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11. 发明授权

US08558859B2 Laser printer with multiple laser-beam sources 有权
标题翻译：具有多个激光束源的激光打印机
公开(公告)号：US08558859B2
公开(公告)日：2013-10-15
申请号：US13090971
申请日：2011-04-20
申请人： John H. Jerman , Sergei Govorkov
发明人： John H. Jerman , Sergei Govorkov
IPC分类号： B41J15/14 , B41J27/00
CPC分类号： B41J2/473 , B41J2/455 , B41J3/4075
摘要： A laser printer arranged to print a pixellated image on laser sensitive tape includes a carriage on which are arranged two laser-beam sources delivering separately modulated laser-beams and optics for focusing the beams on the tape. The tape is mounted on a tape drive which drives the tape incrementally in one direction. The carriage is translated over the tape in a direction perpendicular to the tape-drive direction, while the modulated beams are focused. Two rows of the pixellated image are drawn across the tape in this manner. The tape is then incremented and a further two rows are drawn.
摘要翻译：布置成在激光敏感带上打印像素化图像的激光打印机包括一个滑架，两个激光束源配置有两个激光束源，分别调制激光束和光束，用于将光束聚焦在磁带上。磁带安装在磁带驱动器上，以一个方向递增地驱动磁带。滑架在垂直于磁带驱动方向的方向上在磁带上平移，而调制的光束被聚焦。以这种方式将两行像素化图像画在磁带上。然后将磁带递增，并绘制另外两行。

12. 发明申请

US20060171036A1 Optical pulse duration extender 有权
公开(公告)号：US20060171036A1
公开(公告)日：2006-08-03
申请号：US11395737
申请日：2006-03-31
申请人： Sergei Govorkov , Luis Spinelli , William White , Murray Reed
发明人： Sergei Govorkov , Luis Spinelli , William White , Murray Reed
IPC分类号： G02B27/10
CPC分类号： G02B27/106 , G02B27/143 , H01S3/0057
摘要： An optical pulse extender includes a delay loop formed by a plurality of mirrors and a graded reflectivity beamsplitter. The mirrors and the beamsplitter are configured and aligned such that a pulse to be broadened makes a predetermined number of round trips in the delay loop and is incident on a different zone of the beamsplitter after each round trip. The different zones of the beamsplitter have different reflection values and different transmission values. These values are selected such that the pulse extender delivers a plurality of temporally and spatially separated replica pulses each thereof having about the same energy. The delivered replica pulses together provide an extended pulse having a longer duration than the input pulse. The replica pulses may be passed through a beam homogenizer to spatially homogenize the temporal characteristics of the extended pulse.

13. 发明申请

US20060056478A1 Laser gas replenishment method 有权
标题翻译：激光加气方式
公开(公告)号：US20060056478A1
公开(公告)日：2006-03-16
申请号：US11263626
申请日：2005-10-31
申请人： Hans-Stephen Albrecht , Klaus Vogler , Juergen Kleinschmidt , Thomas Schroeder , Igor Bragin , Vadim Berger , Uwe Stamm , Wolfgang Zschocke , Sergei Govorkov
发明人： Hans-Stephen Albrecht , Klaus Vogler , Juergen Kleinschmidt , Thomas Schroeder , Igor Bragin , Vadim Berger , Uwe Stamm , Wolfgang Zschocke , Sergei Govorkov
IPC分类号： H01S3/22
CPC分类号： G03F7/70025 , G02B5/1814 , G02B5/1838 , G03F7/70575 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/08004 , H01S3/08009 , H01S3/08031 , H01S3/08045 , H01S3/0971 , H01S3/1055 , H01S3/134 , H01S3/225
摘要： Output beam parameters of a gas discharge laser are stabilized by maintaining a molecular fluorine component at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluorine is subject to depletion within the discharge chamber. Gas injections including molecular fluorine can increase the partial pressure of molecular fluorine by a selected amount. The injections can be performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure. The amount per injection and/or the interval between injections can be varied, based on factors such as driving voltage and a calculated amount of molecular fluorine in the discharge chamber. The driving voltage can be in one of multiple driving voltage ranges that are adjusted based on system aging. Within each range, gas injections and gas replacements can be performed based on, for example, total applied electrical energy or time/pulse count.
摘要翻译：气体放电激光器的输出光束参数通过使用气体供应单元和处理器将分子氟成分保持在预定的分压来稳定。分子氟在放电室内会耗尽。包括分子氟在内的气体注入可以将分子氟的分压提高一定量。注射可以以选定的间隔进行，以使构成气体基本保持在初始分压。基于诸如驱动电压和排放室中分子量的计算量的因素，可以改变每次注射的量和/或注射间隔。驱动电压可以是根据系统老化进行调整的多个驱动电压范围之一。在每个范围内，可以基于例如总施加的电能或时间/脉冲计数进行气体注入和气体替换。

14. 发明授权

US06614584B1 Laser frequency converter with automatic phase matching adjustment 失效
标题翻译：激光变频器具有自动相位匹配调整
公开(公告)号：US06614584B1
公开(公告)日：2003-09-02
申请号：US09792622
申请日：2001-02-23
申请人： Sergei Govorkov , Evgueni Slobodchikov
发明人： Sergei Govorkov , Evgueni Slobodchikov
IPC分类号： G02F137
CPC分类号： G02F1/3544 , G02F2001/3546 , H01S3/0092
摘要： A laser system includes a laser source and at least one orientationally adjustable and/or temperature-controlled nonlinear optical crystals. First and second position sensitive detectors respectively detect fundamental and higher frequency harmonic beams. A controller receives signals from the first and second detectors indicative of a phase matching error and controls an orientation and/or a temperature of the crystal based on the signals to substantially a phase matching condition.
摘要翻译：激光系统包括激光源和至少一个可取向调节和/或温度控制的非线性光学晶体。第一和第二位置敏感探测器分别检测基波和高次谐波。控制器从第一和第二检测器接收指示相位匹配误差的信号，并且基于信号将晶体的取向和/或温度控制为基本上相位匹配条件。

15. 发明授权

US06563853B2 Gas performance control system for gas discharge lasers 失效
公开(公告)号：US06563853B2
公开(公告)日：2003-05-13
申请号：US09842281
申请日：2001-04-24
申请人： Peter Heist , Matthias Kramer , Juergen Kleinschmidt , Sergei Govorkov , Marcus Serwazi , Thomas Jünemann
发明人： Peter Heist , Matthias Kramer , Juergen Kleinschmidt , Sergei Govorkov , Marcus Serwazi , Thomas Jünemann
IPC分类号： H01S322
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70575 , H01S3/036 , H01S3/038 , H01S3/134 , H01S3/22 , H01S3/225 , H01S3/2258
摘要： An excimer or molecular fluorine laser system includes a discharge chamber containing a gas mixture, multiple electrodes connected to a power supply circuit for energizing the gas mixture, a resonator for generating a laser beam, a processor, and means for monitoring an amplified spontaneous emission (ASE) signal of the laser, such as preferably an ASE detector. The processor receives a signal from the preferred ASE detector indicative of the ASE signal of the laser. Based on the signal from the ASE detector, the processor determines whether to initiate a responsive action for adjusting a parameter of the laser system.

16. 发明申请

US20130055044A1 Method And Apparatus For Restricting The Operation Of USB Devices 审中-公开
标题翻译：限制USB设备操作的方法和装置
公开(公告)号：US20130055044A1
公开(公告)日：2013-02-28
申请号：US13347720
申请日：2012-01-11
申请人： Faik Eljezovic , Sergei Govorkov , John Alexander McLeod
发明人： Faik Eljezovic , Sergei Govorkov , John Alexander McLeod
IPC分类号： G06F11/10
CPC分类号： G06F11/1004
摘要： The present invention provides a method and apparatus for blocking the operation of selected USB devices at the hardware level, while allowing the operation of selected USB devices and external USB hubs to continue to operate normally. In particular, the method provides for the restricted operation of one or a plurality of USB devices by altering one or a plurality of data fields contained within a USB transaction. An apparatus for operation of the method is also provided. Control of the use of USB storage devices is provided.
摘要翻译：本发明提供一种用于在硬件级别阻止所选择的USB设备的操作，同时允许选定的USB设备和外部USB集线器的操作继续正常操作的方法和装置。特别地，该方法通过改变包含在USB交易中的一个或多个数据字段来提供一个或多个USB设备的受限操作。还提供了一种用于该方法操作的装置。提供了USB存储设备的使用控制。

17. 发明申请

US20060171439A1 Master oscillator - power amplifier excimer laser system 有权
标题翻译：主振荡器 - 功率放大器准分子激光系统
公开(公告)号：US20060171439A1
公开(公告)日：2006-08-03
申请号：US11371411
申请日：2006-03-09
申请人： Sergei Govorkov , Rainer Paetzel
发明人： Sergei Govorkov , Rainer Paetzel
IPC分类号： H01S3/22
CPC分类号： H01S3/2366 , H01S3/005 , H01S3/0057 , H01S3/225 , H01S3/2325 , H01S3/2333 , H01S3/235
摘要： A Master Oscillator (MO)—Power Amplifier (PA) configuration (MOPA) can be used advantageously in an excimer laser system for micro-lithography applications, where semiconductor manufacturers demand powers of 40 W or more in order to support the throughput requirements of advanced lithography scanner systems. A MOPA-based laser system can provide both high pulse energies and high spectral purity. A MOPA system can utilize a multi-pass PA, as well as a special beam path capable of reducing the amount of ASE (Amplified Spontaneous Emission) and feedback to the MO. Lithography scanner optics are primarily fused silica, such that the peak pulse power must be kept low to avoid material compaction when a MOPA system is used with lithography applications. This conflict between the demand for high average power and the low peak power requirement of the pulsed excimer laser source can be resolved by using a novel beam path to generate a sufficiently long pulse length.
摘要翻译：主振荡器（MO） - 功率放大器（PA）配置（MOPA）可以有利地用于微光刻应用的准分子激光系统，其中半导体制造商需要40W或更高的功率，以支持先进的吞吐量要求光刻扫描仪系统。基于MOPA的激光系统可以提供高脉冲能量和高光谱纯度。 MOPA系统可以利用多通道PA，以及能够减少ASE（放大自发发射）量和向MO的反馈的特殊光束路径。平版印刷扫描仪光学器件主要是熔融石英，使得峰值脉冲功率必须保持较低，以避免当MOPA系统与光刻应用一起使用时的材料压实。可以通过使用新颖的光束路径来产生足够长的脉冲长度来解决脉冲准分子激光源的高平均功率需求和低峰值功率需求之间的这种冲突。

18. 发明申请

US20060078031A1 InGaN LED pumped II-VI semiconductor laser 审中-公开
标题翻译： InGaN LED泵浦II-VI半导体激光器
公开(公告)号：US20060078031A1
公开(公告)日：2006-04-13
申请号：US10961262
申请日：2004-10-08
申请人： Sergei Govorkov , Luis Spinelli
发明人： Sergei Govorkov , Luis Spinelli
IPC分类号： H01S3/09
CPC分类号： G02B27/0955 , G02B27/0905 , G02B27/0994 , H01S3/0933 , H01S3/094057 , H01S3/109 , H01S5/005 , H01S5/02232 , H01S5/02461 , H01S5/041 , H01S5/141 , H01S5/18388 , H01S5/327
摘要： An optically pumped semiconductor laser in accordance with the present invention includes a II-VI semiconductor laser chip A plurality of InGaN LEDs provides optical pump light for optically pumping the laser chip. An optical arrangement collects the pump light from the LEDs and directs the pump light to light-concentrating optical device that is either directly or indirectly in optical contact with the laser chip and is arranged to concentrate the pump light on the chip with maximized numerical aperture (NA). In one example of the laser, the light-concentrating device is an immersion lens. In another example of the laser, the light-concentrating device is a tapered light-pipe.
摘要翻译：根据本发明的光泵浦半导体激光器包括II-VI半导体激光器芯片A，多个InGaN LED提供用于光学泵浦激光芯片的光泵浦光。光学装置从LED收集泵浦光，并将泵浦光引导到与激光芯片直接或间接光学接触的聚光光学装置，并且布置成将泵浦光集中在具有最大数值孔径的芯片上 NA）。在激光的一个示例中，聚光装置是浸没透镜。在激光的另一示例中，聚光装置是锥形光管。

19. 发明申请

US20060007978A1 Bandwidth-limited and long pulse master oscillator power oscillator laser systems 有权
标题翻译：带宽限制和长脉冲主振荡器功率振荡器激光系统
公开(公告)号：US20060007978A1
公开(公告)日：2006-01-12
申请号：US11142648
申请日：2005-06-01
申请人： Sergei Govorkov , Alexander Wiessner , Timur Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
发明人： Sergei Govorkov , Alexander Wiessner , Timur Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
IPC分类号： H01S3/22
CPC分类号： H01S3/10092 , H01S3/08031 , H01S3/083 , H01S3/097 , H01S3/225 , H01S2301/02
摘要： Laser systems have a line-narrowed master oscillator and a power oscillator for amplifying the output of the master oscillator. The power oscillator includes optical arrangements for limiting the bandwidth of radiation that can be amplified. The limited amplification bandwidth of the power oscillator is relatively broad compared to that of the output of the master oscillator, but narrower than would be the case without the bandwidth limiting arrangements. The bandwidth narrowing arrangements of the power oscillator function primarily to restrict the bandwidth of amplified spontaneous emission generated by the power oscillator.
摘要翻译：激光系统具有线窄的主振荡器和用于放大主振荡器的输出的功率振荡器。功率振荡器包括用于限制可放大的辐射带宽的光学装置。与主振荡器的输出相比，功率振荡器的有限放大带宽相对较宽，但比没有带宽限制布置的情况更窄。功率振荡器的带宽窄化布置主要用于限制由功率振荡器产生的放大的自发发射的带宽。

20. 发明申请

US20050190452A1 OPTICAL PULSE DURATION EXTENDER 有权
标题翻译：光学脉冲持续时间延长器
公开(公告)号：US20050190452A1
公开(公告)日：2005-09-01
申请号：US10790660
申请日：2004-03-01
申请人： Sergei Govorkov , Luis Spinelli , William White , Murray Reed
发明人： Sergei Govorkov , Luis Spinelli , William White , Murray Reed
IPC分类号： G01S13/00 , G02B27/10 , G02B27/14 , H01S3/00
CPC分类号： G02B27/106 , G02B27/143 , H01S3/0057
摘要： An optical pulse extender includes a delay loop formed by a plurality of mirrors and a graded reflectivity beamsplitter. The mirrors and the beamsplitter are configured and aligned such that a pulse to be broadened makes a predetermined number of round trips in the delay loop and is incident on a different zone of the beamsplitter after each round trip. The different zones of the beamsplitter have different reflection values and different transmission values. These values are selected such that the pulse extender delivers a plurality of temporally and spatially separated replica pulses each thereof having about the same energy. The delivered replica pulses together provide an extended pulse having a longer duration than the input pulse. The replica pulses may be passed through a beam homogenizer to spatially homogenize the temporal characteristics of the extended pulse.
摘要翻译：光脉冲延长器包括由多个反射镜和渐变反射分束器形成的延迟环。反射镜和分束器被配置和对准，使得待扩展的脉冲在延迟环路中进行预定数量的往返，并且在每次往返之后入射到分束器的不同区域。分束器的不同区域具有不同的反射值和不同的透射值。这些值被选择为使得脉冲延长器递送多个时间上和空间上分离的复制脉冲，每个复制脉冲具有大约相同的能量。传送的副本脉冲一起提供具有比输入脉冲更长的持续时间的扩展脉冲。复制脉冲可以通过光束均化器以空间均匀扩展脉冲的时间特性。

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