何形状。

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