会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 5. 发明授权
    • Gas performance control system for gas discharge lasers
    • 气体放电激光器气体性能控制系统
    • US06243406B1
    • 2001-06-05
    • US09418052
    • 1999-10-14
    • Peter HeistMatthias KramerJürgen KleinschmidtSergei Govorkov
    • Peter HeistMatthias KramerJürgen KleinschmidtSergei Govorkov
    • H01S322
    • G03F7/70025G03F7/70041G03F7/70575H01S3/036H01S3/038H01S3/134H01S3/22H01S3/225H01S3/2258
    • A gas mixture of a gas discharge laser such as an excimer or molecular fluorine laser is stabilized. The gas mixture of the laser includes a constituent halogen containing molecular species such as F2 or HCl which is subject to depletion from an initial optimum concentration. When the gas mixture is energized by a pulsed discharge circuit, the amplified spontaneous emission (ASE) signal is monitored. The status of the gas mixture is determined based on the monitored ASE signal. Stimulated emission is preferably filtered or blocked for more precise ASE signal monitoring. The gas mixture is preferably replenished using small halogen injections, total pressure adjustments and mini and partial gas replacements based on the evolving gas mixture status determined from the monitored ASE signal. Another parameter may be monitored such as the driving voltage to indicate the status of another system specification such as alignment or degradation of resonator optics, synchronization of optical components, contamination within the resonator or purge conditions for a F2-laser enclosure.
    • 诸如准分子或分子氟激光器之类的气体放电激光器的气体混合物是稳定的。 激光的气体混合物包括含有分子物质如F2或HCl的组分卤素,其从初始最佳浓度消耗。 当气体混合物通过脉冲放电电路通电时,监测放大的自发发射(ASE)信号。 基于被监测的ASE信号确定气体混合物的状态。 刺激的发射优选地被过滤或阻挡以用于更精确的ASE信号监测。 气体混合物优选使用小型卤素注射,总压力调节和基于从监测的ASE信号确定的演变气体混合物状态的微小和部分气体替代物来补充。 可以监视另一参数,例如驱动电压以指示另一系统规范的状态,例如谐振器光学器件的对准或退化,光学部件的同步,谐振器内的污染物或用于F2激光器外壳的吹扫条件。