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    • 4. 发明授权
    • Balanced microdevice
    • 平衡微型设备
    • US06903486B2
    • 2005-06-07
    • US10251035
    • 2002-09-19
    • John H. JermanJohn D. Grade
    • John H. JermanJohn D. Grade
    • H01S3/1055H01S5/022H01S5/0687H01S5/14H02N1/00
    • H02N1/008
    • A balanced microdevice comprising a substrate, a movable structure overlying the substrate, an element and a lever assembly having a pivot and a lever coupled to and pivotable about the pivot. The lever has a first extremity coupled to the movable structure and an opposite second extremity coupled to the element. The movable structure causes the lever to pivot about the pivot so as to move the element in a direction of travel. The element is substantially mechanically balanced to inhibit undesirable movement of the element in the direction of travel in response to externally applied forces.
    • 平衡微型装置,包括基板,覆盖基板的可移动结构,元件和杠杆组件,其具有联接到枢轴并且可围绕枢轴枢转的枢轴和杠杆。 杠杆具有联接到可移动结构的第一末端和耦合到元件的相对的第二末端。 可移动结构使得杠杆围绕枢轴枢转,以使元件沿行进方向移动。 元件基本上是机械平衡的,以防止元件响应于外部施加的力在行进方向上的不期望的移动。
    • 6. 发明授权
    • Structure for micro-machine optical tooling and method for making and
using
    • 微机光学工具结构及制作与使用方法
    • US6049650A
    • 2000-04-11
    • US107221
    • 1998-06-30
    • John H. JermanJohn D. Grade
    • John H. JermanJohn D. Grade
    • G03F7/40B25J7/00B81B7/00G02B6/36G02B6/38G02B6/42G11B7/22G02B6/00H01L21/70
    • G02B6/3656B81C3/008G02B6/366G02B6/3692G11B7/22G02B6/3893G02B6/42G02B6/4219
    • Micro-machined tools and component holders useful for the manufacture, assembly, and testing of precision micro-miniature parts are provided, particurlarly embodiments well adapted for precision micro-miniature systems incorporating optical and/or electronic components including lenses, optical fibers, and the like. Structure and method find particular applicability in the precision optical systems of the read, write, or read/write heads of optically assisted storage devices for digital computers. Removable tools are used to temporarily position components while the components are glued or otherwise fixed into place during assembly, and then completely removed for use with another head assembly. Break-away tools or holders typically include three major portions: an element holder, a handle, and a break-away neck portion connecting the holder with the handle. The element holder provides a mounting block for an optical, electrical, or mechanical element. Once the elements are attached to the mounting blocks, they are moved into position within the larger assembly via the handle, the mounting block is glued to the assembly and a small predictable force is applied to the handle to break the neck and separate the handle from the holder which is at that time attached to the assembly. Tools may be formed by photolithographically patterened and etching a substrate such as silicon to selectively carve the substrate. Structures formed from plated metal, either on a base material, or made entirely of metal are also provided by the invention. Several embodiments of process for forming the inventive structures are also provided.
    • 提供了用于精密微型部件的制造,组装和测试的微加工工具和部件保持器,特别是适用于包括光学和/或电子部件的精密微型系统的实施例,包括透镜,光纤和 喜欢。 结构和方法在数字计算机的光辅助存储设备的读,写或读/写头的精密光学系统中发现特别适用。 可拆卸工具用于临时定位部件,同时组件被胶合或以其他方式在组装期间固定到位,然后完全移除以与另一个头部组件一起使用。 分离工具或支架通常包括三个主要部分:元件支架,手柄和将支架与手柄连接的脱离颈部。 元件支架为光学,电气或机械元件提供安装块。 一旦元件连接到安装块,它们通过手柄移动到更大的组件内的位置,安装块被粘合到组件上,并且将小的可预测的力施加到手柄以打破颈部并将手柄从 当时在该大会上的持有人。 工具可以通过光刻蚀刻和蚀刻诸如硅的衬底来选择性地雕刻衬底来形成。 本发明还提供了由基底材料制成或完全由金属制成的电镀金属形成的结构。 还提供了用于形成本发明结构的方法的几个实施例。
    • 7. 发明授权
    • Electrostatic microactuator and method for use thereof
    • 静电微致动器及其使用方法
    • US5998906A
    • 1999-12-07
    • US135158
    • 1998-08-17
    • John H. JermanJohn D. GradeJoseph D. Drake
    • John H. JermanJohn D. GradeJoseph D. Drake
    • G02B6/35G02B6/42G02B26/08G11B7/135H02N1/00
    • G02B6/357G02B26/0833G02B26/0841G02B6/4216G11B7/1384H02N1/008G02B6/3518G02B6/3548G02B6/358G02B6/3584
    • An electrostatic microactuator comprising a substrate and at least one comb drive assembly having first and second comb drive members. Each of the first and second comb drive members is provided with comb drive fingers. The first comb drive member is mounted on the substrate. The at least one comb drive assembly is disposed between the first and second spaced-apart, beam-like spring members. The second comb drive member overlies the substrate. Each of the first and second beam-like members have a first end portion secured to the substrate and a second end portion secured to the second comb drive member for suspending the second comb drive member over the substrate. The second comb drive member is movable between a first position in which the comb drive fingers of the first and second comb drive members are spaced apart and a second position in which the comb drive fingers of the first and second comb drive members are interdigitated.
    • 一种静电微致动器,其包括基板和至少一个具有第一和第二梳状驱动构件的梳状驱动组件。 第一和第二梳状驱动构件中的每一个设置有梳齿驱动指。 第一梳状驱动构件安装在基底上。 至少一个梳子驱动组件设置在第一和第二间隔开的梁状弹簧构件之间。 第二梳状驱动构件覆盖在基底上。 第一和第二梁状构件中的每一个具有固定到基板的第一端部和固定到第二梳状驱动构件的第二端部,用于将第二梳状驱动构件悬挂在基板上。 第二梳状驱动构件可以在第一和第二梳状驱动构件的梳状驱动指状物间隔开的第一位置和第一和第二梳状驱动构件的梳状驱动指状物交叉的第二位置之间移动。
    • 8. 发明授权
    • Micromachined capillary electrophoresis device
    • 微加工毛细管电泳装置
    • US5824204A
    • 1998-10-20
    • US671428
    • 1996-06-27
    • John H. Jerman
    • John H. Jerman
    • B81B1/00B81C1/00G01N27/447G01N27/26
    • B81C1/00119G01N27/44791B81B2201/058B81B2203/0338B81B2203/0353B81C2201/014B81C2203/031
    • A micromachined structure for handling fluids with an applied high voltage, i.e. for electrophoresis, includes a glass or other highly insulative substrate on which are formed very small diameter capillary channels of e.g. silicon nitride. Due to the absence of a silicon substrate, this structure is highly electrically insulative. The silicon nitride channels are formed by a micro-machining and etch process, so that they are initially defined in an etched sacrificial silicon wafer by conformal coating of etched features in the silicon wafer with a silicon nitride layer, which is then patterned to define the desired channels. The silicon wafer is bonded to the glass substrate and the bulk of the silicon wafer is sacrificially etched away, leaving the desired silicon nitride channels with supporting silicon mesas. The remaining silicon nitride "shell" is bonded to the glass substrate and substantially duplicates the etched features in the original silicon wafer. The capillary channels are of a material such as low stress silicon nitride and there is no electrical shorting path to the highly insulative glass substrate.
    • 用于处理具有施加的高电压(即电泳)的流体的微加工结构包括玻璃或其它高度绝缘的基底,其上形成非常小直径的毛细管通道。 氮化硅。 由于没有硅衬底,这种结构是高度电绝缘的。 通过微加工和蚀刻工艺形成氮化硅沟道,使得它们最初在蚀刻的牺牲硅晶片中通过在氮化硅层中对硅晶片中的蚀刻特征进行保形涂覆来限定,该氮化硅层被图案化以限定 所需渠道。 将硅晶片结合到玻璃基板上,并将硅晶片的大部分牺牲蚀刻掉,留下所需的具有支撑硅台面的氮化硅沟道。 剩余的氮化硅“壳”结合到玻璃基板上,并且基本上复制了原始硅晶片中的蚀刻特征。 毛细通道是诸如低应力氮化硅的材料,并且没有到高绝缘性玻璃基板的电短路。
    • 10. 发明授权
    • Miniature gas chromatograph apparatus
    • 微型气相色谱仪
    • US4474889A
    • 1984-10-02
    • US371617
    • 1982-04-26
    • Stephen C. TerryJohn H. Jerman
    • Stephen C. TerryJohn H. Jerman
    • G01N30/20G01N30/60G01N30/88G01N31/08B01D53/00
    • G01N30/88G01N30/6095G01N30/20G01N30/6091
    • A gas chromatography assembly has a substrate wafer with grooves and a valve seat etched therein. A plate cooperates with the wafer and the grooves to define gas channels: a carrier gas channel and a sample gas channel, each passing through the valve seat. A valve actuator is attached to the valve seat for controlling the flow of sample gas from the sample gas channel into the carrier gas channel. A pump is attached to the wafer and is connected to the sample gas channel. The pump cooperates with the valve actuator to inject sample gas from the sample gas channel into the carrier gas channel. A modular capillary tube and a detector are connected to the carrier gas channel to analyze the properties of the sample gas flowing in the carrier gas channel from the sample gas channel.
    • 气相色谱组合件具有其中蚀刻有凹槽和阀座的衬底晶片。 板与晶片和槽配合以限定气体通道:载气通道和样品气体通道,每个通过阀座。 阀致动器附接到阀座,用于控制样气从样气通道进入载气通道的流动。 泵连接到晶片并连接到样品气体通道。 泵与阀门致动器配合,将样品气体从样品气体通道注入载气通道。 模块化毛细管和检测器连接到载气通道,以分析从样气通道在载气通道中流动的样气的性质。