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11. 发明授权

US06437284B1 Optical system and apparatus for laser heat treatment and method for producing semiconductor devices by using the same 有权
标题翻译：用于激光热处理的光学系统和设备以及使用该半导体器件的半导体器件的制造方法
公开(公告)号：US06437284B1
公开(公告)日：2002-08-20
申请号：US09599645
申请日：2000-06-23
申请人： Tatsuki Okamoto , Tetsuya Ogawa , Keisuke Furuta , Hidetada Tokioka , Tomohiro Sasagawa , Junichi Nishimae , Mitsuo Inoue , Yukio Sato
发明人： Tatsuki Okamoto , Tetsuya Ogawa , Keisuke Furuta , Hidetada Tokioka , Tomohiro Sasagawa , Junichi Nishimae , Mitsuo Inoue , Yukio Sato
IPC分类号： B23K2606
CPC分类号： B23K26/0732 , B23K2101/40 , H01L21/02675 , H01L21/2026
摘要： An optical system that controls laser beam spot profile for forming a high performance thin film by a laser heat treatment process is provided. In the optical system that irradiates a rectangular laser beam on a film formed on a substrate, intensity distribution forming, apparatus makes the intensity distribution uniform in the longitudinal direction while maintaining the properties of the laser beam 2 such as directivity in the direction of shorter side, making it possible to concentrate the light to a limit permitted by the nature of the laser beam and achieve the maximum intensity gradient on the film disposed on the substrate. Thus a steep temperature distribution can be generated on the film disposed on the substrate and, as a result, high performance thin film can be formed.
摘要翻译：提供了通过激光热处理工艺控制用于形成高性能薄膜的激光束光斑轮廓的光学系统。在形成在基板上的膜上照射矩形激光束的光学系统中，强度分布形成装置使得强度分布沿长度方向均匀，同时保持激光束2的特性，例如沿短边方向的方向性，使得可以将光集中到由激光束的性质允许的极限，并且在设置在基板上的膜上实现最大强度梯度。因此，可以在设置在基板上的膜上产生陡峭的温度分布，结果，可以形成高性能的薄膜。

12. 发明授权

US07223644B2 Method and apparatus for producing polycrystalline silicon film and method of manufacturing semiconductor device and thin-film transistor 失效
标题翻译：用于制造多晶硅膜的方法和装置及半导体器件和薄膜晶体管的制造方法
公开(公告)号：US07223644B2
公开(公告)日：2007-05-29
申请号：US10530026
申请日：2004-08-17
申请人： Mitsuo Inoue , Hidetada Tokioka , Shinsuke Yura
发明人： Mitsuo Inoue , Hidetada Tokioka , Shinsuke Yura
IPC分类号： H01L21/00
CPC分类号： H01L29/66757 , H01L21/02532 , H01L21/02595 , H01L21/2026 , H01L29/78675
摘要： A method for manufacturing a thin-film semiconductor includes polycrystallization to focus visible light pulse laser into a line shape on a surface of an object to be irradiated, and repeat irradiation with displacing the visible light pulse laser such that a line-shaped irradiated region is overlapped with a region irradiated at a next timing in a width direction of the line-shaped irradiated region, to form a polycrystalline silicon film on the surface of the object. The step of polycrystallization applies ultraviolet light pulse laser onto a second irradiated region partially overlapping the first irradiated region while or before the visible light pulse laser is applied to the first irradiated region.
摘要翻译：薄膜半导体的制造方法包括多晶化，将可见光脉冲激光聚焦成被照射物体的表面上的线状，并且通过使可见光脉冲激光器移位，使得线状照射区域为与在线状照射区域的宽度方向的下一定时照射的区域重叠，以在物体的表面上形成多晶硅膜。在将可见光脉冲激光器施加到第一照射区域之前或之前，多晶化步骤将紫外光脉冲激光施加到与第一照射区域部分重叠的第二照射区域上。

13. 发明授权

US07179725B2 Method of fabricating a polycrystalline film by crystallizing an amorphous film with laser light 失效
标题翻译：通过用激光结晶非晶膜制造多晶膜的方法
公开(公告)号：US07179725B2
公开(公告)日：2007-02-20
申请号：US10529373
申请日：2004-08-17
申请人： Mitsuo Inoue , Hidetada Tokioka , Shinsuke Yura
发明人： Mitsuo Inoue , Hidetada Tokioka , Shinsuke Yura
IPC分类号： H01L21/20
CPC分类号： H01L21/02686 , H01L21/02678 , H01L21/02691 , H01L21/2026 , H01L29/66757
摘要： A method of fabricating a thin-film of a semiconductor material includes: a scanning irradiation step of, in order to form a polycrystalline silicon film on the surface of a substrate, focusing first pulse laser light having a visible wavelength into a line shape having an intensity distribution of an approximately Gaussian shape in a width direction on the surface of the substrate and applying the light such that the line shape is shifted in the width direction; an edge processing step of, after performing the scanning irradiation step in one position in one direction, applying second pulse laser light having an ultraviolet wavelength to an end region of an edge parallel to the width direction of a region having undergone the scanning irradiation; and a step of applying the scanning irradiation step again to cover a region that is adjacent to the region covered by the scanning irradiation step as well as overlaps the end region having undergone the edge processing step.
摘要翻译：制造半导体材料薄膜的方法包括：扫描照射步骤，为了在基板的表面上形成多晶硅膜，将具有可见波长的第一脉冲激光聚焦成具有在基板的表面上的宽度方向上的大致高斯形状的强度分布，并且施加光，使得线形状在宽度方向上偏移; 边缘处理步骤，在沿一个方向的一个位置执行扫描照射步骤之后，将具有紫外线波长的第二脉冲激光施加到与经过扫描照射的区域的宽度方向平行的边缘的端部区域; 以及再次施加扫描照射步骤以覆盖与扫描照射步骤所覆盖的区域相邻的区域以及与已经经历边缘处理步骤的端部区域重叠的步骤。

14. 发明授权

US06753548B2 Laser heat treatment method, laser heat treatment apparatus, and semiconductor device 有权
标题翻译：激光热处理方法，激光热处理装置和半导体装置
公开(公告)号：US06753548B2
公开(公告)日：2004-06-22
申请号：US10420779
申请日：2003-04-23
申请人： Tetsuya Ogawa , Hidetada Tokioka , Yukio Sato , Mitsuo Inoue , Tomohiro Sasagawa , Mitsutoshi Miyasaka
发明人： Tetsuya Ogawa , Hidetada Tokioka , Yukio Sato , Mitsuo Inoue , Tomohiro Sasagawa , Mitsutoshi Miyasaka
IPC分类号： H01L2904
CPC分类号： H01L27/1285 , B23K26/0732 , H01L21/02532 , H01L21/02678 , H01L21/02686 , H01L21/268 , H01L27/1296
摘要： The laser heat treatment of an amorphous or polycrystalline silicon film material is conducted by forming a laser beam generated from a pulse laser source having a wavelength of 350 nm to 800 nm into a linear beam having a width and a length, and directing the linear beam onto a film material formed on a substrate.
摘要翻译：通过将具有350nm至800nm波长的脉冲激光源产生的激光束形成为具有宽度和长度的直线光束来进行非晶或多晶硅膜材料的激光热处理，并且引导线性光束在形成在基板上的薄膜材料上。

15. 发明申请

US20050067553A1 Reflection liquid crystal display apparatus 失效
标题翻译：反射液晶显示装置
公开(公告)号：US20050067553A1
公开(公告)日：2005-03-31
申请号：US10496948
申请日：2002-12-09
申请人： Masafumi Agari , Mitsuo Inoue , Takashi Yamamoto , Shigeyuki Yoshida , Takao Sakamoto
发明人： Masafumi Agari , Mitsuo Inoue , Takashi Yamamoto , Shigeyuki Yoshida , Takao Sakamoto
IPC分类号： G02F1/13357 , G02F1/1362 , G09G3/34 , G09G3/36 , G01J1/32
CPC分类号： G02F1/1336 , G02F1/13454 , G02F2001/133616 , G02F2001/133618 , G02F2001/133626 , G02F2201/58 , G02F2203/02 , G09G3/3406 , G09G3/3648 , G09G2300/0408 , G09G2320/0626 , G09G2320/0633 , G09G2320/064 , G09G2360/144 , G09G2360/145 , H01L27/1251
摘要： A reflective liquid crystal display device is integrated with a liquid crystal display panel (1), detects display surface illuminance by a plurality of light sensors (10) provided in the vicinity of the display surface, and in accordance with the detection result, controls luminous intensity of a front light (lighting means) (19) using a lighting control circuit (22) so that the display surface illuminance becomes a predetermined magnitude. Even if the use environment of the reflective liquid crystal display device changes, or more specifically, intensity of external light shone from outside of the device into the display surface varies, the configuration allows controlling automatically the amount of emission from the front light to automatically maintain an appropriate display luminance and to reduce electric power consumption.
摘要翻译：反射型液晶显示装置与液晶显示面板（1）一体化，通过设置在显示面附近的多个光传感器（10）检测显示面照度，根据检测结果，控制发光使用照明控制电路（22）使前灯（照明装置）（19）的强度使得显示面照度成为预定的大小。即使反射型液晶显示装置的使用环境发生变化，或者更具体地说，从设备外部照射到显示面上的外部光的强度变化，能够自动地控制前方的发光量自动维持适当的显示亮度并降低电力消耗。

16. 发明授权

US07388569B2 Reflection liquid crystal display apparatus 失效
标题翻译：反射液晶显示装置
公开(公告)号：US07388569B2
公开(公告)日：2008-06-17
申请号：US10496948
申请日：2002-12-09
申请人： Masafumi Agari , Mitsuo Inoue , Takashi Yamamoto , Shigeyuki Yoshida , Takao Sakamoto
发明人： Masafumi Agari , Mitsuo Inoue , Takashi Yamamoto , Shigeyuki Yoshida , Takao Sakamoto
IPC分类号： G09G3/36 , G09G5/00
CPC分类号： G02F1/1336 , G02F1/13454 , G02F2001/133616 , G02F2001/133618 , G02F2001/133626 , G02F2201/58 , G02F2203/02 , G09G3/3406 , G09G3/3648 , G09G2300/0408 , G09G2320/0626 , G09G2320/0633 , G09G2320/064 , G09G2360/144 , G09G2360/145 , H01L27/1251
摘要： A reflective liquid crystal display device is integrated with a liquid crystal display panel (1), detects display surface illuminance by a plurality of light sensors (10) provided in the vicinity of the display surface, and in accordance with the detection result, controls luminous intensity of a front light (lighting means) (19) using a lighting control circuit (22) so that the display surface illuminance becomes a predetermined magnitude. Even if the use environment of the reflective liquid crystal display device changes, or more specifically, intensity of external light shone from outside of the device into the display surface varies, the configuration allows controlling automatically the amount of emission from the front light to automatically maintain an appropriate display luminance and to reduce electric power consumption.
摘要翻译：反射型液晶显示装置与液晶显示面板（1）一体化，通过设置在显示面附近的多个光传感器（10）检测显示面照度，根据检测结果，控制发光使用照明控制电路（22）使前灯（照明装置）（19）的强度使得显示面照度成为预定的大小。即使反射型液晶显示装置的使用环境发生变化，或者更具体地说，从设备外部照射到显示面上的外部光的强度变化，能够自动地控制前方的发光量自动维持适当的显示亮度并降低电力消耗。

17. 发明授权

US07061452B2 Spontaneous light-emitting display device 有权
标题翻译：自发发光显示装置
公开(公告)号：US07061452B2
公开(公告)日：2006-06-13
申请号：US10276062
申请日：2002-03-15
申请人： Mitsuo Inoue , Masashi Okabe , Shuji Iwata , Takashi Yamamoto
发明人： Mitsuo Inoue , Masashi Okabe , Shuji Iwata , Takashi Yamamoto
IPC分类号： G09G3/30
CPC分类号： G09G3/3233 , G09G2300/0417 , G09G2300/0426 , G09G2300/0819 , G09G2300/0852 , G09G2300/0861 , G09G2300/088 , G09G2320/0233 , G09G2320/029 , G09G2320/043 , G09G2320/045 , G09G2360/148 , H01L27/3269
摘要： In a spontaneous light-emitting display device operating in an active matrix mode, variations in the threshold voltages of transistors controlling the current flowing to light-emitting elements and variations in the light emission threshold voltages of the light-emitting elements are suppressed, reducing variations in the luminance of the light-emitting elements. Light-detecting elements detect light emitted by the light-emitting elements, and threshold voltages of the transistors are detected by the voltages of nodes of resistors and the light-emitting elements. Further, transistors controlled by respective signals of the light-detecting elements also detect the light emission threshold voltages of the light-emitting elements.
摘要翻译：在以有源矩阵模式工作的自发发光显示装置中，控制流向发光元件的电流的晶体管的阈值电压的变化和发光元件的发光阈值电压的变化被抑制，在发光元件的亮度。光检测元件检测由发光元件发出的光，并且通过电阻器和发光元件的节点的电压来检测晶体管的阈值电压。此外，由光检测元件的各个信号控制的晶体管也检测发光元件的发光阈值电压。

18. 发明授权

US06812651B2 Spontaneous light emitting display device 失效
标题翻译：自发发光显示装置
公开(公告)号：US06812651B2
公开(公告)日：2004-11-02
申请号：US10276991
申请日：2002-11-20
申请人： Shuji Iwata , Masashi Okabe , Mitsuo Inoue , Takashi Yamamoto
发明人： Shuji Iwata , Masashi Okabe , Mitsuo Inoue , Takashi Yamamoto
IPC分类号： G09G310
CPC分类号： G09G3/3233 , G09G2300/0417 , G09G2300/0426 , G09G2300/0809 , G09G2300/0819 , G09G2300/0842 , G09G2300/088 , G09G2320/0233 , G09G2320/043 , G09G2320/045 , G09G2330/021 , G09G2360/145 , G09G2360/148 , H01L27/3269
摘要： A spontaneous light emitting display device with low power consumption suppresses fluctuation in characteristics of driving elements of light emitting pixels and has no fluctuation in light emitting luminance of a light emitting element. For each of light emitting pixels arranged in a matrix, a respective photoelectric converting portion detects light emitted from the corresponding light emitting pixels is provided, so that a current flowing to the light emitting pixels is controlled by using a voltage produced from the respective photoelectric converting portion. The device suppresses luminance variation of the light emitting pixel even when the conversion gain of the photoelectric portion varies.

19. 发明授权

US07154454B2 Spontaneous light emitting display device 有权
标题翻译：自发发光显示装置
公开(公告)号：US07154454B2
公开(公告)日：2006-12-26
申请号：US10276159
申请日：2002-03-15
申请人： Masashi Okabe , Mitsuo Inoue , Shuji Iwata , Takashi Yamamoto
发明人： Masashi Okabe , Mitsuo Inoue , Shuji Iwata , Takashi Yamamoto
IPC分类号： G09G3/30 , G09G3/10
CPC分类号： G09G3/3233 , G09G2300/0819 , G09G2300/0852 , G09G2300/0861 , G09G2310/06 , G09G2320/0233 , G09G2320/043
摘要： In a driving circuit of a spontaneous light emitting display device driven as an active matrix, a noise current is prevented from flowing in a light emitting element when compensating for a threshold voltage of a transistor for controlling current flowing to the emitting element, enhancing precision in luminance. A switching element for short-circuiting electrodes of the spontaneous light emitting element for a period in which the noise current flows in the light emitting element bypasses the noise current.
摘要翻译：在作为有源矩阵驱动的自发发光显示装置的驱动电路中，当补偿用于控制流向发光元件的电流的晶体管的阈值电压时，防止噪声电流在发光元件中流动，从而提高精度亮度。用于在发光元件中流过噪声电流的周期中的自发发光元件的短路电极的开关元件绕过噪声电流。

20. 发明申请

US20050053796A1 Polyester film, use thereof and metal laminated sheet made of said film, and metal can and metal lid made of the sheet 审中-公开
标题翻译：聚酯薄膜，其用途和由所述薄膜制成的金属叠片，以及由薄片制成的金属罐和金属盖
公开(公告)号：US20050053796A1
公开(公告)日：2005-03-10
申请号：US10945468
申请日：2004-09-20
申请人： Keizo Kawahara , Katsuya Ito , Kazutake Okamoto , Hideki Shimizu , Hiroshi Nagano , Mitsuo Inoue , Shoichi Gyobu
发明人： Keizo Kawahara , Katsuya Ito , Kazutake Okamoto , Hideki Shimizu , Hiroshi Nagano , Mitsuo Inoue , Shoichi Gyobu
IPC分类号： B32B27/36 , C08J5/18 , C08L67/02 , B32B15/08
CPC分类号： B32B27/36 , B32B15/09 , B32B2307/536 , B32B2367/00 , C08J5/18 , C08J2367/02 , C08L67/02 , Y10T428/31681 , Y10T428/31786 , C08L2666/18
摘要： A polyester film made from two kinds of polyester resins and having a specific DSC (and a specific glass transition point) is provided, (i) which is superior in mechanical property, capable of thermocompression bonding with a metal sheet, despite a high degree of crystallization of the film, reduces quality change of plastic film laminated on the metal sheet even if faced with variation of conditions of thermocompression bonding with the metal sheet, and which is capable of thermocompression bonding even at a relatively low temperature, (ii) which is superior in formability, (iii) which is superior in flavoring property and impact resistance, and which obliterates occurrence of whitening or delamination of the film, or microcracks on the film, even if the film in the metal laminated sheet obtained by thermocompression bonding of the film on the metal sheet or on the surface of a metal can obtained by subjecting the metal laminated sheet to various form processings is crystallized, and (iv) which satisfies productivity at an industrial scale.
摘要翻译：提供由两种聚酯树脂制成并具有特定DSC（和特定玻璃化转变点）的聚酯膜，（i）具有优异的机械性能，能够与金属片材进行热压接，尽管高度即使面对金属板的热压粘合条件的变化，即使在相对低的温度下也能够进行热压接，也可以降低层压在金属板上的塑料膜的质量变化，（ii）优异的成型性，（iii）在调味性和抗冲击性方面优异，并且消除了膜的发白或分层或薄膜上的微裂纹，即使通过热压粘合获得的金属层压片中的膜金属片上的金属片或金属层的表面上的金属膜可以通过各种形式的处理而得到（iv）满足工业规模的生产率。

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