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1. 发明授权

US06590355B1 Linear motor device, stage device, and exposure apparatus 有权
标题翻译：直线电机装置，平台装置和曝光装置
公开(公告)号：US06590355B1
公开(公告)日：2003-07-08
申请号：US09588713
申请日：2000-06-07
申请人： Toshihide Kikuchi , Masahiro Totsu , Kazuya Ono , Yutaka Uda
发明人： Toshihide Kikuchi , Masahiro Totsu , Kazuya Ono , Yutaka Uda
IPC分类号： H02K4102
CPC分类号： G03F7/70716 , G03F7/70758 , H02K41/03
摘要： Disclosed is a linear motor device provided with a movable member, a stator having coils, and a control system for powering selected coils among the coils in accordance with a position of the movable member. The control system powers only the minimum number of coils contributing to the generation of thrust in relation with the current position of the movable member.
摘要翻译：公开了一种线性电动机装置，其具有可动部件，具有线圈的定子，以及用于根据可动部件的位置为线圈间选择的线圈供电的控制系统。控制系统仅对有助于产生推力的最小数量的线圈相对于可动构件的当前位置起作用。

2. 发明授权

US6002320A Electrical coil assembly having a plurality of coils arranged in pairs 失效
标题翻译：具有成对排列的多个线圈的电线圈组件
公开(公告)号：US6002320A
公开(公告)日：1999-12-14
申请号：US891377
申请日：1997-07-11
申请人： Yutaka Uda , Toshihide Kikuchi
发明人： Yutaka Uda , Toshihide Kikuchi
IPC分类号： H01F5/00 , H01F5/02 , H01F7/20 , H01F27/28 , H01F41/06 , H02K3/04 , H02K33/18 , H01F27/30
CPC分类号： H01F27/2823 , H01F41/066 , H01F41/098 , H01F5/00 , H01F5/02 , Y10T29/4902
摘要： The present invention relates to an electrical coil assembly having at least two interconnected electrical coils forming a coil pair with each coil formed with a laminated multiple winding of flat wire.
摘要翻译：本发明涉及一种电线圈组件，其具有至少两个互连的电线圈，其形成线圈对，每个线圈形成有扁平线的叠层多重绕组。

3. 发明授权

US6121867A Electrical coil assembly having a plurality of coils arranged in pairs 有权
标题翻译：具有成对排列的多个线圈的电线圈组件
公开(公告)号：US6121867A
公开(公告)日：2000-09-19
申请号：US418976
申请日：1999-10-14
申请人： Yutaka Uda , Toshihide Kikuchi
发明人： Yutaka Uda , Toshihide Kikuchi
IPC分类号： H01F5/00 , H01F5/02 , H01F7/20 , H01F27/28 , H01F41/06 , H02K3/04 , H02K33/18 , H01F27/30
CPC分类号： H01F27/2823 , H01F41/066 , H01F41/098 , H01F5/00 , H01F5/02 , Y10T29/4902
摘要： An electrical coil assembly and method of manufacturing an electrical coil assembly having at least two interconnected electrical coils forming a coil pair with each coil formed with a multiple winding of wire. The electrical coil assembly preferably has at least one pair of electrical coils with a first coil, a second coil and a third coil aligned in tandem. The first coil is formed from a first wire having an inner end and an outer end with the first wire wound in a clockwise or counterclockwise direction from the inner end to the outer end to form multiple layers of the first wire aligned relative to one another in a single row. The second coil is located between the first coil and the third coil, and is formed from a second wire having an inner end and an outer end with the second wire wound in a direction opposite to the direction of the first wire to form multiple layers of the wire aligned relative to one another in a single row. The third coil is formed from a third wire having an inner end and an outer end with the third wire wound in the same direction of the first wire to form multiple layers of the wire aligned relative to one another in a single row. The inner end of the first coil is connected to the inner end of the second coil and the outer end of the second coil is connected to the outer end of the third coil.
摘要翻译：一种电线圈组件和电线圈组件的制造方法，该电线圈组件具有至少两个互连的电线圈，该电线圈与形成有多个线圈的每个线圈形成线圈对。电线圈组件优选地具有至少一对电线圈，其具有串联对准的第一线圈，第二线圈和第三线圈。第一线圈由具有内端和外端的第一线形成，其中第一线从内端到外端沿顺时针或逆时针方向缠绕，以形成彼此相对的彼此对准的多层第一线单排。第二线圈位于第一线圈和第三线圈之间，并且由具有内端和外端的第二线形成，其中第二线沿与第一线的方向相反的方向缠绕以形成多个层电线在单列中相对于彼此对准。第三线圈由具有内端和外端的第三线形成，其中第三线缠绕在与第一线相同的方向上，以形成多条相对于彼此排列的线。第一线圈的内端连接到第二线圈的内端，第二线圈的外端连接到第三线圈的外端。

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